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    • 1. 发明授权
    • Device comprising a sensor module
    • 装置包括传感器模块
    • US07804165B2
    • 2010-09-28
    • US11913585
    • 2006-04-27
    • Hans M. B. BoeveTeunis J. IkkinkNicolaas J. A. Van Veen
    • Hans M. B. BoeveTeunis J. IkkinkNicolaas J. A. Van Veen
    • H01L23/12
    • H01L31/0203H01L27/14618H01L27/14634H01L27/14636H01L2924/0002H01L2924/00
    • A device (1) comprising a sensor module (2) with a package (3) is produced at reduced costs by providing the package (3) with two or more substrates (4,5) each with a functional layer (14,15), at least one sensor (24,25) such as a magnetometer and/or an accelerometer being located in at least one functional layer (14,15), and by providing the package (3) with a system comprising solder bumps (7-12) for aligning the functional layers (14,15). The system either comprises a first number of solder bumps (7,8) for coupling the functional layers (14,15) electrically and mechanically to each other via first bonding elements (31) or comprises a third substrate (6) with a third functional layer (16) and a second number of solder bumps (9,10) for coupling the first and third functional layers (14,16) electrically and mechanically to each other via second bonding elements (32) and a third number of solder bumps (11,12) for coupling the second and third functional layers (15,16) electrically and mechanically to each other via third bonding elements (33). Mechanically and/or electrically dummy solder bumps improve the alignment of the functional layers (14,15).
    • 通过为封装(3)提供两个或多个具有功能层(14,15)的基板(4,5),以降低的成本制造包括具有封装(3)的传感器模块(2)的装置(1) 至少一个传感器(24,25),例如磁力计和/或加速度计位于至少一个功能层(14,15)中,并且通过为包装(3)提供包括焊料凸块(7- 12),用于对准功能层(14,15)。 该系统还包括第一数量的焊料凸块(7,8),用于通过第一接合元件(31)将功能层(14,15)电和机械地彼此耦合,或包括具有第三功能层 层(16)和第二数量的焊料凸块(9,10),用于经由第二接合元件(32)和第三数量的焊料凸块(32)将第一和第三功能层(14,16)电和机械地彼此耦合 11,12),用于经由第三接合元件(33)将第二和第三功能层(15,16)电和机械地彼此耦合。 机械和/或电虚拟焊料凸起改善了功能层(14,15)的对准。