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    • 6. 发明申请
    • Scale Reading Apparatus
    • 刻度阅读器
    • US20080013105A1
    • 2008-01-17
    • US11629853
    • 2005-06-21
    • David McMurtryJames Henshaw
    • David McMurtryJames Henshaw
    • G01B11/14
    • G01D5/366G01D5/38
    • Apparatus for measuring displacement between two members. A scale is provided on one member and has an incremental pattern with at least one reference mark embedded in it. A read head is provided on the other member and comprises a periodic diffraction means for interacting with a light pattern modulated by the incremental pattern on the scale to produce interference fringes having movement relative to said readhead responsive to said displacement, first detecting means for detecting the movement of the interference fringes, imaging means for imaging the reference mark and second detecting means for detecting the image of the reference mark.
    • 用于测量两个构件之间的位移的装置。 在一个成员上提供比例,并具有增加的模式,其中嵌入了至少一个参考标记。 读头位于另一个构件上,并且包括周期性衍射装置,用于与由刻度尺上的增量图案调制的光图形相互作用,以产生响应于所述位移相对于所述读取头移动的干涉条纹;第一检测装置, 干涉条纹的移动,用于对参考标记成像的成像装置和用于检测参考标记的图像的第二检测装置。