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1. 发明授权

US08074293B2 Defective product inspection apparatus, probe positioning method and probe moving method 有权
标题翻译：产品检验设备不良，探头定位方法和探头移动方法
公开(公告)号：US08074293B2
公开(公告)日：2011-12-06
申请号：US12471907
申请日：2009-05-26
申请人： Eiichi Hazaki , Yasuhiro Mitsui , Takashi Furukawa , Hiroshi Yanagita , Susumu Kato , Osamu Satou , Osamu Yamada , Yoshikazu Inada
发明人： Eiichi Hazaki , Yasuhiro Mitsui , Takashi Furukawa , Hiroshi Yanagita , Susumu Kato , Osamu Satou , Osamu Yamada , Yoshikazu Inada
IPC分类号： H01J37/20 , G01N13/16
CPC分类号： G01R31/2891 , G01N23/225 , G01R31/2887 , H01J37/20 , H01J37/226 , H01J37/28 , H01J2237/2007 , H01J2237/2008 , H01J2237/20221 , H01J2237/204 , H01J2237/24564 , H01J2237/2482
摘要： For adjusting a positional relationship between a specimen and a probe to measure an electric characteristic of the specimen through a contact therebetween, a base table holding a specimen table holding the specimen and a probe holder holding the probe is positioned at a first position to measure the positional relationship between the probe and the specimen at the first position, and subsequently positioned at a second position to measure the positional relationship therebetween at the second position so that the probe and the specimen are contact each other at the second position, the specimen table and the probe holder are movable with respect to each other on the base table at each of the first and second positions to adjust the positional relationship between the probe and the specimen, and a measuring accuracy at the second position is superior to a measuring accuracy at the first position.
摘要翻译：为了调整试样与探针之间的位置关系，通过它们之间的接触测量试样的电特性，将保持试样的试样台的基台和保持探针的探针架固定在第一位置，以测量在第一位置处的探针和样本之间的位置关系，并且随后位于第二位置以测量其在第二位置处的位置关系，使得探针和样本在第二位置彼此接触，样本台和探针支架能够在基台上在第一和第二位置中的每一个处相对于彼此移动，以调节探针与样本之间的位置关系，并且第二位置处的测量精度优于第一名

2. 发明授权

US07553334B2 Defective product inspection apparatus, probe positioning method and probe moving method 有权
标题翻译：产品检验设备不良，探头定位方法和探头移动方法
公开(公告)号：US07553334B2
公开(公告)日：2009-06-30
申请号：US11976238
申请日：2007-10-23
申请人： Eiichi Hazaki , Yasuhiro Mitsui , Takashi Furukawa , Hiroshi Yanagita , Susumu Kato , Osamu Satou , Osamu Yamada , Yoshikazu Inada
发明人： Eiichi Hazaki , Yasuhiro Mitsui , Takashi Furukawa , Hiroshi Yanagita , Susumu Kato , Osamu Satou , Osamu Yamada , Yoshikazu Inada
IPC分类号： G01N13/10
CPC分类号： G01R31/2891 , G01N23/225 , G01R31/2887 , H01J37/20 , H01J37/226 , H01J37/28 , H01J2237/2007 , H01J2237/2008 , H01J2237/20221 , H01J2237/204 , H01J2237/24564 , H01J2237/2482
摘要： For adjusting a positional relationship between a specimen and a probe to measure an electric characteristic of the specimen through a contact therebetween, a base table holding a specimen table holding the specimen and a probe holder holding the probe is positioned at a first position to measure the positional relationship between the probe and the specimen at the first position, and subsequently positioned at a second position to measure the positional relationship therebetween at the second position so that the probe and the specimen are contact each other at the second position, the specimen table and the probe holder are movable with respect to each other on the base table at each of the first and second positions to adjust the positional relationship between the probe and the specimen, and a measuring accuracy at the second position is superior to a measuring accuracy at the first position.
摘要翻译：为了调整试样与探针之间的位置关系，通过它们之间的接触测量试样的电特性，将保持试样的试样台的基台和保持探针的探针架固定在第一位置，以测量在第一位置处的探针和样本之间的位置关系，并且随后位于第二位置以测量其在第二位置处的位置关系，使得探针和样本在第二位置彼此接触，样本台和探针支架能够在基台上在第一和第二位置中的每一个处相对于彼此移动，以调节探针与样本之间的位置关系，并且第二位置处的测量精度优于第一名

