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    • 6. 发明申请
    • OPTICAL DEVICE AND ELECTRONIC DEVICES USING THE SAME
    • 光学器件和使用该光学器件的电子器件
    • US20100148294A1
    • 2010-06-17
    • US12712420
    • 2010-02-25
    • Kyoko FUJIITakahiro NakanoHikari Sano
    • Kyoko FUJIITakahiro NakanoHikari Sano
    • H01L31/0216
    • H04N5/2253H01L27/14609H01L27/14623H01L27/14625H01L27/14627
    • An optical device such as an image sensor alleviates reduction in image quality caused by light reaching a peripheral circuit section other than a light receiving section. A semiconductor substrate includes an interconnect layer, a light receiving section provided with a plurality of light receiving elements on the interconnect layer, and a peripheral circuit section provided in a same layer as the light receiving section, and surrounding the light receiving section. Light entry elements are provided on a surface of the semiconductor substrate. A light shielding film is formed of a metal layer, and covers at least one part of a region corresponding to the peripheral circuit section. A first electrode is formed in the region corresponding to the peripheral circuit section, and in an opening of the light shielding film to be electrically isolated from the light shielding film.
    • 诸如图像传感器的光学装置减轻了到达光接收部分以外的外围电路部分的光的图像质量的降低。 半导体衬底包括互连层,在互连层上设置有多个光接收元件的光接收部分和设置在与光接收部分相同的层中并围绕光接收部分的外围电路部分。 光入射元件设置在半导体衬底的表面上。 遮光膜由金属层形成,并且覆盖对应于外围电路部分的区域的至少一部分。 第一电极形成在与外围电路部分对应的区域中,并且在遮光膜的开口中与遮光膜电隔离。