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1. 发明授权

US07116855B2 Optical shuttle system and method used in an optical switch 失效
标题翻译：用于光开关的光梭系统和方法
公开(公告)号：US07116855B2
公开(公告)日：2006-10-03
申请号：US10879094
申请日：2004-06-30
申请人： Fuqian Yang , Joel A. Kubby , Alex T. Tran , Jun Ma
发明人： Fuqian Yang , Joel A. Kubby , Alex T. Tran , Jun Ma
IPC分类号： G02B6/35
CPC分类号： G02B6/3508 , G02B6/3546 , G02B6/3548 , G02B6/3576 , G02B6/358 , G02B6/3584 , G02B6/3596
摘要： An optical shuttle system for routing signals in a communications system that includes a terminal connected to a power source, a shuttle that includes waveguides used for routing the signals, and a beam connected to the terminal and the shuttle so that the beam suspends the shuttle. When power from the power source is applied to the terminal, the beam drives a movement of the shuttle. Furthermore, a method of using an optical shuttle system for routing signals in a communications system, the method includes connecting a terminal to a power source, connecting a shuttle to a beam to suspend the shuttle, and applying power from the power source to the terminal so that the beam drives a movement of the shuttle in a direction substantially perpendicular to a direction of the beam.
摘要翻译：一种用于在通信系统中路由信号的光梭系统，其包括连接到电源的终端，包括用于路由信号的波导的梭，以及连接到终端和梭的梁，使得梁悬挂在梭上。当来自电源的电力施加到端子时，梁驱动梭子的运动。此外，一种使用光梭系统在通信系统中路由信号的方法，所述方法包括将终端连接到电源，将梭子连接到波束以暂停梭子，以及将来自电源的功率施加到终端使得光束在基本上垂直于光束的方向的方向上驱动梭子的运动。

2. 发明授权

US07106441B2 Structure and method for a microelectromechanic cylindrical reflective diffraction grating spectrophotometer 有权
$Structure and method for a microelectromechanic cylindrical reflective diffraction grating spectrophotometer$
标题翻译：微机电圆柱反射衍射光栅分光光度计的结构与方法
公开(公告)号：US07106441B2
公开(公告)日：2006-09-12
申请号：US10672207
申请日：2003-09-26
申请人： Decai Sun , Joel A. Kubby , Jingkuang Chen , Alex T. Tran , Patrick Y. Maeda
发明人： Decai Sun , Joel A. Kubby , Jingkuang Chen , Alex T. Tran , Patrick Y. Maeda
IPC分类号： G01J3/20
CPC分类号： G01J3/06 , G01J3/02 , G01J3/0256 , G01J3/20
摘要： A tunable microelectromechanical (MEMS) spectrophotometer with a rotating cylindrical reflective diffraction grating is integrated with a photodetector and an optical fiber light source on a Rowland circle on a monolithic silicon substrate.
摘要翻译：具有旋转圆柱反射衍射光栅的可调谐微机电（MEMS）分光光度计与单片硅衬底上的Rowland圆上的光电检测器和光纤光源集成。

3. 发明授权

US07002719B2 Mirror for an integrated device 有权
标题翻译：集成设备镜像
公开(公告)号：US07002719B2
公开(公告)日：2006-02-21
申请号：US10342530
申请日：2003-01-15
申请人： Alex T. Tran
发明人： Alex T. Tran
IPC分类号： G02B26/08
CPC分类号： G02B7/008 , G02B26/0841 , Y10S359/90
摘要： A mirror for an optical MEMS device has a plurality of segments supported on a substrate layer. Each segment includes a support post, a support layer, and a reflective layer formed over the support layer. The reflective layers of the plurality of segments form the reflective surface of the mirror. Due to the relatively small lateral dimensions of the segments, the mirror has a smaller thermal bow than prior art mirrors. The bow can be controlled, e.g., by appropriately choosing the number of segments and the layer thicknesses.
摘要翻译：用于光学MEMS器件的反射镜具有支撑在基底层上的多个部分。每个部分包括支撑柱，支撑层和形成在支撑层上的反射层。多个段的反射层形成反射镜的反射表面。由于段的相对小的横向尺寸，反射镜具有比现有技术的反射镜更小的热弓。可以例如通过适当选择段数和层厚度来控制弓形。

