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1. 发明授权

US06176979B1 Method of manufacturing an object in a vacuum recipient 有权
标题翻译：在真空接收器中制造物体的方法
公开(公告)号：US06176979B1
公开(公告)日：2001-01-23
申请号：US09314333
申请日：1999-05-19
申请人： Hans Signer , Eduard K{umlaut over (u)}gler , Klaus Wellerdieck , Helmut Rudigier , Walter Haag
发明人： Hans Signer , Eduard K{umlaut over (u)}gler , Klaus Wellerdieck , Helmut Rudigier , Walter Haag
IPC分类号： C23C1434
CPC分类号： H01J37/32431 , C23C14/32 , C23C14/54 , H01J2237/0206
摘要： A method of manufacturing an object in a vacuum treatment apparatus having a vacuum recipient for containing an atmosphere, includes the steps of supporting a substrate on a work piece carrier arrangement in the recipient and treating the substrate to manufacture the object in the vacuum recipient. The treating process includes generating electrical charge carriers in the atmosphere and in the recipient which are of the type that form electrically insulating material and providing at least two electroconductive surfaces in the recipient. Power, such as a DC signal, is supplied to at least one of the electroconductive surfaces so that at least one of the electroconductive surfaces receives the electrically insulating material for covering at least part of that electroconductive surface. This causes electrical isolation of that electroconductive surface which leads to arcing and damage to the object. A control signal is applied to the electroconductive surfaces during repeating and alternating first time spans and second time spans, for prevent arcing at the part of the electroconductive surfaces which is, or is becoming electrically isolated from the atmosphere by being covered by the electrical charge carriers.
摘要翻译：在具有用于容纳大气的真空接收器的真空处理装置中制造物体的方法包括以下步骤：将基板支撑在接收器中的工件载体装置上，并处理基板以在真空接收器中制造物体。处理方法包括在大气中和接收体中产生形成电绝缘材料并在接受体中提供至少两个导电表面的类型的电荷载体。诸如DC信号的功率被提供给至少一个导电表面，使得至少一个导电表面接收用于覆盖该导电表面的至少一部分的电绝缘材料。这导致该导电表面的电隔离，这导致对物体的电弧和损坏。在重复和交替的第一时间跨度和第二时间跨度期间，控制信号被施加到导电表面，以防止电导体表面的部分电弧通过被电荷载体覆盖或正在与大气电隔离。

2. 发明授权

US6149783A Vacuum treatment apparatus 有权
标题翻译：真空处理设备
公开(公告)号：US6149783A
公开(公告)日：2000-11-21
申请号：US314833
申请日：1999-05-19
申请人： Hans Signer , Eduard Kugler , Klaus Wellerdieck , Helmut Rudigier , Walter Haag
发明人： Hans Signer , Eduard Kugler , Klaus Wellerdieck , Helmut Rudigier , Walter Haag
IPC分类号： C23C14/32 , C23C14/54 , C23C16/50 , C23C16/52 , C23F4/00 , H01J37/32 , C23C14/34
CPC分类号： H01J37/32431 , C23C14/32 , C23C14/54 , H01J2237/0206
摘要： A vacuum treatment apparatus (FIG. 13) includes a vacuum recipient or chamber (3) for containing an atmosphere. A mechanism (50,52) for generating electrical charge carriers in the atmosphere is provided in the recipient, the electrical charge carriers being of the type that form electrically isolating material. The recipient also contains a work piece carrier arrangement (1) and at least two electroconductive surfaces (2a, 2b) which are mutually electrically isolated from each other. A DC power supply (8) is operationally connected to the electroconductive surfaces by respective electrical conductors with an inductor (L.sub.66) in one of the conductors. A parallel switching arrangement is connected between the electrical conductors to control a current path between the conductors.
摘要翻译：真空处理装置（图13）包括用于容纳气氛的真空接收器或室（3）。在接收器中设置用于在大气中产生电荷载体的机构（50,52），电荷载体是形成电隔离材料的类型。接收器还包括彼此电隔离的工件载体布置（1）和至少两个导电表面（2a，2b）。直流电源（8）通过在一个导体中的电感器（L66）的相应电导体可操作地连接到导电表面。在电导体之间连接并联开关装置，以控制导体之间的电流路径。

