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1. 发明申请

US20120111113A1 BAW Gyroscope with Bottom Electrode 有权
标题翻译： BAW陀螺仪底部电极
公开(公告)号：US20120111113A1
公开(公告)日：2012-05-10
申请号：US12983476
申请日：2011-01-03
申请人： Firas N. Sammoura , Kuang L. Yang
发明人： Firas N. Sammoura , Kuang L. Yang
IPC分类号： G01P15/00 , H05K13/00
CPC分类号： H01L21/4846 , G01C19/5698 , H01L21/84 , Y10T29/49002
摘要： A bulk acoustic wave gyroscope has a primary member in a member plane, and an electrode layer in an electrode plane spaced from the member plane. The electrode layer has a first portion that is electrically isolated from a second portion. The first portion, however, is mechanically coupled with the second portion and faces the primary member (e.g., to actuate or sense movement of the primary member). For support, the second portion of the electrode is directly coupled with structure in the member plane.
摘要翻译：体声波陀螺仪在构件平面中具有主要构件，以及在与构件平面间隔开的电极平面中的电极层。电极层具有与第二部分电隔离的第一部分。然而，第一部分与第二部分机械联接并面向主要部件（例如，以致动或感测主部件的运动）。为了支撑，电极的第二部分直接与构件平面中的结构耦合。

2. 发明授权

US08616056B2 BAW gyroscope with bottom electrode 有权
标题翻译： BAW陀螺仪带底部电极
公开(公告)号：US08616056B2
公开(公告)日：2013-12-31
申请号：US12983476
申请日：2011-01-03
申请人： Firas N. Sammoura , Kuang L. Yang
发明人： Firas N. Sammoura , Kuang L. Yang
IPC分类号： G01C19/56
CPC分类号： H01L21/4846 , G01C19/5698 , H01L21/84 , Y10T29/49002
摘要： A bulk acoustic wave gyroscope has a primary member in a member plane, and an electrode layer in an electrode plane spaced from the member plane. The electrode layer has a first portion that is electrically isolated from a second portion. The first portion, however, is mechanically coupled with the second portion and faces the primary member (e.g., to actuate or sense movement of the primary member). For support, the second portion of the electrode is directly coupled with structure in the member plane.
摘要翻译：体声波陀螺仪在构件平面中具有主要构件，以及在与构件平面间隔开的电极平面中的电极层。电极层具有与第二部分电隔离的第一部分。然而，第一部分与第二部分机械联接并面向主要部件（例如，以致动或感测主部件的运动）。为了支撑，电极的第二部分直接与构件平面中的结构耦合。

3. 发明申请

US20090320557A1 MEMS Stiction Testing Apparatus and Method 有权
标题翻译： MEMS静力测试仪器及方法
公开(公告)号：US20090320557A1
公开(公告)日：2009-12-31
申请号：US12490573
申请日：2009-06-24
申请人： Firas N. Sammoura , William Sawyer , Kuang L. Yang
发明人： Firas N. Sammoura , William Sawyer , Kuang L. Yang
IPC分类号： G01N19/02
CPC分类号： B81C99/0045
摘要： A MEMS stiction testing method applies a first electrical signal to a MEMS device having two opposing surfaces to cause the two opposing surfaces to make physical contact. The two opposing surfaces produce a second electrical signal when in physical contact. The method then substantially mitigates the first electrical signal after detecting that the second electrical signal has reached a prescribed maximum value.
摘要翻译： MEMS静态测试方法将第一电信号应用于具有两个相对表面的MEMS器件，以使两个相对表面进行物理接触。当物理接触时，两个相对表面产生第二电信号。然后，该方法在检测到第二电信号已经达到规定的最大值之后基本上减轻第一电信号。

4. 发明授权

US08215151B2 MEMS stiction testing apparatus and method 有权
标题翻译： MEMS静电测试仪器及方法
公开(公告)号：US08215151B2
公开(公告)日：2012-07-10
申请号：US12490573
申请日：2009-06-24
申请人： Firas N. Sammoura , William Sawyer , Kuang L. Yang
发明人： Firas N. Sammoura , William Sawyer , Kuang L. Yang
IPC分类号： G01P21/00
CPC分类号： B81C99/0045
摘要： A MEMS stiction testing method applies a first electrical signal to a MEMS device having two opposing surfaces to cause the two opposing surfaces to make physical contact. The two opposing surfaces produce a second electrical signal when in physical contact. The method then substantially mitigates the first electrical signal after detecting that the second electrical signal has reached a prescribed maximum value.
摘要翻译： MEMS静态测试方法将第一电信号应用于具有两个相对表面的MEMS器件，以使两个相对表面进行物理接触。当物理接触时，两个相对表面产生第二电信号。然后，该方法在检测到第二电信号已经达到规定的最大值之后基本上减轻第一电信号。

