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1. 发明申请

US20050254024A1 Lithographic apparatus and device manufacturing method 有权
标题翻译：平版印刷设备和器件制造方法
公开(公告)号：US20050254024A1
公开(公告)日：2005-11-17
申请号：US10842634
申请日：2004-05-11
申请人： Hendrikus Marie Van Greevenbroek , Hendrikus Ludovicus Van Dijck , Christian Wagner , Laurentius Jorritsma
发明人： Hendrikus Marie Van Greevenbroek , Hendrikus Ludovicus Van Dijck , Christian Wagner , Laurentius Jorritsma
IPC分类号： G03F7/20 , G03B27/52 , H01L21/027
CPC分类号： G03F7/70891 , G03F7/70133
摘要： A lithographic apparatus includes an instrument for determining the radiation intensity distribution at a pupil plane of the projection system while a patterning device is imparting the projection beam with a pattern, a calculation apparatus for calculating the effect on the imaging by the projection system of heating resulting from the projection beam in the projection system having the determined intensity distribution and a controller for adjusting the lithographic apparatus to compensate for the calculated effect of heating.
摘要翻译：光刻设备包括用于确定投影系统的光瞳平面处的辐射强度分布的仪器，同时图案形成装置将投影光束赋予图案;计算装置，用于计算投影系统对成像的影响，从而产生加热从具有确定的强度分布的投影系统中的投影光束和用于调节光刻设备的控制器来补偿计算出的加热效果。

2. 发明申请

US20140218706A1 RADIATION SOURCE AND LITHOGRAPHIC APPARATUS 审中-公开
标题翻译：辐射源和光刻设备
公开(公告)号：US20140218706A1
公开(公告)日：2014-08-07
申请号：US14241370
申请日：2012-07-27
申请人： Christian Wagner , Erik Roelof Loopstra
发明人： Christian Wagner , Erik Roelof Loopstra
IPC分类号： G03F7/20 , H05G2/00
CPC分类号： G03F7/70058 , G03F7/70025 , G03F7/70033 , H01S3/08009 , H01S3/0804 , H01S3/08059 , H01S3/105 , H01S3/123 , H01S3/2232 , H05G2/006 , H05G2/008
摘要： A radiation source comprises a nozzle configured to direct a stream of fuel droplets (400) along a trajectory towards a plasma formation location and a laser configured to direct laser radiation to the plasma formation location to convert the fuel droplets at the plasma formation location into a plasma. The laser comprises an amplifier (310, 320) and an optical element (500) configured to define a divergent beam path for radiation passing through the amplifier.
摘要翻译：辐射源包括喷嘴，其构造成沿着等离子体形成位置的轨迹引导燃料液滴流（400），并且配置成将激光辐射引导到等离子体形成位置以将等离子体形成位置处的燃料液滴转换成等离子体形成位置等离子体。激光器包括放大器（310,320）和光学元件（500），其被配置为限定用于通过放大器的辐射的发散光束路径。

3. 发明授权

US08002540B2 Neck block cooling 有权
标题翻译：颈部冷却
公开(公告)号：US08002540B2
公开(公告)日：2011-08-23
申请号：US12223565
申请日：2006-11-28
申请人： Witold Neter , Marek Hoenisch , Klaus Wegmann , Stefan Schweininger , Christian Wagner
发明人： Witold Neter , Marek Hoenisch , Klaus Wegmann , Stefan Schweininger , Christian Wagner
IPC分类号： B29C45/73
CPC分类号： B29C45/7312 , B29C33/04 , B29C45/33 , B29C2033/042 , B29K2105/253
摘要： A neck block of a molding tool for the production of a hollow body preform by means of injection molding, wherein the neck block has a main body with a shaping surface which is adapted to the external contour of a neck portion of the hollow body preform to be produced and is provided to come into contact in the injection molding operation with the neck portion of the hollow body preform, wherein furthermore there is provided at least one cooling passage for a cooling fluid which at least portion-wise extends substantially parallel to the shaping surface. The neck block is further provided with an inlet and an outlet and an inlet passage and an outlet passage which connect the inlet and the outlet respectively to the cooling passage. The cooling passage is arranged closer to the shaping surface than the inlet and the outlet. The cooling passage has at least one portion which extends substantially parallel to the shaping surface and which extends within the main body so that the walls thereof are formed by the main body, and a connecting portion which adjoins said portion and the walls of which are formed in part by the main body and in part by a closure element fitted onto the main body.
摘要翻译：一种用于通过注射成型生产中空体预制件的模制工具的颈部块，其中颈部块具有主体，该主体具有适于中空体预制件的颈部的外部轮廓的成形表面，被制造并且在注射成型操作中与中空本体预制件的颈部接触，此外还设置有至少一个用于冷却流体的冷却通道，该冷却通道至少部分地基本上平行于成形表面。颈部还设置有入口和出口以及将入口和出口分别连接到冷却通道的入口通道和出口通道。冷却通道布置成比入口和出口更靠近成形表面。冷却通道具有至少一部分，其基本上平行于成形表面延伸并且在主体内延伸，使得其壁由主体形成，并且连接部分邻接所述部分和壁的形成部分地由主体部分地由安装在主体上的封闭元件构成。

