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1. 发明授权

US06660094B2 Apparatus and method for forming deposited film 失效
标题翻译：用于形成沉积膜的装置和方法
公开(公告)号：US06660094B2
公开(公告)日：2003-12-09
申请号：US09867493
申请日：2001-05-31
申请人： Hirokazu Otoshi , Hiroshi Izawa , Masatoshi Tanaka
发明人： Hirokazu Otoshi , Hiroshi Izawa , Masatoshi Tanaka
IPC分类号： C23C1600
CPC分类号： C23C16/45561 , C23C16/455 , C23C16/545 , G03B9/02
摘要： A deposited film forming apparatus comprises: a chamber capable of maintaining an interior thereof under vacuum; a source gas supply piping for supplying a source gas into the chamber; an evacuation system piping for evacuating the interior of the chamber; a gas supply piping for use in opening to atmosphere, for supplying a gas for returning a pressure within the chamber to atmospheric pressure, wherein a plurality of shut-off valves are provided in series between a gas source of the gas for returning the pressure within the chamber to atmospheric pressure and the chamber, and a pressure gauge and/or evacuating means are provided between the plurality of shut-off valves.
摘要翻译：沉积膜形成装置包括：能够将其内部保持在真空下的室; 用于将源气体供应到所述室中的源气体供应管道; 用于排空室内部的抽空系统管道; 用于向大气开放的气体供应管道，用于供应用于将所述室内的压力返回到大气压力的气体，其中多个截止阀串联设置在所述气体的气体源之间，用于使所述气体中的压力返回所述室与大气压力和所述室，以及在所述多个截止阀之间设置压力计和/或排气装置。

2. 发明授权

US07001640B2 Apparatus and method for forming deposited film 失效
标题翻译：用于形成沉积膜的装置和方法
公开(公告)号：US07001640B2
公开(公告)日：2006-02-21
申请号：US10627603
申请日：2003-07-28
申请人： Hirokazu Otoshi , Hiroshi Izawa , Masatoshi Tanaka
发明人： Hirokazu Otoshi , Hiroshi Izawa , Masatoshi Tanaka
IPC分类号： C23C16/00
CPC分类号： C23C16/4402 , C23C16/545 , Y10T137/0452
摘要： The object of the present invention is to provide an apparatus and method for forming a deposited film which can repeatedly form a large amount of functional deposited films with good reproducibility without degradation in the characteristics of films formed even when gas leakage occurs in a shut-off valve, and without reducing the yield as a result when gas leakage occurs in the shut-off valve, by immediately detecting and repairing it. The deposited film forming apparatus according to the present invention comprises: a chamber capable of maintaining an interior thereof under vacuum; a source gas supply piping for supplying a source gas into the chamber; an evacuation system piping for evacuating the interior of the chamber; a gas supply piping for use in opening to atmosphere, for supplying a gas for returning a pressure within the chamber to atmospheric pressure, wherein a plurality of shut-off valves are provided in series between a gas source of the gas for returning the pressure within the chamber to the atmospheric pressure and the chamber, and a pressure-gauge and/or evacuating means are provided between the plurality of shut-off valves.
摘要翻译：本发明的目的是提供一种用于形成沉积膜的装置和方法，其可以重复地形成大量的具有良好重现性的功能性沉积膜，而不会在形成的膜的特性中劣化，即使在关闭时发生气体泄漏阀，并且在通过立即检测和修理关闭阀时发生气体泄漏的结果而不降低产量。根据本发明的沉积膜形成装置包括：能够将其内部保持在真空下的室; 用于将源气体供应到所述室中的源气体供应管道; 用于排空室内部的抽空系统管道; 用于向大气开放的气体供应管道，用于供应用于将所述室内的压力返回到大气压力的气体，其中多个截止阀串联设置在所述气体的气体源之间，用于使所述气体中的压力返回所述室到大气压力和所述室，并且在所述多个截止阀之间设置有压力表和/或排气装置。

