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    • 8. 发明申请
    • OPTICAL DEVICE AND METHOD FOR FABRICATING THE SAME
    • 光学装置及其制造方法
    • US20100176475A1
    • 2010-07-15
    • US12649524
    • 2009-12-30
    • Hikari SanoYoshihiro Tomita
    • Hikari SanoYoshihiro Tomita
    • H01L31/0232H01L31/0216H01L31/18
    • H01L27/14625H01L27/14603H01L27/14621H01L27/1464H01L27/14683H01L27/14685
    • An optical device according to an aspect of the present invention includes: a semiconductor substrate layer including a plurality of elements; at least one optical component which is formed at the first principal surface side of the semiconductor substrate layer and transmits incident light of desired wavelength; and an interconnect layer formed on second principal surface of the semiconductor substrate layer. In the semiconductor substrate layer, (i) a photoelectric conversion element region is formed at a position corresponding to the at least one optical component, and (ii) at least one element among the plurality of elements is formed near the second principal surface. At least a part of the at least one optical component is formed as a part of the semiconductor substrate layer, and the interconnect layer includes the conductive material electrically connected to the photoelectric conversion element region and the at least one element.
    • 根据本发明的一个方面的光学器件包括:包括多个元件的半导体衬底层; 至少一个光学部件,形成在所述半导体衬底层的第一主表面侧并透射所需波长的入射光; 以及形成在所述半导体衬底层的第二主表面上的互连层。 在半导体衬底层中,(i)在与至少一个光学部件相对应的位置形成光电转换元件区域,(ii)在第二主表面附近形成多个元件中的至少一个元件。 所述至少一个光学部件的至少一部分形成为所述半导体衬底层的一部分,并且所述互连层包括与所述光电转换元件区域和所述至少一个元件电连接的所述导电材料。