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1. 发明授权

US06534358B2 Method of fabricating semiconductor device having ferroelectric capacitor 失效
标题翻译：制造具有铁电电容器的半导体器件的方法
公开(公告)号：US06534358B2
公开(公告)日：2003-03-18
申请号：US09838186
申请日：2001-04-20
申请人： Takeshi Nakura , Hidemitsu Mori , Seiichi Takahashi
发明人： Takeshi Nakura , Hidemitsu Mori , Seiichi Takahashi
IPC分类号： H01L218242
CPC分类号： H01L28/55 , H01L21/3105 , H01L27/10855 , H01L27/10894
摘要： An interlayer insulating film, contacts, and wirings are formed on a MOS transistor formed on a silicon substrate. Another interlayer insulating film and contacts are formed thereon. Subsequently, as a first heat treatment, a heat treatment is performed in a hydrogen atmosphere or a nitrogen- or otherwise-diluted hydrogen atmosphere at a temperature of the order of 300-500° C. for about 5-60 minutes, thereby recovering defects that occur in the MOS transistor and insulating film forming steps and the like. Then, a ferroelectric capacitor connected to either diffusion layer of the MOS transistor is formed along with wirings, electrodes, and the like. Thereafter, as a second heat treatment, a heat treatment is performed in nitrogen at a temperature of the order of 300-500° C. for about 5-60 minutes. This recovers defects that occur after the first heat treatment step.
摘要翻译：在形成于硅衬底上的MOS晶体管上形成层间绝缘膜，触点和布线。在其上形成另一层间绝缘膜和触点。随后，作为第一热处理，在氢气氛或氮气或其它稀释的氢气氛中，在约300-500℃的温度下进行约5-60分钟的热处理，从而回收缺陷发生在MOS晶体管和绝缘膜形成步骤等中。然后，连接到MOS晶体管的任一扩散层的铁电电容器与布线，电极等一起形成。此后，作为第二热处理，在氮气中在约300-500℃的温度下进行约5-60分钟的热处理。这恢复了在第一热处理步骤之后发生的缺陷。

2. 发明授权

US06384440B1 Ferroelectric memory including ferroelectric capacitor, one of whose electrodes is connected to metal silicide film 有权
标题翻译：铁电存储器包括铁电电容器，其电极之一连接到金属硅化物膜
公开(公告)号：US06384440B1
公开(公告)日：2002-05-07
申请号：US09703730
申请日：2000-11-02
申请人： Hidemitsu Mori , Seiichi Takahashi
发明人： Hidemitsu Mori , Seiichi Takahashi
IPC分类号： H01L2702
CPC分类号： H01L27/11502 , H01L21/28518 , H01L21/76895 , H01L27/11507 , H01L28/60
摘要： A ferroelectric memory is composed of a wiring layer, a bottom electrode coupled to the wiring layer, a ferroelectric film formed on the bottom electrode, a top electrode formed on the ferroelectric film, and a metal silicide layer coupled to the top electrode and located above the ferroelectric film. The wiring layer includes substantially no silicon.
摘要翻译：铁电存储器由布线层，与布线层连接的底部电极，形成在底部电极上的强电介质膜，形成在铁电体膜上的顶部电极和与顶部电极耦合并位于其上的金属硅化物层组成铁电薄膜。布线层基本上不含硅。