3. 发明授权

US06273955B1 Film forming apparatus 失效
标题翻译：成膜装置
公开(公告)号：US06273955B1
公开(公告)日：2001-08-14
申请号：US08704138
申请日：1996-08-28
申请人： Takehito Yoshino , Hiroshi Echizen , Masahiro Kanai , Hirokazu Otoshi , Atsushi Yasuno , Kohei Yoshida , Koichiro Moriyama , Masatoshi Tanaka
发明人： Takehito Yoshino , Hiroshi Echizen , Masahiro Kanai , Hirokazu Otoshi , Atsushi Yasuno , Kohei Yoshida , Koichiro Moriyama , Masatoshi Tanaka
IPC分类号： C23C1600
CPC分类号： C23C16/545 , C23C16/24 , C23C16/4401 , C23C16/511 , H01L31/202 , H01L31/204 , H01L31/206 , Y02E10/50 , Y02P70/521
摘要： A film forming apparatus for forming a plurality of films on a substrate through a continuous process, comprising a plurality of vacuum chambers in communication to each other via connection, at least vacuum chamber having internally a treatment detachable from the vacuum chamber for fulfilling a predetermined treatment on the substrate.
摘要翻译：一种用于通过连续工艺在基板上形成多个膜的成膜装置，包括通过连接彼此连通的多个真空室，至少具有可从真空室中分离的处理的真空室，用于实现预定处理在基板上。

4. 发明授权

US06338872B1 Film forming method 有权
标题翻译：成膜方法
公开(公告)号：US06338872B1
公开(公告)日：2002-01-15
申请号：US09337557
申请日：1999-06-22
申请人： Takehito Yoshino , Hiroshi Echizen , Masahiro Kanai , Hirokazu Otoshi , Atsushi Yasuno , Kohei Yoshida , Koichiro Moriyama , Masatoshi Tanaka
发明人： Takehito Yoshino , Hiroshi Echizen , Masahiro Kanai , Hirokazu Otoshi , Atsushi Yasuno , Kohei Yoshida , Koichiro Moriyama , Masatoshi Tanaka
IPC分类号： C23C1600
CPC分类号： C23C16/545 , C23C16/24 , C23C16/4401 , C23C16/511 , H01L31/202 , H01L31/204 , H01L31/206 , Y02E10/50 , Y02P70/521
摘要： A film forming method is described using an apparatus with a plurality of vacuum chambers which communicate with each other via a connection, where the apparatus has one or more detachable treatment rooms and where the method includes continuously forming a plurality of films on a band-shaped substrate within the treatment rooms, while continuously moving the substrate through the treatment rooms. The treatment rooms within said desired vacuum chambers are replaced after forming the film for a predetermined period as a part of the film forming method.
摘要翻译：使用具有多个真空室的设备来描述成膜方法，所述多个真空室经由连接彼此连通，其中所述设备具有一个或多个可拆卸的处理室，并且其中所述方法包括在带状上连续形成多个膜处理室内的基材，同时将基材连续移动通过治疗室。作为成膜方法的一部分，在形成膜预定时间之后，在所述真空室内的处理室被更换。

5. 发明授权

US06727456B2 Deposited film forming method and deposited film forming apparatus 失效
标题翻译：沉积膜形成方法和沉积膜形成装置
公开(公告)号：US06727456B2
公开(公告)日：2004-04-27
申请号：US10153721
申请日：2002-05-24
申请人： Atsushi Yasuno , Hiroshi Izawa , Masatoshi Tanaka
发明人： Atsushi Yasuno , Hiroshi Izawa , Masatoshi Tanaka
IPC分类号： B23K900
CPC分类号： H01L31/202 , B65H20/00 , B65H2301/51214 , B65H2404/283 , C23C16/509 , C23C16/545 , Y02E10/50 , Y02P70/521
摘要： A deposited film forming method and apparatus includes a belt-like member continuously conveyed through a film-forming chamber, one side of which is formed of the belt-like member. A reactive gas is introduced into the film-forming chamber, the interior of the film-forming chamber is evacuated, a high-frequency power induces a plasma therein, and a deposited film is formed on the belt-like member A discharge confining means is provided opposite to a deposited film forming side of the belt-like member to maintain constant contact with the belt-like member while it changes shape.
摘要翻译：沉积膜形成方法和装置包括通过成膜室连续输送的带状构件，其一面由带状构件形成。将反应性气体引入成膜室，成膜室的内部被抽真空，高频功率引起等离子体，并且在带状部件A上形成沉积膜。排出限制装置是与带状构件的沉积膜形成侧相对设置，以保持与带状构件的形状不变的形状。

