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1. 发明授权

US08018316B2 Electroless plating production of nickel and cobalt structures 有权
标题翻译：化学镀镍和钴结构的生产
公开(公告)号：US08018316B2
公开(公告)日：2011-09-13
申请号：US11747555
申请日：2007-05-11
申请人： Flavio Pardo , Maria E. Simon , Brijesh Vyas , Chen Xu
发明人： Flavio Pardo , Maria E. Simon , Brijesh Vyas , Chen Xu
IPC分类号： H01H71/18 , H01H61/00
CPC分类号： C23C18/32 , C23C18/1605 , C23C18/165 , C23C18/1651 , C23C18/1689 , C23C18/34 , C23C18/36
摘要： A method comprising forming a structural element 115 on a surface 620 of a layer 510 via an electroless plating of nickel or cobalt 130 onto the surface, the layer being rigidly fixed to an underlying substrate 110. The method also comprises etching away a portion of the layer such that a part of the structural element is able to move with respect to the substrate.
摘要翻译：一种方法包括在层510的表面620上经由镍或钴130的无电镀层在表面上形成结构元件115，所述层刚性地固定到下面的基底110上。该方法还包括蚀刻掉部分使得结构元件的一部分能够相对于基板移动。

2. 发明申请

US20110215068A1 ELECTROLESS PLATING PRODUCTION OF NICKEL AND COBALT STRUCTURES 审中-公开
标题翻译：镍和镍钴结构的电镀生产
公开(公告)号：US20110215068A1
公开(公告)日：2011-09-08
申请号：US13105460
申请日：2011-05-11
申请人： Flavio Pardo , Maria E. Simon , Brijesh Vyas , Chen Xu
发明人： Flavio Pardo , Maria E. Simon , Brijesh Vyas , Chen Xu
IPC分类号： C23F1/02 , H05K13/00
CPC分类号： C23C18/32 , C23C18/1605 , C23C18/165 , C23C18/1651 , C23C18/1689 , C23C18/34 , C23C18/36
摘要： A method comprising forming a structural element 115 on a surface 620 of a layer 510 via an electroless plating of nickel or cobalt 130 onto the surface, the layer being rigidly fixed to an underlying substrate 110. The method also comprises etching away a portion of the layer such that a part of the structural element is able to move with respect to the substrate.
摘要翻译：一种方法包括在层510的表面620上经由镍或钴130的无电镀层在表面上形成结构元件115，所述层刚性地固定到下面的基底110上。该方法还包括蚀刻掉部分使得结构元件的一部分能够相对于基板移动。

3. 发明申请

US20080278029A1 ELECTROLESS PLATING PRODUCTION OF NICKEL AND COLBALT STRUCTURES 有权
标题翻译：镍和铁素体结构的电镀生产
公开(公告)号：US20080278029A1
公开(公告)日：2008-11-13
申请号：US11747555
申请日：2007-05-11
申请人： Flavio Pardo , Maria E. Simon , Brijesh Vyas , Chen Xu
发明人： Flavio Pardo , Maria E. Simon , Brijesh Vyas , Chen Xu
IPC分类号： H02N10/00 , C25D5/00 , H01L21/00
CPC分类号： C23C18/32 , C23C18/1605 , C23C18/165 , C23C18/1651 , C23C18/1689 , C23C18/34 , C23C18/36
摘要： A method comprising forming a structural element 115 on a surface 620 of a layer 510 via an electroless plating of nickel or cobalt 130 onto the surface, the layer being rigidly fixed to an underlying substrate 110. The method also comprises etching away a portion of the layer such that a part of the structural element is able to move with respect to the substrate.
摘要翻译：一种方法包括在层510的表面620上经由镍或钴130的无电镀层在表面上形成结构元件115，所述层刚性地固定到下面的基底110上。该方法还包括蚀刻掉部分使得结构元件的一部分能够相对于基板移动。

