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    • 3. 发明授权
    • Method of synthesizing hard material
    • 硬质材料的合成方法
    • US5436036A
    • 1995-07-25
    • US79105
    • 1993-06-17
    • Hiromu ShiomiNaoji FujimoriNobuhiro OtaTakahiro Imai
    • Hiromu ShiomiNaoji FujimoriNobuhiro OtaTakahiro Imai
    • C23C16/27C23C16/34C23C16/511B05D3/06
    • C23C16/274C23C16/277C23C16/342C23C16/511
    • A method of vapor-phase synthesizing a hard material use a raw material gas supplied into a reaction tube (6) while irradiating a region of the reaction tube (6) with microwaves (18) of a prescribed frequency for causing a synthesizing reaction to produce the hard material along a prescribed direction, by a plasma generation. In the reaction tube (6), at least two plate electrodes (17a, 17b, 19a, 19b) are oppositely arranged in parallel vertically to electric fields of the microwaves (18), so that the plasma is excited between the plate electrodes (17a, 17b, 19a, 19b) for vapor-phase synthesizing the hard material. The microwaves (18) of high electric power are introduced into the reaction tube (6) through a waveguide (5) without loss, so that strong electric fields can be homogeneously and stably distributed between the opposite plate electrodes.
    • 气相合成硬质材料的方法使用供给反应管(6)的原料气体,同时用规定频率的微波(18)向反应管(6)的区域照射,从而产生合成反应 通过等离子体产生沿规定方向的硬质材料。 在反应管(6)中,至少两个平板电极(17a,17b,19a,19b)在与微波(18)的电场垂直的方向上相互平行地排列,使得等离子体在平板电极(17a) ,17b,19a,19b),用于气相合成硬质材料。 高功率的微波(18)通过波导(5)而不损耗地引入反应管(6),使得强电场能够均匀稳定地分布在相对的板电极之间。