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    • 4. 发明授权
    • Fine pitch lead frame and method
    • 细间距引线框架和方法
    • US06429050B1
    • 2002-08-06
    • US09212013
    • 1998-12-15
    • Robert M. FritzscheDonald C. Abbott
    • Robert M. FritzscheDonald C. Abbott
    • H01L2144
    • H01L23/49548H01L21/4828H01L2924/0002H01L2924/00
    • The invention is a lead frame that has leads formed in two levels during the etching process in which the lead frame is formed. A lead frame form (40), or continuous strip of lead frame material, is coated on two sides with a photo resist material (41,43). Each photo resist coated side is patterned to define leads on the lead frame. The lead patterns (41,43, 42,44) on the two sides are offset from each other so that patterns on one side of the lead frame material alternate with the patterns on the other side of the lead frame material. Both sides of the photo resist patterned lead frame material are etched to a depth exceeding the thickness of a lead. The photo resist (41,43) material is then removed. The resulting lead frame has leads (50-56)that are in two levels, each level having leads offset by a lead width from the other level, but with an effective zero distance between leads horizontally.
    • 本发明是在其中形成引线框架的蚀刻工艺期间具有形成在两个层中的引线的引线框架。 引线框架形式(40)或连续的引线框架材料带用光刻胶材料(41,43)涂覆在两面上。 每个光致抗蚀剂涂层侧被图案化以在引线框架上限定引线。 两侧的引线图案(41,43,42,44)彼此偏移,使得引线框架材料的一侧上的图案与引线框架材料的另一侧上的图案交替。 光刻抗蚀图案引线框架材料的两面被蚀刻到超过铅厚度的深度。 然后除去光致抗蚀剂(41,43)材料。 所得到的引线框架具有两个级别的引线(50-56),每个级别具有由另一级别的引线宽度偏移的引线,但是引线之间的有效零距离水平。