3. 发明授权

US07297945B2 Defective product inspection apparatus, probe positioning method and probe moving method 有权
标题翻译：产品检验设备不良，探头定位方法和探头移动方法
公开(公告)号：US07297945B2
公开(公告)日：2007-11-20
申请号：US11002710
申请日：2004-12-03
申请人： Eiichi Hazaki , Yasuhiro Mitsui , Takashi Furukawa , Hiroshi Yanagita , Susumu Kato , Osamu Satou , Osamu Yamada , Yoshikazu Inada
发明人： Eiichi Hazaki , Yasuhiro Mitsui , Takashi Furukawa , Hiroshi Yanagita , Susumu Kato , Osamu Satou , Osamu Yamada , Yoshikazu Inada
IPC分类号： G01N23/00
CPC分类号： G01R31/2891 , G01N23/225 , G01R31/2887 , H01J37/20 , H01J37/226 , H01J37/28 , H01J2237/2007 , H01J2237/2008 , H01J2237/20221 , H01J2237/204 , H01J2237/24564 , H01J2237/2482
摘要： For adjusting a positional relationship between a specimen and a probe to measure an electric characteristic of the specimen through a contact therebetween, a base table holding a specimen table holding the specimen and a probe holder holding the probe is positioned at a first position to measure the positional relationship between the probe and the specimen at the first position, and subsequently positioned at a second position to measure the positional relationship therebetween at the second position so that the probe and the specimen are contact each other at the second position, the specimen table and the probe holder are movable with respect to each other on the base table at each of the first and second positions to adjust the positional relationship between the probe and the specimen, and a measuring accuracy at the second position is superior to a measuring accuracy at the first position.
摘要翻译：为了调整试样与探针之间的位置关系，通过它们之间的接触测量试样的电特性，将保持试样的试样台的基台和保持探针的探针架固定在第一位置，以测量在第一位置处的探针和样本之间的位置关系，并且随后位于第二位置以测量其在第二位置处的位置关系，使得探针和样本在第二位置彼此接触，样本台和探针支架能够在基台上在第一和第二位置中的每一个处相对于彼此移动，以调节探针与样本之间的位置关系，并且第二位置处的测量精度优于第一名

4. 发明申请

US20050139781A1 Defective product inspection apparatus, probe positioning method and probe moving method 有权
标题翻译：产品检验设备不良，探头定位方法和探头移动方法
公开(公告)号：US20050139781A1
公开(公告)日：2005-06-30
申请号：US11002710
申请日：2004-12-03
申请人： Eiichi Hazaki , Yasuhiro Mitsui , Takashi Furukawa , Hiroshi Yanagita , Susumu Kato , Osamu Satou , Osamu Yamada , Yoshikazu Inada
发明人： Eiichi Hazaki , Yasuhiro Mitsui , Takashi Furukawa , Hiroshi Yanagita , Susumu Kato , Osamu Satou , Osamu Yamada , Yoshikazu Inada
IPC分类号： G01Q30/02 , G01N23/225 , G21K7/00 , G01N23/00
CPC分类号： G01R31/2891 , G01N23/225 , G01R31/2887 , H01J37/20 , H01J37/226 , H01J37/28 , H01J2237/2007 , H01J2237/2008 , H01J2237/20221 , H01J2237/204 , H01J2237/24564 , H01J2237/2482
摘要： For adjusting a positional relationship between a specimen and a probe to measure an electric characteristic of the specimen through a contact therebetween, a base table holding a specimen table holding the specimen and a probe holder holding the probe is positioned at a first position to measure the positional relationship between the probe and the specimen at the first position, and subsequently positioned at a second position to measure the positional relationship therebetween at the second position so that the probe and the specimen are contact each other at the second position, the specimen table and the probe holder are movable with respect to each other on the base table at each of the first and second positions to adjust the positional relationship between the probe and the specimen, and a measuring accuracy at the second position is superior to a measuring accuracy at the first position.
摘要翻译：为了调整试样与探针之间的位置关系，通过它们之间的接触测量试样的电特性，将保持试样的试样台的基台和保持探针的探针架固定在第一位置，以测量在第一位置处的探针和样本之间的位置关系，并且随后位于第二位置以测量其在第二位置处的位置关系，使得探针和样本在第二位置彼此接触，样本台和探针支架能够在基台上在第一和第二位置中的每一个处相对于彼此移动，以调节探针与样本之间的位置关系，并且第二位置处的测量精度优于第一名

