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1. 发明申请

US20050079499A1 Substrate treatment device and method and encoder scale treated by this method 有权
标题翻译：通过该方法处理基板处理装置及方法及编码器尺寸
公开(公告)号：US20050079499A1
公开(公告)日：2005-04-14
申请号：US10494732
申请日：2002-11-15
申请人： Alexander Ellin , James Henshaw , David McMurtry
发明人： Alexander Ellin , James Henshaw , David McMurtry
IPC分类号： B23K26/00 , B23K26/04 , G01D5/347 , C12Q1/68 , C12M1/34 , B05D3/00
CPC分类号： C23F1/02 , B23K26/04 , B23K26/0823 , B23K26/361 , G01D5/34707
摘要： The invention provides a substrate treatment method and apparatus to produce a pattern on the substrate (10). Embodiments show a substrate (10) in the form of a rotary encoder ring (10) having a pattern of marks producable by means of a laser treatment device (122) controllable by a controller (100, 110) to produce the pattern in the correct manner whilst there is continuous relative displacement between the ring (10) and the laser treatment device (122).
摘要翻译：本发明提供了一种在衬底（10）上产生图案的衬底处理方法和设备。实施例示出了旋转编码器环（10）形式的基板（10），其具有通过可由控制器（100,110）控制的激光治疗装置（122）可生产的标记图案，以产生正确的图案同时在环（10）和激光治疗装置（122）之间存在持续的相对位移。

2. 发明申请

US20050229410A1 Scale reading apparatus 有权
标题翻译：刻度读取装置
公开(公告)号：US20050229410A1
公开(公告)日：2005-10-20
申请号：US10521168
申请日：2003-07-16
申请人： David McMurtry , James Henshaw , Alexander Ellin
发明人： David McMurtry , James Henshaw , Alexander Ellin
IPC分类号： G01D5/12 , G01D5/347 , G01D21/00
CPC分类号： G01D5/34707 , G01D5/34738
摘要： A rotary ring system for use in scale reading apparatus comprises a rotary ring (12), provided with scale marks on its surface and at least one intermediate member (24). The at least one intermediate member (24) is fitted between the rotary ring (12) and the machine part (10) on which the rotary ring is to be mounted. Application of a force to the at least one intermediate member adjusts the effective radius of the rotary ring. The at least one intermediate member may be tangentially compliant.
摘要翻译：用于秤读取装置的旋转环系统包括在其表面上设置有刻度标记的旋转环（12）和至少一个中间构件（24）。所述至少一个中间构件（24）装配在所述旋转环（12）与要安装所述旋转环的机器部件（10）之间。向至少一个中间构件施加力调节旋转环的有效半径。至少一个中间构件可以是切向顺应的。

3. 发明申请

US20070177157A1 Optical readhead 审中-公开
标题翻译：光学读数头
公开(公告)号：US20070177157A1
公开(公告)日：2007-08-02
申请号：US10590443
申请日：2005-03-04
申请人： David McMurtry , James Henshaw , Michael Homer , Mark Chapman , Raymond Chaney , William Lee , Jason Slack
发明人： David McMurtry , James Henshaw , Michael Homer , Mark Chapman , Raymond Chaney , William Lee , Jason Slack
IPC分类号： G01B9/02
CPC分类号： G01B9/02081 , G01B9/02041 , G01B9/02084 , G01B2290/70 , G01J9/02 , G01J2009/0234 , G01J2009/0261
摘要： Interferometry apparatus which comprises a measurement light beam (2a, 2b) and a reference light beam (2c, 2d) which interact with each other to cause a spatial fringe pattern (24). An optical device (12) is provided which interacts with the spatial fringe pattern (24), such that light is spatially separated into different directions (30, 32, 34, 36). The intensity modulation in two or more directions of the spatially separated light is phase shifted. The optical device may comprise, for example, a diffractive device, a refractive device or a diffractive optical element.
摘要翻译：干涉测量装置，其包括彼此相互作用以产生空间条纹图案（24）的测量光束（2a，2b）和参考光束（2c，2d）。提供了与空间条纹图案（24）相互作用的光学装置（12），使得光在空间上分离成不同的方向（30,32,34,36）。在空间分离的光的两个或更多个方向上的强度调制是相移的。光学装置可以包括例如衍射装置，折射装置或衍射光学元件。

