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1. 发明授权

US5897753A Continuous deposition of insulating material using multiple anodes alternated between positive and negative voltages 失效
标题翻译：使用多个阳极的绝缘材料的连续沉积在正电压和负电压之间交替
公开(公告)号：US5897753A
公开(公告)日：1999-04-27
申请号：US864766
申请日：1997-05-28
申请人： Douglas S. Schatz , Richard A. Scholl
发明人： Douglas S. Schatz , Richard A. Scholl
IPC分类号： H05H1/46 , C23C14/34 , H01J37/34 , H01L21/316
CPC分类号： H01J37/3438 , H01J37/34 , H01J37/3444
摘要： A method and an apparatus are disclosed for sputter deposition of an insulating material on a substrate in a continuous mode of operation. A novel design for an anode assembly and driving power supply is disclosed to permit this. Single or multiple anodes are used, which at any given time may be biased negatively with respect to the plasma, so that any insulating material which may have been deposited thereupon may be sputtered away so as to provide a clean positive anode to the system, and at least for some period of time is biased positively so that it acts as an anode. The removal of any insulating material which may have formed on the anode structure permits its continuing effective use in collecting electrons from the plasma when it is biased positively, and therefore its continuing effective use as an anode for the system, permitting continuous operation of the system.
摘要翻译：公开了一种用于在连续操作模式下将绝缘材料溅射沉积在衬底上的方法和装置。公开了用于阳极组件和驱动电源的新颖设计，以允许这一点。使用单个或多个阳极，其在任何给定时间可能相对于等离子体负偏压，使得可能已经沉积在其上的任何绝缘材料可被溅射掉，以便为系统提供清洁的正极;以及至少在一段时间内是积极偏见的，以致其作为阳极。可能在阳极结构上形成的任何绝缘材料的去除允许其在被积极地偏置时从等离子体中收集电子继续有效地使用，因此其作为系统的阳极的持续有效的使用，允许系统的连续操作。

2. 发明授权

US06183605B2 AC powered system for continuous deposition of a cathode material 失效
标题翻译：用于连续沉积阴极材料的交流供电系统
公开(公告)号：US06183605B2
公开(公告)日：2001-02-06
申请号：US09285353
申请日：1999-04-02
申请人： Douglas S. Schatz , Richard A. Scholl
发明人： Douglas S. Schatz , Richard A. Scholl
IPC分类号： C23C1434
CPC分类号： H01J37/3438 , H01J37/34 , H01J37/3444
摘要： A method and an apparatus are disclosed for sputter deposition of an insulating material on a substrate in a continuous mode of operation. A novel design for an anode assembly and driving power supply is disclosed to permit this. Single or multiple anodes are used, which at any given time may be biased negatively with respect to the plasma, so that any insulating material which may have been deposited thereupon may be sputtered away so as to provide a clean positive anode to the system, and at least for some period of time is biased positively so that it acts as an anode. The removal of any insulating material which may have formed on the anode structure permits its continuing effective use in collecting electrons from the plasma when it is biased positively, and therefore its continuing effective use as an anode for the system, permitting continuous operation of the system.
摘要翻译：公开了一种用于在连续操作模式下将绝缘材料溅射沉积在衬底上的方法和装置。公开了用于阳极组件和驱动电源的新颖设计，以允许这一点。使用单个或多个阳极，其在任何给定时间可能相对于等离子体负偏压，使得可能已经沉积在其上的任何绝缘材料可能被溅射掉，以便向系统提供清洁的正阳极，以及至少在一段时间内是积极偏见的，以致其作为阳极。可能在阳极结构上形成的任何绝缘材料的去除允许其在被积极地偏置时从等离子体中收集电子继续有效地使用，因此其作为系统的阳极的持续有效的使用，允许系统的连续操作。

