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1. 发明授权

US5496999A Scanning probe microscope 失效
标题翻译：扫描探针显微镜
公开(公告)号：US5496999A
公开(公告)日：1996-03-05
申请号：US320490
申请日：1994-10-11
申请人： Frederick I. Linker , Michael D. Kirk , John D. Alexander , Sang-il Park , Sung-il Park , Ian R. Smith , Peter R. Swift
发明人： Frederick I. Linker , Michael D. Kirk , John D. Alexander , Sang-il Park , Sung-il Park , Ian R. Smith , Peter R. Swift
IPC分类号： G01Q10/02 , G01Q10/04 , G01Q10/06 , G01Q20/00 , G01Q30/02 , G01Q30/06 , G01Q60/10 , G01Q60/24 , G01Q70/02 , G02B21/00 , H01J37/26
CPC分类号： G01Q10/04 , B82Y35/00 , G01Q10/06 , G01Q20/02 , G01Q30/025 , G01Q70/02 , G02B21/002 , Y10S977/851 , Y10S977/86 , Y10S977/873
摘要： A scanning probe microscope having numerous advantages is disclosed. Respective scanning force and scanning tunneling probes are removably mounted in the head using kinematic mounting techniques so that they may be substituted for one another without the need to adjust the cantilever deflection sensor. A linear position-sensitive photodetector in the deflection sensor eliminates further the need for adjustments. A motorized, non-stacked x,y coarse movement stage is kinematically positioned with respect to the base and features a minimized mechanical loop to reduce thermal and vibrational effects on the position of the sample. A z coarse movement stage positions the head kinematically with respect to the base and includes a motorized drive means which allows the height, tilt and pitch of the probe to be adjusted. The scanner includes x,y and z sample position detectors which provide an accurate measurement of the position of the sample with respect to the probe. The z position detector provides an output which is exclusive of sample tilt and which may be used as an output of the scanning probe microscope. The outputs of the x,y and z position detectors may also be connected in feedback loops with the controller to improve the performance of the scanning probe microscope.
摘要翻译：公开了具有许多优点的扫描探针显微镜。使用运动学安装技术将各扫描力和扫描隧道探针可拆卸地安装在头部中，使得它们可以彼此替代，而不需要调整悬臂偏转传感器。偏转传感器中的线性位置敏感光电检测器进一步消除了对调整的需要。机动的，非堆叠的x，y粗移动台相对于基座运动地定位，并具有最小化的机械回路，以减少对样品位置的热和振动影响。 z粗移动台将头相对于基座运动地定位，并且包括允许调节探头的高度，倾斜和俯仰的电动驱动装置。扫描器包括x，y和z采样位置检测器，其提供样品相对于探针的位置的精确测量。 z位置检测器提供的输出不包括样品倾斜，可用作扫描探针显微镜的输出。 x，y和z位置检测器的输出也可以与控制器连接在反馈回路中，以提高扫描探针显微镜的性能。