4. 发明授权

US06998758B2 Deformable MEMS mirror with membrane actuated by application of torque 有权
标题翻译：可变形的MEMS镜，通过施加扭矩由膜致动
公开(公告)号：US06998758B2
公开(公告)日：2006-02-14
申请号：US10455082
申请日：2003-06-05
申请人： Vladimir A. Aksyuk , Omar D. Lopez , Flavio Pardo , Maria E. Simon
发明人： Vladimir A. Aksyuk , Omar D. Lopez , Flavio Pardo , Maria E. Simon
IPC分类号： H02N1/00 , G02B26/10 , G02B26/08
CPC分类号： G02B26/06
摘要： A MEMS device having a deformable mirror. In a representative embodiment, the MEMS device includes a deformable membrane supporting a plurality of light-reflecting segments that form the deformable mirror. One or more actuators, at least one of which is configured to apply torque to a side of the membrane, are used to deform the membrane. Membrane deformation causes the segments to change orientation and thereby change the shape of the minor. A representative MEMS device of the invention enables segment displacements in two directions and thereby realizes effective mirror curvature values in the range from about −2 mm−1 to about +2 mm−1.
摘要翻译：具有可变形反射镜的MEMS器件。在代表性的实施例中，MEMS器件包括支撑形成可变形反射镜的多个光反射段的可变形膜。用于使膜变形的一个或多个致动器（其中至少一个构造成向膜的一侧施加扭矩）。膜变形导致片段改变取向，从而改变镜子的形状。本发明的代表性的MEMS器件使得能够在两个方向上的段位移，从而实现在约-2mm -1至约+2mm -1的范围内的有效镜曲率值 >。

5. 发明授权

US06781744B1 Amplification of MEMS motion 有权
标题翻译： MEMS运动的放大
公开(公告)号：US06781744B1
公开(公告)日：2004-08-24
申请号：US10459108
申请日：2003-06-11
申请人： Vladimir A. Aksyuk , Omar D. Lopez , Flavio Pardo , Maria E. Simon
发明人： Vladimir A. Aksyuk , Omar D. Lopez , Flavio Pardo , Maria E. Simon
IPC分类号： G02B2600
CPC分类号： G02B6/357 , B81B3/0062 , B81B2201/042 , G02B6/3518 , G02B26/0841
摘要： A MEMS device having a movable mirror and a movable actuator plate mechanically coupled together such that a relatively small displacement of the plate results in mirror rotation by a relatively large angle. In a representative embodiment, the mirror and actuator plate are supported on a substrate. The actuator plate moves in response to a voltage difference applied between the plate and an electrode located on the substrate beneath that plate. One or more springs attached to the plate provide a counteracting restoring force when they are stretched from their rest positions by the plate motion. A spring attached between the actuator plate and the mirror transfers the motion of the actuator plate to the mirror such that, when the actuator plate moves toward the substrate, the mirror moves away from the substrate. A representative MEMS device of the invention configured with a mirror that is about 100 &mgr;m in length is capable of producing the mirror rotation angle of about 15 degrees using an actuator voltage of only about 50 V.
摘要翻译： MEMS器件具有可移动反射镜和机械耦合在一起的可移动致动器板，使得板的相对小的位移导致反射镜旋转相对较大的角度。在代表性的实施例中，反射镜和致动器板被支撑在基板上。致动器板响应于施加在板和位于该板下方的衬底上的电极之间的电压差而移动。连接到板上的一个或多个弹簧当它们通过板运动从其静止位置拉伸时提供抵消恢复力。附接在致动器板和反射镜之间的弹簧将致动器板的运动传递到反射镜，使得当致动器板向基板移动时，反射镜远离基板移动。配置有长度大约为100微米的反射镜的本发明的代表性MEMS器件能够使用仅约50V的致动器电压产生约15度的反射镜旋转角度。

