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1. 发明申请

US20120003388A1 METHODS AND APPARATUS FOR THERMAL BASED SUBSTRATE PROCESSING WITH VARIABLE TEMPERATURE CAPABILITY 有权
标题翻译：具有可变温度能力的基于热的基板加工的方法和装置
公开(公告)号：US20120003388A1
公开(公告)日：2012-01-05
申请号：US13169373
申请日：2011-06-27
申请人： GWO-CHUAN TZU , XIAOXIONG YUAN , AMIT KHANDELWAL , BENJAMIN CHENG WANG , AVGERINOS V. GELATOS , KAI WU , MICHAEL P. KARAZIM , JING LIN , OLKAN CUVALCI
发明人： GWO-CHUAN TZU , XIAOXIONG YUAN , AMIT KHANDELWAL , BENJAMIN CHENG WANG , AVGERINOS V. GELATOS , KAI WU , MICHAEL P. KARAZIM , JING LIN , OLKAN CUVALCI
IPC分类号： C23C16/455 , C23C16/06 , C23C16/46 , C23C16/52 , B05C11/00 , C23C16/458
CPC分类号： C23C16/4412 , C23C16/45565 , C23C16/45587 , C23C16/4585 , C23C16/46 , C23C16/52
摘要： A substrate support may include a body; an inner ring disposed about the body; an outer ring disposed about the inner ring forming a first opening therebetween; a first seal ring disposed above the first opening; a shadow ring disposed above the inner ring, extending inward from the outer ring and forming a second opening between the shadow and outer rings; a second seal ring disposed above the second opening; a space at least partially defined by the body and the inner, outer, first, second, and shadow rings; a first gap defined between a processing surface of a substrate when present and the shadow ring; and a plurality of second gaps fluidly coupled to the space; wherein the first gap and the plurality of second gaps are configured such that, when a substrate is present, a gas provided to the space flows out of the space through the first gap.
摘要翻译：衬底支撑件可以包括主体; 围绕身体设置的内圈; 围绕所述内圈设置的外圈，在其间形成第一开口; 设置在所述第一开口上方的第一密封环; 设置在所述内圈上方的从所述外圈向内延伸并在所述阴影和外圈之间形成第二开口的阴影环; 设置在所述第二开口上方的第二密封环; 至少部分地由身体和内，外，第一，第二和第二和阴影环限定的空间; 限定在衬底的处理表面和阴影环之间的第一间隙; 以及流体耦合到所述空间的多个第二间隙; 其中所述第一间隙和所述多个第二间隙被配置为使得当存在基板时，设置到所述空间的气体通过所述第一间隙流出所述空间。

2. 发明申请

US20130247826A1 APPARATUS FOR VARIABLE SUBSTRATE TEMPERATURE CONTROL 有权
标题翻译：可变基板温度控制装置
公开(公告)号：US20130247826A1
公开(公告)日：2013-09-26
申请号：US13430278
申请日：2012-03-26
申请人： GWO-CHUAN TZU , XIAOXIONG YUAN , AMIT KHANDELWAL , AVGERINOS V. GELATOS , OLKAN CUVALCI , KAI WU , MICHAEL P. KARAZIM
发明人： GWO-CHUAN TZU , XIAOXIONG YUAN , AMIT KHANDELWAL , AVGERINOS V. GELATOS , OLKAN CUVALCI , KAI WU , MICHAEL P. KARAZIM
IPC分类号： C23C16/46 , F24J3/00
CPC分类号： C23C16/46 , C23C16/45565 , C23C16/4583 , C23C16/4585 , C23C16/4586 , C23C16/481 , C23C16/52
摘要： In some embodiments, an apparatus for variable substrate temperature control may include a heater moveable along a central axis of a substrate support; a seal ring disposed about the heater, the seal ring configured to interface with a shadow ring disposed above the heater to form a seal; a plurality of spacer pins configured to support a substrate and disposed within a plurality of through holes formed in the heater, the plurality of spacer pins moveable parallel to the central axis, wherein the plurality of spacer pins control a first distance between the substrate and the heater and a second distance between the substrate and the shadow ring; and a resilient element disposed beneath the seal ring to bias the seal ring toward a backside surface of the heater.
摘要翻译：在一些实施例中，用于可变衬底温度控制的装置可以包括可沿衬底支撑件的中心轴线移动的加热器; 围绕所述加热器设置的密封环，所述密封环被配置为与设置在所述加热器上方的阴影环接合以形成密封; 多个间隔销，其构造成支撑基板并且设置在形成在所述加热器中的多个通孔内，所述多个间隔销可平行于所述中心轴线移动，其中所述多个间隔销控制所述基板和所述基板之间的第一距离加热器和衬底和阴影环之间的第二距离; 以及弹性元件，其设置在所述密封环下方以将所述密封环朝向所述加热器的后侧表面偏置。

