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1. 发明申请

US20080155852A1 MULTIPLE SUBSTRATE VAPOR DRYING SYSTEMS AND METHODS 审中-公开
标题翻译：多基底蒸汽干燥系统及方法
公开(公告)号：US20080155852A1
公开(公告)日：2008-07-03
申请号：US11967533
申请日：2007-12-31
申请人： DONALD J.K. OLGADO , Simon Yavelberg , Edwin Velaquez , Hui Chen , Sheshraj L. Tulshibagwale , Ho Seon Shin
发明人： DONALD J.K. OLGADO , Simon Yavelberg , Edwin Velaquez , Hui Chen , Sheshraj L. Tulshibagwale , Ho Seon Shin
IPC分类号： F26B25/08 , F26B3/04
CPC分类号： H01L21/67034 , H01L21/67028
摘要： Embodiments of the present invention generally relate to an apparatus and methods for rinsing and drying substrates that include multiple rinsing and drying modules. Methods for arranging drying modules to enable high-throughput rinsing and drying of multiple substrates are also provided. In one embodiment a system for drying semiconductor substrates is provided. The system comprises a housing, a first drying module positioned within the housing, and a second drying module positioned adjacent the first drying module within the housing, wherein the first and second drying modules are oriented approximately vertically within the housing.
摘要翻译：本发明的实施方案一般涉及用于冲洗和干燥包括多个漂洗和干燥模块的基材的设备和方法。还提供了用于布置干燥模块以实现多个基板的高通量冲洗和干燥的方法。在一个实施例中，提供了一种用于干燥半导体衬底的系统。所述系统包括壳体，位于所述壳体内的第一干燥模块和邻近所述壳体内的所述第一干燥模块定位的第二干燥模块，其中所述第一和第二干燥模块在所述壳体内大致垂直定向。

2. 发明申请

US20080156360A1 HORIZONTAL MEGASONIC MODULE FOR CLEANING SUBSTRATES 审中-公开
标题翻译：用于清洁基板的水平微型模块
公开(公告)号：US20080156360A1
公开(公告)日：2008-07-03
申请号：US11961587
申请日：2007-12-20
申请人： Donald J.K. Olgado , Sheshraj L. Tulshibagwale , Thomas B. Brezoczky , John S. Lewis , Ho Seon Shin , Hui Chen , Roy C. Nangoy
发明人： Donald J.K. Olgado , Sheshraj L. Tulshibagwale , Thomas B. Brezoczky , John S. Lewis , Ho Seon Shin , Hui Chen , Roy C. Nangoy
IPC分类号： B08B3/00
CPC分类号： B08B3/00 , B08B3/04 , B08B3/12
摘要： Embodiments of the present invention relate to semiconductor device manufacturing, and more particularly to a horizontal megasonic module for cleaning substrates. In one embodiment an apparatus for cleaning a substrate is provided. The apparatus comprises a tank adapted to contain a cleaning fluid, a movable housing having a first side adapted to be placed in the cleaning fluid, a plurality of rotatable rollers coupled to the first side of the housing, the rollers positioned and including grooves to securely hold the substrate in a horizontal orientation, and one or more transducers adapted to direct vibrational energy through the cleaning fluid in the tank toward the substrate, wherein at least one of the transducers directs vibrational energy toward the substrate and substantially parallel to a major surface of the substrate.
摘要翻译：本发明的实施例涉及半导体器件制造，更具体地涉及用于清洁衬底的水平兆声模块。在一个实施例中，提供了一种用于清洁基底的装置。该设备包括适于容纳清洁流体的罐，具有适于放置在清洁流体中的第一侧的可移动壳体，与壳体的第一侧耦合的多个可旋转辊，辊定位并包括槽以牢固地将所述基板保持在水平方向，以及一个或多个换能器，其适于将振动能量引导通过所述罐中的所述清洁流体朝向所述基板，其中所述换能器中的至少一个将振动能量引向所述基板并基本上平行于底物。

