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1. 发明申请

US20070001571A1 Method and device for the generation of a plasma through electric discharge in a discharge space 有权
标题翻译：用于通过放电空间中的放电产生等离子体的方法和装置
公开(公告)号：US20070001571A1
公开(公告)日：2007-01-04
申请号：US10548243
申请日：2004-03-05
申请人： Eric Bosch , Jeroen Jonkers , Willi Neff , Gunther Derra
发明人： Eric Bosch , Jeroen Jonkers , Willi Neff , Gunther Derra
IPC分类号： H01J17/26 , H01J61/28
CPC分类号： H05G2/003 , H05G2/005 , H05H1/48
摘要： The invention relates to a method and a device for the generation of a plasma through electric discharge in a discharge space which contains at least two electrodes, at least one of which is constructed from a matrix material or carrier material, such that an erosion-susceptible region with an evaporation spot is formed at least by the current flow. To present a method or a device for the generation of a plasma by electric discharge, it is suggested that a sacrificial substrate (38) is provided at least at the evaporation spot, the boiling point of said lying below the melting point of the carrier material (30), such that charge carriers arising in the current flow are mainly generated from the sacrificial substrate (38).
摘要翻译：本发明涉及一种用于在放电空间中通过放电产生等离子体的方法和装置，其包含至少两个电极，其中至少一个电极由基质材料或载体材料构成，使得易受侵蚀至少由电流形成具有蒸发点的区域。为了呈现用于通过放电产生等离子体的方法或装置，建议至少在蒸发点处提供牺牲衬底（38），其中所述的沸点低于载体材料的熔点（30），使得在电流中产生的电荷载体主要从牺牲衬底（38）产生。

2. 发明申请

US20110248192A1 METHOD AND DEVICE FOR GENERATING EUV RADIATION OR SOFT X-RAYS WITH ENHANCED EFFICIENCY 有权
标题翻译：用于产生具有增强效率的EUV辐射或软X射线的方法和装置
公开(公告)号：US20110248192A1
公开(公告)日：2011-10-13
申请号：US13139601
申请日：2009-12-09
申请人： Jeroen Jonkers , Felix Alexander Krepper , Harald Ernest Verbraak , Jakob Willi Neff
发明人： Jeroen Jonkers , Felix Alexander Krepper , Harald Ernest Verbraak , Jakob Willi Neff
IPC分类号： H05G2/00
CPC分类号： H05G2/003 , H05G2/005
摘要： The present invention relates to a method and device for generating optical radiation, in particular EUV radiation or soft x-rays, by means of an electrically operated discharge. A plasma (15) is ignited in a gaseous medium between at least two electrodes (1, 2), wherein said gaseous medium is produced at least partly from a liquid material (6) which is applied to one or several surface(s) moving in the discharge space and is at least partially evaporated by one or several pulsed energy beams. In the proposed method and device at least two consecutive pulses (9, 18) are applied within a time interval of each electrical discharge onto said surface(s). With this measure, the collectable conversion efficiency is increased compared to the use of only one single energy pulse within each electrical discharge.
摘要翻译：本发明涉及通过电动放电产生光辐射，特别是EUV辐射或软X射线的方法和装置。等离子体（15）在至少两个电极（1,2）之间的气态介质中点燃，其中所述气体介质至少部分地由施加到移动的一个或多个表面的液体材料（6）产生在放电空间中并且被一个或多个脉冲能量束至少部分蒸发。在所提出的方法和装置中，在每个放电到所述表面的时间间隔内施加至少两个连续脉冲（9,18）。通过这种措施，与在每次放电期间仅使用一个单个能量脉冲相比，可收集的转换效率提高。

3. 发明申请

US20070090304A1 Method and apparatus for producing extreme ultraviolet radiation or soft x-ray radiation 有权
标题翻译：用于产生极紫外辐射或软X射线辐射的方法和装置
公开(公告)号：US20070090304A1
公开(公告)日：2007-04-26
申请号：US10570535
申请日：2004-09-01
申请人： Jeroen Jonkers , Dominik Vaudrevange , Willi Neff
发明人： Jeroen Jonkers , Dominik Vaudrevange , Willi Neff
IPC分类号： G01J3/10
CPC分类号： H05G2/003 , H05G2/005
摘要： A method of producing extreme ultraviolet radiation (EUV) or soft X-ray radiation by means of an electrically operated discharge, in particular for EUV lithography or for metrology, in which a plasma (22) is ignited in a gaseous medium between at least two electrodes (14, 16) in a discharge space (12), said plasma emitting said radiation that is to be produced. The gaseous medium is produced from a metal melt (24), which is applied to a surface in said discharge space (12) and at least partially evaporated by an energy beam, in particular by a laser beam (20).
摘要翻译：一种通过电操作的放电产生极紫外辐射（EUV）或软X射线辐射的方法，特别是用于EUV光刻或计量的方法，其中等离子体（22）在气体介质中点燃至少两个放电空间（12）中的电极（14,16），所述等离子体发射要产生的辐射。气体介质由金属熔体（24）产生，金属熔体（24）施加到所述放电空间（12）中的表面，并且至少部分地被能量束，特别是激光束（20）蒸发。

