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    • 10. 发明授权
    • Method for improving high frequency operation of a vertical cavity surface emitting laser (VCSEL) with monolithically integrated bridge arm
    • 用于改进具有单片集成桥臂的垂直腔面发射激光器(VCSEL)的高频操作的方法
    • US07756168B2
    • 2010-07-13
    • US10900015
    • 2004-07-26
    • Phil FloydPeter KnerDecai Sun
    • Phil FloydPeter KnerDecai Sun
    • H01S3/10
    • H01S5/18366H01S5/0425H01S5/0607
    • A vertical cavity laser apparatus is provided. In one embodiment, the apparatus includes an electrically responsive substrate; a support block positioned on the electrically responsive substrate; a bridge arm structure coupled to the support block, the structure having a base; a laser active area on the bridge arm structure, a tuning pad on the bridge arm structure, a laser bond pad on the bridge arm structure with traces connecting the laser bond pad to the laser active area and base. The traces are positioned and shaped to be symmetric to avoid problems due to the asymmetry of the injection current. Additionally, in this embodiment, the laser bond pad is kept at a height of the base in order to minimize device capacitance and the traces are also kept at the height of the base. Methods are also provided whereby impedance matching and high speed performance can be accomplished irregardless of the mechanical configuration of the bridge arm structure.
    • 提供了一种垂直腔激光装置。 在一个实施例中,该装置包括电响应基板; 位于所述电响应基板上的支撑块; 耦合到所述支撑块的桥臂结构,所述结构具有基部; 桥臂结构上的激光有源区域,桥臂结构上的调谐板,桥臂结构上的激光键合焊盘,其具有将激光键合焊盘连接到激光器有源区域和基底的迹线。 迹线被定位和成形为对称以避免由于注入电流的不对称性引起的问题。 此外,在本实施例中,激光焊盘保持在基座的高度,以便最小化器件电容,并且迹线也保持在基座的高度。 还提供了可以实现阻抗匹配和高速性能的方法,无论桥臂结构的机械结构如何。