5. 发明申请

US20090230984A1 DEFECTIVE PRODUCT INSPECTION APPARATUS, PROBE POSITIONING METHOD AND PROBE MOVING METHOD 有权
标题翻译：有缺陷的产品检验设备，探针定位方法和探头移动方法
公开(公告)号：US20090230984A1
公开(公告)日：2009-09-17
申请号：US12471907
申请日：2009-05-26
申请人： Eiichi HAZAKI , Yasuhiro Mitsui , Takashi Furukawa , Hiroshi Yanagita , Susumu Kato , Osamu Satou , Osamu Yamada , Yoshikazu Inada
发明人： Eiichi HAZAKI , Yasuhiro Mitsui , Takashi Furukawa , Hiroshi Yanagita , Susumu Kato , Osamu Satou , Osamu Yamada , Yoshikazu Inada
IPC分类号： G01R31/02
CPC分类号： G01R31/2891 , G01N23/225 , G01R31/2887 , H01J37/20 , H01J37/226 , H01J37/28 , H01J2237/2007 , H01J2237/2008 , H01J2237/20221 , H01J2237/204 , H01J2237/24564 , H01J2237/2482
摘要： For adjusting a positional relationship between a specimen and a probe to measure an electric characteristic of the specimen through a contact therebetween, a base table holding a specimen table holding the specimen and a probe holder holding the probe is positioned at a first position to measure the positional relationship between the probe and the specimen at the first position, and subsequently positioned at a second position to measure the positional relationship therebetween at the second position so that the probe and the specimen are contact each other at the second position, the specimen table and the probe holder are movable with respect to each other on the base table at each of the first and second positions to adjust the positional relationship between the probe and the specimen, and a measuring accuracy at the second position is superior to a measuring accuracy at the first position.
摘要翻译：为了调整试样与探针之间的位置关系，通过它们之间的接触测量试样的电特性，将保持试样的试样台的基台和保持探针的探针架固定在第一位置，以测量在第一位置处的探针和样本之间的位置关系，并且随后位于第二位置以测量其在第二位置处的位置关系，使得探针和样本在第二位置彼此接触，样本台和探针支架能够在基台上在第一和第二位置中的每一个处相对于彼此移动，以调节探针与样本之间的位置关系，并且第二位置处的测量精度优于第一名

6. 发明申请

US20080048699A1 Defective product inspection apparatus, probe positioning method and probe moving method 有权
标题翻译：产品检验设备不良，探头定位方法和探头移动方法
公开(公告)号：US20080048699A1
公开(公告)日：2008-02-28
申请号：US11976238
申请日：2007-10-23
申请人： Eiichi Hazaki , Yasuhiro Mitsui , Takashi Furukawa , Hiroshi Yanagita , Susumu Kato , Osamu Satou , Osamu Yamada , Yoshikazu Inada
发明人： Eiichi Hazaki , Yasuhiro Mitsui , Takashi Furukawa , Hiroshi Yanagita , Susumu Kato , Osamu Satou , Osamu Yamada , Yoshikazu Inada
IPC分类号： G01R31/02
CPC分类号： G01R31/2891 , G01N23/225 , G01R31/2887 , H01J37/20 , H01J37/226 , H01J37/28 , H01J2237/2007 , H01J2237/2008 , H01J2237/20221 , H01J2237/204 , H01J2237/24564 , H01J2237/2482
摘要： For adjusting a positional relationship between a specimen and a probe to measure an electric characteristic of the specimen through a contact therebetween, a base table holding a specimen table holding the specimen and a probe holder holding the probe is positioned at a first position to measure the positional relationship between the probe and the specimen at the first position, and subsequently positioned at a second position to measure the positional relationship therebetween at the second position so that the probe and the specimen are contact each other at the second position, the specimen table and the probe holder are movable with respect to each other on the base table at each of the first and second positions to adjust the positional relationship between the probe and the specimen, and a measuring accuracy at the second position is superior to a measuring accuracy at the first position.
摘要翻译：为了调整试样与探针之间的位置关系，通过它们之间的接触测量试样的电特性，将保持试样的试样台的基台和保持探针的探针架固定在第一位置，以测量在第一位置处的探针和样本之间的位置关系，并且随后位于第二位置以测量其在第二位置处的位置关系，使得探针和样本在第二位置彼此接触，样本台和探针支架能够在基台上在第一和第二位置中的每一个处相对于彼此移动，以调节探针与样本之间的位置关系，并且在第二位置处的测量精度优于第一名

