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    • 3. 发明授权
    • Methods for treating surfaces
    • 表面处理方法
    • US07749327B2
    • 2010-07-06
    • US11933770
    • 2007-11-01
    • Nishant SinhaGurtej S. Sandhu
    • Nishant SinhaGurtej S. Sandhu
    • B08B3/00B08B3/04
    • B08B3/10B08B7/02B24C3/322B24C7/0007H01L21/02052H01L21/02057H01L21/67051
    • Some embodiments include methods for treating surfaces. Beads and/or other insolubles may be dispersed within a liquid carrier to form a dispersion. A transfer layer may be formed across a surface. The dispersion may be directed toward the transfer layer, and the insolubles may impact the transfer layer. The impacting may generate force in the transfer layer, and such force may be transferred through the transfer layer to the surface. The surface may be a surface of a semiconductor substrate, and the force may be utilized to sweep contaminants from the semiconductor substrate surface. The transfer layer may be a liquid, and in some embodiments may be a cleaning solution.
    • 一些实施方案包括用于处理表面的方法。 珠和/或其他不溶物可以分散在液体载体中以形成分散体。 可以跨越表面形成转印层。 分散体可以指向转移层,并且不溶物可能影响转移层。 冲击可能在转移层中产生力,并且这种力可以通过转移层转移到表面。 表面可以是半导体衬底的表面,并且该力可用于从半导体衬底表面扫除污染物。 转移层可以是液体,并且在一些实施方案中可以是清洁溶液。
    • 7. 发明授权
    • Methods for treating surfaces
    • 表面处理方法
    • US07837805B2
    • 2010-11-23
    • US11847073
    • 2007-08-29
    • Gurtej S. SandhuNishant Sinha
    • Gurtej S. SandhuNishant Sinha
    • B08B3/04B08B3/08B08B3/10
    • H01L21/67051B08B3/02B24C1/003B24C5/005H01L21/02096
    • Some embodiments include methods of treating surfaces with aerosol particles. The aerosol particles may be formed as liquid particles, and then passed through a chamber under conditions which change the elasticity of the particles prior to impacting a surface with the particles. The change in elasticity may be an increase in the elasticity, or a decrease in the elasticity. The change in elasticity may be accomplished by causing a phase change of one or more components of the aerosol particles such as, for example, by at least partially freezing the aerosol particles, or by forming entrained bubbles within the aerosol particles. Some embodiments include apparatuses that may be utilized during treatment of surfaces with aerosol particles.
    • 一些实施方案包括用气溶胶颗粒处理表面的方法。 气溶胶颗粒可以形成为液体颗粒,然后在使颗粒撞击表面之前改变颗粒的弹性的条件下通过室。 弹性的变化可能是弹性的增加或弹性的降低。 弹性变化可以通过引起气溶胶颗粒的一种或多种组分的相变,例如通过至少部分地冷冻气溶胶颗粒,或通过在气溶胶颗粒内形成夹带的气泡来实现。 一些实施方案包括在用气溶胶颗粒处理表面期间可以使用的装置。