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    • 4. 发明申请
    • Plasma nitriding method
    • 等离子氮化方法
    • US20050196973A1
    • 2005-09-08
    • US11071246
    • 2005-03-04
    • Nobumasa SuzukiHideo Kitagawa
    • Nobumasa SuzukiHideo Kitagawa
    • H01L21/318H01L21/4763
    • H01L21/0214H01L21/02332H01L21/0234H01L21/3105H01L21/3115
    • Disclosed is a plasma nitriding method by which an ultra-thin oxide-nitride film having a half-value depth of not greater than 0.8 nm can be produced, overcoming various inconveniences involved in conventional plasma nitriding methods. In one preferred form of the present invention, the plasma nitriding method includes the steps of introducing a substrate to be processed, into a reaction chamber, evacuating the reaction chamber, supplying a gas containing nitrogen atoms, into the reaction chamber at a predetermined flow rate, adjusting an exhaust conductance to maintain a predetermined pressure inside the reaction chamber, and applying an electric voltage into the reaction chamber to produce plasma to thereby cause nitriding of the surface of the substrate, wherein the gas further contains hydrogen atoms, wherein the predetermined pressure is not less than 2 Torr, and wherein a spacing between the substrate and a densest portion of the plasma is not less than 75 nm.
    • 公开了一种等离子体氮化方法,其可以生产半值深度不大于0.8nm的超薄氧化物氮化物膜,以克服常规等离子体氮化方法中涉及的各种不便。 在本发明的一个优选形式中,等离子体氮化方法包括以下步骤:将预处理的基材以预定的流速引入反应室,将反应室抽空,将含有氮原子的气体供给反应室 调节排气电导以维持反应室内的预定压力,并向反应室施加电压以产生等离子体,从而导致衬底表面渗氮,其中气体还含有氢原子,其中预定压力 不小于2Torr,并且其中衬底和等离子体最稠密部分之间的间隔不小于75nm。
    • 8. 发明授权
    • Vehicle wheel alignment measuring apparatus
    • 车轮对准测量仪
    • US06657711B1
    • 2003-12-02
    • US09603593
    • 2000-06-26
    • Hideo KitagawaHiroshi Takagi
    • Hideo KitagawaHiroshi Takagi
    • G01B1126
    • G01B11/2755G01B2210/14G01B2210/22G01B2210/286
    • An apparatus for measuring the dynamic characteristics of the vehicle wheel alignment in non-contact fashion with high accuracy is disclosed. A laser light source (4) emits a laser beam of a predetermined geometric pattern toward the wheel side surface. A laser beam control device (6) controls the width of the laser beam in such a manner as to be radiated only in a predetermined range of the wheel side surface. Two laser light sources (120), (121) emit non-parallel laser beams. A photdetecting device (122) receives the two laser beams and converts them to two corresponding image data. A processing unit calculates the distance between the two images based on the two image data and calculates the wheel alignment based on the same distance.
    • 公开了一种用于以非接触方式高精度地测量车轮对准的动态特性的装置。 激光光源(4)朝向轮侧表面发射预定几何图案的激光束。 激光束控制装置(6)以仅在轮侧表面的预定范围内辐射的方式控制激光束的宽度。 两个激光源(120),(121)发射非平行激光束。 光检测装置(122)接收两个激光束并将其转换成两个对应的图像数据。 处理单元基于两个图像数据计算两个图像之间的距离,并且基于相同的距离计算车轮对准。