4. 发明申请

US20090250638A1 EUV PLASMA DISCHARGE LAMP WITH CONVEYOR BELT ELECTRODES 有权
标题翻译：带输送带皮带电极的EUV等离子体放电灯
公开(公告)号：US20090250638A1
公开(公告)日：2009-10-08
申请号：US12439696
申请日：2007-08-29
申请人： Jeroen Jonkers , Jacob Willi Neff , Ralf Pruemmer
发明人： Jeroen Jonkers , Jacob Willi Neff , Ralf Pruemmer
IPC分类号： H05G2/00
CPC分类号： H05G2/003 , H05G2/005
摘要： The present invention relates to a plasma discharge lamp for generating EUV radiation and/or soft X-rays by means of an electrically operated discharge. The proposed lamp comprises at least two electrodes arranged in a discharge space at a distance from one another to form a gap which allows the ignition of a plasma (14) in a gaseous medium between said electrodes. A metal applying device applies a metal to a surface of said electrodes. The electrodes are formed of conveyer belts (15) driven to transport the metal to said gap, wherein for each of the electrodes a shaper element (13) is provided at the gap to ensure a proper form and distance of the electrodes at the gap. An energy beam device (4) is adapted to direct an energy beam onto at least one of said surfaces in the gap evaporating said applied metal at least partially thereby producing said gaseous medium. With the proposed plasma discharge lamp high input powers can be achieved at a compact design of the lamp.
摘要翻译：本发明涉及一种用于通过电动放电产生EUV辐射和/或软X射线的等离子体放电灯。所提出的灯包括布置在彼此间隔一定距离的放电空间中的至少两个电极，以形成允许在所述电极之间的气态介质中的等离子体（14）点火的间隙。金属施加装置将金属施加到所述电极的表面。电极由驱动以将金属输送到所述间隙的输送带（15）形成，其中对于每个电极，在间隙处设置成形元件（13），以确保电极在间隙处的适当形式和距离。能量束装置（4）适于将能量束引导到间隙中的至少一个所述表面中，至少部分地蒸发所述施加的金属，从而产生所述气体介质。利用所提出的等离子体放电灯，可以在灯的紧凑设计下实现高输入功率。

5. 发明授权

US07397190B2 Gas discharge lamp for extreme UV radiation 有权
标题翻译：用于极紫外辐射的气体放电灯
公开(公告)号：US07397190B2
公开(公告)日：2008-07-08
申请号：US10536918
申请日：2003-11-28
申请人： Guenther Hans Derra , Joseph Robert Rene Pankert , Willi Neff , Klaus Bergmann , Jeroen Jonkers
发明人： Guenther Hans Derra , Joseph Robert Rene Pankert , Willi Neff , Klaus Bergmann , Jeroen Jonkers
IPC分类号： H01J61/09
CPC分类号： H05G2/003 , H01J61/09
摘要： The invention relates to a gas discharge lamp for EUV radiation with an anode (1) and a hollow cathode (2), wherein the hollow cathode (2) has at least two openings (3, 3′) and the anode (1) has a through hole (4), which is characterized in that the longitudinal axes (5, 5′) of the hollow cathode openings (3) have a common point of intersection S lying on the axis of symmetry (6) of the anode opening (4).
摘要翻译：本发明涉及一种用于具有阳极（1）和中空阴极（2）的EUV辐射的气体放电灯，其中中空阴极（2）具有至少两个开口（3,3'），阳极（1）具有一个通孔（4），其特征在于，中空阴极开口（3）的纵向轴线（5,5'）具有位于阳极开口（6）的对称轴线（6）上的公共交点S 4）。

