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    • 9. 发明授权
    • Methods of forming dispersions of nanoparticles, and methods of forming flash memory cells
    • 形成纳米颗粒分散体的方法和形成闪存细胞的方法
    • US08084345B2
    • 2011-12-27
    • US12871838
    • 2010-08-30
    • Dan Millward
    • Dan Millward
    • H01L21/3205H01L21/4763
    • H01L21/28273B22F1/0022B22F3/22B22F2999/00B82Y10/00B82Y30/00H01L21/28282Y10S977/70Y10S977/74Y10S977/748B22F1/0062
    • Some embodiments include methods of forming dispersions of nanoparticles. The nanoparticles are incorporated into first coordination complexes in which the nanoparticles are coordinated to hydrophobic ligands, and the first coordination complexes are dispersed within a non-polar solvent. While the first coordination complexes are within the non-polar solvent, the ligands are reacted with one or more reactants to convert the first coordination complexes into second coordination complexes that contain hydrophilic ligands. The second coordination complexes are then extracted from the non-polar solvent into water, to form a mixture of the second coordination complexes and the water. In some embodiments, the mixture may be dispersed across a semiconductor substrate to form a uniform distribution of the nanoparticles across the substrate. In some embodiments, the nanoparticles may then be incorporated into flash memory devices as charge-trapping centers.
    • 一些实施方案包括形成纳米颗粒分散体的方法。 将纳米颗粒掺入第一配位络合物中,其中纳米颗粒与疏水配体配位,第一配位络合物分散在非极性溶剂中。 虽然第一配位络合物在非极性溶剂内,配体与一种或多种反应物反应,将第一配位络合物转化为含有亲水配体的第二配位络合物。 然后将第二配位络合物从非极性溶剂中提取到水中,形成第二配位络合物和水的混合物。 在一些实施方案中,混合物可以分散在半导体衬底上以形成纳米颗粒在衬底上的均匀分布。 在一些实施例中,纳米颗粒然后可以作为电荷俘获中心并入闪存器件中。