2. 发明授权

US5376790A Scanning probe microscope 失效
标题翻译：扫描探针显微镜
公开(公告)号：US5376790A
公开(公告)日：1994-12-27
申请号：US850669
申请日：1992-03-13
申请人： Frederick I. Linker , Michael D. Kirk , John D. Alexander , Sang-il Park , Sung-il Park , Ian R. Smith
发明人： Frederick I. Linker , Michael D. Kirk , John D. Alexander , Sang-il Park , Sung-il Park , Ian R. Smith
IPC分类号： G01Q10/02 , G01Q10/04 , G01Q10/06 , G01Q20/00 , G01Q30/02 , G01Q30/06 , G01Q60/10 , G01Q60/24 , G01Q70/02 , G02B21/00 , H01J37/00
CPC分类号： G01Q10/04 , B82Y35/00 , G01Q10/06 , G01Q20/02 , G01Q30/025 , G01Q70/02 , G02B21/002 , Y10S977/851 , Y10S977/86 , Y10S977/873
摘要： A scanning probe microscope having numerous advantages is disclosed. Respective scanning force and scanning tunneling probes are removably mounted in the head using kinematic mounting techniques so that they may be substituted for one another without the need to adjust the cantilever deflection sensor. A linear position-sensitive photodetector in the deflection sensor eliminates further the need for adjustments. A motorized, non-stacked x,y coarse movement stage is kinematically positioned with respect to the base and features a minimized mechanical loop to reduce thermal and vibrational effects on the position of the sample. A z coarse movement stage positions the head kinematically with respect to the base and includes a motorized drive means which allows the height, tilt and pitch of the probe to be adjusted. The scanner includes x,y and z sample position detectors which provide an accurate measurement of the position of the sample with respect to the probe. The z position detector provides an output which is exclusive of sample tilt and which may be used as an output of the scanning probe microscope. The outputs of the x,y and z position detectors may also be connected in feedback loops with the controller to improve the performance of the scanning probe microscope.
摘要翻译：公开了具有许多优点的扫描探针显微镜。使用运动学安装技术将各扫描力和扫描隧道探针可拆卸地安装在头部中，使得它们可以彼此替代，而不需要调整悬臂偏转传感器。偏转传感器中的线性位置敏感光电检测器进一步消除了对调整的需要。机动的，非堆叠的x，y粗移动台相对于基座运动地定位，并具有最小化的机械回路，以减少对样品位置的热和振动影响。 z粗移动台将头相对于基座运动地定位，并且包括允许调节探头的高度，倾斜和俯仰的电动驱动装置。扫描器包括x，y和z采样位置检测器，其提供样品相对于探针的位置的精确测量。 z位置检测器提供的输出不包括样品倾斜，可用作扫描探针显微镜的输出。 x，y和z位置检测器的输出也可以与控制器连接在反馈回路中，以提高扫描探针显微镜的性能。

3. 发明授权

US5714756A Scanning probe microscope having a single viewing device for on-axis and oblique angle views 失效
标题翻译：具有单个观察装置的扫描探针显微镜，用于轴上和斜视角
公开(公告)号：US5714756A
公开(公告)日：1998-02-03
申请号：US710239
申请日：1996-09-13
申请人： Sang-Il Park , Frederick I. Linker , Ian R. Smith
发明人： Sang-Il Park , Frederick I. Linker , Ian R. Smith
IPC分类号： G01Q30/04 , G01N23/00 , G01Q10/00 , G01Q20/02 , G01Q20/04 , G01Q30/02 , G01Q30/20 , G01Q60/10 , G01Q70/02 , G01Q70/10 , G01R31/302 , G02B21/00 , G02B21/18 , G02B21/26 , G21K7/00 , H01J37/26
CPC分类号： G01Q20/02 , B82Y35/00 , G01Q30/025 , G01Q70/02 , G02B21/002 , G02B21/26 , Y10S977/851 , Y10S977/869 , Y10S977/87 , Y10S977/874
摘要： An optical system for a scanning probe microscope provides both an optical on-axis view and an optical oblique view of the sample by two optical paths each providing an image to a CCD camera via an auto-zoom lens. A shutter alternately blocks the image of either view from reaching the auto-zoom lens. The CCD camera provides the optical image to a video display which also displays the scanning probe image, thus eliminating the need for eyepieces and allowing easy viewing of both the optical and scanning probe images simultaneously.
摘要翻译：用于扫描探针显微镜的光学系统通过两个光路提供样品的光学轴向视图和光学斜视图，每个光路通过自动变焦镜头向CCD照相机提供图像。快门交替阻止任一视图的图像到达自动变焦镜头。 CCD摄像机将光学图像提供给还显示扫描探针图像的视频显示器，从而不需要目镜，并且可以同时轻松查看光学和扫描探针图像。

