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1. 发明授权

US06432823B1 Off-concentric polishing system design 失效
标题翻译：非同心抛光系统设计
公开(公告)号：US06432823B1
公开(公告)日：2002-08-13
申请号：US09433681
申请日：1999-11-04
申请人： Cuc K. Huynh , Paul A. Manfredi , Thomas J. Martin , Douglas P. Nadeau , Yutong Wu
发明人： Cuc K. Huynh , Paul A. Manfredi , Thomas J. Martin , Douglas P. Nadeau , Yutong Wu
IPC分类号： H01L21302
CPC分类号： B24B37/042 , B24B27/0076
摘要： An apparatus and method of planarizing objects, particularly electronic components. The off-concentric polishing system of the present invention comprises at least two polishing platens positioned adjacent each other such that the polishing portions of the platens are substantially co-planar. At least one wafer carrier is moveably mounted over the at least two platens such that a wafer may be polished by more than one platen substantially simultaneously. The platen configurations may be in a linear or non-linear configuration such that the wafer being polished is no longer centrally disposed over a single platen but is off-concentrically positioned over multiple platens. The off-concentric positioning of the wafer provides enhanced slurry distribution and endpoint detection. The present invention reduces time and cost in manufacturing electronic components by engaging several polishing conditions simultaneously without the need for sequential polishing.
摘要翻译：平面化物体，特别是电子部件的装置和方法。本发明的非同心抛光系统包括至少两个彼此相邻定位的抛光台，使得压板的抛光部分基本上是共面的。至少一个晶片载体可移动地安装在所述至少两个压板上，使得晶片可以被多于一个压板基本上同时抛光。压板构造可以是线性或非线性构造，使得被抛光的晶片不再居中地设置在单个压板上，而是在多个压板上偏心地定位。晶片的非同心定位提供了增强的浆料分布和端点检测。本发明通过同时接合多个抛光条件来减少制造电子部件的时间和成本，而不需要顺序抛光。

2. 发明授权

US08005560B2 Method of optimizing queue times in a production cycle 有权
标题翻译：优化生产周期队列时间的方法
公开(公告)号：US08005560B2
公开(公告)日：2011-08-23
申请号：US11874518
申请日：2007-10-18
申请人： Brad J. Rawlins , James Rice , Yunsheng Song , Yutong Wu
发明人： Brad J. Rawlins , James Rice , Yunsheng Song , Yutong Wu
IPC分类号： G06F19/00 , G06F11/30
CPC分类号： G05B19/41865 , G05B2219/32191 , G05B2219/32265 , G06Q10/02 , G06Q50/04 , Y02P90/20 , Y02P90/22 , Y02P90/30
摘要： A method of optimizing production cycle queue time includes selecting a plurality of process steps for a production cycle, calculating queue times for each of the plurality of process steps, statistically analyzing the queue times, and generating at least one visual output that illustrates the statistically analyzed queue times.
摘要翻译：优化生产周期队列时间的方法包括选择用于生产周期的多个处理步骤，计算多个处理步骤中的每一个的队列时间，统计分析队列时间，以及生成至少一个视觉输出，说明统计分析队列时间

3. 发明授权

US07480538B2 Methods, systems, and computer program products for managing movement of work-in-process materials in an automated manufacturing environment 失效
标题翻译：用于管理自动化制造环境中工件在线材料的移动的方法，系统和计算机程序产品
公开(公告)号：US07480538B2
公开(公告)日：2009-01-20
申请号：US11939792
申请日：2007-11-14
申请人： Richard P. Volant , Bradley P. Jones , Sameer T. Shikalgar , Michael J. Toner , Yutong Wu
发明人： Richard P. Volant , Bradley P. Jones , Sameer T. Shikalgar , Michael J. Toner , Yutong Wu
IPC分类号： G06F19/00
CPC分类号： G06Q50/04 , G06Q10/06 , Y02P80/40 , Y02P90/30 , Y02P90/86
摘要： Methods, systems, and computer program products for managing movement of work-in-process materials between processing units in an automated manufacturing environment are provided. A system includes a host system in communication with a work-in-process (WIP) material lot. The system also includes an application executing on the host. The application implements a method that includes tracking a position of the WIP material lot, receiving a list of the processing units designated to be inoperative during a down time, and receiving a start time and a duration of the down time. The method also includes determining a maximum dwell time for each of the designated processing units and scheduling movement of the WIP material lot during an interim between a current time and the start time of the down time based on current position of the work-in-process material lot, the current time, the start time and duration of the down time, and the maximum dwell time.
摘要翻译：提供了用于管理在自动化制造环境中的处理单元之间的在制品材料的移动的方法，系统和计算机程序产品。系统包括与工件在制品（WIP）材料批次通信的主机系统。该系统还包括在主机上执行的应用程序。应用程序实现一种方法，其包括跟踪WIP物料批次的位置，接收在停机期间被指定为不起作用的处理单元的列表，以及接收停机时间的开始时间和持续时间。该方法还包括确定每个指定处理单元的最大驻留时间，并根据当前工作中的位置在当前时间与停机时间的开始时间间隔期间调度WIP材料批次的移动材料批次，当前时间，停机时间的开始时间和持续时间以及最长停留时间。

