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    • 9. 发明申请
    • Two-layer patterned resistor
    • 双层图案电阻
    • US20050133872A1
    • 2005-06-23
    • US10743589
    • 2003-12-22
    • Gregory DunnScott CarneyJovica Savic
    • Gregory DunnScott CarneyJovica Savic
    • H01C1/148H01C7/00H01C17/065H01L21/8222H01L23/498H01L23/62
    • H01C7/006H01C1/148H01C17/065H01L23/49822H01L2924/0002H01L2924/00
    • A technique for fabricating a patterned resistor on a substrate produces a patterned resistor (101, 801, 1001, 1324, 1374) including two conductive end terminations (110, 810, 1010) on the substrate, a pattern of first resistive material (120, 815, 1015) having a first width (125) and a first sheet resistance, and a pattern of second resistive material (205, 820, 1020) having a second width (210) and a second sheet resistance that at least partially overlies the pattern of first resistive material. One of the first and second sheet resistances is a low sheet resistance and the other of the first and second resistances is a high sheet resistance. A ratio of the high sheet resistance to the low sheet resistance is at least ten to one. The pattern having the higher sheet resistance is substantially wider than the pattern having the low sheet resistance. The patterned resistor can be precision trimmed 1225.
    • 用于在衬底上制造图案化电阻器的技术产生包括在衬底上的两个导电端接(110,810,1010)的图案化电阻器(101,801,1001,1324,1374),第一电阻材料(120, 具有第一宽度(125)和第一薄层电阻的第二电阻材料(205,820,1020)的图案,以及具有至少部分地覆盖图案的第二宽度(210)和第二薄层电阻的图案 的第一电阻材料。 第一和第二薄层电阻之一是低的薄层电阻,第一和第二电阻中的另一个是高的薄层电阻。 高薄层电阻与低薄层电阻的比例至少为10比1。 具有较高薄层电阻的图案基本上比具有低薄层电阻的图案更宽。 图案化电阻器可精密修整1225。