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    • 4. 发明申请
    • Method of heat treating a superalloy component and an alloy component
    • 高温合金部件和合金部件的热处理方法
    • US20090071580A1
    • 2009-03-19
    • US12155826
    • 2008-06-10
    • Robert J. MitchellDavid U. FurrerJoseph A. LemskyMark C. Hardy
    • Robert J. MitchellDavid U. FurrerJoseph A. LemskyMark C. Hardy
    • C22F1/10C21D9/00
    • C21D1/70C21D1/26C21D9/0068C21D2221/00
    • A method of heat treating a superalloy component comprises solution heat treating the component at a temperature below the gamma prime solvus temperature to produce a fine grain structure in the component. Insulation is placed over a first area of the component to form an insulated assembly. The insulated assembly is placed in a furnace at a temperature below the solvus temperature and maintained at that temperature for a predetermined time to achieve a uniform temperature in the component. The temperature is increased at a predetermined rate to a temperature above the solvus temperature to maintain a fine grain structure in a first region, to produce a coarse grain structure in a second region and to produce a transitional structure in a third region between the first and second regions of the component. The insulated assembly is removed from the furnace when the second region of the component has been above the solvus temperature for a predetermined time and/or the first region of the component has reached a predetermined temperature.
    • 热处理超合金部件的方法包括在低于伽马质子溶质温度的温度下对组分进行固溶热处理,以在组分中产生细晶粒结构。 绝缘被放置在部件的第一区域上以形成绝缘组件。 将绝缘组件放置在低于固溶温度的温度下的炉中,并在该温度下保持预定时间,以实现组分中均匀的温度。 温度以预定速率增加到高于溶剂温度的温度,以在第一区域中保持细晶粒结构,以在第二区域中产生粗晶粒结构,并在第一区域和第二区域之间的第三区域产生过渡结构 组件的第二个区域。 当组件的第二区域已经高于固相温度达预定时间和/或部件的第一区域已经达到预定温度时,将绝热组件从炉中移除。
    • 9. 发明申请
    • High throughput wafer notch aligner
    • 高通量晶圆缺口对准器
    • US20080138175A1
    • 2008-06-12
    • US11634697
    • 2006-12-06
    • Robert J. MitchellJoseph Ferrara
    • Robert J. MitchellJoseph Ferrara
    • H01L21/677B65H1/00G06F7/00
    • H01L21/681H01L21/67265H01L21/67745
    • An ion implantation apparatus, system, and method are provided for a transferring a plurality of workpieces between vacuum and atmospheric pressures, wherein an alignment mechanism is operable to align a plurality of workpieces for generally simultaneous transportation to a dual-workpiece load lock chamber. The alignment mechanism comprises a characterization device, an elevator, and two vertically-aligned workpiece supports for supporting two workpieces. First and second atmospheric robots are configured to generally simultaneously transfer two workpieces at a time between load lock modules, the alignment mechanism, and a FOUP. Third and fourth vacuum robots are configured to transfer one workpiece at a time between the load lock modules and a process module.
    • 提供一种用于在真空和大气压之间传送多个工件的离子注入装置,系统和方法,其中对准机构可操作以将多个工件对准,以便大体上同时传送到双工件加载锁定室。 对准机构包括表征装置,电梯和用于支撑两个工件的两个垂直对齐的工件支撑件。 第一和第二大气机器人被配置为一般在负载锁定模块,对准机构和FOUP之间同时传送两个工件。 第三和第四真空机器人被配置为在加载锁模块和处理模块之间一次传送一个工件。
    • 10. 发明申请
    • Single crystal component and a method of heat treating a single crystal component
    • 单晶成分和单晶成分的热处理方法
    • US20100043929A1
    • 2010-02-25
    • US12461012
    • 2009-07-29
    • Robert A. HobbsSammy TinCatherine M.F. RaeRobert J. Mitchell
    • Robert A. HobbsSammy TinCatherine M.F. RaeRobert J. Mitchell
    • C22F1/00C21D9/00
    • F01D5/28C22F1/10F01D5/225F01D5/3007F05D2300/607
    • A single crystal component comprising a first region and a second region. The component comprising a nickel base single crystal superalloy having a gamma phase matrix and gamma prime phase precipitates distributed in the gamma phase matrix. The first region of the component comprises a bi-modal distribution of gamma prime phase precipitates in the gamma phase matrix and the second region of the component comprising a uni-modal distribution of gamma prime phase precipitates in the gamma phase matrix. The uni-modal distribution of gamma prime phase precipitates consisting of primary cuboidal gamma prime phase precipitates and the bi-modal distribution of gamma prime phase precipitates consisting of primary cuboidal gamma prime phase precipitates and secondary spherical gamma prime phase precipitates and/or cuboidal gamma prime phase precipitates whereby the first region of the component has enhanced resistance to low cycle fatigue and the second region of the component has enhanced resistance to creep deformation.
    • 一种单晶组分,包括第一区和第二区。 该组分包含具有分布在伽马相基质中的γ相和γ初相的镍基单晶超合金。 该组件的第一区域包括在伽马相基质中的γ相相沉淀物的双模式分布,并且该组分的第二区域包含γ相基质中γ相析出物的单模分布。 由初始立方γ相析出物组成的γ初相相沉淀物的单态分布以及由原始立方体γ相析出物和二次球形γ初相相析出物和/或立方形γ原子组成的γ初相析出物的双峰分布 相沉积物,由此部件的第一区域具有增强的耐低循环疲劳性,并且部件的第二区域具有增强的抗蠕变变形性。