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    • 10. 发明授权
    • Electronic components having high-frequency elements and methods of
manufacture therefor
    • 具有高频元件的电子部件及其制造方法
    • US5747857A
    • 1998-05-05
    • US182561
    • 1994-01-18
    • Kazuo EdaYutaka TaguchiAkihiro KanaboshiTetsuyoshi Ogura
    • Kazuo EdaYutaka TaguchiAkihiro KanaboshiTetsuyoshi Ogura
    • H01L27/20H03B5/04H03B5/36H03H3/02H03H9/02H03H9/05H03H9/10H03H9/17H03H9/19H03H9/54H03H9/56H01L41/10H01L41/08
    • H01L27/20H03B5/368H03H3/02H03H9/02102H03H9/02133H03H9/0542H03H9/1021H03H9/174H03H9/19H03H9/545H03H9/562H03H9/564H03B5/04
    • Integrated circuits utilizing piezoelectric elements can be advantageously constructed by bonding elements together via direct bonds. Such integrated circuits include an electro-acoustic hybrid integrated circuit such as a voltage controlled oscillator wherein a semiconductor substrate having an active element is bonded through direct bonding to a surface acoustic wave resonator or a quartz oscillator as an electro-acoustic element. A quartz device can also be provided which includes a quartz plate, excitation electrodes on opposite surfaces, and a holding member made of a material having a thermal expansion coefficient substantially equal to that of the quartz plate. The holding member is connected to the quartz plate by direct bonding without using any adhesives. Because the thermal expansion coefficients of the quartz plate and the holding member are equal, no thermal stress occurs in the bonding area. As a result, virtually no stress is applied to the quartz plate and the frequency-temperature characteristic can be improved. A piezoelectric filter according to the invention includes an oscillatory piezoelectric plate made of quartz, lithium tantalate, lithium niobate or lithium borate and having an oscillatory portion; a glass plate to which the piezoelectric plate is directly bonded; and first and second oscillatory electrode members which are provided on opposite faces of the oscillatory portion, respectively, such that at least one of the oscillatory electrode members is divided into a plurality of counter electrodes.
    • 利用压电元件的集成电路可以有利地通过直接结合将元件结合在一起而构成。 这种集成电路包括诸如压控振荡器的电声混合集成电路,其中具有有源元件的半导体衬底通过直接接合结合到表面声波谐振器或作为电声元件的石英振荡器。 还可以提供石英装置,其包括石英板,相对表面上的激励电极以及由具有基本上等于石英板的热膨胀系数的材料制成的保持构件。 保持构件通过直接接合而不使用任何粘合剂连接到石英板。 由于石英板和保持构件的热膨胀系数相等,所以在接合区域中不产生热应力。 结果,几乎没有对石英板施加应力,并且可以提高频率 - 温度特性。 根据本发明的压电滤波器包括由石英,钽酸锂,铌酸锂或硼酸锂制成并具有振荡部分的振荡压电板; 压电板直接接合的玻璃板; 以及第一和第二振荡电极部件,其分别设置在所述振荡部分的相对面上,使得所述振荡电极部件中的至少一个被分成多个对置电极。