3. 发明申请

US20080156359A1 SYSTEMS AND METHODS FOR MODULAR AND CONFIGURABLE SUBSTRATE CLEANING 审中-公开
标题翻译：用于模块化和可配置的基板清洁的系统和方法
公开(公告)号：US20080156359A1
公开(公告)日：2008-07-03
申请号：US11963458
申请日：2007-12-21
申请人： DONALD J.K. OLGADO , Ho Seon Shin , Sheshraj L. Tulshibagwale , Roy C. Nangoy , Hui Chen , Allen L. D'Ambra
发明人： DONALD J.K. OLGADO , Ho Seon Shin , Sheshraj L. Tulshibagwale , Roy C. Nangoy , Hui Chen , Allen L. D'Ambra
IPC分类号： B08B3/00
CPC分类号： H01L21/67034 , H01L21/67028 , H01L21/67207
摘要： Embodiments of the invention generally relate to a modular, configurable system in which distinct cleaning and drying modules can be arranged in different combinations selectable by a user of the system. In one embodiment a configurable system for substrate cleaning is provided. The configurable system provides a frame including first and second bays, the first and second bays each adapted to hold one or more cleaning or drying modules, and a transfer area positioned between the first and second bays including a robot adapted to move substrates to and from the one or more modules positioned within the first and second bays, wherein the frame is adapted to hold a user selectable set of one or more cleaning or drying modules in the first and second bays.
摘要翻译：本发明的实施例一般涉及模块化的可配置系统，其中不同的清洁和干燥模块可以以由系统的用户选择的不同组合来布置。在一个实施例中，提供了一种用于衬底清洁的可配置系统。可配置系统提供包括第一和第二托架的框架，每个适于保持一个或多个清洁或干燥模块的第一和第二托架以及定位在第一和第二托架之间的传送区域，包括适于将基板移动到和从一个或多个模块定位在第一和第二托架内，其中框架适于在第一和第二托架中容纳用户可选择的一个或多个清洁或干燥模块组。

4. 发明授权

US08407846B2 Scrubber brush with sleeve and brush mandrel for use with the scrubber brush 有权
标题翻译：洗涤刷与套筒和刷心轴用于洗涤刷
公开(公告)号：US08407846B2
公开(公告)日：2013-04-02
申请号：US11683116
申请日：2007-03-07
申请人： Hui Chen , Sheshraj L. Tulshibagwale , Hideshi Takahashi , Toshikazu Tomita , Takashi Fujikawa
发明人： Hui Chen , Sheshraj L. Tulshibagwale , Hideshi Takahashi , Toshikazu Tomita , Takashi Fujikawa
IPC分类号： B05C1/00
CPC分类号： H04L1/0045 , H01L21/67046 , H03M13/09 , H03M13/3738 , H03M13/3776 , H03M13/41 , H04L1/0059 , H04L1/20 , H04L1/208
摘要： In one aspect, a scrubber brush assembly is provided. The scrubber brush assembly includes (1) a cylindrical brush including exterior and interior surfaces; and (2) a sleeve having an exterior surface coupled to the interior surface of the scrubber brush and an interior surface. The exterior surface of the sleeve includes first coupling features adapted to prevent rotation of the sleeve relative to the brush. The scrubber brush assembly also includes a mandrel coupled to the interior surface of the sleeve. Numerous other aspects are provided.
摘要翻译：在一个方面，提供了洗涤器刷组件。洗涤器刷组件包括（1）包括外表面和内表面的圆柱刷; 和（2）具有连接到洗涤器刷的内表面的外表面和内表面的套管。套筒的外表面包括适于防止套筒相对于刷子旋转的第一联结特征。洗涤器刷组件还包括联接到套筒的内表面的心轴。提供了许多其他方面。