3. 发明授权

US3935412A Induction heated vapor source 失效
标题翻译：感应加热蒸气源
公开(公告)号：US3935412A
公开(公告)日：1976-01-27
申请号：US472179
申请日：1974-05-22
申请人： George W. McDonough , Douglas S. Schatz , Emmett R. Anderson
发明人： George W. McDonough , Douglas S. Schatz , Emmett R. Anderson
IPC分类号： C23C14/26 , H05B6/24 , H05B5/18
CPC分类号： H05B6/24 , C23C14/26
摘要： Induction heated vapor source particularly suitable for vacuum deposition of thin films utililzing a flat wound work coil fabricated of a solid conductor enclosed in a hermetically sealed chamber. A cooling medium is circulated through the chamber about the coil, and the coolant is passed to and from the chamber through fittings which also serve to carry electric power to the coil. A crucible for holding the material to be vaporized is mounted on an adjustable pedestal outside the sealed chamber in the field produced by the coil.
摘要翻译：感应加热蒸气源，特别适用于薄膜的真空沉积，利用由密封在密封室中的实心导体制成的扁平绕线工作线圈。冷却介质围绕线圈循环通过腔室，并且冷却剂通过配件进入和离开室，该配件还用于将电力传送到线圈。用于保持待蒸发的材料的坩埚安装在由线圈产生的场中的密封室外的可调节基座上。

4. 发明授权

US5009764A Apparatus for removal of electrical shorts in a sputtering system 失效
标题翻译：用于在溅射系统中去除电短路的装置
公开(公告)号：US5009764A
公开(公告)日：1991-04-23
申请号：US494554
申请日：1990-03-16
申请人： Jerry D. Siefkes , John G. Harpold , Douglas S. Schatz
发明人： Jerry D. Siefkes , John G. Harpold , Douglas S. Schatz
IPC分类号： C23C14/56 , H01J37/34
CPC分类号： C23C14/564 , H01J37/34 , H01J2237/0206 , H01J2237/022
摘要： Techniques for removing an electrical short caused by a flake in a thin film sputtering system are disclosed. The flake typically bridges the dark space between target and anode or shield and is removed through manipulation of the power supply utilized for normal operations. Sensing of the flake and discrimination between recoverable arcs is accomplished by timing the duration of an over-current condition. Removal involves switching between power mode or some other initial mode of regulation and current modes and progressively increasing current to melt the flake. Circuitry automatically removes the flake and is easily adapted to power supplies particularly more sophisticated, high frequency, lower energy storage DC supplies.
摘要翻译：公开了用于去除由薄膜溅射系统中的薄片引起的电短路的技术。薄片通常桥接目标和阳极或屏蔽之间的暗空间，并通过操纵用于正常操作的电源来移除。通过对过电流条件的持续时间进行定时，可以实现薄片的感测和可恢复电弧之间的辨别。去除涉及在功率模式或一些其他初始调节模式和电流模式之间切换，并逐渐增加电流以熔化薄片。电路自动去除薄片，并且易于适应电源，特别是更复杂，高频，更低能量存储的直流电源。

5. 发明授权

US06316754B1 Frequency selected, variable output inductor heater system 失效
标题翻译：频率选择，可变输出电感加热器系统
公开(公告)号：US06316754B1
公开(公告)日：2001-11-13
申请号：US09462402
申请日：2000-04-28
申请人： Douglas S. Schatz , John M. Dorrenbacher
发明人： Douglas S. Schatz , John M. Dorrenbacher
IPC分类号： H05B644
CPC分类号： H01L21/67109 , C23C16/46 , C30B25/10 , H05B6/06 , H05B6/44
摘要： An induction heating systems using a plurality of zones in a coil provides selective heating control for better uniformity especially for semiconductor and other thin film processing applications. By arranging the zones to have different resonance frequencies, the power supply may control the various zones by altering its frequency output. The power supply may also act to control the differential heating by switching among zones in conjunction with the frequency control, by sweeping through a variety of frequencies, by simultaneously providing power over different frequencies, by altering the residence time at each frequency, or by outputting different powers to each frequency or the like. Each zone may thus be tuned as appropriate to achieve the desired induction heating characteristic.
摘要翻译：在线圈中使用多个区域的感应加热系统提供选择性加热控制，以获得更好的均匀性，特别是对于半导体和其它薄膜处理应用。通过布置这些区域具有不同的谐振频率，电源可以通过改变其频率输出来控制各个区域。电源还可以通过在频率范围内切换，通过扫描各种频率，通过在不同频率上同时提供功率，通过改变每个频率的停留时间，或通过输出每个频率的不同功率等。因此，可以适当地调整每个区域以实现期望的感应加热特性。