6. 发明授权

US07897948B2 EUV plasma discharge lamp with conveyor belt electrodes 有权
标题翻译： EUV等离子放电灯带传送带电极
公开(公告)号：US07897948B2
公开(公告)日：2011-03-01
申请号：US12439696
申请日：2007-08-29
申请人： Jeroen Jonkers , Jakob Willi Neff , Ralf Pruemmer
发明人： Jeroen Jonkers , Jakob Willi Neff , Ralf Pruemmer
IPC分类号： H05G2/00
CPC分类号： H05G2/003 , H05G2/005
摘要： The present invention relates to a plasma discharge lamp for generating EUV radiation and/or soft X-rays by means of an electrically operated discharge. The proposed lamp comprises at least two electrodes arranged in a discharge space at a distance from one another to form a gap which allows the ignition of a plasma (14) in a gaseous medium between said electrodes. A metal applying device applies a metal to a surface of said electrodes. The electrodes are formed of conveyer belts (15) driven to transport the metal to said gap, wherein for each of the electrodes a shaper element (13) is provided at the gap to ensure a proper form and distance of the electrodes at the gap. An energy beam device (4) is adapted to direct an energy beam onto at least one of said surfaces in the gap evaporating said applied metal at least partially thereby producing said gaseous medium. With the proposed plasma discharge lamp high input powers can be achieved at a compact design of the lamp.
摘要翻译：本发明涉及一种用于通过电动放电产生EUV辐射和/或软X射线的等离子体放电灯。所提出的灯包括布置在彼此间隔一定距离的放电空间中的至少两个电极，以形成允许在所述电极之间的气态介质中的等离子体（14）点火的间隙。金属施加装置将金属施加到所述电极的表面。电极由驱动以将金属输送到所述间隙的输送带（15）形成，其中对于每个电极，在间隙处设置成形元件（13），以确保电极在间隙处的适当形式和距离。能量束装置（4）适于将能量束引导到间隙中的至少一个所述表面中，至少部分地蒸发所述施加的金属，从而产生所述气体介质。利用所提出的等离子体放电灯，可以在灯的紧凑设计下实现高输入功率。

7. 发明授权

US07518300B2 Method and device for the generation of a plasma through electric discharge in a discharge space 有权
标题翻译：用于通过放电空间中的放电产生等离子体的方法和装置
公开(公告)号：US07518300B2
公开(公告)日：2009-04-14
申请号：US10548243
申请日：2004-03-05
申请人： Eric Gerardus Theodoor Bosch , Jeroen Jonkers , Willi Neff , Günther Hans Derra
发明人： Eric Gerardus Theodoor Bosch , Jeroen Jonkers , Willi Neff , Günther Hans Derra
IPC分类号： H01J17/26
CPC分类号： H05G2/003 , H05G2/005 , H05H1/48
摘要： The invention relates to a method and a device for the generation of a plasma through electric discharge in a discharge space which contains at least two electrodes, at least one of which is constructed from a matrix material or carrier material, such that an erosion-susceptible region with an evaporation spot is formed at least by the current flow. To present a method or a device for the generation of a plasma by electric discharge, it is suggested that a sacrificial substrate (38) is provided at least at the evaporation spot, the boiling point of said sacrificial suvstrate (38) during discharge operation lying below the melting point of the carrier material (30), such that charge carriers arising in the current flow are mainly generated from the sacrificial substrate (38).
摘要翻译：本发明涉及一种用于在放电空间中通过放电产生等离子体的方法和装置，其包含至少两个电极，其中至少一个电极由基质材料或载体材料构成，使得易受侵蚀至少由电流形成具有蒸发点的区域。为了呈现通过放电产生等离子体的方法或装置，建议至少在蒸发点处提供牺牲衬底（38），在放电操作期间所述牺牲衬套（38）的沸点位于低于载体材料（30）的熔点，使得在电流中产生的电荷载体主要从牺牲衬底（38）产生。