6. 发明授权

US08299878B2 RF circuit substrate comprised of guide portions made of photocurable layers and including a protruding surface features 有权
标题翻译：射频电路基板，由可光固化层构成的引导部分构成，并包括突出表面特征
公开(公告)号：US08299878B2
公开(公告)日：2012-10-30
申请号：US12586962
申请日：2009-09-30
申请人： Flavio Pardo , Robert F. Fullowan
发明人： Flavio Pardo , Robert F. Fullowan
IPC分类号： H01P3/18
CPC分类号： H01P11/002 , H01P3/121 , H01P3/123 , H01P7/065
摘要： A radio frequency circuit structure for transmitting radio signals includes a lower guide portion having a plurality of photocurable layers deposited on a substrate and an upper guide portion interfacing with the lower guide portion to define a guiding geometry. The upper guide portion may also include a plurality of photocurable layers deposited on a second substrate. A method for fabricating the radio frequency circuit structure includes depositing the plurality of photocurable layers on the substrate. A portion of each photocurable layer of the plurality of photocurable layers is exposed to ultraviolet light to form a latent image. The plurality of photocurable layers is developed to remove the portions not exposed to ultraviolet light to form a guide portion. The guide portion may be metalized and closed to form a guiding geometry. A lower guide portion may be closed by an upper guide portion formed in substantially the same manner as the lower guide portion.
摘要翻译：用于发送无线电信号的射频电路结构包括具有沉积在基板上的多个可光固化层的下引导部分和与下引导部分接合以限定引导几何形状的上引导部分。上引导部分还可以包括沉积在第二基底上的多个光固化层。一种用于制造射频电路结构的方法包括将多个光固化层沉积在基片上。多个光固化层的每个光固化层的一部分暴露于紫外光以形成潜像。多个光固化层被显影以除去未暴露于紫外光的部分以形成引导部分。引导部分可以被金属化和封闭以形成引导几何形状。下引导部分可以由与下引导部分基本相同的方式形成的上引导部分封闭。

7. 发明申请

US20120087620A1 OPTICAL TRANSMITTER WITH FLIP-CHIP MOUNTED LASER OR INTEGRATED ARRAYED WAVEGUIDE GRATING WAVELENTH DIVISION MULTIPLEXER 有权
标题翻译：带光滑安装激光或集成式阵列波导光栅光栅多路复用器的光传输器
公开(公告)号：US20120087620A1
公开(公告)日：2012-04-12
申请号：US12944917
申请日：2010-11-12
申请人： Flavio Pardo , Mark Earnshaw
发明人： Flavio Pardo , Mark Earnshaw
IPC分类号： G02B6/43 , B23K31/02
CPC分类号： G02B6/12019 , G02B6/12004 , G02B6/4249 , G02B6/43 , H01L2224/48091 , H01L2224/73257 , H01S5/005 , H01S5/02252 , H01S5/02272 , H01S5/4031 , H04B10/506 , H01L2924/00014
摘要： An optical communication system comprising first and second planar substrates and an alignment assembly. The first substrate of a semiconductor material, is located on a planar surface of a sub-mount and having a planar first edge. The second substrate of a different second material, is located on said planar surface of said sub-mount and having a planar second edge. The alignment assembly is located on said sub-mount, said alignment assembly including rigid standoff structures configured to fixedly vertically align said first and second edges above said sub-mount such that each optical output of one of said lasers is vertically aligned with the end of one of said light-guiding structures.
摘要翻译：一种包括第一和第二平面基板和对准组件的光通信系统。半导体材料的第一衬底位于子座的平坦表面上并且具有平面的第一边缘。不同第二材料的第二衬底位于所述子座的所述平坦表面上并具有平坦的第二边缘。对准组件位于所述子安装座上，所述对准组件包括刚性支架结构，其被配置为将所述第一和第二边缘固定地垂直对齐在所述子安装座上方，使得所述激光器之一的每个光学输出垂直对准所述导光结构之一。