4. 发明授权

US5448399A Optical system for scanning microscope 失效
公开(公告)号：US5448399A
公开(公告)日：1995-09-05
申请号：US850677
申请日：1992-03-13
申请人： Sang-Il Park , Frederick I. Linker , Ian R. Smith
发明人： Sang-Il Park , Frederick I. Linker , Ian R. Smith
IPC分类号： G01Q30/04 , G01N23/00 , G01Q10/00 , G01Q20/02 , G01Q20/04 , G01Q30/02 , G01Q30/20 , G01Q60/10 , G01Q70/02 , G01Q70/10 , G01R31/302 , G02B21/00 , G02B21/18 , G02B21/26 , G21K7/00
CPC分类号： G01Q20/02 , B82Y35/00 , G01Q30/025 , G01Q70/02 , G02B21/002 , G02B21/26 , Y10S977/851 , Y10S977/869 , Y10S977/87 , Y10S977/874
摘要： An optical system for a scanning probe microscope provides both an optical on-axis view and an optical oblique view of the sample by means of two optical paths each providing an image to a CCD camera via an auto-zoom lens. A shutter alternately blocks the image of either view from reaching the auto-zoom lens. The CCD camera provides the optical image to a video display which also displays the scanning probe image, thus eliminating the need for eyepieces and allowing easy viewing of both the optical and scanning probe images simultaneously.

5. 发明授权

US6130427A Scanning probe microscope with multimode head 失效
标题翻译：带多模头的扫描探针显微镜
公开(公告)号：US6130427A
公开(公告)日：2000-10-10
申请号：US828771
申请日：1997-04-01
申请人： Sang-Il Park , Frederick I. Linker , Ian R. Smith , Michael Kirk , John Alexander , Sung Park
发明人： Sang-Il Park , Frederick I. Linker , Ian R. Smith , Michael Kirk , John Alexander , Sung Park
IPC分类号： G01Q30/04 , G01N23/00 , G01Q10/00 , G01Q20/02 , G01Q20/04 , G01Q30/02 , G01Q30/20 , G01Q60/10 , G01Q70/02 , G01Q70/10 , G01R31/302 , G02B21/00 , G02B21/18 , G02B21/26 , G21K7/00 , H01J37/26
CPC分类号： G01Q20/02 , B82Y35/00 , G01Q30/025 , G01Q70/02 , G02B21/002 , G02B21/26 , Y10S977/851 , Y10S977/869 , Y10S977/87 , Y10S977/874
摘要： An optical system for a scanning probe microscope provides both an optical on-axis view and an optical oblique view of the sample by means of two optical paths each providing an image to a CCD camera via an auto-zoom lens. A shutter alternately blocks the image of either view from reaching the auto-zoom lens. The CCD camera provides the optical image to a video display which also displays the scanning probe image, thus eliminating the need for eyepieces and allowing easy viewing of both the optical and scanning probe images simultaneously.
摘要翻译：用于扫描探针显微镜的光学系统通过两个光学路径提供样品的光学轴向视图和光学斜视图，每个光学路径通过自动变焦镜头向CCD照相机提供图像。快门交替阻止任一视图的图像到达自动变焦镜头。 CCD摄像机将光学图像提供给还显示扫描探针图像的视频显示器，从而不需要目镜，并且可以同时轻松查看光学和扫描探针图像。