6. 发明授权

US4963238A Method for removal of electrical shorts in a sputtering system 失效
标题翻译：在溅射系统中去除电短路的方法
公开(公告)号：US4963238A
公开(公告)日：1990-10-16
申请号：US297707
申请日：1989-01-13
申请人： Jerry D. Siefkes , John G. Harpold , Douglas S. Schatz
发明人： Jerry D. Siefkes , John G. Harpold , Douglas S. Schatz
IPC分类号： C23C14/56 , H01J37/34
CPC分类号： H01J37/34 , C23C14/564 , H01J2237/0206 , H01J2237/022
摘要： Techniques for removing an electrical short caused by a flake in a thin film sputtering system are disclosed. The flake typically bridges the dark space between target and anode or shield and is removed through manipulation of the power supply utilized for normal operations. Sensing of the flake and discrimination between recoverable arcs is accomplished by timing the duration of an over-current condition. Removal involves switching between power mode or some other initial mode of regulation and current modes and progressively increasing current to melt the flake. Circuitry automatically removes the flake and is easily adapted to power supplies particularly more sophisticated, high frequency, lower energy storage DC supplies.
摘要翻译：公开了用于去除由薄膜溅射系统中的薄片引起的电短路的技术。薄片通常桥接目标和阳极或屏蔽之间的暗空间，并通过操纵用于正常操作的电源来移除。通过对过电流条件的持续时间进行定时，可以实现薄片的感测和可恢复电弧之间的辨别。去除涉及在功率模式或一些其他初始调节模式和电流模式之间切换，并逐渐增加电流以熔化薄片。电路自动去除薄片，并且易于适应电源，特别是更复杂，高频，更低能量存储的直流电源。

7. 发明授权

US6031211A Zone heating system with feedback control 失效
标题翻译：带加热系统带反馈控制
公开(公告)号：US6031211A
公开(公告)日：2000-02-29
申请号：US890386
申请日：1997-07-11
申请人： Robert D. Mailho , Douglas S. Schatz
发明人： Robert D. Mailho , Douglas S. Schatz
IPC分类号： C23C16/46 , C30B25/10 , H05B3/02
CPC分类号： C30B25/10 , C23C16/46
摘要： A structure and method are disclosed which allow for a tighter control of the temperature across a wafer substrate. In accordance with the present invention, a wafer to be processed is heated to a constant and uniform temperature by an RF induction coil including a plurality of heating zones each of which being shunted by an associated capacitor tuned to a specific frequency. By adjusting the time during which current of a particular frequency is provided to the induction coil, current flow within, and thus the heat generated in, each of the zones may be independently controlled. Since the heat generated in the susceptor quickly changes in response to changes in current flow therein, both deviations of the wafer temperature from the processing temperature and temperature gradients across the surface of the wafer may be quickly corrected. This superior thermal response results in the present invention maintaining a wafer at a uniform temperature during heating and cooling with increased accuracy and precision.
摘要翻译：公开了允许对晶片衬底的温度进行更严格控制的结构和方法。根据本发明，通过包括多个加热区域的RF感应线圈将要处理的晶片加热到恒定均匀的温度，每个加热区域被调谐到特定频率的相关电容器分流。通过调整将特定频率的电流提供给感应线圈的时间，可以独立地控制每个区域内产生的电流以及因此产生的热量。由于基座中产生的热量响应于其中的电流变化而快速变化，因此可以快速校正晶片温度与晶片表面的处理温度和温度梯度的偏差。这种优异的热响应导致本发明在加热和冷却期间以均匀的温度保持晶片的精度和准确度。

