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    • 3. 发明授权
    • RF circuit substrate comprised of guide portions made of photocurable layers and including a protruding surface features
    • 射频电路基板,由可光固化层构成的引导部分构成,并包括突出表面特征
    • US08299878B2
    • 2012-10-30
    • US12586962
    • 2009-09-30
    • Flavio PardoRobert F. Fullowan
    • Flavio PardoRobert F. Fullowan
    • H01P3/18
    • H01P11/002H01P3/121H01P3/123H01P7/065
    • A radio frequency circuit structure for transmitting radio signals includes a lower guide portion having a plurality of photocurable layers deposited on a substrate and an upper guide portion interfacing with the lower guide portion to define a guiding geometry. The upper guide portion may also include a plurality of photocurable layers deposited on a second substrate. A method for fabricating the radio frequency circuit structure includes depositing the plurality of photocurable layers on the substrate. A portion of each photocurable layer of the plurality of photocurable layers is exposed to ultraviolet light to form a latent image. The plurality of photocurable layers is developed to remove the portions not exposed to ultraviolet light to form a guide portion. The guide portion may be metalized and closed to form a guiding geometry. A lower guide portion may be closed by an upper guide portion formed in substantially the same manner as the lower guide portion.
    • 用于发送无线电信号的射频电路结构包括具有沉积在基板上的多个可光固化层的下引导部分和与下引导部分接合以限定引导几何形状的上引导部分。 上引导部分还可以包括沉积在第二基底上的多个光固化层。 一种用于制造射频电路结构的方法包括将多个光固化层沉积在基片上。 多个光固化层的每个光固化层的一部分暴露于紫外光以形成潜像。 多个光固化层被显影以除去未暴露于紫外光的部分以形成引导部分。 引导部分可以被金属化和封闭以形成引导几何形状。 下引导部分可以由与下引导部分基本相同的方式形成的上引导部分封闭。
    • 10. 发明授权
    • Thermal actuator for a MEMS-based relay switch
    • 用于基于MEMS的继电器开关的热致动器
    • US08154378B2
    • 2012-04-10
    • US11836860
    • 2007-08-10
    • Validmir Anatolyevich AksyukFlavio PardoMaria Elina Simon
    • Validmir Anatolyevich AksyukFlavio PardoMaria Elina Simon
    • H01H61/00H01H71/16H01H71/18H01H61/02F01B29/10F02G1/04
    • H01H61/02B81B3/0024B81B2201/014B81B2201/031H01H2061/008
    • A representative embodiment of the invention provides a thermal actuator for a MEMS-based relay switch. The thermal actuator has an “active” arm that is movably mounted on a substrate. The “active” arm has (i) a thermal expansion layer and (ii) a resistive heater that is electrically isolated from the thermal expansion layer. The thermal expansion layer is adapted to expand in response to a temperature change induced by a control current flowing through the resistive heater, thereby bending the “active” arm and moving that arm with respect to the substrate. Due to the fact that mechanical and electrical characteristics of the “active” arm are primarily controlled by the thermal expansion layer and the resistive heater, respectively, those characteristics can be optimized independently to obtain better operating characteristics for MEMS-based relay switches of the invention compared to those attained in the prior art.
    • 本发明的代表性实施例提供了一种用于基于MEMS的继电器开关的热致动器。 热致动器具有可移动地安装在基板上的“主动”臂。 “主动”臂具有(i)热膨胀层和(ii)与热膨胀层电隔离的电阻加热器。 热膨胀层适应于由流过电阻加热器的控制电流引起的温度变化而膨胀,从而弯曲“主动”臂并相对于基板移动该臂。 由于“主动”臂的机械和电气特性分别主要由热膨胀层和电阻加热器控制,可以独立地优化这些特性以获得本发明的基于MEMS的继电器开关更好的工作特性 与现有技术中获得的相比。