6. 发明授权

US5672816A Large stage system for scanning probe microscopes and other instruments 失效
标题翻译：用于扫描探针显微镜和其他仪器的大型舞台系统
公开(公告)号：US5672816A
公开(公告)日：1997-09-30
申请号：US448004
申请日：1995-05-23
申请人： Sang-il Park , Ian R. Smith , Michael D. Kirk
发明人： Sang-il Park , Ian R. Smith , Michael D. Kirk
IPC分类号： G01Q10/02 , G01Q20/02 , G01Q30/02 , G01Q30/18 , G01Q70/04 , G02B21/00 , G02B21/26 , G02B21/06 , G01B9/04 , G01N21/01 , G01N21/84
CPC分类号： G01Q10/02 , B82Y35/00 , G01Q30/025 , G02B21/002 , G02B21/26 , Y10S977/87
摘要： A large scale horizontal translation stage for a microscope or other instrument particularly a scanning probe microscope is disclosed. The translation stage is provided with air bearings which allow it to float over a planar surface. The translation stage is kinematically mounted on a guiding member such that the horizontal position of the translation stage is defined by the guiding member but the translation stage is free to move in a direction perpendicular to the planar surface. To position a sample, the air bearings are actuated and the guiding member moves the translation stage to a desired position. An attractive force, preferably suction in the air bearings, is then applied to hold the translation stage firmly against the supporting surface while the sample is analyzed. The preferred embodiment includes two optical microscopes. The first optical microscope is directed substantially perpendicular to the plane of the sample and has a focal point which coincides with the surface of the sample when it is being positioned by the translation stage. The second optical microscope is directed obliquely and focused on the probe.
摘要翻译：公开了用于显微镜或其他仪器，特别是扫描探针显微镜的大型水平平移平台。平移台设有空气轴承，允许其浮在平面上。平移台被运动地安装在引导构件上，使得平移台的水平位置由引导构件限定，但是平移台可以在垂直于平面的方向上自由移动。为了定位样品，空气轴承被致动并且引导构件将平移台移动到期望的位置。然后施加吸引力，优选在空气轴承中的吸力，以在分析样品时将平移台牢固地保持在支撑表面上。优选实施例包括两个光学显微镜。第一光学显微镜被定向为基本上垂直于样品的平面，并且具有当通过平移台定位时与样品表面重合的焦点。第二光学显微镜倾斜地定向并聚焦在探头上。

7. 发明授权

US5877891A Scanning probe microscope having a single viewing device for on-axis and oblique optical views 失效
标题翻译：扫描探针显微镜具有单个观察装置，用于轴上和斜视光学视图
公开(公告)号：US5877891A
公开(公告)日：1999-03-02
申请号：US428358
申请日：1995-04-21
申请人： Sano-Il Park , Frederick I. Linker , Ian R. Smith
发明人： Sano-Il Park , Frederick I. Linker , Ian R. Smith
IPC分类号： G01Q30/04 , G01N23/00 , G01Q10/00 , G01Q20/02 , G01Q20/04 , G01Q30/02 , G01Q30/20 , G01Q60/10 , G01Q70/02 , G01Q70/10 , G01R31/302 , G02B21/00 , G02B21/18 , G02B21/26 , G21K7/00
CPC分类号： G01Q20/02 , B82Y35/00 , G01Q30/025 , G01Q70/02 , G02B21/002 , G02B21/26 , Y10S977/851 , Y10S977/869 , Y10S977/87 , Y10S977/874
摘要： An optical system for a scanning probe microscope provides both an optical on-axis view and an optical oblique view of the sample by means of two optical paths each providing an image to a CCD camera via an auto-zoom lens. A shutter alternately blocks the image of either view from reaching the auto-zoom lens. The CCD camera provides the optical image to a video display which also displays the scanning probe image, thus eliminating the need for eyepieces and allowing easy viewing of both the optical and scanning probe images simultaneously.
摘要翻译：用于扫描探针显微镜的光学系统通过两个光学路径提供样品的光学轴向视图和光学斜视图，每个光学路径通过自动变焦镜头向CCD照相机提供图像。快门交替阻止任一视图的图像到达自动变焦镜头。 CCD摄像机将光学图像提供给还显示扫描探针图像的视频显示器，从而不需要目镜，并且可以同时轻松查看光学和扫描探针图像。