7. 发明授权

US08713758B2 Opening/closing device 有权
标题翻译：开/关装置
公开(公告)号：US08713758B2
公开(公告)日：2014-05-06
申请号：US13698095
申请日：2011-05-02
申请人： Yasuhiro Mitsui , Hironobu Sayama
发明人： Yasuhiro Mitsui , Hironobu Sayama
IPC分类号： E05D11/06
CPC分类号： H04M1/0237 , G06F1/1615 , H04M1/0216 , Y10T16/544 , Y10T16/5448 , Y10T74/18944
摘要： An opening/closing device includes a fixed plate, a moving plate movable relative to the fixed plate, a slide plate formed having a groove, a hinge including a first shaft connected to the fixed plate, a third shaft connected to the moving plate, and a second shaft between the first and third shafts, and moves the moving plate between closed and open positions relative to the fixed plate, a slide arm including a fourth shaft connected to the moving plate and a fifth shaft connected slidably along the groove, and moves the moving plate between the closed and open positions, a link arm having one end connected to the second shaft and the other to the fifth shaft. The fifth shaft slides inside the groove as the link arm moves along with the moving of the hinge when the moving plate is moved between the closed and open positions.
摘要翻译：开闭装置包括固定板，相对于固定板可移动的移动板，形成有槽的滑动板，包括连接到固定板的第一轴的铰链，连接到移动板的第三轴，以及在第一和第三轴之间的第二轴，并且使移动板相对于固定板在关闭和打开位置之间移动，包括连接到移动板的第四轴的滑动臂和沿着凹槽可滑动地连接的第五轴，所述移动板在所述闭合位置和打开位置之间，连杆臂的一端连接到所述第二轴，而另一端连接到所述第五轴。当移动板在关闭位置和打开位置之间移动时，连杆臂随着铰链的移动而移动，第五轴在凹槽内滑动。

8. 发明授权

US08618520B2 Method and apparatus for processing a micro sample 有权
公开(公告)号：US08618520B2
公开(公告)日：2013-12-31
申请号：US13547942
申请日：2012-07-12
申请人： Mitsuo Tokuda , Muneyuki Fukuda , Yasuhiro Mitsui , Hidemi Koike , Satoshi Tomimatsu , Hiroyasu Shichi , Hideo Kashima , Kaoru Umemura
发明人： Mitsuo Tokuda , Muneyuki Fukuda , Yasuhiro Mitsui , Hidemi Koike , Satoshi Tomimatsu , Hiroyasu Shichi , Hideo Kashima , Kaoru Umemura
IPC分类号： G21K5/00
CPC分类号： H04L29/06 , G01N23/225 , H01J37/256 , H01J37/3056 , H01J2237/20 , H01J2237/202 , H01J2237/31745 , H04L67/16 , H04L69/329
摘要： An object of the invention is to realize a method and an apparatus for processing and observing a minute sample which can observe a section of a wafer in horizontal to vertical directions with high resolution, high accuracy and high throughput without splitting any wafer which is a sample. In an apparatus of the invention, there are included a focused ion beam optical system and an electron optical system in one vacuum container, and a minute sample containing a desired area of the sample is separated by forming processing with a charged particle beam, and there are included a manipulator for extracting the separated minute sample, and a manipulator controller for driving the manipulator independently of a wafer sample stage.