6. 发明授权

US07641382B2 Leak judgment method, and computer-readable recording medium with recorded leak-judgment-executable program 失效
标题翻译：泄漏判断方法和具有记录的泄漏判断可执行程序的计算机可读记录介质
公开(公告)号：US07641382B2
公开(公告)日：2010-01-05
申请号：US11270563
申请日：2005-11-10
申请人： Hiroshi Izawa , Hiroshi Echizen , Hirokazu Ohtoshi , Masatoshi Tanaka
发明人： Hiroshi Izawa , Hiroshi Echizen , Hirokazu Ohtoshi , Masatoshi Tanaka
IPC分类号： G01N25/72 , G01K13/02 , G01K1/00 , G01M3/02
CPC分类号： H01J37/3244 , C23C16/4401 , G01M3/002
摘要： In a deposited-film formation apparatus or process having the means or steps of evacuating the inside of an inside-evacuatable chamber through an evacuation piping by an evacuation means, feeding a material gas into the chamber while evacuating the inside of the chamber, and applying a high-frequency power to form a deposited film on a substrate disposed inside the chamber, a leak is detected on the basis of a measured value of a temperature sensor which detects the heat of reaction that is generated when the material gas fed into the chamber reacts with oxygen contained in air having entered from the outside, so as to be able to stop the material gas feeding.In deposited-film formation apparatus or processes making use of spontaneously ignitable gases, the leak can quickly be detected when air enters the chamber because of any unexpected accident such as a break of piping.
摘要翻译：在具有通过排气装置通过排气管道将内部可抽空室抽空的方法或步骤的沉积膜形成装置或方法中，在抽空室内时将原料气体进料到室中，并施加在设置在室内的基板上形成沉积膜的高频电力，基于检测供给到室内的原料气体产生的反应热的温度传感器的测定值来检测泄漏与从外部进入的空气中所含的氧气反应，以便能够停止原料气体供给。在使用自发点燃气体的沉积膜形成装置或工艺中，当空气进入腔室时，由于任何意想不到的事故（例如管道断裂），可以快速检测泄漏。

7. 发明申请

US20060068081A1 Leak judgment method, and computer-readable recording medium with recorded leak-judgment-executable program 失效
标题翻译：泄漏判断方法和具有记录的泄漏判断可执行程序的计算机可读记录介质
公开(公告)号：US20060068081A1
公开(公告)日：2006-03-30
申请号：US11270563
申请日：2005-11-10
申请人： Hiroshi Izawa , Hiroshi Echizen , Hirokazu Ohtoshi , Masatoshi Tanaka
发明人： Hiroshi Izawa , Hiroshi Echizen , Hirokazu Ohtoshi , Masatoshi Tanaka
IPC分类号： C23C16/52 , C23C16/00
CPC分类号： H01J37/3244 , C23C16/4401 , G01M3/002
摘要： In a deposited-film formation apparatus or process having the means or steps of evacuating the inside of an inside-evacuatable chamber through an evacuation piping by an evacuation means, feeding a material gas into the chamber while evacuating the inside of the chamber, and applying a high-frequency power to form a deposited film on a substrate disposed inside the chamber, a leak is detected on the basis of a measured value of a temperature sensor which detects the heat of reaction that is generated when the material gas fed into the chamber reacts with oxygen contained in air having entered from the outside, so as to be able to stop the material gas feeding. In deposited-film formation apparatus or processes making use of spontaneously ignitable gases, the leak can quickly be detected when air enters the chamber because of any unexpected accident such as a break of piping.
摘要翻译：在具有通过排气装置通过排气管道将内部可抽空室抽空的方法或步骤的沉积膜形成装置或方法中，在抽空室内时将原料气体进料到室中，并施加在设置在室内的基板上形成沉积膜的高频电力，基于检测供给到室内的原料气体产生的反应热的温度传感器的测定值来检测泄漏与从外部进入的空气中所含的氧气反应，以便能够停止原料气体供给。在使用自发点燃气体的沉积膜形成装置或工艺中，当空气进入腔室时，由于任何意想不到的事故（例如管道断裂），可以快速检测泄漏。

8. 发明授权

US08111962B2 Optical fiber connection structure and single-mode fiber 失效
标题翻译：光纤连接结构和单模光纤
公开(公告)号：US08111962B2
公开(公告)日：2012-02-07
申请号：US13120745
申请日：2009-08-21
申请人： Masatoshi Tanaka , Masayoshi Hachiwaka , Haruo Ooizumi
发明人： Masatoshi Tanaka , Masayoshi Hachiwaka , Haruo Ooizumi
IPC分类号： G02B6/02
CPC分类号： G02B6/02366 , G02B6/02376 , G02B6/03644 , G02B6/0365 , G02B6/2552 , G02B6/262 , G02B6/268 , G02B6/381
摘要： An optical fiber connection structure which reduces MPI in the use of an optical fiber with a bend resistance improved by forming holes in the fiber, and a single-mode fiber which reduces MPI are provided. A second cladding portion of a second single-mode fiber 20 includes holes 28, and thus, the second single-mode fiber 20 has low bending loss. A portion of the second single-mode fiber 20 connected to a first single-mode fiber 10a is made solid by filling corresponding portions of the holes 28 over the length L0, and light in a mode LP11 is significantly attenuated in this portion, thereby reducing MPI.
摘要翻译：提供了通过在光纤中形成孔而改善使用具有弯曲电阻的光纤的MPI的光纤连接结构以及减少MPI的单模光纤。第二单模光纤20的第二包层部分包括孔28，因此第二单模光纤20具有低弯曲损耗。连接到第一单模光纤10a的第二单模光纤20的一部分通过在长度L0上填充孔28的对应部分而被制成固体，并且在该部分中模式LP11中的光显着衰减，从而减少 MPI。