3. 发明授权

US5948224A Method of controlling a treatment process and vacuum treatment apparatus 失效
标题翻译：控制处理方法和真空处理装置
公开(公告)号：US5948224A
公开(公告)日：1999-09-07
申请号：US887091
申请日：1997-07-02
申请人： Hans Signer , Eduard Kugler , Klaus Wellerdieck , Helmut Rudigier , Walter Haag
发明人： Hans Signer , Eduard Kugler , Klaus Wellerdieck , Helmut Rudigier , Walter Haag
IPC分类号： C23C14/32 , C23C14/54 , C23C16/50 , C23C16/52 , C23F4/00 , H01J37/32 , C23C14/34
CPC分类号： H01J37/32431 , C23C14/32 , C23C14/54 , H01J2237/0206
摘要： A vacuum treatment apparatus eliminate arcing in a vacuum recipient for containing an atmosphere and having a mechanism for generating electrical charge carriers in the atmosphere. A workpiece carrier arrangement and at least two electro-conductive surfaces are in the recipient and a generator unit having an output is connected to the electro-conductive surfaces. The generator includes a DC generator with an output, and a controlled adjusting unit with an input connected to the output of the DC generator. The controlled adjusting unit generates a first output signal in dependency on an output signal of the DC generator during first timespans, and a second output signal during second timespans. The unit may also have a time-controlled discharge or charge current loop connected from one of the electro-conductive surfaces to the other, with a higher ohmic resistance during the first timespans and a lower ohmic resistance during the second timespans.
摘要翻译：真空处理装置消除真空接收器中的电弧，以容纳气氛并具有在大气中产生电荷载体的机构。工件载体装置和至少两个导电表面在接收器中，并且具有输出的发生器单元连接到导电表面。发电机包括具有输出的直流发电机和受控调节单元，输入端连接到直流发电机的输出端。受控调节单元根据第一时间段内的DC发生器的输出信号产生第一输出信号，并且在第二时间段期间产生第二输出信号。该单元还可以具有时间控制的放电或充电电流环路，从一个导电表面连接到另一个导电表面，在第一次时间段期间具有较高的欧姆电阻，并且在第二次倍数期间具有较低的欧姆电阻。

4. 发明授权

US06878248B2 Method of manufacturing an object in a vacuum recipient 失效
标题翻译：在真空接收器中制造物体的方法
公开(公告)号：US06878248B2
公开(公告)日：2005-04-12
申请号：US10388542
申请日：2003-03-17
申请人： Hans Signer , Eduard Kügler , Klaus Wellerdieck , Helmut Rudigier , Walter Haag
发明人： Hans Signer , Eduard Kügler , Klaus Wellerdieck , Helmut Rudigier , Walter Haag
IPC分类号： C23C14/32 , C23C14/54 , C23C16/50 , C23C16/52 , C23F4/00 , H01J37/32 , C23C14/34
CPC分类号： H01J37/32431 , C23C14/32 , C23C14/54 , H01J2237/0206
摘要： A method of manufacturing an object in a vacuum treatment apparatus having a vacuum recipient for containing an atmosphere, includes the steps of supporting a substrate on a work piece carrier arrangement in the recipient and treating the substrate to manufacture the object in the vacuum recipient. The treating process includes generating electrical charge carriers in the atmosphere and in the recipient which are of the type that form electrically insulating material and providing at least two electroconductive surfaces in the recipient. Power, such as a DC signal, is supplied to at least one of the electroconductive surfaces so that at least one of the electroconductive surfaces receives the electrically insulating material for covering at least part of that electroconductive surface. This causes electrical isolation of that electroconductive surface which leads to arcing and damage to the object. A control signal is applied to the electroconductive surfaces during repeating and alternating first time spans and second time spans, for prevent arcing at the part of the electroconductive surfaces which is, or is becoming electrically isolated from the atmosphere by being covered by the electrical charge carriers.
摘要翻译：在具有用于容纳大气的真空接收器的真空处理装置中制造物体的方法包括以下步骤：将基板支撑在接收器中的工件载体装置上，并处理基板以在真空接收器中制造物体。处理方法包括在大气中和接收体中产生形成电绝缘材料并在接受体中提供至少两个导电表面的类型的电荷载体。诸如DC信号的功率被提供给至少一个导电表面，使得至少一个导电表面接收用于覆盖该导电表面的至少一部分的电绝缘材料。这导致该导电表面的电隔离，这导致对物体的电弧和损坏。在重复和交替的第一时间跨度和第二时间跨度期间，控制信号被施加到导电表面，以防止电导体表面的部分电弧通过被电荷载体覆盖或正在与大气电隔离。