4. 发明申请

US20090162473A1 Neck Block Cooling 有权
标题翻译：颈部冷却
公开(公告)号：US20090162473A1
公开(公告)日：2009-06-25
申请号：US12223565
申请日：2006-11-28
申请人： Witold Neter , Marek Hoenisch , Klaus Wegmann , Stefan Schweininger , Christian Wagner
发明人： Witold Neter , Marek Hoenisch , Klaus Wegmann , Stefan Schweininger , Christian Wagner
IPC分类号： B29C45/17
CPC分类号： B29C45/7312 , B29C33/04 , B29C45/33 , B29C2033/042 , B29K2105/253
摘要： A neck block of a moulding tool for the production of a hollow body preform by means of injection moulding, wherein the neck block has a main body with a shaping surface which is adapted to the external contour of a neck portion of the hollow body preform to be produced and is provided to come into contact in the injection moulding operation with the neck portion of the hollow body preform, wherein furthermore there is provided at least one cooling passage for a cooling fluid which at least portion-wise extends substantially parallel to the shaping surface. The neck block is further provided with an inlet and an outlet and an inlet passage and an outlet passage which connect the inlet and the outlet respectively to the cooling passage. The cooling passage is arranged closer to the shaping surface than the inlet and the outlet. The cooling passage has at least one portion which extends substantially parallel to the shaping surface and which extends within the main body so that the walls thereof are formed by the main body, and a connecting portion which adjoins said portion and the walls of which are formed in part by the main body and in part by a closure element fitted onto the main body.
摘要翻译：一种用于通过注射成型生产中空体预制件的模制工具的颈部块，其中颈部块具有主体，该主体具有适于中空体预制件的颈部的外部轮廓的成形表面，被制造并且在注射成型操作中与中空本体预制件的颈部接触，此外还设置有至少一个用于冷却流体的冷却通道，该冷却通道至少部分地基本上平行于成形表面。颈部还设置有入口和出口以及将入口和出口分别连接到冷却通道的入口通道和出口通道。冷却通道布置成比入口和出口更靠近成形表面。冷却通道具有至少一部分，其基本上平行于成形表面延伸并且在主体内延伸，使得其壁由主体形成，并且连接部分邻接所述部分和壁的形成部分地由主体部分地由安装在主体上的封闭元件构成。

5. 发明申请

US20090022780A1 HYDROGEL 审中-公开
公开(公告)号：US20090022780A1
公开(公告)日：2009-01-22
申请号：US12278036
申请日：2007-01-31
申请人： Sabine Scherer , Christian Wagner , Christian Leuner , Wolfgang Fleischer
发明人： Sabine Scherer , Christian Wagner , Christian Leuner , Wolfgang Fleischer
IPC分类号： A61L15/00 , A61K9/14 , A61K9/127 , A61K31/16 , A61K33/38 , A61K33/02 , A61P43/00 , A61K33/28 , A61K33/00 , A61K31/415 , A61K31/01
CPC分类号： A61L15/24 , A61L15/44 , A61L26/0014 , A61L26/008 , C08L33/02
摘要： The invention is related to gel preparations capable of absorbing as well as releasing liquid, and the use of such gel preparations in the treatment of wounds.
摘要翻译：本发明涉及能够吸收以及释放液体的凝胶制剂，以及这些凝胶制剂在伤口治疗中的用途。

6. 发明申请

US20080212052A1 OPTICAL ARRANGEMENT AND PROJECTION EXPOSURE SYSTEM FOR MICROLITHOGRAPHY WITH PASSIVE THERMAL COMPENSATION 审中-公开
标题翻译：具有被动热补偿的微电脑的光学布置和投影曝光系统
公开(公告)号：US20080212052A1
公开(公告)日：2008-09-04
申请号：US12119693
申请日：2008-05-13
申请人： Christian Wagner , Michael Trunz , Ralf Hilgers
发明人： Christian Wagner , Michael Trunz , Ralf Hilgers
IPC分类号： G03B27/52
CPC分类号： G03F7/70825 , G02B7/028 , G03F7/70108 , G03F7/70241 , G03F7/70358
摘要： An optical arrangement with a light source includes an optical element that is fastened in a mount. The light source emits radiation and the optical element is acted on thereby such that the heat that results lacks symmetry corresponding to the shape of the optical element. A connecting structure is provided between the optical element and the mount and has a symmetry that does not correspond to the shape of the optical element and effects an at least partial homogenization of the temperature distribution in the optical element.
摘要翻译：具有光源的光学装置包括紧固在安装座中的光学元件。光源发射辐射，并且光学元件被作用在其上，使得导致对应于光学元件的形状的对称性的热量。在光学元件和安装座之间提供了连接结构，并且具有与光学元件的形状不对应的对称性，并且使光学元件中的温度分布至少部分均匀化。