4. 发明授权

US06576507B1 Selectively removable filler layer for BiCMOS process 有权
标题翻译：用于BiCMOS工艺的选择性可移除填料层
公开(公告)号：US06576507B1
公开(公告)日：2003-06-10
申请号：US09712510
申请日：2000-11-14
申请人： Kenneth A. Bandy , Stuart D. Cheney , Gary L. Milo , Yutong Wu
发明人： Kenneth A. Bandy , Stuart D. Cheney , Gary L. Milo , Yutong Wu
IPC分类号： H01L218249
CPC分类号： H01L21/8249
摘要： The present invention is intended for use on BiCMOS technology where the BJTs are formed after the FETs. A thin FET protection layer 26 is deposited on the raised and recessed regions 28 of the semiconductor substrate 10. A selectively removable filler layer 30 is then deposited on the FET protection layer 26 with a thickness to over-fill the recessed regions 28 of the gates 24 of the FETs. The selectively removable filler layer 30 is then planarized until the FET protection layer 26 on top of the gates 24 is exposed. The recessed regions 28 between the gates 24 are left substantially filled with selectively removable filler layer 30. The selectively removable filler layer 30 in the region where the BJT is formed is patterned and an opening 32 is made to allow for the depositing of layers of different materials 34, 36, 38, 40, 42, 44 used in the construction of the BJT. The layer of different materials 34, 36, 38, 40, 42, 44 are processed by methods known in the art to form polysilicon emitter 46 of the BJT. Due to selectively removable filler layer 30 creating a substantially planar surface in the recessed regions 28 of the FETs, little to none of the layers of different materials 34, 36, 38, 40, 42, 44 that are used in the construction of the BJT are deposited within the recessed regions 28. Thus, removal of the layers of different materials 34, 36, 38, 40 (40′), 42, 44 from the FET region is simplified. After removal of the layers of different materials 34, 36, 38, 40 (40′), 42, 44 from the FET region, the selectively removable filler layer 30 is removed selectively to the FET protection layer 26. The FET protection layer 26 is then removed. The recessed regions 28 between the gates 24 of the FETs are free from residual films.
摘要翻译：本发明旨在用于在FET之后形成BJT的BiCMOS技术。薄的FET保护层26沉积在半导体衬底10的凸起和凹陷区域28上。然后，可选择地移除的填充层30沉积在FET保护层26上，其厚度足以使栅极的凹陷区域28过度填充 24个FET。然后可选择性地移除的填充层30被平坦化，直到露出栅极24顶部的FET保护层26为止。门24之间的凹陷区域28基本上被可选择地移除的填充层30填充。形成BJT的区域中的可选择性地移除的填充层30被图案化并且形成开口32以允许沉积不同的层用于建造BJT的材料34,36,38,40,42,44。通过本领域已知的方法来处理不同材料层34,36,38,40,42,44的层以形成BJT的多晶硅发射器46。由于选择性地可移除的填充层30在FET的凹陷区域28中产生基本平坦的表面，所以在BJT的构造中使用的不同材料34,36,38,40,42,44的层几乎不下降沉积在凹陷区域28内。因此，从FET区域去除不同材料层34,36,38,40（40'），42,44的层被简化。在从FET区域去除不同材料34,36,38,40（40'），42,44的层之后，可选择地移除的填充层30被选择性地去除到FET保护层26.FET保护层26是然后删除。 FET的栅极24之间的凹陷区域28没有残留的膜。