5. 发明授权

US06934432B1 Switch for the optical switching of a light path 失效
标题翻译：切换光路的光学切换
公开(公告)号：US06934432B1
公开(公告)日：2005-08-23
申请号：US09594170
申请日：2000-06-15
申请人： Helmut Rudigier
发明人： Helmut Rudigier
IPC分类号： G02B6/35 , G02B5/08 , G02B7/182 , G02B26/08
CPC分类号： G02B6/3514 , G02B6/3546
摘要： A switch for the optical switching of a light path, particularly for switching the entering of light into a fiber-optical light guide is provided. The switch dial has at least one mirror surface for reflecting the light and, for establishing the mirror surface, a support is equipped with a reflective layer, which support is constructed as a glass body.
摘要翻译：提供用于光路的光学切换的开关，特别是用于将光的入射切换到光纤光导中。开关拨盘具有至少一个用于反射光的镜面，并且为了建立镜面，支撑件配备有反射层，该支撑构造为玻璃体。

6. 发明授权

US06804445B2 Waveguide and process for the production thereof 失效
标题翻译：波导及其制作方法
公开(公告)号：US06804445B2
公开(公告)日：2004-10-12
申请号：US10457852
申请日：2003-06-10
申请人： Johannes Edlinger , Helmut Rudigier
发明人： Johannes Edlinger , Helmut Rudigier
IPC分类号： G02B613
CPC分类号： G02B6/1221 , G02B6/122 , G02B6/13
摘要： A method for manufacturing an optical waveguide includes shaping a substrate of organic material, applying at least one intermediate layer by a first vacuum coating process onto the substrate and applying a waveguide layer by means of a second vacuum coated process onto the intermediate layer. The at least one intermediate layer is applied so that only a negligible part of light energy reaches an interface surface between the intermediate layer and the substrate.
摘要翻译：一种光波导的制造方法，包括使有机材料的基板成形，通过第一真空镀膜法将至少一个中间层涂布在基板上，并通过第二真空镀膜工艺将波导层施加到中间层上。施加至少一个中间层，使得只有可忽略的部分光能到达中间层和基底之间的界面。

7. 发明授权

US5675691A Diffraction gratings in optical waveguide components and production method thereof 失效
$Diffraction gratings in optical waveguide components and production method thereof$
标题翻译：光波导部件中的衍射光栅及其制造方法
公开(公告)号：US5675691A
公开(公告)日：1997-10-07
申请号：US570161
申请日：1995-12-11
申请人： Johannes Edlinger , Helmut Rudigier
发明人： Johannes Edlinger , Helmut Rudigier
IPC分类号： G02B5/18 , B23K26/00 , B23K26/06 , B23K26/073 , G02B6/122 , G02B6/13 , G02B6/124
CPC分类号： G02B6/13
摘要： A diffraction grating structure for coupling light into or out of a high refractive index waveguide layer on a carrier substrate is formed by irradiating the carrier substrate and/or the layer with UV laser light that is subject to simultaneous, spatially periodic intensity modulation. The modulation may be achieved, for example, by a biprism. The modulated UV light has the effect of periodically modulating the local refractive index of the waveguide layer or of the surface of the substrate to form the diffraction grating.
摘要翻译：通过用经受同时空间周期性强度调制的UV激光照射载体衬底和/或层来形成用于将光耦合到载体衬底上的高折射率波导层的衍射光栅结构。调制可以例如通过双棱镜来实现。调制的UV光具有周期性地调制波导层或基板表面的局部折射率以形成衍射光栅的效果。