3. 发明授权

US08097541B2 Method for surface treating semiconductor 有权
标题翻译：半导体表面处理方法
公开(公告)号：US08097541B2
公开(公告)日：2012-01-17
申请号：US11990440
申请日：2006-08-15
申请人： Mikio Takagi , Seiichi Takahashi , Hiroaki Inoue , Masayuki Satou , Yutaka Miura
发明人： Mikio Takagi , Seiichi Takahashi , Hiroaki Inoue , Masayuki Satou , Yutaka Miura
IPC分类号： H01L21/302
CPC分类号： H01L21/67109 , H01L21/02046 , H01L21/306 , H01L21/67017 , H01L21/67757
摘要： Native oxide film on a semiconductor silicon wafer(s) is dry etched at a temperature of 50° C. or less. Hydrogen treatment is then carried out a temperature of 100° C. or more to bond the dangling bonds with hydrogen. A jig 9 that has been used is again used for loading new semiconductor silicon wafer(s) 10. The wafer(s) on the jig 9 is subjected to removal of a native oxide film and then hydrogen bonding. The resultant heat remains in jig and makes it difficult to maintain the wafers to temperature appropriate to removal of a native oxide film.After treatment of hydrogen bonding, inert gas having temperature of from 0 to −30° C. is injected into reaction vessel 5 and/or treatment preparing vessel 21, in which a native oxide film has been removed.
摘要翻译：半导体硅晶片上的天然氧化物膜在50℃以下的温度下被干法蚀刻。然后进行氢气处理，其温度为100℃以上，以使悬挂键与氢键合。已经使用的夹具9再次用于装载新的半导体硅晶片10.将夹具9上的晶片除去自然氧化膜，然后氢键合。所得到的热量保留在夹具中，并且使得难以将晶片保持适于去除天然氧化物膜的温度。在氢键处理之后，将温度为0〜-30℃的惰性气体注入反应容器5和/或其中去除了自然氧化膜的处理制备容器21。

4. 发明授权

US07682481B2 Vacuum processing apparatus 有权
标题翻译：真空加工设备
公开(公告)号：US07682481B2
公开(公告)日：2010-03-23
申请号：US11646593
申请日：2006-12-28
申请人： Seiichi Takahashi , Takehisa Miyaya , Soo Boo Lim , Masayuki Satou , Kengo Tsutsumi , Yohei Ono
发明人： Seiichi Takahashi , Takehisa Miyaya , Soo Boo Lim , Masayuki Satou , Kengo Tsutsumi , Yohei Ono
IPC分类号： C23F1/00 , C23C16/00
CPC分类号： H01L21/67748 , C23C14/566 , H01L21/3065 , H01L21/6719 , H01L21/67751
摘要： The present invention provides a vacuum processing apparatus that allows easy exchange of processing chambers. A vacuum processing apparatus of the present invention has a processing chamber and a carrying-in-and-out chamber. The carrying-in-and-out chamber is fixed and located at a position above the processing chamber. The processing chamber can be lowered by a vertically moving mechanism. Therefore, the processing chamber is separated from the carrying-in-and-out chamber by lowering the processing chamber. A conveying means is connected to the processing chamber so that it is possible to easily convey the processing chamber after being removed from the carrying-in-and-out chamber. The operation for exchanging the processing chambers can be simpler than in the conventional systems.
摘要翻译：本发明提供一种允许容易地更换处理室的真空处理装置。本发明的真空处理装置具有处理室和搬入室。进出室被固定并位于处理室上方的位置。处理室可以通过垂直移动的机构降低。因此，通过降低处理室，处理室与进出室分离。传送装置连接到处理室，使得可以在从搬入室移出之后容易地输送处理室。用于更换处理室的操作可以比常规系统更简单。

5. 发明授权

US06675925B2 Working vehicle 有权
标题翻译：工作车辆
公开(公告)号：US06675925B2
公开(公告)日：2004-01-13
申请号：US10077195
申请日：2002-02-15
申请人： Seiichi Takahashi , Ryohei Sumiyoshi , Isamu Kawai , Takashi Yasumi
发明人： Seiichi Takahashi , Ryohei Sumiyoshi , Isamu Kawai , Takashi Yasumi
IPC分类号： B60R1730
CPC分类号： B62D7/06 , B60K17/303 , B62D9/00 , F16D3/221
摘要： A steering apparatus for a working vehicle is provided which is capable of steering dirigible wheels by increased steering angles while checking sideways sliding of the wheels on the ground. For this purpose, a pair of right and left intermediate cases are supported by right and left wheel supports of a vehicle body, each to be pivotable about a first steering axis extending substantially vertically. Each intermediate case supports an axle case in a position thereof opposed to the associated dirigible wheel, to be pivotable about a second steering axis extending substantially vertically. The axle case supports the associated dirigible wheel to be rotatable on an axle.
摘要翻译：提供了一种用于工作车辆的转向装置，其能够在检查车轮在地面上的侧向滑动的同时通过增加的转向角度来转向不可转动的车轮。为此，一对左右的中间壳体由车体的左右车轮支撑件支撑，每一个可绕着基本垂直延伸的第一转向轴线枢转。每个中间壳体在其相对于相关联的刚性轮的位置支撑轴箱，以能够围绕基本上垂直延伸的第二转向轴枢转。轴箱支撑相关联的转向轮可在轴上旋转。