4. 发明授权

US06846087B2 Micromirror having counterbalancing structures and method for manufacturing same 有权
标题翻译：具有平衡结构的微镜及其制造方法
公开(公告)号：US06846087B2
公开(公告)日：2005-01-25
申请号：US10208458
申请日：2002-07-30
申请人： Dustin W Carr , Christopher John Frye , Timofei Nikita Kroupenkine , Victor Alexander Lifton , Michael Patrick Schlax , Alex T Tran , Joseph J Vuillemin
发明人： Dustin W Carr , Christopher John Frye , Timofei Nikita Kroupenkine , Victor Alexander Lifton , Michael Patrick Schlax , Alex T Tran , Joseph J Vuillemin
IPC分类号： G02B5/08 , G02B7/182
CPC分类号： G02B5/08 , G02B5/0808 , G02B5/0816
摘要： A multilayer micromirror structure that exhibits substantially no form change as a result of a given change in temperature is disclosed. A reflective layer is disposed on a substrate layer, and a counterbalancing structure is disposed on the structure in a way such that a neutral plane is located at a predetermined position relative to the substrate layer and the reflective layer. When forces are exerted at the neutral plane of such a structure, the structure attains a predetermined geometric form. A method of manufacture is disclosed wherein a substrate is etched to define a desired structure and a conformal layer of a masking material is deposited onto the etched substrate. Further etching exposes portions of the substrate and silicon is deposited to achieve another desired structure. Excess material is etched away to free the finished structure and a reflective layer is deposited onto the surface of the structure.
摘要翻译：公开了一种由于给定的温度变化而基本上没有形式变化的多层微镜结构。反射层设置在基板层上，并且平衡结构以相对于基板层和反射层位于预定位置的方式设置在结构上。当力在这种结构的中立平面上施加时，结构达到预定的几何形状。公开了一种制造方法，其中蚀刻衬底以限定期望的结构，并且将掩蔽材料的保形层沉积在蚀刻的衬底上。进一步的蚀刻暴露了衬底和硅的部分，以实现另一个期望的结构。蚀刻掉多余的材料以释放完成的结构，并且将反射层沉积到结构的表面上。

5. 发明授权

US06567448B1 Scanning III-V compound light emitters integrated with Si-based actuators 有权
标题翻译：扫描III-V复合发光体与Si基致动器集成
公开(公告)号：US06567448B1
公开(公告)日：2003-05-20
申请号：US09210315
申请日：1998-12-11
申请人： Decai Sun , Ross D. Bringans , Christopher L. Chua , Philip D. Floyd , Eric Peeters , Joel A. Kubby , Alex T. Tran
发明人： Decai Sun , Ross D. Bringans , Christopher L. Chua , Philip D. Floyd , Eric Peeters , Joel A. Kubby , Alex T. Tran
IPC分类号： H01S500
CPC分类号： H01S5/18308 , H01S5/021 , H01S5/02252 , H01S5/02288 , H01S5/4087 , H01S5/423 , H01S5/426
摘要： A III-V compound light emitter is integrated with Si-based actuators. The proposed devices take advantage of the superior optical properties of III-V compounds and the superior mechanical properties of Si, as well as mature fabrication technologies of Si-Micro-Electro-Mechanical Systems (MEMS). The emitter can be a light emitting diode (LED), a vertical cavity surface emitting laser (VCSEL) or an edge emitting laser. Electro or magnetic based actuation from Si-based actuators provides
摘要翻译： III-V复合光发射器与Si基致动器集成。所提出的器件利用了III-V化合物的优异光学性能和Si的优异机械性能，以及Si-Micro-Electro-Mechanical Systems（MEMS）的成熟制造技术。发射极可以是发光二极管（LED），垂直腔表面发射激光器（VCSEL）或边缘发射激光器。基于Si的致动器的基于电或磁的致动器提供