9. 发明申请

US20110233412A1 COLLIMATOR, RADIOLOGICAL IMAGING APPARATUS AND NUCLEAR MEDICINE DIAGNOSIS APPARATUS 失效
标题翻译：放射成像装置和核医学诊断装置
公开(公告)号：US20110233412A1
公开(公告)日：2011-09-29
申请号：US12019269
申请日：2008-01-24
申请人： Tsuneaki Kawaguchi , Masatoshi Tanaka , Shigeru Kimura , Katsutoshi Tsuchiya , Masami Murayama , Junichi Katogi
发明人： Tsuneaki Kawaguchi , Masatoshi Tanaka , Shigeru Kimura , Katsutoshi Tsuchiya , Masami Murayama , Junichi Katogi
IPC分类号： G21K1/02 , G01T1/00
CPC分类号： G21K1/025 , G01T1/1648
摘要： A collimator, a radiological imaging apparatus and a nuclear medicine diagnosis apparatus which are able to improve the sensitivity are provided. The radiological imaging apparatus has a collimator 11 disposed to oppose a radiological detection device 12 and having through-holes 11a for passing to the radiological detection device 12 gamma rays in a specified direction out of those radiated from an object to be examined. The collimator 11 is produced by mutually coupling a plurality of metal tubular members 11A each having the through-hole 11a with the help of a bonding agent S in alignment with a plurality of detectors 12a constituting the radiological detection device 12.
摘要翻译：提供了能够提高灵敏度的准直仪，放射学成像装置和核医学诊断装置。放射线成像装置具有与放射线检测装置12相对设置的准直仪11，具有通过通孔11a使得放射线检测装置12沿从规定方向射出的伽马射线从被检体的辐射状态射出。准直仪11是借助于与构成放射线检测装置12的多个检测器12a对准的接合剂S，使具有贯通孔11a的多个金属管状构件11A相互连接而制造的。

10. 发明授权

US07654543B2 Vehicle suspension arm supporting structure 失效
标题翻译：车辆悬臂支撑结构
公开(公告)号：US07654543B2
公开(公告)日：2010-02-02
申请号：US11660527
申请日：2005-09-08
申请人： Masatoshi Tanaka , Yasushi Yoshida
发明人： Masatoshi Tanaka , Yasushi Yoshida
IPC分类号： B62D21/11
CPC分类号： B60G7/02 , B60G21/0551 , B60G2200/142 , B60G2200/44 , B60G2204/1222 , B60G2204/15 , B60G2204/43 , B60G2204/4302 , B60G2206/0114 , B60G2206/60 , B60G2206/602 , B60G2300/13 , B62D21/11
摘要： The invention relates to a vehicle suspension arm supporting structure. A receiving portion 9 is formed integrally on a subframe 5 which is formed of a light metal in such a manner as to extend transversely outwards, and a sheet steel member 15 is connected to the subframe 5 by a bolt or a nut in such a manner as to be situated below the receiving portion 9 of the subframe 5 at a predetermined interval. A base portion 13b of a suspension arm 13 is disposed between the receiving portion 9 of the subframe 5 and the sheet steel member 15, the base portion 13b of the suspension arm 13 is supported on the subframe 5 via a rubber bushing joint 14 by a connecting bolt 16 which vertically passes through the receiving portion 9 of the subframe 5 and the sheet steel member 15, and the receiving portion 9 of the subframe 5 is connected to a side member 4 by the connecting bolt 16.
摘要翻译：本发明涉及一种车辆悬架臂支撑结构。接收部9一体地形成在由轻金属形成的子框架5上，横向向外延伸，并且钢板构件15以这样的方式通过螺栓或螺母连接到副框架5 以预定间隔位于子帧5的接收部分9的下方。悬架臂13的基部13b设置在副车架5的接收部9与钢板构件15之间，悬架臂13的基部13b通过橡胶衬套接头14被支撑在副车架5上垂直穿过副车架5的接收部分9和钢板构件15的连接螺栓16和副车架5的接收部分9通过连接螺栓16连接到侧构件4。

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