3. 发明申请

US20120003833A1 METHODS FOR FORMING TUNGSTEN-CONTAINING LAYERS 审中-公开
标题翻译：形成含钨层的方法
公开(公告)号：US20120003833A1
公开(公告)日：2012-01-05
申请号：US13172339
申请日：2011-06-29
申请人： AMIT KHANDELWAL , KAI WU , EMILY RENUART , JINQIU CHEN , AVGERINOS V. GELATOS
发明人： AMIT KHANDELWAL , KAI WU , EMILY RENUART , JINQIU CHEN , AVGERINOS V. GELATOS
IPC分类号： H01L21/285
CPC分类号： H01L21/28562 , C23C16/06 , C23C16/45525
摘要： Methods for forming tungsten-containing layers on substrates are provided herein. In some embodiments, a method for forming a tungsten-containing layer on a substrate disposed in a process chamber may include mixing hydrogen and a hydride to form a first process gas; introducing the first process gas to the process chamber; exposing the substrate in the process chamber to the first process gas for a first period of time to form a conditioned substrate surface; subsequently purging the process chamber of the first process gas; exposing the substrate to a second process gas comprising a tungsten precursor for a second period of time to form a tungsten-containing nucleation layer atop the conditioned substrate surface; and subsequently purging the process chamber of the second process gas.
摘要翻译：本文提供了在基片上形成含钨层的方法。在一些实施例中，在设置在处理室中的衬底上形成含钨层的方法可以包括混合氢气和氢化物以形成第一工艺气体; 将第一工艺气体引入处理室; 将处理室中的衬底暴露于第一工艺气体第一时间段以形成经调理的衬底表面; 随后清洗第一工艺气体的处理室; 将衬底暴露于包含钨前体的第二工艺气体持续第二时间段以在经调理的衬底表面上方形成含钨成核层; 随后清洗第二工艺气体的处理室。

4. 发明申请

US20170327707A1 Electrically Conductive PTC Screen Printable Ink with Double Switching Temperatures and Method of Making the Same 审中-公开
公开(公告)号：US20170327707A1
公开(公告)日：2017-11-16
申请号：US15143524
申请日：2016-04-30
申请人： SHUYONG XIAO , KAI WU
发明人： SHUYONG XIAO , KAI WU
IPC分类号： C09D11/52 , C09D11/102 , C09D11/107
CPC分类号： C09D11/52 , C09D11/037 , C09D11/102 , C09D11/107 , H05B3/12 , H05B3/146 , H05B2203/013 , H05B2203/02 , H05K1/097 , Y10T428/24802 , Y10T428/24901
摘要： The invention provides an electrically conductive screen-printable PTC ink with double switching temperatures, which comprising by weight based on total composition, 10-30 wt % conductive particles; 5-15 wt % polymer resin 1; 5-15 wt % polymer resin 2; 40-80 wt % organic solvent; e) 1-5 wt % other additives.

5. 发明申请

US20110079284A1 STRUCTURE AND METHOD FOR CONNECTING JUNCTION BOX TO SOLAR CELL MODULE 审中-公开
标题翻译：将接线盒连接到太阳能电池模块的结构和方法
公开(公告)号：US20110079284A1
公开(公告)日：2011-04-07
申请号：US12896465
申请日：2010-10-01
申请人： KAI WU
发明人： KAI WU
IPC分类号： H01L31/0203 , H01L31/0264 , H01L31/0272 , H05K13/00
CPC分类号： H02S40/34 , Y10T29/49002
摘要： In a structure and method for connecting junction box to solar cell module, at least one support pin is embedded in the laminated layers of the solar cell module. The support pin includes at least a plug section, a support section and a stop section. The support section is embedded in the laminated layers of the solar cell module and can therefore provide support strength to the junction box. The stop section is pressed against an end surface of the solar cell module to enable a limiting and lateral supporting effect. The plug section is exposed from a layer of fixing sealant applied on the end surface of the solar cell module for plugging in and accordingly holding to a socket section of the junction box, protecting the junction box against separating from the solar cell module before the fixing sealant is fully cured.
摘要翻译：在将接线盒连接到太阳能电池模块的结构和方法中，至少一个支撑销嵌入在太阳能电池组件的叠层中。支撑销至少包括插头部分，支撑部分和止挡部分。支撑部分嵌入在太阳能电池模块的层压层中，因此可以为接线盒提供支撑强度。止动部分被压靠在太阳能电池模块的端面上，以实现限制和横向支撑效果。插头部分从施加在太阳能电池模块的端面上的固定密封剂层露出，用于插入并相应地保持到接线盒的插座部分，在固定之前保护接线盒免受与太阳能电池组件分离的影响密封胶完全固化。

6. 发明申请

US20110319276A1 NUCLEOTIDES AND OLIGONUCLEOTIDES FOR NUCLEIC ACID SEQUENCING 有权
标题翻译：核酸序列的核苷酸和寡核苷酸（NIGLEOTIDES AND OLIGONUCLEOTIDES FOR NUCLEIC ACID SEQUENCE）
公开(公告)号：US20110319276A1
公开(公告)日：2011-12-29
申请号：US12823995
申请日：2010-06-25
申请人： JIANQUAN LIU , XING SU , KAI WU
发明人： JIANQUAN LIU , XING SU , KAI WU
IPC分类号： C40B30/00 , C07H19/20
CPC分类号： C07H19/10 , C12Q1/6874 , C12Q2521/101 , C12Q2521/319 , C12Q2521/525 , C12Q2525/186 , C12Q2537/157 , C12Q2565/537 , C12Q2565/607
摘要： Embodiments of the invention provide non-natural bifunctional nucleotides having both nuclease resistance and nucleic acid synthesis blocking properties and methods of sequencing nucleic acids that employ non-natural bifunctional nucleic acids. Additional embodiments provide non-natural oligonucleotides and methods for sequencing nucleic acids using the non-natural oligonucleotides. Methods according to embodiments of the invention employ electronic detection and fluorescent detection of nucleic acid sequencing reactions.
摘要翻译：本发明的实施方案提供具有核酸酶抗性和核酸合成阻断性质的非天然双功能核苷酸，以及使用非天然双功能核酸测序核酸的方法。另外的实施方案提供非天然寡核苷酸和使用非天然寡核苷酸测序核酸的方法。根据本发明的实施方案的方法使用核酸测序反应的电子检测和荧光检测。

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