5. 发明申请

US20130320466A1 Package for Damping Inertial Sensor 审中-公开
标题翻译：阻尼惯性传感器封装
公开(公告)号：US20130320466A1
公开(公告)日：2013-12-05
申请号：US13484567
申请日：2012-05-31
申请人： Li Chen , Kuang L. Yang
发明人： Li Chen , Kuang L. Yang
IPC分类号： H01L29/84 , H01L21/02
CPC分类号： G01P1/003 , G01P1/023 , G01P15/0802 , G01P15/125
摘要： A capped micromachined accelerometer with a Q-factor of less than 2.0 is fabricated without encapsulating a high-viscosity gas with the movable mass of the micromachined accelerometer by providing small gaps between the movable mass and the substrate, and between the movable mass and the cap. The cap may be an silicon cap, and may be an ASIC smart cap.
摘要翻译：通过在可移动质量块和衬底之间以及可移动质量块和盖子之间提供小的间隙，制造了Q值小于2.0的加盖微机械加速度计，而不用高密度气体与微机械加速度计的可移动质量块封装。盖可以是硅帽，并且可以是ASIC智能帽。

6. 发明授权

US09174837B2 System and method for detecting surface charges of a MEMS device 有权
标题翻译：用于检测MEMS器件的表面电荷的系统和方法
公开(公告)号：US09174837B2
公开(公告)日：2015-11-03
申请号：US13435236
申请日：2012-03-30
申请人： Fang Liu , Kuang L. Yang
发明人： Fang Liu , Kuang L. Yang
IPC分类号： G01R27/26 , G01L9/00 , B81B7/00 , G01R29/24
CPC分类号： B81B7/008 , B81B2207/03 , G01R29/24
摘要： A method for measuring retained surface charges within a MEMS device includes performing an initial voltage sweep on the MEMS device, and recording the capacitance between a first and second electrode of the MEMS device. The method may then (1) apply a stress signal to the MEMS device that causes a first and/or second electrode within the MEMS device to retain a surface charge, and (2) perform at least one additional voltage sweep on the MEMS device. The method may record the capacitance during the additional voltage sweep(s), and calculate a C-V center voltage shift based upon the data obtained during the initial voltage sweep and additional voltage sweep. The voltage shift is representative of the retained surface charge.
摘要翻译：用于测量MEMS器件内的保持的表面电荷的方法包括在MEMS器件上执行初始电压扫描，以及在MEMS器件的第一和第二电极之间记录电容。该方法可以（1）将应力信号施加到MEMS器件，其使MEMS器件内的第一和/或第二电极保持表面电荷，以及（2）在MEMS器件上执行至少一个额外的电压扫描。该方法可以在附加电压扫描期间记录电容，并且基于在初始电压扫描期间获得的数据和附加电压扫描来计算C-V中心电压偏移。电压偏移代表保留的表面电荷。

7. 发明授权

US08590136B2 Method of fabricating a dual single-crystal backplate microphone 有权
标题翻译：制造双单面背板麦克风的方法
公开(公告)号：US08590136B2
公开(公告)日：2013-11-26
申请号：US12870288
申请日：2010-08-27
申请人： Kuang L. Yang , Li Chen , Thomas D. Chen
发明人： Kuang L. Yang , Li Chen , Thomas D. Chen
IPC分类号： H04R31/00
CPC分类号： H04R19/04 , B81B2201/0257 , B81C1/00182 , B81C2201/0194 , H04R19/005 , H04R2201/003 , Y10T29/43 , Y10T29/49002 , Y10T29/49005 , Y10T29/4908
摘要： A dual backplate MEMS microphone system including a flexible diaphragm sandwiched between two single-crystal silicon backplates may be formed by fabricating each backplate in a separate wafer, and then transferring one backplate from its wafer to the other wafer, to form two separate capacitors with the diaphragm.
摘要翻译：包括夹在两个单晶硅背板之间的柔性隔膜的双背板MEMS麦克风系统可以通过在单独的晶片中制造每个背板，然后将一个背板从其晶片传输到另一个晶片来形成两个单独的电容器，其中隔膜

