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    • 1. 发明申请
    • Power module member manufactured by wet treatment, and wet treatment method and wet treatment equipment thereof
    • 通过湿式处理制造的电力模块部件,湿式处理方法及其湿式处理设备
    • US20080230515A1
    • 2008-09-25
    • US12153431
    • 2008-05-19
    • Ken IyodaMakoto NamiokaHideyo OsanaiSusumu Shimada
    • Ken IyodaMakoto NamiokaHideyo OsanaiSusumu Shimada
    • C23F1/02
    • H05K3/068H01L21/4846H01L23/3735H01L2924/0002H05K3/0085H01L2924/00
    • The present invention provides a method of forming a circuit pattern on an integrally bonded member, the method not requiring a correction step of a laminate film or a resist film which has been necessary at the time of wet treatment of the integrally bonded member. After a circuit pattern forming metal plate is bonded on a part of a ceramic substrate so as to expose an outer peripheral edge portion of the ceramic substrate in an integrally bonded member, the integrally bonded member is set on a treating apparatus while being covered with a masking member having a window portion from which the circuit pattern forming metal plate of the integrally bonded member is exposed. Further, the integrally bonded member is pressed with an appropriate pressure from a base plate side so that a boundary surface between a portion surrounding the window portion in the masking member and an exposed surface of the ceramic substrate which is exposed in a metal-ceramic bonded member has a state not allowing a liquid to pass therethrough. Thereafter, a treatment solution for wet treatment is injected from an injection pipe to be in contact with the circuit pattern forming metal plate.
    • 本发明提供了在整体接合部件上形成电路图案的方法,该方法不需要在整体接合部件进行湿处理时必需的层压膜或抗蚀剂膜的校正步骤。 在电路图案形成用金属板接合在陶瓷基板的一部分上,以将整体接合部件露出陶瓷基板的外周缘部之后,将整体接合部件设置在处理装置上,同时被覆盖 掩模构件具有窗口部分,整体结合构件的电路图案形成金属板从该窗口部分露出。 此外,整体结合部件从基板侧以适当的压力被按压,使得掩蔽部件中的窗部分周围的部分与陶瓷基板的暴露在金属 - 陶瓷结合的表面之间的边界面 构件具有不允许液体通过的状态。 此后,从喷射管注入用于湿处理的处理液,以与电路图形形成金属板接触。
    • 4. 发明授权
    • Power module member manufactured by wet treatment, and wet treatment method and wet treatment equipment thereof
    • 通过湿式处理制造的电力模块部件,湿式处理方法及其湿式处理设备
    • US07387741B2
    • 2008-06-17
    • US10397429
    • 2003-03-27
    • Ken IyodaMakoto NamiokaHideyo OsanaiSusumu Shimada
    • Ken IyodaMakoto NamiokaHideyo OsanaiSusumu Shimada
    • B44C1/22C03C15/00C03C25/68C23F1/00
    • H05K3/068H01L21/4846H01L23/3735H01L2924/0002H05K3/0085H01L2924/00
    • The present invention provides a method of forming a circuit pattern on an integrally bonded member, the method not requiring a correction step of a laminate film or a resist film which has been necessary at the time of wet treatment of the integrally bonded member. After a circuit pattern forming metal plate 13 is bonded on a part of a ceramic substrate 12 so as to expose an outer peripheral edge portion of the ceramic substrate 12 in an integrally bonded member 10, the integrally bonded member 10 is set on a treating apparatus 30 while being covered with a masking member 20 having a window portion 22 from which the circuit pattern forming metal plate 13 of the integrally bonded member 10 is exposed. Further, the integrally bonded member 10 is pressed with an appropriate pressure from a base plate 11 side so that a boundary surface between a portion 23 surrounding the window portion in the masking member and an exposed surface 16 of the ceramic substrate which is exposed in a metal-ceramic bonded member 14 has a state not allowing a liquid to pass therethrough. Thereafter, a treatment solution 33 for wet treatment is injected from an injection pipe 35 to be in contact with the circuit pattern forming metal plate 13.
    • 本发明提供了在整体接合部件上形成电路图案的方法,该方法不需要在整体接合部件进行湿处理时必需的层压膜或抗蚀剂膜的校正步骤。 在陶瓷基板12的一部分上接合有电路图案形成用金属板13,从而在整体接合部件10中露出陶瓷基板12的外周缘部,将整体接合部件10设置在处理装置 同时被具有窗口部分22的掩模构件20覆盖,整体接合构件10的电路图案形成金属板13从该窗口部分22露出。 此外,整体接合部件10以适当的压力从基板11侧按压,使得围绕掩模部件中的窗口部分的部分23与露出在掩模部件中的陶瓷基板的暴露表面16之间的边界面 金属陶瓷接合部件14具有不允许液体通过的状态。 之后,从注入管35注入湿润处理用处理液33,与电路图案形成金属板13接触。
    • 8. 发明授权
    • Mold and method for manufacturing metal-ceramic composite member
    • 金属陶瓷复合材料制造用模具及其制造方法
    • US06997233B2
    • 2006-02-14
    • US10668342
    • 2003-09-24
    • Hideyo OsanaiSusumu IbaragiMakoto Namioka
    • Hideyo OsanaiSusumu IbaragiMakoto Namioka
    • B22D19/00B22D19/02B22D19/04B22D10/08
    • B22D19/00
    • To provide a mold capable of manufacturing a metal-ceramic composite member in which a predetermined number of ceramic members are joined onto a large joining metal, the large joining metal being free from swell and shrinkage cavity on the surface thereof and high in dimensional precision. A metal-ceramic composite member 3 according to this embodiment is manufactured in such a manner that a predetermined number of metal-ceramic bonded substrates 30 are placed in a mold main body 11 constituting a mold 1, with a ceramic substrate 31 side thereof facing upward, an atmosphere inside and outside the mold 1 is replaced with an inert gas such as a nitrogen gas from the atmosphere, a molten metal 42 is poured and filled in a first joining portion 14 that is formed by the molten metal main body 11 and an upper container 13 and that has a shrinkage cavity inducing portion 16 on a metal material holding portion side and a shrinkage cavity inducing portion 18 on an air vent side, and the molten metal 42 is cooled.
    • 为了提供能够制造金属陶瓷复合构件的模具,其中预定数量的陶瓷构件接合到大的接合金属上,大的接合金属在其表面上没有膨胀和收缩空腔,并且尺寸精度高。 制造本实施方式的金属 - 陶瓷复合构件3,将规定数量的金属陶瓷接合基板30配置在构成模具1的模具主体11内,陶瓷基板31侧面朝上 模具1内部和外部的气氛被来自大气的惰性气体如氮气置换,熔融金属42被注入并填充在由熔融金属主体11形成的第一接合部分14和 上部容器13,并且在金属材料保持部侧具有收缩空腔诱导部分16,在通风口侧具有收缩空腔诱导部分18,并且熔融金属42被冷却。