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    • 7. 发明授权
    • Pattern defect analysis equipment, pattern defect analysis method and pattern defect analysis program
    • 图案缺陷分析设备,图案缺陷分析方法和图案缺陷分析程序
    • US08280148B2
    • 2012-10-02
    • US13349402
    • 2012-01-12
    • Norio SatouSusumu KoyamaMasashi SakamotoKenji Obara
    • Norio SatouSusumu KoyamaMasashi SakamotoKenji Obara
    • G06K9/00
    • G06T7/001G06T2207/10061G06T2207/30148
    • A data processing unit acquires a review image including a pattern defect on a substrate, compares the review image with a reference image thereby to extract a defect image, the reference image including no pattern defect, and performs an alignment between the review image and a self-layer design pattern image which is generated from design data belonging to the identical layer in a region corresponding to the review image. The data processing unit, then, based on result of the alignment, generates an another-layer design pattern image which is generated from design data belonging to another layer in the region corresponding to the review image, and, based on a synthesized image of the defect image and the another-layer design pattern image, determines the relative position relationship between the pattern defect and a pattern belonging to another layer, and judges the criticality based on the relative position relationship.
    • 数据处理单元获取在基板上包含图案缺陷的检查图像,将检查图像与参考图像进行比较,从而提取缺陷图像,该参考图像不包括图案缺陷,并且在检查图像与自身之间进行对准 在与检查图像相对应的区域中属于相同层的设计数据生成的层设计图案图像。 然后,数据处理单元基于对准的结果,生成从属于与检视图像对应的区域中的另一层的设计数据生成的另一层设计图案图像,并且基于合成图像 缺陷图像和另一层设计图案图像,确定图案缺陷和属于另一层的图案之间的相对位置关系,并且基于相对位置关系来判断临界度。
    • 8. 发明授权
    • Pattern search method
    • 模式搜索方式
    • US07941008B2
    • 2011-05-10
    • US11104632
    • 2005-04-13
    • Norio SatouAkiyuki SugiyamaOsamu KomuroSatoru Yamaguchi
    • Norio SatouAkiyuki SugiyamaOsamu KomuroSatoru Yamaguchi
    • G06K9/54
    • G06T7/001
    • According to the pattern search method of the present invention, detection of a detection image region relative to an observation image is performed by a pattern matching. An image whose size is substantially the same as that of the observation image is used as the detection image region. The detection image region is relatively displaced with reference to the observation image, thereby detecting a degree of similarity for a common region which is common to both of the region and the image. Displacement range of the detection image region is set in advance. If area of the common region is larger than a predetermined value, calculating the degree of similarity will be performed.
    • 根据本发明的图案搜索方法,通过图案匹配来执行相对于观察图像的检测图像区域的检测。 使用与观察图像基本相同的图像作为检测图像区域。 检测图像区域相对于观察图像相对移位,从而检测对于区域和图像两者共同的公共区域的相似度。 预先设定检测图像区域的位移范围。 如果公共区域的面积大于预定值,则将执行相似度的计算。
    • 9. 发明申请
    • PATTERN DEFECT ANALYSIS EQUIPMENT, PATTERN DEFECT ANALYSIS METHOD AND PATTERN DEFECT ANALYSIS PROGRAM
    • 图形缺陷分析设备,图形缺陷分析方法和图形缺陷分析程序
    • US20090180680A1
    • 2009-07-16
    • US12350783
    • 2009-01-08
    • Norio SatouSusumu KoyamaMasashi SakamotoKenji Obara
    • Norio SatouSusumu KoyamaMasashi SakamotoKenji Obara
    • G06K9/00
    • G06T7/001G06T2207/10061G06T2207/30148
    • A data processing unit acquires a review image including a pattern defect on a substrate, compares the review image with a reference image thereby to extract a defect image, the reference image including no pattern defect, and performs an alignment between the review image and a self-layer design pattern image which is generated from design data belonging to the identical layer in a region corresponding to the review image. The data processing unit, then, based on result of the alignment, generates an another-layer design pattern image which is generated from design data belonging to another layer in the region corresponding to the review image, and, based on a synthesized image of the defect image and the another-layer design pattern image, determines the relative position relationship between the pattern defect and a pattern belonging to another layer, and judges the criticality based on the relative position relationship.
    • 数据处理单元获取在基板上包含图案缺陷的检查图像,将检查图像与参考图像进行比较,从而提取缺陷图像,该参考图像不包括图案缺陷,并且在检查图像和自身之间进行对准 在与检查图像相对应的区域中属于相同层的设计数据生成的层设计图案图像。 然后,数据处理单元基于对准的结果,生成从属于与检视图像对应的区域中的另一层的设计数据生成的另一层设计图案图像,并且基于合成图像 缺陷图像和另一层设计图案图像,确定图案缺陷和属于另一层的图案之间的相对位置关系,并且基于相对位置关系来判断临界度。