7. 发明申请

US20080143992A1 Polarized radiation in lithographic apparatus and device manufacturing method 有权
公开(公告)号：US20080143992A1
公开(公告)日：2008-06-19
申请号：US12010819
申请日：2008-01-30
申请人： Christian Wagner , Wilhelmus Petrus De Boeij , Roel De Jonge , Tilmann Heil , Damian Fiolka
发明人： Christian Wagner , Wilhelmus Petrus De Boeij , Roel De Jonge , Tilmann Heil , Damian Fiolka
IPC分类号： G03B27/72
CPC分类号： G03F7/70566 , G03F7/70083 , G03F7/70125 , G03F7/70883 , G03F9/7065
摘要： A lithographic apparatus uses polarized light to improve the imaging properties such as exposure latitude, while maintaining and extending the lifetime of an illumination system in a lithographic apparatus.

8. 发明授权

US07312852B2 Polarized radiation in lithographic apparatus and device manufacturing method 有权
标题翻译：光刻设备中的极化辐射和器件制造方法
公开(公告)号：US07312852B2
公开(公告)日：2007-12-25
申请号：US11022938
申请日：2004-12-28
申请人： Christian Wagner , Wilhelmus Petrus De Boeij , Tilmann Heil , Damian Fiolka
发明人： Christian Wagner , Wilhelmus Petrus De Boeij , Tilmann Heil , Damian Fiolka
IPC分类号： G03B27/72
CPC分类号： G03F7/70566 , G03F7/70091 , G03F7/70191
摘要： A lithographic apparatus uses polarized light to improve the imaging properties, such as exposure latitude, while maintaining and extending the lifetime of an illumination system in the lithographic apparatus.
摘要翻译：光刻设备使用偏振光来改善诸如曝光宽容度的成像特性，同时保持和延长光刻设备中照明系统的寿命。

9. 发明申请

US20070148280A1 Mold cavity structure 审中-公开
标题翻译：模腔结构
公开(公告)号：US20070148280A1
公开(公告)日：2007-06-28
申请号：US10579993
申请日：2004-11-05
申请人： Marek Hönisch , Christian Wagner , Klaus Wegmann
发明人： Marek Hönisch , Christian Wagner , Klaus Wegmann
IPC分类号： B29C45/00
CPC分类号： B29C33/76 , B29C45/0025 , B29C45/2673 , B29C45/34 , B29C45/36 , B29C45/43 , B29C2045/0034 , B29K2105/253
摘要： A mold for the production of hollow moldings, wherein the mold has a mold space (5), within a cavity (1) having an inner contour corresponding at least in sections to an outer contour of a molding to be produced and the mold has a core (2)within the cavity, the outer contour of which corresponds at least in sections to an inner contour of the molding to be produced, and a supporting ring (3) which at least partially surrounds the core (2) when the mold cavity is closed, wherein the supporting ring (3) has an inner cone (9) and the core (2) a corresponding outer cone (8), which are formed such that at least when the mold cavity is closed, the inner cone (9) of the supporting ring (3) comes into contact with the outer cone (8) of the core (2), wherein neither the inner cone (9) of the supporting ring (3) nor the outer cone (8) of the core (2) directly adjoins the mold space (5). The invention also includes a core and supporting ring for use with the mold.
摘要翻译：一种用于生产中空模制品的模具，其中所述模具具有模具空间（5），所述模具空间（5）在具有内部轮廓的空腔（1）内，所述内部轮廓至少部分对应于待生产的模制件的外部轮廓，并且所述模具具有所述模腔内的所述芯体（2）至少部分地对应于待生产的模制品的内部轮廓，并且所述支撑环（3）至少部分地围绕所述模芯（2）封闭，其中所述支撑环（3）具有内圆锥体（9）和所述芯体（2）相应的外圆锥体（8），其形成为使得至少当所述模腔封闭时，所述内锥体（9）支撑环（3）的外圆锥体（8）与芯部（2）的外圆锥体（8）接触，其中支撑环（3）的内圆锥体（9）（2）直接邻接模具空间（5）。本发明还包括用于模具的芯和支撑环。

10. 发明申请

US20060263466A1 Cooling system for the cooling of tool pieces 有权
公开(公告)号：US20060263466A1
公开(公告)日：2006-11-23
申请号：US10545188
申请日：2004-02-10
申请人： Manfred Lausenhammer , Christian Wagner
发明人： Manfred Lausenhammer , Christian Wagner
IPC分类号： B29C45/00
CPC分类号： B29C45/7207 , B29C45/73 , B29C49/6427 , B29C2033/042 , B29C2045/725
摘要： A cooling system for cooling tool parts. The system includes at least one base system including a fluid guided from a fluid inlet through connector lines to a fluid outlet. The tool parts are connected in the direction of through-flow between at least one connector line connected to the fluid inlet and at least one connected to the fluid outlet, wherein, between the at least one connector line connected to the fluid inlet and the at least one connector line connected to the fluid outlet, at least one additional connector line and tool parts which are in flow communication therewith are placed in between such that, on its flow path, the fluid flows through at least two tool parts one after the other.

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