8. 发明授权

US07427766B2 Method and apparatus for producing extreme ultraviolet radiation or soft X-ray radiation 有权
标题翻译：用于产生极紫外辐射或软X射线辐射的方法和装置
公开(公告)号：US07427766B2
公开(公告)日：2008-09-23
申请号：US10570535
申请日：2004-09-01
申请人： Jeroen Jonkers , Dominik Marcel Vaudrevange , Willi Neff
发明人： Jeroen Jonkers , Dominik Marcel Vaudrevange , Willi Neff
IPC分类号： A61N5/06 , G01J3/10 , H05G2/00
CPC分类号： H05G2/003 , H05G2/005
摘要： A method of producing extreme ultraviolet radiation (EUV) or soft X-ray radiation by means of an electrically operated discharge, in particular for EUV lithography or for metrology, in which a plasma (22) is ignited in a gaseous medium between at least two electrodes (14, 16) in a discharge space (12), said plasma emitting said radiation that is to be produced. The gaseous medium is produced from a metal melt (24), which is applied to a surface in said discharge space (12) and at least partially evaporated by an energy beam, in particular by a laser beam (20).
摘要翻译：一种通过电操作的放电产生极紫外辐射（EUV）或软X射线辐射的方法，特别是用于EUV光刻或计量的方法，其中等离子体（22）在气体介质中点燃至少两个放电空间（12）中的电极（14,16），所述等离子体发射要产生的辐射。气体介质由金属熔体（24）产生，金属熔体（24）施加到所述放电空间（12）中的表面，并且至少部分地被能量束，特别是激光束（20）蒸发。

9. 发明申请

US20060138960A1 Gas discharge lamp for euv radiation 有权
标题翻译：用于euv辐射的气体放电灯
公开(公告)号：US20060138960A1
公开(公告)日：2006-06-29
申请号：US10536918
申请日：2003-11-28
申请人： Guenther Derra , Joseph Pankert , Willi Neff , Klaus Bergmann , Jeroen Jonkers
发明人： Guenther Derra , Joseph Pankert , Willi Neff , Klaus Bergmann , Jeroen Jonkers
IPC分类号： H01J61/09 , H01J17/06
CPC分类号： H05G2/003 , H01J61/09
摘要： The invention relates to a gas discharge lamp for EUV radiation with an anode (1) and a hollow cathode (2), wherein the hollow cathode (2) has at least two openings (3, 3′) and the anode (1) has a through hole (4), which is characterized in that the longitudinal axes (5, 5′) of the hollow cathode openings (3) have a common point of intersection S lying on the axis of symmetry (6) of the anode opening (4).
摘要翻译：本发明涉及一种用于具有阳极（1）和中空阴极（2）的EUV辐射的气体放电灯，其中中空阴极（2）具有至少两个开口（3,3'），阳极（1）具有一个通孔（4），其特征在于，中空阴极开口（3）的纵向轴线（5,5'）具有位于阳极开口（6）的对称轴线（6）上的公共交点S 4）。

10. 发明申请

US20090206268A1 METHOD OF INCREASING THE CONVERSION EFFICIENCY OF AN EUV AND/OR SOFT X-RAY LAMP AND A CORRESPONDING APPARATUS 有权
标题翻译：提高EUV和/或软X射线灯转换效率的方法及相关装置
公开(公告)号：US20090206268A1
公开(公告)日：2009-08-20
申请号：US12300858
申请日：2007-05-08
申请人： Jeroen Jonkers , Dominik Marcel Vaudrevange
发明人： Jeroen Jonkers , Dominik Marcel Vaudrevange
IPC分类号： G01T1/18 , G01J3/10
CPC分类号： H05G2/003 , H05G2/005
摘要： The present invention relates to a method of increasing the conversion efficiency of an EUV and/or soft X-ray lamp, in which a discharge plasma (8) emitting EUV radiation or soft X-rays is generated in a gaseous medium formed by an evaporated liquid material in a discharge space, said liquid material being provided on a surface in the discharge space and being at least partially evaporated by an energy beam (9). The invention also refers to a corresponding apparatus for producing EUV radiation and/or soft X-rays. In the method, a gas (11) composed of chemical elements having a lower mass number than chemical elements of the liquid material is supplied through at least one nozzle (10) in a directed manner to the discharge space and/or to the liquid material on a supply path to the discharge space in order to reduce the density of the evaporated liquid material in the discharge space. With the present method and corresponding apparatus the conversion efficiency of the lamp is increased.
摘要翻译：本发明涉及一种提高EUV和/或软X射线灯的转换效率的方法，其中在由蒸发的形成的气体介质中产生发射EUV辐射或软X射线的放电等离子体（8）液体材料在放电空间中，所述液体材料设置在放电空间中的表面上，并被能量束（9）至少部分地蒸发。本发明还涉及用于产生EUV辐射和/或软X射线的相应装置。在该方法中，由具有比液体材料的化学元素低的质量数的化学元素构成的气体（11）通过至少一个喷嘴（10）以指向的方式供给到放电空间和/或液体材料在放电空间的供给路径上，以便减小放电空间中蒸发的液体材料的密度。利用本方法和相应的装置，灯的转换效率提高。

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