6. 发明授权

US06506620B1 Process for manufacturing micromechanical and microoptomechanical structures with backside metalization 有权
标题翻译：具有背面金属化的微机械和微机电结构的制造工艺
公开(公告)号：US06506620B1
公开(公告)日：2003-01-14
申请号：US09724515
申请日：2000-11-27
申请人： Bruce R. Scharf , Joel A. Kubby , Chuang-Chia Lin , Alex T. Tran , Andrew J. Zosel , Peter M. Gulvin , Jingkuang Chen
发明人： Bruce R. Scharf , Joel A. Kubby , Chuang-Chia Lin , Alex T. Tran , Andrew J. Zosel , Peter M. Gulvin , Jingkuang Chen
IPC分类号： H01L2100
CPC分类号： B81C1/00484 , B81B2201/042 , B81B2203/0118 , B81C1/00666 , B81C2201/0142
摘要： The present invention provides a micromechanical or microoptomechanical structure produced by a process comprising defining the structure in a single-crystal silicon layer separated by an insulator layer from a substrate layer; selectively etching the single crystal silicon layer; depositing and etching a polysilicon layer on the insulator layer, with remaining polysilicon forming mechanical elements of the structure; metalizing a backside of the structure; and releasing the formed structure.
摘要翻译：本发明提供了一种微机械或微机电结构，其通过包括限定由绝缘体层与衬底层分隔的单晶硅层中的结构的方法而产生; 选择性地蚀刻单晶硅层; 沉积和蚀刻绝缘体层上的多晶硅层，剩余的多晶硅形成结构的机械元件; 金属化结构的背面; 并释放形成的结构。

7. 发明授权

US06479311B1 Process for manufacturing micromechanical and microoptomechanical structures with pre-applied patterning 有权
标题翻译：用预制图案化制造微机械和微机电结构的方法
公开(公告)号：US06479311B1
公开(公告)日：2002-11-12
申请号：US09724506
申请日：2000-11-27
申请人： Bruce R. Scharf , Joel A. Kubby , Jingkuang Chen , Peter M. Gulvin , Chuang-Chia Lin , Alex T. Tran
发明人： Bruce R. Scharf , Joel A. Kubby , Jingkuang Chen , Peter M. Gulvin , Chuang-Chia Lin , Alex T. Tran
IPC分类号： H01L2100
CPC分类号： B81C1/00666 , B81B2201/047 , B81B2203/0118
摘要： The present invention provides a micromechanical or microoptomechanical structure. The structure is produced by a process comprising defining a pattern on a single crystal silicon layer separated by an insulator layer from a substrate layer; defining a structure in the single-crystal silicon layer; depositing and etching a polysilicon layer on the single crystal silicon layer, with remaining polysilcon forming mechanical or optical elements of the structure; and releasing the formed structure.
摘要翻译：本发明提供一种微机械或微机电结构。该结构通过一种工艺制造，该方法包括在由绝缘体层与衬底层隔开的单晶硅层上限定图案; 限定单晶硅层中的结构; 沉积和蚀刻单晶硅层上的多晶硅层，其余的聚硅氧烷形成该结构的机械或光学元件; 并释放形成的结构。

8. 发明授权

US07158693B2 Molecular detection using an optical waveguide fixed to a cantilever 有权
标题翻译：使用固定在悬臂上的光波导的分子检测
公开(公告)号：US07158693B2
公开(公告)日：2007-01-02
申请号：US11240151
申请日：2005-09-29
申请人： Alex T. Tran , Dustin W. Carr
发明人： Alex T. Tran , Dustin W. Carr
IPC分类号： G02B6/00
CPC分类号： G01N33/54373 , G02B6/3502 , G02B6/3566
摘要： The invention relates to devices and methods for detecting a ligand in a liquid, based on deflection of one or more microscopic cantilevers. Each cantilever has an optical waveguide fixed thereto or integral therewith. Deflection of the cantilever is detected by assessing coupling of light between the optical waveguide on the cantilever and an optical waveguide fixed distally thereto.
摘要翻译：本发明涉及用于检测液体中配体的装置和方法，其基于一个或多个微观悬臂的偏转。每个悬臂具有固定到其上的或与其成一体的光波导。通过评估悬臂梁上的光波导与远端固定的光波导之间的光耦合来检测悬臂的偏转。

