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    • 2. 发明授权
    • Plasma etching method, plasma etching apparatus and storage medium
    • 等离子体蚀刻方法,等离子体蚀刻装置和存储介质
    • US08383001B2
    • 2013-02-26
    • US12707957
    • 2010-02-18
    • Hiromasa MochikiYoshinobu OoyaFumio YamazakiToshio Haga
    • Hiromasa MochikiYoshinobu OoyaFumio YamazakiToshio Haga
    • B44C1/22
    • H01J37/32174H01J37/32027H01J37/32091H01J2237/334
    • There is provided a plasma etching method capable of achieving a sufficient organic film modifying effect by high-velocity electrons. In forming a hole in an etching target film by plasma etching, a first condition of generating plasma within a processing chamber by way of turning on a plasma-generating high frequency power application unit and a second condition of not generating the plasma within the processing chamber by way of turning off the plasma-generating high frequency power application unit are repeated alternately. Further, a negative DC voltage is applied from a first DC power supply such that an absolute value of the applied negative DC voltage during a period of the second condition is greater than an absolute value of the applied negative DC voltage during a period of the first condition.
    • 提供了能够通过高速电子获得充分的有机膜修饰效果的等离子体蚀刻方法。 在通过等离子体蚀刻在蚀刻靶膜中形成孔时,通过开启等离子体产生高频电力施加单元和在处理室内不产生等离子体的第二条件,在处理室内产生等离子体的第一条件 通过关闭等离子体产生高频电力应用单元交替重复。 此外,从第一直流电源施加负的直流电压,使得在第二状态的周期期间所施加的负的直流电压的绝对值大于在第一状态期间施加的负的直流电压的绝对值 条件。
    • 8. 发明授权
    • Hierarchical control apparatus of hierarchical storage system and method for maintaining and managing duplexed media
    • 分级存储系统的分级控制装置和用于维护和管理双面媒体的方法
    • US07664914B2
    • 2010-02-16
    • US11527547
    • 2006-09-27
    • Fumio Yamazaki
    • Fumio Yamazaki
    • G06F21/00
    • G06F11/2094G06F11/2097
    • A control unit of a hierarchical control apparatus holds information in which one of duplexed library apparatuses is set as a master and the other is set as a slave for each medium in each of the duplexed library apparatuses, and statistical information about each of the library apparatuses. The control unit includes an automatic redundant copy unit detecting that a statistical information of a medium reaches a predetermined amount, replacing the medium with a free medium, and copying data to the free medium, a master/slave setting unit setting the medium to which the data is copied and the other medium as a master or a slave such that a load is even between the duplexed library apparatuses according to the statistical information, and a unit copying and reading the requested data to the disk array apparatus by prioritizing one of the duplexed library apparatuses including the medium set as a master when there is no requested data in the disk array apparatus.
    • 分级控制装置的控制单元保存将双工库设备中的一个设置为主设备并将另一个设置为每个双工库设备中的每个介质的从设备的信息,以及关于每个库设备的统计信息 。 控制单元包括检测介质的统计信息达到预定量的自动冗余复制单元,用自由介质替换介质并将数据复制到可用介质;主/从设置单元,其设置为 数据被复制,另一个介质作为主机或从机,使得根据统计信息的双工库设备之间的负载均匀,并且单元通过对双绞线的一个进行优先级来复制和读取所请求的数据到磁盘阵列设备 当在磁盘阵列装置中没有请求的数据时,包括设置为主机的介质的图书馆装置。