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    • 2. 发明授权
    • Semiconductor integrated circuit device and a method of manufacturing the same
    • 半导体集成电路器件及其制造方法
    • US08222712B2
    • 2012-07-17
    • US12399957
    • 2009-03-08
    • Kunihiko KatoShigeya ToyokawaKozo WatanabeMasatoshi Taya
    • Kunihiko KatoShigeya ToyokawaKozo WatanabeMasatoshi Taya
    • H01L29/872
    • H01L29/872H01L21/823857H01L21/823878H01L27/0629H01L29/0619H01L29/417H01L2924/0002H01L2924/00
    • To achieve a further reduction in the size of a finished product by reducing the number of externally embedded parts, the embedding of a Schottky barrier diode which is relatively large in the amount of current in a semiconductor integrated circuit device has been pursued. In such a case, it is general practice to densely arrange a large number of contact electrodes in a matrix over a Schottky junction region. It has been widely performed to perform a sputter etching process with respect to the surface of a silicide layer at the bottom of each contact hole before a barrier metal layer is deposited. However, in a structure in which electrodes are thus arranged over a Schottky junction region, a reverse leakage current in a Schottky barrier diode is varied by variations in the amount of sputter etching. The present invention is a semiconductor integrated circuit device having a Schottky barrier diode in which contact electrodes are arranged over a guard ring in contact with a peripheral isolation region.
    • 为了通过减少外部嵌入部件的数量来进一步减小成品的尺寸,已经追求了在半导体集成电路器件中嵌入的电流量相对较大的肖特基势垒二极管。 在这种情况下,通常的做法是在肖特基结区域上将矩阵中的大量接触电极密集布置。 在阻挡金属层沉积之前,已经广泛地执行相对于每个接触孔底部的硅化物层的表面的溅射蚀刻工艺。 然而,在其中将电极布置在肖特基结区上方的结构中,肖特基势垒二极管中的反向泄漏电流由于溅射蚀刻量的变化而变化。 本发明是一种具有肖特基势垒二极管的半导体集成电路器件,其中接触电极布置在与周边隔离区接触的保护环上。
    • 6. 发明授权
    • Method of manufacture of a semiconductor device
    • 半导体器件的制造方法
    • US07118972B2
    • 2006-10-10
    • US10833118
    • 2004-04-28
    • Masaaki ShinoharaKozo WatanabeFukuo OwadaTakashi Aoyama
    • Masaaki ShinoharaKozo WatanabeFukuo OwadaTakashi Aoyama
    • H01L21/8234
    • H01L27/11568H01L27/115
    • A method of manufacture of a semiconductor device uses simplified steps while improving the electrical properties of each element in the semiconductor device. Over a semiconductor substrate, having a memory gate electrode, control gate electrode and gate electrode formed thereover, a silicon oxide film, a silicon nitride film and a silicon oxide film are formed successively. The silicon oxide film formed over the gate electrode is then removed by wet etching. The silicon oxide film, silicon nitride film and silicon oxide film formed over the semiconductor substrate are removed successively by anisotropic dry etching, whereby respective sidewall spacers having a relatively large width and a relatively small width are formed.
    • 半导体器件的制造方法使用简化的步骤,同时改善半导体器件中每个元件的电性能。 在其上形成有存储栅电极,控制栅电极和栅电极的半导体衬底上,依次形成氧化硅膜,氮化硅膜和氧化硅膜。 然后通过湿蚀刻除去在栅电极上形成的氧化硅膜。 形成在半导体衬底上形成的氧化硅膜,氮化硅膜和氧化硅膜通过各向异性干蚀刻连续地去除,从而形成具有相对较大宽度和相对较小宽度的各个侧壁间隔物。