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    • 5. 发明授权
    • Polycrystalline silicon thin film transistor of liquid crystal display and manufacturing method thereof
    • 液晶显示器的多晶硅薄膜晶体管及其制造方法
    • US06822703B2
    • 2004-11-23
    • US10128330
    • 2002-04-24
    • Chang-Won HwangWoo-Suk ChungTae-Hyeong ParkHyun-Jae KimGyu-Sun MoonSook-Young Kang
    • Chang-Won HwangWoo-Suk ChungTae-Hyeong ParkHyun-Jae KimGyu-Sun MoonSook-Young Kang
    • G02F1136
    • H01L27/1288G02F1/136227G02F2001/136236H01L27/1214
    • A polycrystalline silicon TFT for an LCD and a manufacturing method thereof is disclosed. The TFT comprises an active pattern formed on a substrate, a gate insulating layer formed on the substrate including the active pattern, a gate line formed on the gate insulating layer to be crossed with the active pattern and including a gate electrode for defining the first impurity region, a second impurity region and a channel region, an insulating interlayer formed on the gate insulating layer including the gate line, a data line formed on the insulating interlayer and connected to the second impurity region through the first contact hole which is formed through the gate insulating layer and the insulating interlayer on the second impurity region and a pixel electrode formed on the same insulating interlayer as the data line and connected with the first impurity region through a second contact hole which is formed through the gate insulating layer and the insulating interlayer on the first impurity region. The number of mask can be reduced to 5 or 6 sheets, thereby simplifying a manufacturing process.
    • 公开了一种用于LCD的多晶硅TFT及其制造方法。 TFT包括形成在基板上的有源图案,形成在包括有源图案的基板上的栅极绝缘层,形成在栅极绝缘层上以与有源图案交叉的栅极线,并且包括用于限定第一杂质的栅电极 区域,第二杂质区域和沟道区域,在包括栅极线的栅极绝缘层上形成的绝缘夹层,形成在绝缘层间并通过第一接触孔连接到第二杂质区域的数据线,该第一接触孔通过 栅绝缘层和第二杂质区上的绝缘中间层,以及形成在与数据线相同的绝缘夹层上的像素电极,并通过第二接触孔与第一杂质区连接,第二接触孔通过栅极绝缘层和绝缘中间层 在第一杂质区域。 掩模的数量可以减少到5张或6张,从而简化制造过程。