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1. 发明授权

US08614534B2 Transducer having natural unidirectionality for surface acoustic waves 有权
标题翻译：具有表面声波自然单向性的传感器
公开(公告)号：US08614534B2
公开(公告)日：2013-12-24
申请号：US13262874
申请日：2010-04-21
申请人： Guenter Martin , Manfred Weihnacht , Sergey Biryukov , Alexander Darinski , Bert Wall
发明人： Guenter Martin , Manfred Weihnacht , Sergey Biryukov , Alexander Darinski , Bert Wall
IPC分类号： H03H9/25
CPC分类号： H03H9/14505
摘要： A transducer has natural unidirectionality for surface acoustic waves. An interdigital electrode structure is arranged on a piezoelectric crystal substrate and is constructed with interdigital transducers including collecting electrodes and fingers. At least two of the fingers form a transducer cell, which includes at least one excitation center for exciting an electrical potential wave and at least one reflection center for reflecting electrical potential waves. The fingers are oriented perpendicularly to a direction R parallel to a 1- or 3-fold rotational axis of the substrate crystal and the derivative dv/dθ=0 applies to R, wherein v is the phase velocity of the surface wave and θ is an angular deviation of the perpendicular to the finger direction from the direction R.
摘要翻译：传感器对表面声波具有自然的单向性。叉指电极结构布置在压电晶体基板上，并由叉指式换能器构成，包括收集电极和指状物。至少两个手指形成换能器单元，其包括用于激发电势波的至少一个激励中心和用于反射电势波的至少一个反射中心。指状物垂直于平行于衬底晶体的1或3倍旋转轴的方向R定向，并且导数dv /dθ= 0适用于R，其中v是表面波的相速度，θ是与手指方向垂直于方向R的角度偏差

2. 发明申请

US20120032554A1 TRANSDUCER HAVING NATURAL UNIDIRECTIONALITY FOR SURFACE ACOUSTIC WAVES 有权
公开(公告)号：US20120032554A1
公开(公告)日：2012-02-09
申请号：US13262874
申请日：2010-04-21
申请人： Guenter Martin , Manfred Weihnacht , Sergey Biryukov , Alexander Darinski , Bert Wall
发明人： Guenter Martin , Manfred Weihnacht , Sergey Biryukov , Alexander Darinski , Bert Wall
IPC分类号： H01L41/047 , H01L41/04
CPC分类号： H03H9/14505
摘要： The invention relates to a transducer having natural unidirectionality for surface acoustic waves, wherein an interdigital electrode structure is arranged on a piezoelectric crystal substrate and is constructed with interdigital transducers comprising collecting electrodes and fingers, wherein at least two of the fingers form a transducer cell, which comprises at least one excitation center for exciting an electrical potential wave and at least one reflection center for reflecting electrical potential waves. The invention is based on the problem of finding materials, material sections, and propagation directions for transducers having natural unidirectionality that result in a low insertion loss even in broadband transducers, and for which the frequency position is not affected or is affected only slightly by errors in the orientation of the electrode structure on the substrate despite the unidirectional characteristics of the transducers. According to an essential characteristic of the invention, the fingers are oriented perpendicularly to a direction R, wherein the direction R is directed parallel to a 1- or 3-fold rotational axis of the substrate crystal and the derivative dv/dθ=0 applies to R, wherein v is the phase velocity of the surface wave and θ is an angular deviation of the perpendicular to the finger direction from the direction R. According to a further characteristic of the invention, the electrode materials and the layer thicknesses thereof are selected in such a way that the phase shift Φs between the excitation center and a reflection center in each transducer cell, given by the equation sin2(Φs)=(ωo2−ωa2) (ωa2−ωo1)/(ωs2−ωs1)(ωo1+ωo2−ωs1−ωa2), lies between 41.4° and 48.6° or between −48.6° and −41.4° or between 131.4° and 138.6° or between −138.6° and −131.4°. The transducer according to the invention can be used in particular for sensors, identification components (ID tag), resonators, filter, delay lines, and oscillators insofar as the mode of operation thereof is based on surface acoustic waves.