4. 发明申请

US20050235502A1 Rotary scale 有权
标题翻译：旋转秤
公开(公告)号：US20050235502A1
公开(公告)日：2005-10-27
申请号：US10521440
申请日：2003-07-16
申请人： David McMurtry , James Henshaw , Alexander David Ellin
发明人： David McMurtry , James Henshaw , Alexander David Ellin
IPC分类号： G01D5/245 , G01D5/347 , G01D21/00
CPC分类号： G01D5/34707 , G01D5/3473
摘要： A rotary ring for use in scale reading apparatus, comprises a flexible ring (10) which has scale markings (14) provided on a surface thereof. The rotary ring is mounted onto a machine part (22) by providing the machine part with a region of increased diameter (26) and stretching or shrinking the flexible rotary scale (10) over said region of increased diameter. The manufacturing tolerance of the rotary scale or differential e.g. thermal expansion is thus taken up by stretching or shrinking it into place. The region of increased diameter may comprise an annular protrusion or an O-ring, for example.
摘要翻译：一种用于秤读取装置的旋转环，包括在其表面上设置有刻度标记（14）的柔性环（10）。通过为机器部件提供直径增加的区域（26）将旋转环安装到机器部件（22）上，并将柔性旋转秤（10）在增大的直径区域上拉伸或收缩。旋转秤或差速器的制造公差例如热膨胀因此被拉伸或收缩就位。直径增大的区域可以包括例如环形突起或O形环。

5. 发明申请

US20080013105A1 Scale Reading Apparatus 有权
标题翻译：刻度阅读器
公开(公告)号：US20080013105A1
公开(公告)日：2008-01-17
申请号：US11629853
申请日：2005-06-21
申请人： David McMurtry , James Henshaw
发明人： David McMurtry , James Henshaw
IPC分类号： G01B11/14
CPC分类号： G01D5/366 , G01D5/38
摘要： Apparatus for measuring displacement between two members. A scale is provided on one member and has an incremental pattern with at least one reference mark embedded in it. A read head is provided on the other member and comprises a periodic diffraction means for interacting with a light pattern modulated by the incremental pattern on the scale to produce interference fringes having movement relative to said readhead responsive to said displacement, first detecting means for detecting the movement of the interference fringes, imaging means for imaging the reference mark and second detecting means for detecting the image of the reference mark.
摘要翻译：用于测量两个构件之间的位移的装置。在一个成员上提供比例，并具有增加的模式，其中嵌入了至少一个参考标记。读头位于另一个构件上，并且包括周期性衍射装置，用于与由刻度尺上的增量图案调制的光图形相互作用，以产生响应于所述位移相对于所述读取头移动的干涉条纹;第一检测装置，干涉条纹的移动，用于对参考标记成像的成像装置和用于检测参考标记的图像的第二检测装置。

6. 发明申请

US20060283034A1 Probe or stylus orientation 有权
标题翻译：探针或手写笔方向
公开(公告)号：US20060283034A1
公开(公告)日：2006-12-21
申请号：US11510687
申请日：2006-08-28
申请人： David McMurtry , Geoffrey McFarland
发明人： David McMurtry , Geoffrey McFarland
IPC分类号： G01B3/00
CPC分类号： G01B5/012 , G01B21/042
摘要： Re-orientation of a stylus 30 or measurement probe 12 can be accomplished by engaging a part of the stylus or probe with a fixed part 50 and moving the probe in a spherical path centred at the engagement. The engagement 50 is spaced from the stylus tip 34 and avoids bending of the stylus during re-orientation. The re-orientation can take place into a plurality of e.g. repeatable rest positions by virtue of a kinematic array (e.g. balls 122 and rollers 120 FIG. 2).
摘要翻译：触针30或测量探头12的重新定位可以通过将触针或探针的一部分与固定部分50接合并以以接合为中心的球形路径移动探针来实现。接合件50与触针尖端34间隔开并且避免了在重新取向时触针的弯曲。重新定位可以发生到多个例如凭借运动学阵列（例如球122和图2的滚轮120）可重复的休息位置。

7. 发明申请

US20050190999A1 Bearing arrangement 有权
标题翻译：轴承安排
公开(公告)号：US20050190999A1
公开(公告)日：2005-09-01
申请号：US11053848
申请日：2005-02-10
申请人： Stephen Hunter , Michael Reeve , David McMurtry , Hugo Derrick
发明人： Stephen Hunter , Michael Reeve , David McMurtry , Hugo Derrick
IPC分类号： G01B21/00 , F16C11/06 , F16C17/08 , F16C17/10 , F16C23/04 , F16C27/02 , G01B5/012 , G01B7/00 , G01D11/02 , F16C17/04
CPC分类号： F16C17/10 , F16C17/08 , F16C23/04 , F16C25/04 , G01B5/012 , G01B7/001 , G01D11/02
摘要： A bearing arrangement for an articulatable support includes bearing assemblies. In one embodiment, the assemblies have a ball and aperture having sliding contact at discrete areas during relative rotation. In another embodiment, the sliding contact may be formed at a ball and a plastics (e.g. P.T.F.E. support). Resilient displacement of the bearing contact along a rotational axis is provided by planar spring supports and a rigid support is provided by supports.
摘要翻译：用于可铰接支撑件的轴承装置包括轴承组件。在一个实施例中，组件具有在相对旋转期间在离散区域处具有滑动接触的球和孔。在另一个实施例中，滑动接触可以形成在球和塑料（例如P.T.F.E.支撑件）上。轴承接触沿旋转轴线的弹性位移由平面弹簧支撑件提供，刚性支撑件由支撑件提供。