8. 发明授权

US5006421A Metalization systems for heater/sensor elements 失效
标题翻译：加热器/传感器元件的金属化系统
公开(公告)号：US5006421A
公开(公告)日：1991-04-09
申请号：US257074
申请日：1988-09-30
申请人： Kuang L. Yang , David Gutierrez , George E. Gimpelson
发明人： Kuang L. Yang , David Gutierrez , George E. Gimpelson
IPC分类号： G01K7/18 , G01F1/684 , G01K7/22 , G01P5/10 , H01C7/00 , H01C7/02 , H01L29/84
CPC分类号： H01C7/021 , G01F1/6845 , G01P5/10 , H01C7/022 , Y10T428/12493 , Y10T428/12674 , Y10T428/12806 , Y10T428/12812 , Y10T428/12833 , Y10T428/12868
摘要： Device comprising a substrate and a metallized sensor/heater element having a temperature coefficient of resistance of at least 2000 parts per million. Methods of fabricating the devices are also disclosed.
摘要翻译：该装置包括基片和金属化传感器/加热器元件，其温度系数电阻为至少2000ppm。还公开了制造器件的方法。

9. 发明授权

US08755541B2 Microphone with parasitic capacitance cancelation 有权
标题翻译：具有寄生电容消除的麦克风
公开(公告)号：US08755541B2
公开(公告)日：2014-06-17
申请号：US13609872
申请日：2012-09-11
申请人： Fang Liu , Kuang L. Yang
发明人： Fang Liu , Kuang L. Yang
IPC分类号： H04R25/00
CPC分类号： H04R19/005 , H04R3/06 , Y10T29/43
摘要： A microelectromechanical microphone and method of manufacturing the same are disclosed. The microphone has a moveable diaphragm and a fixed backplate that create a variable capacitance. A fixed anchor electrically coupled to the diaphragm has an electrode that measures the variable capacitance, but also measures an unwanted, additive, parasitic capacitance. Various embodiments include a reference electrode, manufactured in the same deposition layer as the diaphragm or anchor, that measures only the parasitic capacitance. A circuit is provided either on-chip or off-chip that subtracts the capacitance measured at the reference electrode from that measured at the anchor, thereby producing only the desired variable capacitance as output. Because the reference electrode is deposited at the same time as the diaphragm or anchor, only minimal changes are required to existing manufacturing techniques.
摘要翻译：公开了一种微机电麦克风及其制造方法。麦克风具有可移动的隔膜和固定的背板，产生可变电容。电耦合到隔膜的固定锚具有测量可变电容的电极，但也测量不想要的附加的寄生电容。各种实施例包括参考电极，其制造在与隔膜或锚固件相同的沉积层中，仅测量寄生电容。提供片上或片外的电路，其减去在参考电极处测量的电容与在锚处测量的电容，从而仅产生期望的可变电容作为输出。因为参考电极与隔膜或锚固件同时沉积，所以现有制造技术只需要最小的变化。

10. 发明申请

US20140001577A1 MEMS Device with Improved Charge Elimination and Methods of Producing Same 有权
标题翻译：具有改善电荷消除的MEMS器件及其生产方法相同
公开(公告)号：US20140001577A1
公开(公告)日：2014-01-02
申请号：US13535781
申请日：2012-06-28
申请人： Fang Liu , Kuang L. Yang
发明人： Fang Liu , Kuang L. Yang
IPC分类号： H01L29/84 , H01L21/02
CPC分类号： B81B3/0008
摘要： A method for producing a MEMS device having improved charge elimination characteristics includes providing a substrate having one or more layers, and applying a first charge elimination layer onto at least one portion of one given layer of the substrate. The method may then (1) apply a sacrificial layer onto the first charge elimination layer, (2) apply a second charge elimination layer onto at least a portion of the sacrificial layer, and (3) deposit a movable layer onto at least a portion of the second charge elimination layer. To form a structure within the movable layer the method may etch the movable layer. The method may then etch the sacrificial layer to release the structure.
摘要翻译：一种具有改善的电荷消除特性的MEMS器件的制造方法包括提供具有一个或多个层的衬底，以及在衬底的一个给定层的至少一部分上施加第一电荷消除层。然后，该方法可以（1）在第一电荷消除层上施加牺牲层，（2）将第二电荷消除层施加到牺牲层的至少一部分上，以及（3）将可移动层沉积在至少一部分上的第二电荷消除层。为了在可移动层内形成结构，该方法可以蚀刻可移动层。该方法然后可以蚀刻牺牲层以释放结构。

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