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    • 10. 发明申请
    • INERTIAL SENSOR WITH STRESS ISOLATION STRUCTURE
    • 具有应力隔离结构的惯性传感器
    • US20130139593A1
    • 2013-06-06
    • US13480884
    • 2012-05-25
    • Hsieh-Shen HsiehWei-leun Fang
    • Hsieh-Shen HsiehWei-leun Fang
    • G01P15/00
    • G01P15/09G01P15/123G01P15/125G01P15/18G01P2015/0814G01P2015/0842
    • An inertial sensor with stress isolation structure includes a substrate, a suspension bridge, a guard ring and an electromechanical conversion mechanism. The substrate has a housing trough and an annular wall surrounding the housing trough. The suspension bridge is located in the housing trough and connected to the annular wall. The guard ring is connected to the suspension bridge and suspended in the housing trough. The suspension bridge is located between the substrate and guard ring. The electromechanical conversion mechanism is connected to and surrounded by the guard ring. Through the guard ring, interferences of applied forces to the electromechanical conversion mechanism can be reduced, precision of the inertial sensor can be improved, and performance impact caused by succeeding element package process can also be reduced. Thus package, test and calibration processes can be simplified to lower production cost.
    • 具有应力隔离结构的惯性传感器包括基板,吊桥,保护环和机电转换机构。 衬底具有壳体槽和围绕壳体槽的环形壁。 吊桥位于外壳槽中并与环形壁连接。 防护环连接到吊桥并悬挂在外壳槽中。 吊桥位于基板和防护环之间。 机电转换机构连接保护环并被保护环围绕。 通过防护环,可以降低对机电转换机构的施加力的干扰,可以提高惯性传感器的精度,并且还可以降低由元件封装过程引起的性能影响。 因此,可以简化封装,测试和校准过程,以降低生产成本。