8. 发明授权

US07733200B2 MEMS actuator 有权
标题翻译： MEMS致动器
公开(公告)号：US07733200B2
公开(公告)日：2010-06-08
申请号：US11904949
申请日：2007-09-29
申请人： Vladimir Anatolyevich Aksyuk , Flavio Pardo , Maria Elina Simon
发明人： Vladimir Anatolyevich Aksyuk , Flavio Pardo , Maria Elina Simon
IPC分类号： H01H51/22
CPC分类号： H01H1/0036 , B81B3/0024 , B81B2201/031 , H01H2001/0078 , H01H2061/006 , H01H2061/008
摘要： Apparatus including substrate, pusher assembly, and flexor assembly adjacent to pusher assembly. Pusher assembly includes hot and cold pusher arms. First ends of hot and cold pusher arms are anchored over substrate. Second ends of hot and cold pusher arms are coupled together and suspended for lateral displacement over substrate. Flexor assembly includes flexor arm, and conductor having actuator contact. First end of flexor arm is anchored over substrate. Pusher assembly is configured for causing lateral displacement of second end of flexor arm and of actuator contact over the substrate. Method includes providing apparatus and causing pusher assembly to laterally displace second end of flexor arm and actuator contact over substrate.
摘要翻译：包括靠近推进器组件的基底，推动器组件和屈肌组件的装置。推动器组件包括冷热推杆。冷热推杆的第一端锚固在基板上。冷热推杆的第二端连接在一起并悬挂在基板上横向移位。弯曲组件包括屈肌臂和具有致动器接触的导体。屈肌臂的第一端锚固在基底上。推动器组件被构造成使得屈肌臂的第二端和致动器接触的横向位移在基底上。方法包括提供装置并使得推动器组件横向移动屈肌臂的第二端和致动器接触在基底上。

9. 发明申请

US20090040636A1 TAPERED REINFORCING STRUTS FOR MICROMACHINED STRUCTURES 有权
标题翻译：用于微结构结构的锥形加固件
公开(公告)号：US20090040636A1
公开(公告)日：2009-02-12
申请号：US11836540
申请日：2007-08-09
申请人： Fred P. Klemens , Flavio Pardo
发明人： Fred P. Klemens , Flavio Pardo
IPC分类号： G02B7/182
CPC分类号： B81B3/007 , B81B2201/042 , G02B26/0841
摘要： According to one embodiment, a reinforcing strut of the invention is a polyhedron attached to a plate and having at least two slanted facets, with each of the slanted facets oriented with respect to the plane of the plate at an angle different from about 90 degrees. Two slanted facets intersect to form an edge that causes the strut to have a tapered profile along the longitudinal axis of the strut.
摘要翻译：根据一个实施例，本发明的加强支柱是连接到板上并具有至少两个倾斜小平面的多面体，其中每个倾斜小面以不同于约90度的角度相对于板的平面定向。两个倾斜小平面相交以形成一个边缘，该边缘使支柱沿着支柱的纵向轴线具有锥形轮廓。

10. 发明授权

US08798409B2 Optical transmitter with flip-chip mounted laser or integrated arrayed waveguide grating wavelenth division multiplexer 有权
标题翻译：具有倒装芯片激光器或集成阵列波导光栅波分复用器的光发射机
公开(公告)号：US08798409B2
公开(公告)日：2014-08-05
申请号：US12944917
申请日：2010-11-12
申请人： Flavio Pardo , Mark Earnshaw
发明人： Flavio Pardo , Mark Earnshaw
IPC分类号： G02B6/12 , G02B6/26 , G02B6/36 , G02B6/10 , G02B6/43 , G02B6/42
CPC分类号： G02B6/12019 , G02B6/12004 , G02B6/4249 , G02B6/43 , H01L2224/48091 , H01L2224/73257 , H01S5/005 , H01S5/02252 , H01S5/02272 , H01S5/4031 , H04B10/506 , H01L2924/00014
摘要： An optical communication system comprising first and second planar substrates and an alignment assembly. The first substrate of a semiconductor material, is located on a planar surface of a sub-mount and having a planar first edge. The second substrate of a different second material, is located on said planar surface of said sub-mount and having a planar second edge. The alignment assembly is located on said sub-mount, said alignment assembly including rigid standoff structures configured to fixedly vertically align said first and second edges above said sub-mount such that each optical output of one of said lasers is vertically aligned with the end of one of said light-guiding structures.
摘要翻译：一种包括第一和第二平面基板和对准组件的光通信系统。半导体材料的第一衬底位于子座的平坦表面上并且具有平面的第一边缘。不同第二材料的第二衬底位于所述子座的所述平坦表面上并具有平坦的第二边缘。对准组件位于所述子安装座上，所述对准组件包括刚性支架结构，其被配置为将所述第一和第二边缘固定地垂直对齐在所述子安装座上方，使得所述激光器之一的每个光学输出垂直对准所述导光结构之一。

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