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1. 发明申请

US20070163335A1 METHOD AND APPARATUS FOR MEASURING ELECTRICAL PROPERTIES IN TORSIONAL RESONANCE MODE 有权
标题翻译：用于测量扭转谐振模式下电气特性的方法和装置
公开(公告)号：US20070163335A1
公开(公告)日：2007-07-19
申请号：US11619097
申请日：2007-01-02
申请人： Lin Huang , Chanmin Su
发明人： Lin Huang , Chanmin Su
IPC分类号： G01N13/10 , G01N13/16 , G01N13/20
CPC分类号： G01Q20/04 , G01Q10/065 , G01Q30/06 , G01Q30/18 , G01Q60/26 , G01Q60/30 , G01Q60/32 , G01Q60/40 , G01Q60/48
摘要： The preferred embodiments are directed to a method and apparatus of operating a scanning probe microscope (SPM) including oscillating a probe of the SPM at a torsional resonance of the probe, and generally simultaneously measuring an electrical property, e.g., a current, capacitance, impedance, etc., between a probe of the SPM and a sample at a separation controlled by the torsional resonance mode. Preferably, the measuring step is performed while using torsional resonance feedback to maintain a set-point of SPM operation.
摘要翻译：优选实施例涉及一种操作扫描探针显微镜（SPM）的方法和装置，包括在探针的扭转共振下振荡SPM的探针，并且通常同时测量电特性，例如电流，电容，阻抗等等，在SPM的探针和由扭转共振模式控制的分离的样品之间。优选地，在使用扭转共振反馈以维持SPM操作的设定点的同时执行测量步骤。

2. 发明授权

US5583443A Calibration of capacitance probe 失效
标题翻译：电容探头的校准
公开(公告)号：US5583443A
公开(公告)日：1996-12-10
申请号：US481161
申请日：1995-06-07
申请人： David R. McMurtry , David K. Thomas , David C. Bound
发明人： David R. McMurtry , David K. Thomas , David C. Bound
IPC分类号： G01B7/00 , G01B7/008 , G01B7/02 , G01B7/28 , G01B7/34 , G01N13/20 , G01N37/00 , G01R27/26 , G01R35/00
CPC分类号： G01B7/008 , G01B7/023 , G01B7/28 , G01B7/34
摘要： A capacitance probe is used by a coordinate measuring machine or machine tool to determine distances from the probe to the workpiece surface at various points over the surface. The probe is calibrated by moving it along a line, which is skewed to the surface. During this movement, a plurality of values of the capacitance and the corresponding values of the actual distance moved along the line are recorded. A datum value for the movement along the skewed line is also determined, which corresponds to a position at which the probe would touch the surface. The probe is calibrated without needing separate independent measurements of the distance from the probe to the surface. The workpiece surface is scanned using the thus-calibrate probe, in which different calibration values are used at different points on the surface, in order to account for the local shape of the surface.
摘要翻译：坐标测量机或机床使用电容探头来确定表面上各个点处从探头到工件表面的距离。通过沿着与表面倾斜的线移动探头来校准探针。在该移动期间，记录电容的多个值和沿线移动的实际距离的对应值。还确定了沿着偏斜线的移动的基准值，其对应于探针将接触表面的位置。探头被校准，无需对从探头到表面的距离进行独立的独立测量。使用如此校准的探头扫描工件表面，其中在表面上的不同点使用不同的校准值，以便考虑表面的局部形状。

3. 发明授权

US5189377A Method and apparatus for co-ordinate measuring using a capacitance probe 失效
标题翻译：使用电容式探头协同测量的方法和装置
公开(公告)号：US5189377A
公开(公告)日：1993-02-23
申请号：US577021
申请日：1990-09-04
申请人： Lawrence J. Rhoades , Ralph L. Resnick , John R. Rose
发明人： Lawrence J. Rhoades , Ralph L. Resnick , John R. Rose
IPC分类号： G01B7/34 , G01B7/004 , G01B7/28 , G01N13/20 , G01N37/00
CPC分类号： G01B7/004 , G01B7/28
摘要： The surface parameters and characteristics of a conductive workpiece are determined by applying a voltage between the workpiece and a capacitance probe having proximity sensing capabilities, and moving the probe in two or three co-ordinate axes relative to the workpiece while measuring the capacitance between the probe and workpiece, and controlling the probe velocity and/or direction within a stand-off band adjacent to the workpiece as a function of the capacitance value measured for purposes of effecting significant real time process controls, and determining the workpiece surface parameters as a function of the probe movement and capacitance measured.
摘要翻译：导电工件的表面参数和特性是通过在工件和具有接近感应能力的电容探头之间施加电压来确定的，并且使探头相对于工件在两个或三个坐标轴上移动，同时测量探头之间的电容和工件，并且根据为了实现显着的实时过程控制而测量的电容值的函数来控制与工件相邻的隔离带内的探测器速度和/或方向，以及确定作为探头运动和电容测量。