9. 发明申请

US20130156354A1 SLIDING DEVICE FOR ELECTRONIC APPARATUS 有权
标题翻译：电子设备滑动装置
公开(公告)号：US20130156354A1
公开(公告)日：2013-06-20
申请号：US13818730
申请日：2011-08-29
申请人： Yasuhiro Mitsui
发明人： Yasuhiro Mitsui
IPC分类号： H04M1/02
CPC分类号： H04M1/0235 , G06F1/1624 , H04M1/0237
摘要： A sliding device for an electronic apparatus includes a contact piece projecting outward in a widthwise direction from a sliding plate and a contacted part with which the contact piece is caused to come into contact when the sliding plate is caused to slide with a maximum displacement in a rear direction relative to a base plate. The contact piece includes a partially cylindrical surface and a connecting surface. The contacted part includes a contacted shape part configured to be contacted by a boundary part of the partially cylindrical surface and the connecting surface to provide the sliding plate with a rotational force to cause a front direction end portion of the sliding plate to move in the bottom direction relative to a rear direction end portion of the sliding plate, and an engaged shape part with which the partially cylindrical surface and the connecting surface are caused to engage.
摘要翻译：一种用于电子设备的滑动装置，包括从滑动板沿宽度方向向外突出的接触片和当滑动板以最大位移滑动时使接触片接触的接触部分相对于基板的后方向。接触件包括部分圆柱形表面和连接表面。接触部分包括接触形状部分，其被构造成与部分圆柱形表面的边界部分和连接表面接触，以向滑动板提供旋转力，以使滑板的前方端部在底部移动相对于滑动板的后方端部的方向，以及与部分圆筒形表面和连接表面接合的接合形状部分。

10. 发明申请

US20100116986A1 Specimen Inspection Equipment and How to Make the Electron Beam Absorbed Current Images 有权
标题翻译：标本检测设备和如何使电子束吸收当前图像
公开(公告)号：US20100116986A1
公开(公告)日：2010-05-13
申请号：US12691331
申请日：2010-01-21
申请人： Tomoharu Obuki , Hiroshi Toyama , Yasuhiro Mitsui , Munetoshi Fukui , Yasuhiko Nara , Tohru Ando , Katsuo Ooki , Tsutomu Saito , Masaaki Komori
发明人： Tomoharu Obuki , Hiroshi Toyama , Yasuhiro Mitsui , Munetoshi Fukui , Yasuhiko Nara , Tohru Ando , Katsuo Ooki , Tsutomu Saito , Masaaki Komori
IPC分类号： G01N23/225
CPC分类号： G01N23/225 , H01J2237/2449 , H01J2237/24564 , H01J2237/2817
摘要： An object of the present invention is to obtain a clear absorbed current image without involving the difference in gain of amplifier between inputs, from absorbed currents detected by using a plurality of probes and to improve measurement efficiency.In the present invention, a plurality of probes are brought in contact with a specimen. While irradiating the specimen with an electron beam, currents flowing in the probes are measured. Signals from at least two probes are input to a differential amplifier. An output of the differential amplifier is amplified. On the basis of the amplified output and scanning information of the electron beam, an absorbed current image is generated. According to the invention, a clear absorbed current image can be obtained without involving the difference in gain of amplifier between inputs. Thus, measurement efficiency in a failure analysis of a semiconductor device can be improved.
摘要翻译：本发明的目的是获得清晰的吸收电流图像，而不涉及放大器在输入之间的增益差异，从吸收的电流通过使用多个探针检测并提高测量效率。在本发明中，使多个探针与试样接触。在用电子束照射样品的同时，测量在探针中流动的电流。至少两个探头的信号被输入到差分放大器。差分放大器的输出被放大。基于电子束的放大输出和扫描信息，产生吸收的当前图像。根据本发明，可以获得清晰的吸收电流图像而不涉及放大器在输入之间的增益差。因此，可以提高半导体器件的故障分析中的测量效率。

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