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    • 7. 发明授权
    • Substrate holding and rotating device, substrate treatment apparatus including the device, and substrate treatment method
    • 基板保持和旋转装置,包括该装置的基板处理装置和基板处理方法
    • US09385020B2
    • 2016-07-05
    • US13596848
    • 2012-08-28
    • Hiroshi Kato
    • Hiroshi Kato
    • H01L21/67H01L21/687
    • H01L21/68728H01L21/68792
    • A substrate holding and rotating device includes: a turntable rotatable; a rotative drive unit which rotates the turntable; a holding member which is provided on the turntable and horizontally holds a substrate in upwardly spaced relation to the turntable; a vertically movable protection disk disposed between the turntable and a substrate holding position; and a magnetic levitation mechanism including a first magnet attached to the protection disk, an annular second magnet which generates a repulsive force with respect to the first magnet, a support member which non-rotatably supports the second magnet, and a relative movement mechanism which moves the support member and the turntable relative to each other.
    • 基板保持旋转装置包括:转盘, 旋转驱动单元,其使转盘旋转; 保持构件,其设置在转台上并水平地保持与转台成向上间隔开的基板; 设置在所述转盘和基板保持位置之间的可垂直移动的保护盘; 以及磁悬浮机构,其包括附接到保护盘的第一磁体,相对于第一磁体产生排斥力的环形第二磁体,不可旋转地支撑第二磁体的支撑部件,以及相对移动机构,其移动 支撑构件和转台相对于彼此。
    • 8. 发明授权
    • Projection type display apparatus and method of cooling light source
    • 投影式显示装置及冷却光源的方法
    • US09223193B2
    • 2015-12-29
    • US13813404
    • 2010-08-02
    • Hiroshi Kato
    • Hiroshi Kato
    • G03B21/16G03B21/20
    • G03B21/16G03B21/2033
    • There is provided a projection-type display apparatus which solves the problem that when an amount of electric power applied to light sources is adjusted, the amount of electric power involved in the cooling of LEDs becomes greater than necessary. Coolers (107R, 107G, 107B) cool light sources (103R, 103G, 103B). Light sensor (111) detects the brightness of a surrounding area. Light case temperature detectors (112R, 112G, 112B) detect case temperatures which are the temperatures of cases of light sources (103R, 103G, 103B). Light source forward voltage detectors (113R, 113G, 113B) detect forward voltages of light sources (103R, 103G, 103B). Light source forward current detectors (114R, 114G, 114B) detect forward currents of light sources (103R, 103G, 103B). Adjuster (117) adjusts the amount of cooling power of coolers (107R, 107G, 107B) based on the forward voltage, the forward current, and the case temperatures.
    • 提供一种投影型显示装置,其解决了当调整施加到光源的电力的量时,LED的冷却所涉及的电力的量变得大于必要的问题。 冷却器(107R,107G,107B)冷却光源(103R,103G,103B)。 光传感器(111)检测周围区域的亮度。 光箱温度检测器(112R,112G,112B)检测作为光源(103R,103G,103B)的情况的温度的外壳温度。 光源正向电压检测器(113R,113G,113B)检测光源(103R,103G,103B)的正向电压。 光源正向电流检测器(114R,114G,114B)检测光源(103R,103G,103B)的正向电流。 调节器(117)根据正向电压,正向电流和外壳温度调节冷却器(107R,107G,107B)的冷却功率。