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1. 发明申请

US20120111112A1 Resonating Sensor with Mechanical Constraints 有权
标题翻译：谐振传感器与机械约束
公开(公告)号：US20120111112A1
公开(公告)日：2012-05-10
申请号：US12940354
申请日：2010-11-05
申请人： Firas N. Sammoura , William D. Sawyer
发明人： Firas N. Sammoura , William D. Sawyer
IPC分类号： G01P15/00
CPC分类号： G01C19/5698
摘要： A method and apparatus for sensing movement resonates a primary member in a flexure mode at a given frequency, thus causing the primary member to have top and bottom portions that resonate at substantially about zero Hertz. The method also secures the bottom portion to a first substrate, and mechanically constrains the top portion while resonating in the flexure mode to substantially eliminate vibrations in the top portion. Finally, the method generates a changing capacitance signal in response to movement of the primary member. When generating this changing capacitance signal, the primary member resonates in a bulk mode at a given frequency.
摘要翻译：用于感测运动的方法和装置以给定的频率以弯曲模式谐振主要构件，从而使主构件具有基本上约为零赫兹共振的顶部和底部。该方法还将底部部分固定到第一基板，并且机械约束顶部部分，同时以弯曲模式共振，以基本上消除顶部部分中的振动。最后，该方法响应于主构件的移动而产生变化的电容信号。当产生这种改变的电容信号时，主要部件以给定的频率以体模式谐振。

2. 发明授权

US08631700B2 Resonating sensor with mechanical constraints 有权
标题翻译：谐振传感器具有机械约束
公开(公告)号：US08631700B2
公开(公告)日：2014-01-21
申请号：US12940354
申请日：2010-11-05
申请人： Firas N. Sammoura , William D. Sawyer
发明人： Firas N. Sammoura , William D. Sawyer
IPC分类号： G01C19/56
CPC分类号： G01C19/5698
摘要： A method and apparatus for sensing movement resonates a primary member in a flexure mode at a given frequency, thus causing the primary member to have top and bottom portions that resonate at substantially about zero Hertz. The method also secures the bottom portion to a first substrate, and mechanically constrains the top portion while resonating in the flexure mode to substantially eliminate vibrations in the top portion. Finally, the method generates a changing capacitance signal in response to movement of the primary member. When generating this changing capacitance signal, the primary member resonates in a bulk mode at a given frequency.
摘要翻译：用于感测运动的方法和装置以给定的频率以弯曲模式谐振主要构件，从而使主构件具有基本上约为零赫兹共振的顶部和底部。该方法还将底部部分固定到第一基板，并且机械约束顶部部分，同时以弯曲模式共振，以基本上消除顶部部分中的振动。最后，该方法响应于主构件的移动而产生变化的电容信号。当产生这种改变的电容信号时，主要部件以给定的频率以体模式谐振。

3. 发明申请

US20120111113A1 BAW Gyroscope with Bottom Electrode 有权
标题翻译： BAW陀螺仪底部电极
公开(公告)号：US20120111113A1
公开(公告)日：2012-05-10
申请号：US12983476
申请日：2011-01-03
申请人： Firas N. Sammoura , Kuang L. Yang
发明人： Firas N. Sammoura , Kuang L. Yang
IPC分类号： G01P15/00 , H05K13/00
CPC分类号： H01L21/4846 , G01C19/5698 , H01L21/84 , Y10T29/49002
摘要： A bulk acoustic wave gyroscope has a primary member in a member plane, and an electrode layer in an electrode plane spaced from the member plane. The electrode layer has a first portion that is electrically isolated from a second portion. The first portion, however, is mechanically coupled with the second portion and faces the primary member (e.g., to actuate or sense movement of the primary member). For support, the second portion of the electrode is directly coupled with structure in the member plane.
摘要翻译：体声波陀螺仪在构件平面中具有主要构件，以及在与构件平面间隔开的电极平面中的电极层。电极层具有与第二部分电隔离的第一部分。然而，第一部分与第二部分机械联接并面向主要部件（例如，以致动或感测主部件的运动）。为了支撑，电极的第二部分直接与构件平面中的结构耦合。

4. 发明授权

US08616056B2 BAW gyroscope with bottom electrode 有权
标题翻译： BAW陀螺仪带底部电极
公开(公告)号：US08616056B2
公开(公告)日：2013-12-31
申请号：US12983476
申请日：2011-01-03
申请人： Firas N. Sammoura , Kuang L. Yang
发明人： Firas N. Sammoura , Kuang L. Yang
IPC分类号： G01C19/56
CPC分类号： H01L21/4846 , G01C19/5698 , H01L21/84 , Y10T29/49002
摘要： A bulk acoustic wave gyroscope has a primary member in a member plane, and an electrode layer in an electrode plane spaced from the member plane. The electrode layer has a first portion that is electrically isolated from a second portion. The first portion, however, is mechanically coupled with the second portion and faces the primary member (e.g., to actuate or sense movement of the primary member). For support, the second portion of the electrode is directly coupled with structure in the member plane.
摘要翻译：体声波陀螺仪在构件平面中具有主要构件，以及在与构件平面间隔开的电极平面中的电极层。电极层具有与第二部分电隔离的第一部分。然而，第一部分与第二部分机械联接并面向主要部件（例如，以致动或感测主部件的运动）。为了支撑，电极的第二部分直接与构件平面中的结构耦合。

5. 发明申请

US20090320557A1 MEMS Stiction Testing Apparatus and Method 有权
标题翻译： MEMS静力测试仪器及方法
公开(公告)号：US20090320557A1
公开(公告)日：2009-12-31
申请号：US12490573
申请日：2009-06-24
申请人： Firas N. Sammoura , William Sawyer , Kuang L. Yang
发明人： Firas N. Sammoura , William Sawyer , Kuang L. Yang
IPC分类号： G01N19/02
CPC分类号： B81C99/0045
摘要： A MEMS stiction testing method applies a first electrical signal to a MEMS device having two opposing surfaces to cause the two opposing surfaces to make physical contact. The two opposing surfaces produce a second electrical signal when in physical contact. The method then substantially mitigates the first electrical signal after detecting that the second electrical signal has reached a prescribed maximum value.
摘要翻译： MEMS静态测试方法将第一电信号应用于具有两个相对表面的MEMS器件，以使两个相对表面进行物理接触。当物理接触时，两个相对表面产生第二电信号。然后，该方法在检测到第二电信号已经达到规定的最大值之后基本上减轻第一电信号。

6. 发明授权

US08215151B2 MEMS stiction testing apparatus and method 有权
标题翻译： MEMS静电测试仪器及方法
公开(公告)号：US08215151B2
公开(公告)日：2012-07-10
申请号：US12490573
申请日：2009-06-24
申请人： Firas N. Sammoura , William Sawyer , Kuang L. Yang
发明人： Firas N. Sammoura , William Sawyer , Kuang L. Yang
IPC分类号： G01P21/00
CPC分类号： B81C99/0045
摘要： A MEMS stiction testing method applies a first electrical signal to a MEMS device having two opposing surfaces to cause the two opposing surfaces to make physical contact. The two opposing surfaces produce a second electrical signal when in physical contact. The method then substantially mitigates the first electrical signal after detecting that the second electrical signal has reached a prescribed maximum value.
摘要翻译： MEMS静态测试方法将第一电信号应用于具有两个相对表面的MEMS器件，以使两个相对表面进行物理接触。当物理接触时，两个相对表面产生第二电信号。然后，该方法在检测到第二电信号已经达到规定的最大值之后基本上减轻第一电信号。

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