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    • 1. 发明授权
    • Signal transmission and reception system
    • 信号发射和接收系统
    • US4633511A
    • 1986-12-30
    • US643834
    • 1984-08-23
    • Daisuke KogaMasahide TamuraYukio Naito
    • Daisuke KogaMasahide TamuraYukio Naito
    • H04B1/40H04B1/50
    • H04B1/50H04B1/408
    • A duplex transmission and reception system wherein a local oscillator of the receiver is dispensed with by using the output of a modulated transmission oscillator, with its modulation cancelled, in lieu of a receiver local oscillator. The transmitter modulation signal is adjusted by appropriate level correction and phase inversion. The modulated output of the transmission oscillator is itself applied to a modulator, where it is modulated by the adjusted modulation signal. This results in substantially cancelling out the modulation component of the transmission oscillator output. This modulation-cancelled signal is supplied to the mixer of a superheterodyne receiver as a local oscillator signal.
    • 一种双工发送和接收系统,其中通过使用调制的发送振荡器的输出来取消接收机的本地振荡器,其调制被取消,代替接收机本地振荡器。 通过适当的电平校正和相位反转调整发射机调制信号。 传输振荡器的调制输出本身被应用于调制器,在调制器中调制输出被调制后的调制信号调制。 这导致基本上消除了发送振荡器输出的调制分量。 该调制解除信号作为本地振荡器信号提供给超外差接收机的混频器。
    • 2. 发明授权
    • Transmitter having a phase synchronizing system
    • 具有相位同步系统的变送器
    • US4395776A
    • 1983-07-26
    • US269029
    • 1981-05-27
    • Yukio NaitoMasahide TamuraShigeo Takahashi
    • Yukio NaitoMasahide TamuraShigeo Takahashi
    • H03C3/09H04B1/04
    • H03C3/0966H04B1/0475H04B2001/0491
    • A transmitter having a transmitting phase synchronizing system. To one input of a frequency mixer is applied the output of a phase synchronizing type digital frequency synthesizer, through a first frequency divider. A modulating signal is applied to another input of the frequency mixer. The output from the mixer is connected via a bandpass filter to a phase synchronizing system having in series, along a main route, a phase detector, a lowpass filter, and a voltage controlled oscillator, and thence to an amplifier system. In a feedback route from another outlet of the voltage controlled oscillator to the phase detector is a second fixed frequency divider. The digital frequency synthesizer itself may have a reference oscillator connected in series to a third fixed frequency divider, a second phase detector, a second lowpass filter and a second voltage controlled oscillator, from which a feedback circuit leads back to the phase detector via the first fixed frequency divider and a variable frequency divider.
    • PCT No.PCT / JP80 / 00224 Sec。 371日期:1981年5月27日 102(e)日期1981年5月22日PCT提交1980年9月26日PCT公布。 出版物WO81 / 00942 日期:1981年4月2日。具有发射相位同步系统的发射机。 通过第一分频器对相位同步型数字频率合成器的输出施加到混频器的一个输入端。 调制信号被施加到混频器的另一输入端。 来自混频器的输出通过带通滤波器连接到相位同步系统,该相位同步系统沿着主路线,相位检测器,低通滤波器和压控振荡器串联,从而连接到放大器系统。 在从压控振荡器的另一个出口到相位检测器的反馈路径中是第二固定分频器。 数字频率合成器本身可以具有与第三固定分频器,第二相位检测器,第二低通滤波器和第二压控振荡器串联连接的参考振荡器,反馈电路从该第二固定分频器,第二低通滤波器和第二压控振荡器经由第一固定分频器 固定分频器和可变分频器。
    • 4. 发明授权
    • Automatic flaw detection device
    • 自动探伤装置
    • US4562738A
    • 1986-01-07
    • US596700
    • 1984-04-04
    • Kazuo NakayamaYukio NaitoEiji Munesue
    • Kazuo NakayamaYukio NaitoEiji Munesue
    • G01N29/26G01N29/04
    • G01N29/26
    • An automatic flaw detection apparatus comprises a supporting frame; a rotational frame supported inside the supporting frame in a freely rotatable manner by means of bearings; a hollow shaft which is supported by and inside the rotational frame, through the interior of which passes a material to be inspected; a holder which is disposed within the hollow shaft extending in the longitudinal direction of the axis of the hollow shaft and rotates in association with the hollow shaft, the a sensor incorporated in the holder to detect any defect in the material to be probed; and a signal transmission device which is placed between the hollow shaft and the rotational frame and comprises a stator section supported by the supporting frame and a rotor section supported by the hollow shaft or the rotational frame to be electrically in association with the stator section, and which transmits flaw detection signal from the sensor to the outside.
    • 一种自动探伤装置,包括支撑框架; 旋转框架,其通过轴承以可自由旋转的方式支撑在所述支撑框架内; 一个空心轴,由旋转框架支撑并在旋转框架的内部,通过其内部通过待检查的材料; 所述保持器设置在所述中空轴内,所述保持器沿所述中空轴的轴线的长度方向延伸,并且与所述中空轴相关联地旋转,所述传感器并入所述保持器中,以检测待探测材料中的任何缺陷; 以及信号传输装置,其设置在所述中空轴与所述旋转框架之间,并且包括由所述支撑框架支撑的定子部分和由所述中空轴或所述旋转框架支撑的与所述定子部分电连接的转子部分,以及 其将探测信号从传感器传送到外部。
    • 7. 发明授权
    • Plasma processing method and plasma etching method
    • 等离子体处理方法和等离子体蚀刻方法
    • US5716534A
    • 1998-02-10
    • US564621
    • 1995-11-29
    • Hiroshi TsuchiyaYoshio FukasawaShuji MochizukiYukio NaitoKosuke Imafuku
    • Hiroshi TsuchiyaYoshio FukasawaShuji MochizukiYukio NaitoKosuke Imafuku
    • H01J37/32H01L21/00
    • H01J37/32082H01J37/32165H01J37/3299H01J2237/3343
    • A plasma etching apparatus includes a process chamber that can be set at a reduced pressure. A lower electrode on which a semiconductor wafer is placed and an upper electrode opposing the lower electrode are disposed in the process chamber. The lower and upper electrodes are connected to RF power supplies, respectively. First and second RF powers, the phases and power ratio of which are separately controlled, can be applied to the upper and lower electrodes. Parameters including the frequencies, power values, and relative phases of the first and second RF powers are selected in order to set the etching characteristics, e.g., an etching rate, the planar uniformity of the etching rate, the etching selectivity ratio and the like to predetermined values. During etching, the first and second RF powers are monitored by separate detectors, and are maintained at initial preset values through a controller.
    • 等离子体蚀刻装置包括能够减压设置的处理室。 在其中放置半导体晶片的下电极和与下电极相对的上电极设置在处理室中。 下电极和上电极分别连接到RF电源。 第一和第二RF功率(其相位和功率比被单独控制)可以应用于上电极和下电极。 选择包括第一和第二RF功率的频率,功率值和相对相位的参数,以便将蚀刻特性,例如蚀刻速率,蚀刻速率的平面均匀性,蚀刻选择比等设置为 预定值。 在蚀刻期间,第一和第二RF功率由分离的检测器监测,并通过控制器保持在初始预设值。