5. 发明授权

US07369911B1 Methods, systems, and computer program products for managing movement of work-in-process materials in an automated manufacturing environment 失效
标题翻译：用于管理自动化制造环境中工件在线材料的移动的方法，系统和计算机程序产品
公开(公告)号：US07369911B1
公开(公告)日：2008-05-06
申请号：US11621693
申请日：2007-01-10
申请人： Richard P. Volant , Bradley P. Jones , Sameer T. Shikalgar , Michael J. Toner , Yutong Wu
发明人： Richard P. Volant , Bradley P. Jones , Sameer T. Shikalgar , Michael J. Toner , Yutong Wu
IPC分类号： G06F19/00
CPC分类号： G06Q50/04 , G06Q10/06 , Y02P80/40 , Y02P90/30 , Y02P90/86
摘要： Methods, systems, and computer program products for managing movement of work-in-process materials between processing units in an automated manufacturing environment are provided. A system includes a host system in communication with a work-in-process (WIP) material lot. The system also includes an application executing on the host. The application implements a method that includes tracking a position of the WIP material lot, receiving a list of the processing units designated to be inoperative during a down time, and receiving a start time and a duration of the down time. The method also includes determining a maximum dwell time for each of the designated processing units and scheduling movement of the WIP material lot during an interim between a current time and the start time of the down time based on current position of the work-in-process material lot, the current time, the start time and duration of the down time, and the maximum dwell time.
摘要翻译：提供了用于管理在自动化制造环境中的处理单元之间的在制品材料的移动的方法，系统和计算机程序产品。系统包括与工件在制品（WIP）材料批次通信的主机系统。该系统还包括在主机上执行的应用程序。应用程序实现一种方法，其包括跟踪WIP物料批次的位置，接收在停机期间被指定为不起作用的处理单元的列表，以及接收停机时间的开始时间和持续时间。该方法还包括确定每个指定处理单元的最大驻留时间，并根据当前工作中的位置在当前时间与停机时间的开始时间间隔期间调度WIP材料批次的移动材料批次，当前时间，停机时间的开始时间和持续时间以及最长停留时间。

6. 发明申请

US20090105854A1 METHOD OF OPTIMIZING QUEUE TIMES IN A PRODUCTION CYCLE 有权
标题翻译：在生产周期中优化队列时间的方法
公开(公告)号：US20090105854A1
公开(公告)日：2009-04-23
申请号：US11874518
申请日：2007-10-18
申请人： Brad J. Rawlins , James Rice , Yunsheng Song , Yutong Wu
发明人： Brad J. Rawlins , James Rice , Yunsheng Song , Yutong Wu
IPC分类号： G05B13/02
CPC分类号： G05B19/41865 , G05B2219/32191 , G05B2219/32265 , G06Q10/02 , G06Q50/04 , Y02P90/20 , Y02P90/22 , Y02P90/30
摘要： A method of optimizing production cycle queue time includes selecting a plurality of process steps for a production cycle, calculating queue times for each of the plurality of process steps, statistically analyzing the queue times, and generating at least one visual output that illustrates the statistically analyzed queue times.
摘要翻译：优化生产周期队列时间的方法包括选择用于生产周期的多个处理步骤，计算多个处理步骤中的每一个的队列时间，统计分析队列时间，以及生成至少一个视觉输出，说明统计分析队列时间

7. 发明申请

US20080167743A1 METHODS, SYSTEMS, AND COMPUTER PROGRAM PRODUCTS FOR MANAGING MOVEMENT OF WORK-IN-PROCESS MATERIALS IN AN AUTOMATED MANUFACTURING ENVIRONMENT 审中-公开
标题翻译：用于管理自动化制造环境中工艺过程材料运动的方法，系统和计算机程序产品
公开(公告)号：US20080167743A1
公开(公告)日：2008-07-10
申请号：US11868739
申请日：2007-10-08
申请人： Richard P. Volant , Bradley P. Jones , Sameer T. Shikalgar , Michael J. Toner , Yutong Wu
发明人： Richard P. Volant , Bradley P. Jones , Sameer T. Shikalgar , Michael J. Toner , Yutong Wu
IPC分类号： G06F19/00
CPC分类号： G06Q50/04 , G06Q10/06 , Y02P80/40 , Y02P90/30 , Y02P90/86
摘要： Methods, systems, and computer program products for managing movement of work-in-process materials (WIPs) between processing units are provided. A system includes a host system and an application executing thereon. The application implements a method that includes receiving a list of WIP lots, and indexing a list of routes with raw process time by process steps and with safe holding points. The method also includes indexing a scheduled start time of shutdown for the process units and calculating transport time for moving each of the lots to the next nearest safe holding point in the route. For each lot, the method includes determining whether the lot is at a safe holding point, and assigning a dispatch priority to the lot if it is not at the safe holding point. The method further includes sending a list of assigned dispatch priorities to a dispatcher for transporting the lots to corresponding safe holding points prior to initiating the shutdown.
摘要翻译：提供了用于管理处理单元之间的在制品（WIP）的移动的方法，系统和计算机程序产品。系统包括主机系统和在其上执行的应用。应用程序实现了一种方法，包括接收WIP批次的列表，并通过流程步骤和安全的保留点对原始进程时间的路由索引进行索引。该方法还包括为处理单元索引预定的关闭开始时间，并计算将每个批次移动到路线中的下一个最近的安全保持点的运输时间。对于每个批次，该方法包括确定批次是否处于安全的保持点，以及如果批次不在安全保存点，则向批次分配调度优先级。该方法还包括将发送分配优先级的列表发送到调度器，用于在开始关闭之前将批量传送到相应的安全保持点。