4. 发明授权

US07404313B2 Scanning probe microscope 失效
标题翻译：扫描探针显微镜
公开(公告)号：US07404313B2
公开(公告)日：2008-07-29
申请号：US11374842
申请日：2006-03-14
申请人： Kazutoshi Watanabe
发明人： Kazutoshi Watanabe
IPC分类号： G01B5/28 , G01N13/16 , G01N13/20
CPC分类号： G01Q60/40 , G01Q20/04 , G01Q60/30
摘要： A scanning probe microscope has a self-detection type probe structure including a cantilever having an electrically conductive probe at a distal end thereof, a supporting part, and a piezoresistance element whose resistance value changes depending on the deflection of the cantilever. A detector applies a predetermined voltage to the piezoresistance element and detects the value of the current passing through the piezoresistance element to detect deflection of the cantilever. A sample table mounts a sample such that a surface of the sample confronts a tip of the probe, and a moving mechanism relatively moves the sample table and the probe tip in X, Y and Z directions. A controller controls the moving mechanism to maintain a fixed distance between the probe tip and the sample surface and measures the surface shape of the sample on the basis of the detection result of the detector. A predetermined voltage is applied between the probe and the sample surface, and a measuring part operates simultaneously with the detector and measures electrical property information caused by the applied voltage.
摘要翻译：扫描探针显微镜具有自检型探针结构，其包括在其远端具有导电探针的悬臂，支撑部和耐电阻值根据悬臂的偏转而变化的压阻元件。检测器将预定电压施加到压阻元件，并检测通过压阻元件的电流值，以检测悬臂的偏转。样品台安装样品，使得样品的表面面对探针的尖端，并且移动机构使样品台和探针尖端在X，Y和Z方向上相对移动。控制器控制移动机构以在探针尖端和样品表面之间保持固定的距离，并且基于检测器的检测结果测量样品的表面形状。在探针和样品表面之间施加预定的电压，并且测量部分与检测器同时操作并测量由所施加的电压引起的电特性信息。

5. 发明授权

US07249002B1 Direct relative motion measurement for vibration induced noise and drift cancellation 有权
标题翻译：用于振动引起的噪声和漂移消除的直接相对运动测量
公开(公告)号：US07249002B1
公开(公告)日：2007-07-24
申请号：US10929260
申请日：2004-08-30
申请人： Yuval Ben-Dov , Michael Weber-Grabau
发明人： Yuval Ben-Dov , Michael Weber-Grabau
IPC分类号： G06F15/00 , G01N13/12 , G01N13/16 , G01N13/20
CPC分类号： G01Q30/06 , G01Q70/04
摘要： A surface analysis apparatus and a method for compensating for mechanical vibrations and drifts in a surface analysis instrument are disclosed. A probe that is sensitive to the distance between the probe and a sample surface provides a probe signal. The probe signal contains information about the surface properties and noise due to changes in the probe-surface distance. A sensor measures a displacement between a probe and the sample surface. The sensor is substantially insensitive to the surface properties measured by the probe. The displacement measurement can be used to compensate for the noise in the probe signal.
摘要翻译：公开了用于补偿表面分析仪器中的机械振动和漂移的表面分析装置和方法。探针与探头和样品表面之间的距离敏感的探头提供探测信号。探头信号包含由于探头表面距离变化而引起的表面性质和噪声的信息。传感器测量探头与样品表面之间的位移。传感器对由探头测量的表面性质基本上不敏感。位移测量可用于补偿探测信号中的噪声。

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