3. 发明授权

US08004147B2 Waveguide components on the basis of acoustic surface waves, and their use 有权
标题翻译：波导元件在声表面波的基础上，以及它们的用途
公开(公告)号：US08004147B2
公开(公告)日：2011-08-23
申请号：US12310472
申请日：2007-09-02
申请人： Sergey Biryukov , Guenter Martin , Manfred Weihnacht
发明人： Sergey Biryukov , Guenter Martin , Manfred Weihnacht
IPC分类号： H03H9/25
CPC分类号： H03H9/14547 , H03H9/14561 , H03H9/14564
摘要： The invention relates to waveguide components based on acoustic surface waves, comprising at least one interdigital converter for exciting acoustic surface waves in a piezoelectric substrate or a piezoelectric layer. The object of the invention is to change known waveguide components, comprising at least one interdigital converter for exciting acoustic surface waves in a piezoelectric substrate or a piezoelectric layer, such that no reflectors are necessary with an otherwise equivalent function. The inventive waveguide components are characterized in that the interdigital converter(s) a) is or are disposed at a defined distance over the piezoelectric substrate or the piezoelectric layer for exciting wave fields, or b) is or are in contact with the piezoelectric substrate or the piezoelectric layer, wherein in version a) the piezoelectric substrate is designed as a ring and the piezoelectric layer is designed as a circular region. In case of version b), the interdigital converter and/or the piezoelectric layer form circular regions. The components can be used for example as resonators, filters, oscillators and sensors.
摘要翻译：本发明涉及基于声表面波的波导部件，其包括用于激发压电基板或压电层中的声表面波的至少一个叉指转换器。本发明的目的是改变已知的波导部件，其包括用于激励压电基板或压电层中的声表面波的至少一个叉指转换器，使得不需要具有其他等效功能的反射器。本发明的波导部件的特征在于，指数转换器a）在压电基板或用于激发波场的压电层之间以规定的距离设置，或者b）与压电基板接触或者与压电基板接触压电层，其中在版本a）压电基片被设计为环，并且压电层被设计为圆形区域。在版本b）的情况下，叉指转换器和/或压电层形成圆形区域。组件可以用作例如谐振器，滤波器，振荡器和传感器。

4. 发明申请

US20100007241A1 WAVEGUIDE COMPONENTS ON THE BASIS OF ACOUSTIC SURFACE WAVES, AND THEIR USE 有权
标题翻译：基于声波表面波的波形组件及其使用
公开(公告)号：US20100007241A1
公开(公告)日：2010-01-14
申请号：US12310472
申请日：2007-09-02
申请人： Sergey Biryukov , Guenter Martin , Manfred Weihnacht
发明人： Sergey Biryukov , Guenter Martin , Manfred Weihnacht
IPC分类号： H03H9/25
CPC分类号： H03H9/14547 , H03H9/14561 , H03H9/14564
摘要： The invention relates to waveguide components based on acoustic surface waves, comprising at least one interdigital converter for exciting acoustic surface waves in a piezoelectric substrate or a piezoelectric layer. The object of the invention is to change known waveguide components, comprising at least one interdigital converter for exciting acoustic surface waves in a piezoelectric substrate or a piezoelectric layer, such that no reflectors are necessary with an otherwise equivalent function. The inventive waveguide components are characterized in that the interdigital converter(s) a) is or are disposed at a defined distance over the piezoelectric substrate or the piezoelectric layer for exciting wave fields, or b) is or are in contact with the piezoelectric substrate or the piezoelectric layer, wherein in version a) the piezoelectric substrate is designed as a ring and the piezoelectric layer is designed as a circular region. In case of version b), the interdigital converter and/or the piezoelectric layer form circular regions. The components can be used for example as resonators, filters, oscillators and sensors.
摘要翻译：本发明涉及基于声表面波的波导部件，其包括用于激发压电基板或压电层中的声表面波的至少一个叉指转换器。本发明的目的是改变已知的波导部件，其包括用于激励压电基板或压电层中的声表面波的至少一个叉指转换器，使得不需要具有其他等效功能的反射器。本发明的波导部件的特征在于，指数转换器a）在压电基板或用于激发波场的压电层之间以规定的距离设置，或者b）与压电基板接触或者与压电基板接触压电层，其中在版本a）压电基片被设计为环，并且压电层被设计为圆形区域。在版本b）的情况下，叉指转换器和/或压电层形成圆形区域。组件可以用作例如谐振器，滤波器，振荡器和传感器。