6. 发明授权

US5995387A Switching power-supply unit 失效
标题翻译：开关电源单元
公开(公告)号：US5995387A
公开(公告)日：1999-11-30
申请号：US85615
申请日：1998-05-27
申请人： Seiichi Takahashi , Yasuo Ohashi
发明人： Seiichi Takahashi , Yasuo Ohashi
IPC分类号： H02M3/28 , H02M1/08 , H02M1/14 , H02M3/335
CPC分类号： H02M1/14 , H02M3/33523
摘要： In a switching power-supply unit in which a series circuit comprising a primary winding of a switching transformer and a switching device is provided across the terminals of an input power supply, a noise-eliminating bypass capacitor is connected across the ends of the series circuit. The bypass capacitor forms a short circuit path for high frequency noise having a frequency higher than the switching frequency of the switching device, thereby reducing high-frequency radiant noise.
摘要翻译：在开关电源单元中，在输入电源的端子两端设置有包括开关变压器的初级绕组和开关装置的串联电路的开关电源单元，串联电路的两端连接有消除噪声的旁路电容器。旁路电容器形成具有高于开关器件的开关频率的频率的高频噪声的短路路径，从而降低高频辐射噪声。

7. 外观设计

USD387068S Agricultural tractor 失效
公开(公告)号：USD387068S
公开(公告)日：1997-12-02
申请号：US50525
申请日：1995-11-28
申请人： Hisato Kato , Mitsuhiko Obe , Seiichi Takahashi
设计人： Hisato Kato , Mitsuhiko Obe , Seiichi Takahashi

8. 发明授权

US5452766A Hydraulic control system for a tractor 失效
标题翻译：拖拉机液压控制系统
公开(公告)号：US5452766A
公开(公告)日：1995-09-26
申请号：US138672
申请日：1993-10-18
申请人： Takeshi Imamura , Satoshi Iida , Seiichi Takahashi
发明人： Takeshi Imamura , Satoshi Iida , Seiichi Takahashi
IPC分类号： A01B63/112
CPC分类号： A01B63/112 , B60G2401/12
摘要： A control system for controlling a hydraulically operable link mechanism mounted on a working vehicle. The link mechanism includes lift arms, a hydraulic actuator for controlling the lift arms, a first and a second lower links each connected at one end thereof to a working implement, and connecting rods interconnecting the lift arms and the first and second lower links, respectively. The control system includes a first coupling for pivotally connecting the first lower link to one side of a vehicle body, a second coupling for pivotally connecting the second lower link to the other side of the vehicle body, strain gauges provided for the first and second couplings, respectively, and a control device for controlling the actuator based on detection signals received from the strain gauges.
摘要翻译：一种用于控制安装在工作车辆上的液压可操作的连杆机构的控制系统。连杆机构包括提升臂，用于控制提升臂的液压致动器，分别在其一端连接到工作工具的第一和第二下部连杆，以及将升降臂与第一和第二下部连杆相互连接的连接杆。所述控制系统包括用于将所述第一下部连杆枢转地连接到车身的一侧的第一联接器，用于将所述第二下部连杆枢转地连接到所述车身的另一侧的第二联接件，用于所述第一和第二联接器以及用于根据从应变计接收到的检测信号来控制致动器的控制装置。