8. 发明申请

US20070231061A1 Pivot joint 有权
公开(公告)号：US20070231061A1
公开(公告)日：2007-10-04
申请号：US11798462
申请日：2007-05-14
申请人： David McMurtry
发明人： David McMurtry
IPC分类号： F16D1/12
CPC分类号： B25J17/0266 , B25J9/0072 , F16C11/045 , F16C11/0614 , F16C11/0623 , G01B3/002 , G01B5/004 , Y10T74/20207 , Y10T403/32041 , Y10T403/32631 , Y10T403/32681
摘要： A pivot joint has a first structure comprising a ball mounted in a receptacle, wherein the location of the ball is held with respect to the receptacle, and a second structure mounted on and movable with respect to the ball, wherein the second structure has at least one bearing surface which defines its position with respect to the ball. The ball may be held in location by contact with the receptacle at at least two positions. At least one of the positions of contact may be adjustable.

9. 发明申请

US20060215179A1 Laser calibration apparatus 审中-公开
标题翻译：激光校准仪
公开(公告)号：US20060215179A1
公开(公告)日：2006-09-28
申请号：US10518918
申请日：2003-07-07
申请人： David McMurtry , Raymond Chaney , Mark Chapman , Stephen Angood
发明人： David McMurtry , Raymond Chaney , Mark Chapman , Stephen Angood
IPC分类号： G01B5/004 , G01B11/14
CPC分类号： G01B11/272 , G01D5/262 , G01D5/305
摘要： Apparatus for measuring deviation of a trajectory from a straight line in the movement of a first body with respect to a second body comprising a transmitter unit mounted on one of the bodies and an optic unit mounted on the other of the bodies. The transmitter unit directs at least one light beam towards the optic unit such that two or more light beams are received within it. One of the units is provided with two or more detectors to detect the light beams transmitted to or reflected from the optic unit. The position of the light beams on the detectors is used to calculate the deviation of a trajectory from a straight line of one of the bodies with respect to the other in at least one degree of freedom. This enables measurement of straightness, pitch, roll, yaw and squareness errors.
摘要翻译：用于测量轨迹与第一主体相对于第二主体的移动中的直线的偏离的装置，包括安装在一个主体上的发射器单元和安装在另一个主体上的光学单元。发射器单元将至少一个光束引导到光学单元，使得在其内接收两个或更多个光束。其中一个单元设置有两个或更多个检测器，用于检测传输到光学单元或从光学单元反射的光束。光束在检测器上的位置用于在至少一个自由度中计算轨迹与一个物体的直线相对于另一个的直线的偏差。这样可以测量平直度，俯仰，滚动，偏航和平方度误差。

10. 发明申请

US20060037208A1 Method of scanning 失效
标题翻译：扫描方法
公开(公告)号：US20060037208A1
公开(公告)日：2006-02-23
申请号：US10523687
申请日：2003-08-29
申请人： David McMurtry
发明人： David McMurtry
IPC分类号： G01B5/20
CPC分类号： G01B5/004
摘要： A method of scanning an object is disclosed comprising the steps of providing a scanning device having a probe and a sample holder whereby the sample holder is rotatable relative to the probe, providing a first feature for indicating the start and/or end of a scan, and recognising the first feature whereby when the first feature is recognised the scanning device is ready to start or end a scan. The scanning device may have a fixed stop which comprises the first feature alternatively, the first feature is provided on the scanning device or on the object. A second feature, located on the scanning device or object for example, may be provided wherein the first feature indicates the start of a scan and the second feature indicates the end of the scan. Also disclosed is an apparatus for scanning an object.
摘要翻译：公开了一种扫描物体的方法，包括以下步骤：提供具有探针和样品保持器的扫描装置，由此样品保持器可相对于探针旋转，提供用于指示扫描的开始和/或结束的第一特征，并且识别第一特征，当识别出第一特征时，扫描装置准备开始或结束扫描。扫描装置可以具有固定挡块，其包括第一特征，第一特征设置在扫描装置上或物体上。可以提供位于扫描装置或物体上的例如第二特征，其中第一特征指示扫描的开始，第二特征指示扫描的结束。还公开了一种用于扫描物体的装置。

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