5. 发明申请

US20060202782A1 Oscillator with acoustic surface wave resonators 失效
标题翻译：具有声表面波谐振器的振荡器
公开(公告)号：US20060202782A1
公开(公告)日：2006-09-14
申请号：US11360634
申请日：2006-02-23
申请人： Guenter Martin , Manfred Weihnacht
发明人： Guenter Martin , Manfred Weihnacht
IPC分类号： H03H9/64
CPC分类号： H03B5/326 , H03H9/02834 , H03H9/6433 , H03H9/6469
摘要： An oscillator or a sensor comprising a unit including two frequency determining elements each of which comprises at least one interdigital converter for acoustic surface waves and a back-coupling circuit comprising an amplifier, wherein the frequency determining elements are distinguished by a temperature dependence of a synchronous frequency. The frequency determining elements are embodied in the form of acoustic surface wave resonators, and the temperature coefficients of n-th order of the synchronous frequency of the two acoustic surface wave resonators have different sings if they are not equal to zero and the temperature coefficients of (n+1st) order of the synchronous frequency of the two acoustic surface wave resonators have the same sign and the temperature coefficients from the first order to (n−1st) order of the synchronous frequency of the two acoustic surface wave resonators are equal to zero if n is greater than 1, wherein n being equal to or greater than 1, c) the ratio between the converter openings and the ratio between the lengths in the direction perpendicular to the edge teeth of the converter and to strips of the object reflectors having different frequency determining elements which are assembled in one unit are selected in such a way that the oscillator frequency variation is minimum within the range of given temperatures.
摘要翻译：一种振荡器或传感器，包括包括两个频率确定元件的单元，每个频率确定元件包括用于声表面波的至少一个叉指转换器和包括放大器的反向耦合电路，其中频率确定元件由同步的温度依赖性频率。频率确定元件以声表面波谐振器的形式实现，并且两个声表面波谐振器的同步频率的n阶的温度系数如果不等于零，并且温度系数两个声表面波谐振器的同步频率的第（n + 1）个阶数具有相同的符号，并且两个声表面波谐振器的同步频率的第一到第（n-1）次的温度系数等于如果n大于1，则为零，其中n等于或大于1，c）转换器开口之间的比率和垂直于转换器的边缘齿的方向上的长度与对象反射器的条带之间的比率选择组合在一个单元中的具有不同频率确定元件的方式使振荡器频率变化在最小范围内给定温度。

6. 发明授权

US07692517B2 Oscillator with acoustic surface wave resonators 失效
标题翻译：具有声表面波谐振器的振荡器
公开(公告)号：US07692517B2
公开(公告)日：2010-04-06
申请号：US11360634
申请日：2004-08-24
申请人： Guenter Martin , Manfred Weihnacht
发明人： Guenter Martin , Manfred Weihnacht
IPC分类号： H03H9/00 , H03H9/205 , H01L41/18
CPC分类号： H03B5/326 , H03H9/02834 , H03H9/6433 , H03H9/6469
摘要： An oscillator or a sensor comprising a unit including two frequency determining elements each of which comprises at least one interdigital converter for acoustic surface waves and a back-coupling circuit comprising an amplifier, wherein the frequency determining elements are distinguished by a temperature dependence of a synchronous frequency. The frequency determining elements are embodied in the form of acoustic surface wave resonators, and the temperature coefficients of n-th order of the synchronous frequency of the two acoustic surface wave resonators have different sings if they are not equal to zero and the temperature coefficients of (n+1st) order of the synchronous frequency of the two acoustic surface wave resonators have the same sign and the temperature coefficients from the first order to (n-1st) order of the synchronous frequency of the two acoustic surface wave resonators are equal to zero if n is greater than 1, wherein n being equal to or greater than 1, c) the ratio between the converter openings and the ratio between the lengths in the direction perpendicular to the edge teeth of the converter and to strips of the object reflectors having different frequency determining elements which are assembled in one unit are selected in such a way that the oscillator frequency variation is minimum within the range of given temperatures.
摘要翻译：一种振荡器或传感器，包括包括两个频率确定元件的单元，每个频率确定元件包括用于声表面波的至少一个叉指转换器和包括放大器的反向耦合电路，其中频率确定元件由同步的温度依赖性频率。频率确定元件以声表面波谐振器的形式实现，并且两个声表面波谐振器的同步频率的n阶的温度系数如果不等于零，并且温度系数两个声表面波谐振器的同步频率的第（n + 1）个阶数具有相同的符号，并且两个声表面波谐振器的同步频率的第一到第（n-1）次的温度系数等于如果n大于1，则为零，其中n等于或大于1，c）转换器开口之间的比率和垂直于转换器的边缘齿的方向上的长度与对象反射器的条带之间的比率选择组合在一个单元中的具有不同频率确定元件的方式使振荡器频率变化在最小范围内给定温度。

