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1. 发明授权

US07782452B2 Systems and method for simultaneously inspecting a specimen with two distinct channels 有权
标题翻译：用两个不同通道同时检查样本的系统和方法
公开(公告)号：US07782452B2
公开(公告)日：2010-08-24
申请号：US11848516
申请日：2007-08-31
申请人： Courosh Mehanian , Hans J. Hansen , Yingjian Wang , Yuval Ben-Dov , Zheng-Wu Li , Andrew V. Hill , Mehdi Vaez-Iravani , Kurt Zimmermann
发明人： Courosh Mehanian , Hans J. Hansen , Yingjian Wang , Yuval Ben-Dov , Zheng-Wu Li , Andrew V. Hill , Mehdi Vaez-Iravani , Kurt Zimmermann
IPC分类号： G01N21/00
CPC分类号： G02B21/18 , G01N21/8806 , G01N21/9501 , G01N2021/8825 , G02B21/367
摘要： A system is provided herein for inspecting a specimen. In one embodiment, the system may include a dual-channel microscope, two illuminators, each coupled for illuminating a different channel of the dual-channel microscope and two detectors, each coupled to a different channel of the dual-channel microscope for acquiring images of the specimen. Means are provided for separating the channels of the dual-channel microscope, so that the two detectors can acquire the images of the specimen at substantially the same time. In one embodiment, the channels of the dual-channel microscope may be spectrally separated by configuring the two illuminators, so that they produce light in two substantially non-overlapping spectral ranges. In another embodiment, the channels of the dual-channel microscope may be spatially separated by positioning the two detectors, so that the illumination light do not overlap and the fields of view of the two detectors do not overlap within a field of view of an objective lens included within the system.
摘要翻译：本文提供了用于检查样本的系统。在一个实施例中，系统可以包括双通道显微镜，两个照明器，每个照明器被耦合用于照亮双通道显微镜和两个检测器的不同通道，每个检测器耦合到双通道显微镜的不同通道，用于获取标本。提供了用于分离双通道显微镜的通道的装置，使得两个检测器可以在基本上同时获取样本的图像。在一个实施例中，双通道显微镜的通道可以通过配置两个照明器进行光谱分离，使得它们产生两个基本上非重叠的光谱范围的光。在另一个实施例中，双通道显微镜的通道可以通过定位两个检测器在空间上分离，使得照明光不重叠，并且两个检测器的视场在目标的视场内不重叠镜头包含在系统内。

2. 发明申请

US20110228070A1 System and Method for Determining Image Focus by Sampling the Image at Multiple Focal Planes Simultaneously 审中-公开
标题翻译：用于通过在多重焦点平面上采样图像来确定图像聚焦的系统和方法
公开(公告)号：US20110228070A1
公开(公告)日：2011-09-22
申请号：US12941054
申请日：2010-11-06
申请人： Courosh Mehanian , Yuval Ben-Dov , Andrew V. Hill
发明人： Courosh Mehanian , Yuval Ben-Dov , Andrew V. Hill
IPC分类号： H04N7/18 , H04N5/232
CPC分类号： H04N5/23248
摘要： A system and method for maintaining focus in an imaging device; the imaging device having an objective lens with an optical axis, a stage for supporting a specimen, and a controller for controlling the stage-to-objective distance; the system comprising: one or more image sensors placed at a plurality of substantially different axial focal positions, and at least one computing device executing computer-readable instructions stored in its memory and configured to acquire images from each of the image sensors; the method comprising: computing a quantitative image characteristic for each of the images acquired by the computing device, computing an axial stage-to-objective distance correction based on the computed quantitative image characteristics and the plurality of axial focal positions, and causing the controller to adjust the axial stage-to-objective distance according to the computed axial stage-to-objective distance correction.
摘要翻译：一种用于在成像装置中保持焦点的系统和方法; 所述成像装置具有带有光轴的物镜，用于支撑样本的台，以及用于控制所述阶段对目标距离的控制器; 所述系统包括：放置在多个基本上不同的轴向焦点位置的一个或多个图像传感器，以及执行存储在其存储器中并被配置为从每个图像传感器获取图像的计算机可读指令的至少一个计算设备; 所述方法包括：计算由所述计算设备获取的每个图像的定量图像特征，基于所计算的定量图像特征和所述多个轴向焦点位置计算轴向阶段到目标距离校正，并且使所述控制器根据计算的轴向阶段到目标的距离校正来调整轴向阶段到目标的距离。