5. 发明申请

US20070209135A1 SCRUBBER BRUSH WITH SLEEVE AND BRUSH MANDREL FOR USE WITH THE SCRUBBER BRUSH 有权
标题翻译：带橡皮布的刷子和刷子与滚筒刷一起使用
公开(公告)号：US20070209135A1
公开(公告)日：2007-09-13
申请号：US11683116
申请日：2007-03-07
申请人： Hui Chen , Sheshraj L. Tulshibagwale , Hideshi Takahashi , Toshikazu Tomita , Takashi Fujikawa
发明人： Hui Chen , Sheshraj L. Tulshibagwale , Hideshi Takahashi , Toshikazu Tomita , Takashi Fujikawa
IPC分类号： A46B7/10
CPC分类号： H04L1/0045 , H01L21/67046 , H03M13/09 , H03M13/3738 , H03M13/3776 , H03M13/41 , H04L1/0059 , H04L1/20 , H04L1/208
摘要： In one aspect, a scrubber brush assembly is provided. The scrubber brush assembly includes (1) a cylindrical brush including exterior and interior surfaces; and (2) a sleeve having an exterior surface coupled to the interior surface of the scrubber brush and an interior surface. The exterior surface of the sleeve includes first coupling features adapted to prevent rotation of the sleeve relative to the brush. The scrubber brush assembly also includes a mandrel coupled to the interior surface of the sleeve. Numerous other aspects are provided.
摘要翻译：在一个方面，提供了洗涤器刷组件。洗涤器刷组件包括（1）包括外表面和内表面的圆柱刷; 和（2）具有连接到洗涤器刷的内表面的外表面和内表面的套管。套筒的外表面包括适于防止套筒相对于刷子旋转的第一联结特征。洗涤器刷组件还包括联接到套筒的内表面的心轴。提供了许多其他方面。

6. 发明申请

US20100084023A1 FLOW CONTROL MODULE FOR A FLUID DELIVERY SYSTEM 审中-公开
标题翻译：流体输送系统的流量控制模块
公开(公告)号：US20100084023A1
公开(公告)日：2010-04-08
申请号：US12247013
申请日：2008-10-07
申请人： Chris Melcer , Thuy Britcher , Avi Tepman , Simon Y. Yavelberg , Sheshraj L. Tulshibagwale
发明人： Chris Melcer , Thuy Britcher , Avi Tepman , Simon Y. Yavelberg , Sheshraj L. Tulshibagwale
IPC分类号： F16K11/00
CPC分类号： H01L21/67219 , B24B37/04 , B24B57/02 , H01L21/67017 , Y10T137/0396 , Y10T137/877
摘要： Embodiments described herein provide an application for delivery of fluids within substrate processing systems. More particularly, embodiments described herein provide applications for delivery of processing chemicals within substrate processing systems. In one embodiment, a fluid delivery system is provided. The fluid delivery system comprises a bulk fluid source for supplying fluids, a fluid delivery module for controlling and monitoring a ratio of fluids flowing from the bulk fluid source, a first stream line positioned downstream from the fluid delivery module, a first switch positioned along the first stream line, a second stream line positioned downstream from the fluid delivery module, and a second switch positioned along the second stream line, wherein the fluid delivery module splits the fluids from the bulk fluid source into two streams flowing through the first stream line and the second stream line according to a pre-defined ratio.
摘要翻译：本文所述的实施例提供了在衬底处理系统内输送流体的应用。更具体地，本文描述的实施例提供了在衬底处理系统内递送处理化学品的应用。在一个实施例中，提供流体输送系统。流体输送系统包括用于供应流体的体液源，流体输送模块，用于控制和监测从大量流体源流出的流体的比例，位于流体输送模块下游的第一流线，沿着流体输送模块定位的第一开关第一流线，位于流体输送模块下游的第二流线和沿着第二流线定位的第二开关，其中流体输送模块将流体从本体流体源分流成流过第一流线的两股流，第二条流线根据预定义的比例。

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