9. 发明授权

US08361274B2 Etching apparatus and etching method 有权
标题翻译：蚀刻装置和蚀刻方法
公开(公告)号：US08361274B2
公开(公告)日：2013-01-29
申请号：US11032651
申请日：2005-01-10
申请人： Kwang-Myung Lee , Ki-Young Yun , Il-Kyoung Kim , Sung-Wook Park , Seung-Ki Chae , No-Hyun Huh , Jae-Wook Kim , Jae-Hyuck An , Woo-Seok Kim , Myeong-Jin Kim , Kyoung-Ho Jang , Shinji Yanagisawa , Kengo Tsutsumi , Seiichi Takahashi
发明人： Kwang-Myung Lee , Ki-Young Yun , Il-Kyoung Kim , Sung-Wook Park , Seung-Ki Chae , No-Hyun Huh , Jae-Wook Kim , Jae-Hyuck An , Woo-Seok Kim , Myeong-Jin Kim , Kyoung-Ho Jang , Shinji Yanagisawa , Kengo Tsutsumi , Seiichi Takahashi
IPC分类号： H01L21/3065 , C23C16/455 , C23C16/00
CPC分类号： H01L21/6708 , H01J37/3244 , H01L21/3065
摘要： A vacuum processing apparatus is provided with: a vacuum processing tank; a first gas introduction section that is constructed such that a first processing gas in a radical state is introduced into the vacuum processing tank and is guided to a semiconductor wafer; and a second gas introduction section that is constructed such that a second processing gas that reacts with the first processing gas is introduced into the vacuum processing tank and is guided to the semiconductor wafer. The second gas introduction section has two shower nozzles provided at positions on either side of an introduction pipe provided for the first gas introduction section. According to this vacuum processing apparatus, high speed processing of a number of processing objects can be achieved. Moreover, the in-plane uniformity of the processing objects after processing can be ensured.
摘要翻译：真空处理装置具有：真空处理槽; 第一气体导入部，被构造成使得自由基状态的第一处理气体被引入到真空处理槽中并被引导到半导体晶片; 以及第二气体导入部，其被构造成使得与第一处理气体反应的第二处理气体被引入到真空处理槽中并被引导到半导体晶片。第二气体导入部具有设置在为第一气体导入部设置的导入管的任一侧的位置的两个喷淋喷嘴。根据该真空处理装置，可以实现多个处理对象的高速处理。此外，可以确保处理后的加工对象的面内均匀性。

10. 发明授权

US07670676B2 Pharmaceutical raw material 有权
标题翻译：制药原料
公开(公告)号：US07670676B2
公开(公告)日：2010-03-02
申请号：US11451597
申请日：2006-06-13
申请人： Nanao Horiishi , Toshiyuki Hakata , Hirofumi Kawasaki , Shinji Uemoto , Hiromitsu Misawa , Seiichi Takahashi
发明人： Nanao Horiishi , Toshiyuki Hakata , Hirofumi Kawasaki , Shinji Uemoto , Hiromitsu Misawa , Seiichi Takahashi
IPC分类号： B32B19/00 , B32B5/16
CPC分类号： H01F1/344 , A61K49/1809 , B82Y5/00 , H01F1/0054 , Y10T428/29 , Y10T428/2927 , Y10T428/2982
摘要： There are provided a pharmaceutical raw material capable of exhibiting a uniform functionality and producing magnetic particle-containing drugs for diagnosis and medical treatments with a high reproducibility. The pharmaceutical raw material comprises a monodisperse colloid sterile aqueous solution of magnetic iron oxide fine particles having an average particle diameter of 5 to 30 nm, a saturation magnetization of 50 to 90 Am2/kg and a coercive force of 0.1 to 1.6 kA/m. The pharmaceutical raw material can be produced by forming magnetic iron oxide fine particles in the form of a colloid aqueous solution, purifying the resultant colloid aqueous solution of superparamagnetic iron oxide particles by water-washing and removing water-soluble salts by-produced upon the reaction from the reaction solution by an ordinary method, and replacing a dispersing medium of the purified colloid aqueous solution with ultrapure water.
摘要翻译：提供能够显示均匀功能性并且以高再现性产生用于诊断和医疗的磁性颗粒药物的药用原料。药物原料包含平均粒径为5〜30nm，饱和磁化强度为50〜90Am 2 / kg，矫顽力为0.1〜1.6kA / m的磁性氧化铁微粒的单分散胶体无菌水溶液。药物原料可以通过形成胶体水溶液形式的磁性氧化铁细颗粒来制造，通过水洗净化所得到的超顺磁性氧化铁颗粒的胶体水溶液，并除去反应后副产的水溶性盐通过常规方法从反应溶液中，用超纯水代替纯化的胶体水溶液的分散介质。

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