8. 发明申请

US20080167733A1 METHODS, SYSTEMS, AND COMPUTER PROGRAM PRODUCTS FOR MANAGING MOVEMENT OF WORK-IN-PROCESS MATERIALS IN AN AUTOMATED MANUFACTURING ENVIRONMENT 失效
标题翻译：用于管理自动化制造环境中工艺过程材料运动的方法，系统和计算机程序产品
公开(公告)号：US20080167733A1
公开(公告)日：2008-07-10
申请号：US11939792
申请日：2007-11-14
申请人： Richard P. Volant , Bradley P. Jones , Sameer T. Shikalgar , Michael J. Toner , Yutong Wu
发明人： Richard P. Volant , Bradley P. Jones , Sameer T. Shikalgar , Michael J. Toner , Yutong Wu
IPC分类号： G05B13/02
CPC分类号： G06Q50/04 , G06Q10/06 , Y02P80/40 , Y02P90/30 , Y02P90/86
摘要： Methods, systems, and computer program products for managing movement of work-in-process materials between processing units in an automated manufacturing environment are provided. A system includes a host system in communication with a work-in-process (WIP) material lot. The system also includes an application executing on the host. The application implements a method that includes tracking a position of the WIP material lot, receiving a list of the processing units designated to be inoperative during a down time, and receiving a start time and a duration of the down time. The method also includes determining a maximum dwell time for each of the designated processing units and scheduling movement of the WIP material lot during an interim between a current time and the start time of the down time based on current position of the work-in-process material lot, the current time, the start time and duration of the down time, and the maximum dwell time.
摘要翻译：提供了用于管理在自动化制造环境中的处理单元之间的在制品材料的移动的方法，系统和计算机程序产品。系统包括与工件在制品（WIP）材料批次通信的主机系统。该系统还包括在主机上执行的应用程序。应用程序实现一种方法，其包括跟踪WIP物料批次的位置，接收在停机期间被指定为不起作用的处理单元的列表，以及接收停机时间的开始时间和持续时间。该方法还包括确定每个指定处理单元的最大驻留时间，并根据当前工作中的位置在当前时间与停机时间的开始时间间隔期间调度WIP材料批次的移动材料批次，当前时间，停机时间的开始时间和持续时间以及最长停留时间。

9. 发明授权

US07089077B1 Monitor wafer purchase and controls database 失效
标题翻译：监控晶圆采购和控制数据库
公开(公告)号：US07089077B1
公开(公告)日：2006-08-08
申请号：US11160719
申请日：2005-07-06
申请人： Neil A. Reitmeyer , Sean M. Dickinson , Yutong Wu
发明人： Neil A. Reitmeyer , Sean M. Dickinson , Yutong Wu
IPC分类号： G06F19/00 , G06F7/00 , G06F3/00 , G05B15/00
CPC分类号： G06Q10/087 , Y10S715/961
摘要： Controlling stocker capacity in an automated facility and controlling monitor budgets by capped releases, capped FOUP supplies, and wafer reuse methodology. A Database is used to order, track, and reclaim test (monitor) wafers in the FAB. The database automatically controls the amount of FOUPs in the FAB as well as the amount of wafers released into the FAB each day. This database also interacts with the Control Center in helping to release monitor wafers in the FAB.
摘要翻译：控制自动化设备中的储存器容量，并通过封顶版本控制监控预算，限制FOUP耗材和晶圆再利用方法。数据库用于在FAB中订购，跟踪和回收测试（监视）晶圆。数据库自动控制FAB中FOUP的数量以及每天释放到FAB中的晶片数量。该数据库还与控制中心进行交互，以帮助释放FAB中的监视晶片。

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