8. 发明授权

US5939719A Scanning probe microscope with scan correction 失效
公开(公告)号：US5939719A
公开(公告)日：1999-08-17
申请号：US831153
申请日：1997-04-01
申请人： Sang-Il Park , Ian R. Smith , Michael Kirk
发明人： Sang-Il Park , Ian R. Smith , Michael Kirk
IPC分类号： G01Q30/04 , G01N23/00 , G01Q10/00 , G01Q20/02 , G01Q20/04 , G01Q30/02 , G01Q30/20 , G01Q60/10 , G01Q70/02 , G01Q70/10 , G01R31/302 , G02B21/00 , G02B21/18 , G02B21/26 , G21K7/00 , H01J37/26
CPC分类号： G01Q20/02 , B82Y35/00 , G01Q30/025 , G01Q70/02 , G02B21/002 , G02B21/26 , Y10S977/851 , Y10S977/869 , Y10S977/87 , Y10S977/874
摘要： An optical system for a scanning probe microscope provides both an optical on-axis view and an optical oblique view of the sample by means of two optical paths each providing an image to a CCD camera via an auto-zoom lens. A shutter alternately blocks the image of either view from reaching the auto-zoom lens. The CCD camera provides the optical image to a video display which also displays the scanning probe image, thus eliminating the need for eyepieces and allowing easy viewing of both the optical and scanning probe images simultaneously.

9. 发明授权

US06590703B2 Optical system for scanning microscope 失效
标题翻译：用于扫描显微镜的光学系统
公开(公告)号：US06590703B2
公开(公告)日：2003-07-08
申请号：US09906985
申请日：2001-07-16
申请人： Sang-Il Park , Ian R. Smith
发明人： Sang-Il Park , Ian R. Smith
IPC分类号： G02B2118
CPC分类号： G01Q20/02 , G01Q30/025 , G01Q70/02 , G02B21/002 , G02B21/26 , Y10S977/851 , Y10S977/869 , Y10S977/87 , Y10S977/874
摘要： An optical system for a scanning probe microscope provides both an optical on-axis view and an optical oblique view of the sample by means of two optical paths each providing an image to a CCD camera via an auto-zoom lens. A shutter alternately blocks the image of either view from reaching the auto-zoom lens. The CCD camera provides the optical image to a video display which also displays the scanning probe image, thus eliminating the need for eyepieces and allowing easy viewing of both the optical and scanning probe images simultaneously.
摘要翻译：用于扫描探针显微镜的光学系统通过两个光学路径提供样品的光学轴向视图和光学斜视图，每个光学路径通过自动变焦镜头向CCD照相机提供图像。快门交替阻止任一视图的图像到达自动变焦镜头。 CCD摄像机将光学图像提供给还显示扫描探针图像的视频显示器，从而不需要目镜，并且可以同时轻松查看光学和扫描探针图像。

10. 发明授权

US06265718B1 Scanning probe microscope with scan correction 有权
标题翻译：扫描探针显微镜扫描校正
公开(公告)号：US06265718B1
公开(公告)日：2001-07-24
申请号：US09561448
申请日：2000-04-28
申请人： Sang-Il Park , Ian R. Smith
发明人： Sang-Il Park , Ian R. Smith
IPC分类号： H01J3700
CPC分类号： G01Q70/02 , G01Q30/025 , G01Q30/04 , G02B21/002 , G02B21/26 , Y10S977/85 , Y10S977/851
摘要： An optical system for a scanning probe microscope provides both an optical on-axis view and an optical oblique view of the sample by means of two optical paths each providing an image to a CCD camera via an auto-zoom lens. A shutter alternately blocks the image of either view from reaching the auto-zoom lens. The CCD camera provides the optical image to a video display which also displays the scanning probe image, thus eliminating the need for eyepieces and allowing easy viewing of both the optical and scanning probe images simultaneously.
摘要翻译：用于扫描探针显微镜的光学系统通过两个光学路径提供样品的光学轴向视图和光学斜视图，每个光学路径通过自动变焦镜头向CCD照相机提供图像。快门交替阻止任一视图的图像到达自动变焦镜头。 CCD摄像机将光学图像提供给还显示扫描探针图像的视频显示器，从而不需要目镜，并且可以同时轻松查看光学和扫描探针图像。

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