8. 发明授权

US5473468A Coated transparent substrate 失效
标题翻译：涂布透明基材
公开(公告)号：US5473468A
公开(公告)日：1995-12-05
申请号：US252576
申请日：1994-06-01
申请人： Helmut Rudigier , Reinhard Sperger
发明人： Helmut Rudigier , Reinhard Sperger
IPC分类号： B32B7/02 , B32B17/06 , B60J1/00 , C03C17/02 , C03C17/34 , C23C14/00 , C23C14/06 , G02B5/28 , F21V9/04 , G02B1/10 , G02B5/08
CPC分类号： G02B5/282 , C03C17/3435 , C23C14/0021 , C23C14/0641 , C23C14/0676 , Y10T428/24975
摘要： A coated wear resistant and transparent glass substrate has a multi-layer system with at least one layer of an oxynitride of one of hafnium, zirconium, tantalum and titanium, and with no metal layer. The substrate with multi-layer system has a reduced sun energy transmittance and anti-reflective effect in the visual spectral range.
摘要翻译：涂覆耐磨透明玻璃基板具有多层系统，其具有至少一层铪，锆，钽和钛之一的氧氮化物层，并且不具有金属层。具有多层系统的基板在视觉光谱范围内具有降低的太阳能透射率和抗反射效果。

9. 发明授权

US06610222B1 Waveguide and the process for production thereof 失效
标题翻译：波导及其生产工艺
公开(公告)号：US06610222B1
公开(公告)日：2003-08-26
申请号：US08751369
申请日：1996-11-19
申请人： Johannes Edlinger , Helmut Rudigier
发明人： Johannes Edlinger , Helmut Rudigier
IPC分类号： B29D1100
CPC分类号： G02B6/1221 , G02B6/122 , G02B6/13
摘要： Proposed is a waveguide which is formed on a substrate (2) of a polymer. For that purpose, provided between the substrate (2) and the waveguide layer (1) is an intermediate layer (8) of an inorganic material which prevents a substantial amount of energy from penetrating into the relatively highly absorbent polymer material. That minimizes the waveguide losses.
摘要翻译：提出了形成在聚合物的基底（2）上的波导。为此，提供在基板（2）和波导层（1）之间的是无机材料的中间层（8），其防止大量的能量渗透到相对高吸收性的聚合物材料中。这使波导损耗最小化。

10. 发明授权

US06342970B1 Dielectric interference filter system, LCD-display and CCD-arrangement as well as process for manufacturing a dielectric interference filter system and use of this process 失效
标题翻译：介质干涉滤波器系统，LCD显示器和CCD布置以及制造介质干涉滤波器系统的过程以及该过程的使用
公开(公告)号：US06342970B1
公开(公告)日：2002-01-29
申请号：US08789581
申请日：1997-01-28
申请人： Reinhard Sperger , Helmut Rudigier , Peter Wierer , Helmut Schoech
发明人： Reinhard Sperger , Helmut Rudigier , Peter Wierer , Helmut Schoech
IPC分类号： G02B110
CPC分类号： G02B5/201 , G02B5/285 , G02F1/133516 , G02F2001/133521 , Y10S359/90
摘要： A dielectric interference filter system with at least filter elements of different spectral characteristics on the same carrier substrate is provided. The filter elements have the same height and/or adjoin each other without gaps. The system is used for, inter alia, interference color filter systems in the form of an LCD-display or CCD-arrangement. A process for manufacturing the system includes preparing at least one filter element by coating and subsequent etching, and preparing at least one subsequent filter element by coating and subsequent structuring utilizing lift-off in which the etching mask is used as the lift-off mask.
摘要翻译：提供了一种至少在同一载体基板上具有不同光谱特性的滤光元件的介质干涉滤光系统。过滤元件具有相同的高度和/或彼此相邻而没有间隙。该系统尤其用于LCD显示器或CCD装置形式的干涉滤色器系统。一种用于制造该系统的方法包括通过涂覆和随后的蚀刻制备至少一个过滤元件，以及通过涂覆和随后的结构化制备至少一个随后的过滤元件，其中使用蚀刻掩模作为剥离掩模。

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