9. 发明授权

US06362512B1 Microelectromechanical structures defined from silicon on insulator wafers 有权
标题翻译：由绝缘体上硅晶片定义的微机电结构
公开(公告)号：US06362512B1
公开(公告)日：2002-03-26
申请号：US09468423
申请日：1999-12-21
申请人： Joel A. Kubby , Jingkuang Chen , Alex T. Tran
发明人： Joel A. Kubby , Jingkuang Chen , Alex T. Tran
IPC分类号： H01L2982
CPC分类号： B81B3/0083 , B81C2201/0109 , B81C2201/019 , B81C2201/0191 , B81C2201/053 , G02B6/4214
摘要： A device structure is defined in a single-crystal silicon (SCS) layer separated by an insulator layer, such as an oxide layer, from a handle wafer. The SCS can be attached to the insulator by wafer bonding, and is selectively etched, as by photolithographic patterning and dry etching. A sacrificial oxide layer can be deposited on the etched SCS, on which polysilicon can be deposited. A protective oxide layer is deposited, and CMOS circuitry and sensors are integrated. Silicon microstructures with sensors connected to CMOS circuitry are released. In addition, holes can be etched through the sacrificial oxide layer, sacrificial oxide can be deposited on the etched SCS, polysilicon can be deposited on the sacrificial oxide, PSG can be deposited on the polysilicon layer, which both can then be patterned.
摘要翻译：器件结构被限定在由来自处理晶片的绝缘体层（例如氧化物层）分离的单晶硅（SCS）层中。 SCS可以通过晶片接合连接到绝缘体，并且通过光刻图案和干蚀刻被选择性地蚀刻。可以在蚀刻的SCS上沉积牺牲氧化物层，在其上沉积多晶硅。沉积保护性氧化物层，并集成CMOS电路和传感器。释放了连接到CMOS电路的传感器的硅微结构。此外，可以通过牺牲氧化物层蚀刻孔，牺牲氧化物可以沉积在蚀刻的SCS上，多晶硅可以沉积在牺牲氧化物上，PSG可以沉积在多晶硅层上，然后可以对其进行图案化。

10. 发明授权

US07212693B2 Optical substance analyzer 有权
标题翻译：光学物质分析仪
公开(公告)号：US07212693B2
公开(公告)日：2007-05-01
申请号：US10743253
申请日：2003-12-22
申请人： Dustin W. Carr , Ho Bun Chan , Alex T. Tran
发明人： Dustin W. Carr , Ho Bun Chan , Alex T. Tran
IPC分类号： G02B6/00
CPC分类号： G01N21/774 , G01N21/45 , G01N21/7746 , G01N33/54366 , G01N33/569 , G01N2021/7709 , G01N2021/7779 , G01N2021/7793
摘要： A portable waveguide sensor having one or more gratings. In one embodiment, the sensor has a waveguide, wherein a plurality of grooves imprinted onto the waveguide form a Bragg grating. The surface of the grooves has a functional layer adapted to bind a substance of interest, e.g., a biological pathogen. When the pathogen binds to the functional layer, the binding shifts the spectral reflection band corresponding to the Bragg grating such that a probe light previously reflected by the grating now passes through the grating, thereby indicating the presence of the pathogen. In another embodiment, the sensor has a Mach-Zehnder interferometer (MZI), one arm of which has a resonator formed by two Bragg gratings. The surface of the resonator between the gratings has a functional layer whereas the Bragg gratings themselves do not have such a layer.
摘要翻译：具有一个或多个光栅的便携式波导传感器。在一个实施例中，传感器具有波导，其中印在波导上的多个凹槽形成布拉格光栅。凹槽的表面具有适于结合感兴趣物质的功能层，例如生物病原体。当病原体与功能层结合时，结合移动对应于布拉格光栅的光谱反射带，使得光栅以前反射的探针光线现在通过光栅，从而指示病原体的存在。在另一个实施例中，传感器具有马赫 - 曾德干涉仪（MZI），其一个臂具有由两个布拉格光栅形成的谐振器。光栅之间的谐振器的表面具有功能层，而布拉格光栅本身不具有这样的层。

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