7. 发明授权

US06853115B2 Acoustic surface wave component 有权
标题翻译：声表面波分量
公开(公告)号：US06853115B2
公开(公告)日：2005-02-08
申请号：US10432683
申请日：2002-02-15
申请人： Siegfried Menzel , Hagen Schmidt , Manfred Weihnacht
发明人： Siegfried Menzel , Hagen Schmidt , Manfred Weihnacht
IPC分类号： H01L41/09 , H01L41/08 , H01L41/18 , H03H9/02 , H03H9/145
CPC分类号： H03H9/02929
摘要： An acoustic surface wave component for which metallic strip structures of copper are applied on a piezoelectric material wherein the metallic strip structures have a polycrystalline and/or monocrystalline structure and/or are present in an amorphous state and consist of a basic copper material to which 0 atom percent to a maximum of 10 atom percent of one or more other metallic elements, an alloy and/or a compound are mixed, and that the strip structures are coated with or surround by one or more diffusion barrier layers.
摘要翻译：一种声表面波分量，其中铜的金属带状结构施加在压电材料上，其中金属条状结构具有多晶和/或单晶结构和/或以非晶态存在并由碱性铜材料组成，其中0 原子百分数至最多10原子％的一种或多种其它金属元素，合金和/或化合物混合，并且条状结构被一个或多个扩散阻挡层涂覆或围绕。

8. 发明授权

US06885491B2 Diffraction-optical component, illumination system and exposure system comprising such a diffraction-optical component as well as an exposure method employing such an exposure system 失效
$Diffraction-optical component, illumination system and exposure system comprising such a diffraction-optical component as well as an exposure method employing such an exposure system$
标题翻译：衍射光学部件，照明系统和包括这种衍射光学部件的曝光系统以及采用这种曝光系统的曝光方法
公开(公告)号：US06885491B2
公开(公告)日：2005-04-26
申请号：US10102613
申请日：2002-03-20
申请人： Martin Ross-Messemer , Alexander Menck , Frank Höller , Kurt Franke , Günter Martin , Hagen Schmidt , Manfred Weihnacht
发明人： Martin Ross-Messemer , Alexander Menck , Frank Höller , Kurt Franke , Günter Martin , Hagen Schmidt , Manfred Weihnacht
IPC分类号： G02B5/18 , G02F1/33 , G03F7/20 , H01L21/027 , G02F1/11 , H01L41/04 , H03H9/00 , H04B11/00
CPC分类号： G03F7/70158 , G02F1/33 , G03F7/70316
摘要： A diffraction-optical component for providing a radiation-diffracting grating structure is proposed, comprising a surface wave device including a substrate 43, a surface wave source 47 excitable with an adjustable frequency for producing surface waves on a surface 45 of the substrate 43 and an interaction region 17 of the substrate surface 45 which is provided for the radiation to interact with a grating structure provided by the surface waves produced.To this end, the surface wave source 47 may have a directional characteristic and emits surface waves stronger in a preferred direction 53 than in a direction 54 opposite thereto, the surface wave source may comprises an electro-acoustic transducer which includes spaced apart sections for emitting surface waves at different wavelengths, an electro-acoustic transducer of the surface wave source may be operated as a voltage divider with an intermediate electrode, the frequency for exciting the surface wave source may be adjusted in response to a measuring signal which is obtained by a surface wave receiver 73, a surface wave damper 73, 87 may be provided in the form of an acousto-electric transducer, a closed propagation path may be provided for the surface waves and the grating structure may be formed by standing surface waves.Moreover, an exposure system is proposed which comprises such a diffraction-optical component and a radiation source.
摘要翻译：提出了一种用于提供辐射衍射光栅结构的衍射光学部件，其包括表面波器件，其包括衬底43，可调频率激发的表面波源47，用于在衬底43的表面45上产生表面波，以及衬底表面45的相互作用区域17，其被提供用于辐射与由所产生的表面波提供的光栅结构相互作用。为此，表面波源47可以具有方向特性并且在优选方向53上发射比在与其相反的方向54更强的表面波，表面波源可以包括电声换能器，其包括用于发射的间隔开的部分不同波长的表面波，表面波源的电声换能器可以作为具有中间电极的分压器来操作，激励表面波源的频率可以响应于由a 表面波接收器73，表面波阻尼器73,87可以以声电换能器的形式提供，可以为表面波提供闭合传播路径，并且可以通过驻波表面波形成光栅结构。此外，提出了包括这样的衍射光学部件和辐射源的曝光系统。

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