3. 发明申请

US20090059215A1 Systems and Method for Simultaneously Inspecting a Specimen with Two Distinct Channels 有权
标题翻译：同时检测两个不同通道样本的系统和方法
公开(公告)号：US20090059215A1
公开(公告)日：2009-03-05
申请号：US11848516
申请日：2007-08-31
申请人： Courosh Mehanian , Hans J. Hansen , Yingjian Wang , Yuval Ben-Dov , Zheng-Wu Li , Andrew V. Hill , Mehdi Vaez-Iravani , Kurt Zimmerman
发明人： Courosh Mehanian , Hans J. Hansen , Yingjian Wang , Yuval Ben-Dov , Zheng-Wu Li , Andrew V. Hill , Mehdi Vaez-Iravani , Kurt Zimmerman
IPC分类号： G01N21/88 , G02B21/18
CPC分类号： G02B21/18 , G01N21/8806 , G01N21/9501 , G01N2021/8825 , G02B21/367
摘要： A system is provided herein for inspecting a specimen. In one embodiment, the system may include a dual-channel microscope, two illuminators, each coupled for illuminating a different channel of the dual-channel microscope and two detectors, each coupled to a different channel of the dual-channel microscope for acquiring images of the specimen. Means are provided for separating the channels of the dual-channel microscope, so that the two detectors can acquire the images of the specimen at substantially the same time. In one embodiment, the channels of the dual-channel microscope may be spectrally separated by configuring the two illuminators, so that they produce light in two substantially non-overlapping spectral ranges. In another embodiment, the channels of the dual-channel microscope may be spatially separated by positioning the two detectors, so that the illumination light do not overlap and the fields of view of the two detectors do not overlap within a field of view of an objective lens included within the system.
摘要翻译：本文提供了用于检查样本的系统。在一个实施例中，系统可以包括双通道显微镜，两个照明器，每个照明器被耦合用于照亮双通道显微镜和两个检测器的不同通道，每个检测器耦合到双通道显微镜的不同通道，用于获取标本。提供了用于分离双通道显微镜的通道的装置，使得两个检测器可以在基本上同时获取样本的图像。在一个实施例中，双通道显微镜的通道可以通过配置两个照明器进行光谱分离，使得它们产生两个基本上非重叠的光谱范围的光。在另一个实施例中，双通道显微镜的通道可以通过定位两个检测器在空间上分离，使得照明光不重叠，并且两个检测器的视场在目标的视场内不重叠镜头包含在系统内。

4. 发明授权

US06745095B1 Detection of process endpoint through monitoring fluctuation of output data 失效
标题翻译：通过监测输出数据的波动来检测过程终点
公开(公告)号：US06745095B1
公开(公告)日：2004-06-01
申请号：US09686656
申请日：2000-10-04
申请人： Yuval Ben-Dov , Moshe Sarfaty , Alexander Viktorovich Garachtchenko
发明人： Yuval Ben-Dov , Moshe Sarfaty , Alexander Viktorovich Garachtchenko
IPC分类号： G06F1900
CPC分类号： H01L22/26
摘要： Progress of a semiconductor fabrication process is monitored by detecting data output by the process, and then correlating a specific process event to fluctuations in the output data over a time period of 10 milliseconds or less. In one embodiment, endpoint of a plasma chamber cleaning process may be identified by calculating standard deviation of intensity of optical chamber emissions based upon a local time period. The time at which standard deviation of optical emissions attains a steady state indicates endpoint of the cleaning process. Another approach to characterizing fluctuation is to perform a Fast Fourier Transform (FFT) on the output emissions data, and then to plot over time the total power of the emissions over a relevant frequency range. The time at which total power attains a steady state also reveals endpoint of the process. Other techniques for characterizing fluctuation for process monitoring include calculation of the root-mean-square or entropy of an output signal.
摘要翻译：通过检测由该过程输出的数据，然后在10毫秒或更短的时间段内将特定的处理事件与输出数据的波动相关联来监视半导体制造过程的进展。在一个实施例中，可以通过基于本地时间段计算光学室排放的强度的标准偏差来识别等离子体室清洁过程的端点。光发射的标准偏差达到稳定状态的时间表示清洁过程的终点。表征波动的另一种方法是对输出发射数据执行快速傅里叶变换（FFT），然后随时间绘制在相关频率范围内的排放总功率。总功率达到稳定状态的时间也揭示了过程的终点。用于表征过程监测的波动的其他技术包括计算输出信号的均方根或熵。

5. 发明授权

US07249002B1 Direct relative motion measurement for vibration induced noise and drift cancellation 有权
标题翻译：用于振动引起的噪声和漂移消除的直接相对运动测量
公开(公告)号：US07249002B1
公开(公告)日：2007-07-24
申请号：US10929260
申请日：2004-08-30
申请人： Yuval Ben-Dov , Michael Weber-Grabau
发明人： Yuval Ben-Dov , Michael Weber-Grabau
IPC分类号： G06F15/00 , G01N13/12 , G01N13/16 , G01N13/20
CPC分类号： G01Q30/06 , G01Q70/04
摘要： A surface analysis apparatus and a method for compensating for mechanical vibrations and drifts in a surface analysis instrument are disclosed. A probe that is sensitive to the distance between the probe and a sample surface provides a probe signal. The probe signal contains information about the surface properties and noise due to changes in the probe-surface distance. A sensor measures a displacement between a probe and the sample surface. The sensor is substantially insensitive to the surface properties measured by the probe. The displacement measurement can be used to compensate for the noise in the probe signal.
摘要翻译：公开了用于补偿表面分析仪器中的机械振动和漂移的表面分析装置和方法。探针与探头和样品表面之间的距离敏感的探头提供探测信号。探头信号包含由于探头表面距离变化而引起的表面性质和噪声的信息。传感器测量探头与样品表面之间的位移。传感器对由探头测量的表面性质基本上不敏感。位移测量可用于补偿探测信号中的噪声。

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