8. 发明授权

US4314324A Transformer power supply having an inductively loaded full wave rectifier in the primary 失效
标题翻译：变压器电源在主电源中具有感应加载的全波整流器
公开(公告)号：US4314324A
公开(公告)日：1982-02-02
申请号：US92280
申请日：1979-11-08
申请人： Emmett R. Anderson , Douglas S. Schatz
发明人： Emmett R. Anderson , Douglas S. Schatz
IPC分类号： G05F1/38 , H02P13/24
CPC分类号： G05F1/38
摘要： In a transformer power supply, a full wave rectifier is series connected in circuit with the primary winding of the transformer such that the current flowing through the primary winding of the transformer flows in series through the input of the full wave rectifier. An inductive load is connected across the output terminals of the full wave rectifier such that the rectified output current flows through the inductive load. The full wave rectifier preferably uses silicon controlled rectifiers which are phase triggered in such a manner so as to control their conduction angles so as to control the power flow from the source to the load connected to the secondary of the transformer. The inductance of the load for the rectifier preferably exceeds the critical inductance so as to minimize ripples in the secondary of the transformer. This type of power supply circuit is particularly useful for supplying power to an electron gun which is subject to arcing. The inductive load for the rectifier reduces the transient voltages impressed on the transformer resulting from SCR phase control and also minimizes AC voltage drop across the inductive load while providing transient current limiting as may be encountered by arcing of the electron gun.
摘要翻译：在变压器电源中，全波整流器与变压器的初级绕组串联在一起，使得流过变压器初级绕组的电流通过全波整流器的输入串联流动。感应负载连接在全波整流器的输出端之间，使整流后的输出电流流过感性负载。全波整流器优选地使用以这种方式相位触发的可控硅整流器，以便控制其导通角度，以便控制从源极到连接到变压器次级的负载的功率流。整流器负载的电感优选超过临界电感，以便最小化变压器次级的波纹。这种电源电路特别适用于向受电弧放电的电子枪供电。整流器的感性负载降低了由SCR相位控制引起的对变压器施加的瞬态电压，并且还使电感负载下的交流电压降最小化，同时提供电子枪电弧可能遇到的瞬态电流限制。

9. 发明授权

US3941966A RF Power transmission line 失效
标题翻译：射频输电线路
公开(公告)号：US3941966A
公开(公告)日：1976-03-02
申请号：US472180
申请日：1974-05-22
申请人： Douglas S. Schatz
发明人： Douglas S. Schatz
IPC分类号： H01B7/08 , H01B11/12 , H05B6/02 , H05B7/11
CPC分类号： H05B6/02 , H01B11/12 , H01B7/0838
摘要： Transmission line for RF power utilizing generally flat supply and return lines each comprising a plurality of flexible, insulated conductors connected together at their ends. The two lines are enclosed in a flexible sheath which holds the lines in close proximity to each other, and fields produced by the lines tend to cancel each other.
摘要翻译：用于RF功率的传输线利用大体上扁平的供电和返回线路，每条线路包括在其端部连接在一起的多个柔性绝缘导体。这两条线被包围在一条柔软的护套中，这些护套保持彼此靠近的线，并且由线产生的场往往彼此抵消。

10. 发明授权

US08242634B2 High efficiency remotely controllable solar energy system 有权
标题翻译：高效遥控太阳能系统
公开(公告)号：US08242634B2
公开(公告)日：2012-08-14
申请号：US12682559
申请日：2008-07-18
申请人： Douglas S. Schatz , Robert M. Porter , Anatoli Ledenev
发明人： Douglas S. Schatz , Robert M. Porter , Anatoli Ledenev
IPC分类号： H02J3/00
CPC分类号： H02J3/385 , H02J3/00 , H02J13/0003 , H02M2001/0077 , Y02E10/58 , Y02E40/72 , Y02P80/23 , Y04S10/123 , Y10S136/293 , Y10T307/609 , Y10T307/615 , Y10T307/658 , Y10T307/685 , Y10T307/696 , Y10T307/707 , Y10T307/718
摘要： A solar energy system (55) has aspects that can allow individualized control and analysis for overall field power control that can be used while harvesting maximum power from a solar energy source (1) and a string of solar panels (11) for a power grid (10). The invention provides control of power at high efficiency with aspects that can exist independently including: 1) power management with switch disconnect control (64), 2) sequenced start of a solar power system, 3) providing a safety output system that can be handled by installers and maintenance and advantageously controlled, 4) providing programmable power functionality controller (86) either on site or remotely from an administrative facility by radio transmission individual solar panel disconnect control (85), 5) a system with pattern analyzer (87) for operational, installation, and maintenance indications, and 6) systems with individual solar panel string power simulator (89) for disparate components.
摘要翻译：太阳能系统（55）具有能够在从太阳能源（1）和用于电力网的太阳能电池板（11））获取最大功率的同时可以使用的整体现场功率控制的个体化控制和分析的方面。（10）。本发明能够独立存在的方面提供高效率的电力控制，包括：1）开关断开控制的电源管理（64），2）太阳能发电系统的顺序启动，3）提供可以处理的安全输出系统通过安装和维护并有利地控制，4）通过无线电传输单独的太阳能电池板断开控制（85）现场或远离管理设施来提供可编程电源功能控制器（86），5）具有模式分析器（87）的系统，用于操作，安装和维护指示，以及6）具有单独的太阳能电池板功率模拟器（89）的系统，用于不同的组件。

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