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1. 发明授权

US6022265A Complementary material conditioning system for a chemical mechanical polishing machine 失效
标题翻译：用于化学机械抛光机的补充材料调节系统
公开(公告)号：US6022265A
公开(公告)日：2000-02-08
申请号：US100276
申请日：1998-06-19
申请人： Charles F. Drill , Calvin Gabriel , Milind Weling , Richard Russ , David E. Henderson
发明人： Charles F. Drill , Calvin Gabriel , Milind Weling , Richard Russ , David E. Henderson
IPC分类号： B24B53/007 , B24B53/013 , B24B53/017 , B24B1/00
CPC分类号： B24B53/017 , B24B53/013
摘要： A complementary conditioning system for use in chemical mechanical polishing (CMP). The present invention functions with a CMP machine adapted for polishing a semiconductor wafer having tungsten components fabricated thereon. A polishing pad is mounted on the CMP machine. The polishing pad has a polishing surface configured for polishing the semiconductor wafer and its tungsten components. The performance of the polishing surface is characterized by a polishing efficiency. A complementary end-effector is mounted on the CMP machine. The complementary end-effector is adapted to chemically complement the tungsten components on the semiconductor wafer. The complementary end-effector is further adapted to contact the polishing surface and improve the polishing efficiency by chemically enhancing the polishing surface, thereby obtaining a more efficient removal rate for the chemical mechanical polishing.
摘要翻译：用于化学机械抛光（CMP）的补充调理系统。本发明与适用于抛光其上制造有钨成分的半导体晶片的CMP机器相结合。抛光垫安装在CMP机器上。抛光垫具有被配置用于抛光半导体晶片及其钨组分的抛光表面。研磨表面的性能的特征在于抛光效率。互补的末端执行器安装在CMP机器上。互补末端执行器适于化学补充半导体晶片上的钨成分。补充的末端执行器还适于接触抛光表面并且通过化学增强抛光表面来提高抛光效率，从而获得用于化学机械抛光的更有效的去除速率。

2. 发明授权

US07378177B2 Electrochemical cell bipolar plate 有权
标题翻译：电化学电池双极板
公开(公告)号：US07378177B2
公开(公告)日：2008-05-27
申请号：US10711685
申请日：2004-09-30
申请人： Greg A. Hanlon , David E. Henderson
发明人： Greg A. Hanlon , David E. Henderson
IPC分类号： H01M8/02
CPC分类号： H01M8/0206 , H01M8/021 , H01M8/0228 , H01M8/0247 , H01M8/0258 , H01M8/026 , H01M8/0297 , H01M2008/1095
摘要： A bipolar plate for an electrochemical cell having a first layer, a second layer, and a third layer is disclosed. The first layer has a first plurality of through channels oriented in a first direction. The second layer has a second plurality of through channels oriented in a second different direction. The third layer is disposed between and bonded to the first and second layers. The third layer has a first set of header channels in fluid communication with the first plurality of channels, and a second set of header channels in fluid communication with the second plurality of channels. A first inlet port and a first outlet port are in fluid communication with the first set of header channels, and a second inlet port and a second outlet port are in fluid communication with the second set of header channels. The bonded third layer prevents fluid communication between the first plurality of channels and the second plurality of channels.
摘要翻译：公开了一种用于具有第一层，第二层和第三层的电化学电池的双极板。第一层具有沿第一方向取向的第一多个贯通通道。第二层具有沿第二不同方向定向的第二多个通道。第三层设置在第一层和第二层之间并结合到第一和第二层。第三层具有与第一多个通道流体连通的第一组标题通道，以及与第二多个通道流体连通的第二组标题通道。第一入口端口和第一出口端口与第一组头部通道流体连通，第二入口端口和第二出口端口与第二组头部通道流体连通。接合的第三层防止第一多个通道和第二多个通道之间的流体连通。

3. 发明授权

US4532093A Method and apparatus for the manufacture of molded packings 失效
标题翻译：用于制造模压填料的方法和装置
公开(公告)号：US4532093A
公开(公告)日：1985-07-30
申请号：US485062
申请日：1983-04-14
申请人： Michael P. O'Malley , David E. Henderson , Mark J. Cable , James E. Hefferon
发明人： Michael P. O'Malley , David E. Henderson , Mark J. Cable , James E. Hefferon
IPC分类号： B29C33/36 , B29C44/38 , B29D27/04 , B29C1/04
CPC分类号： B29C44/388 , B29C33/36 , B29L2031/712 , B29L2031/7138
摘要： A method and system are described for manufacturing molded packings used in the shipment of articles such as computers, typewriters and the like. The system employs a plurality of mold plugs positioned on a rotating platform whereby the mold plugs are alternately moved between work stations. At one work station a separator sheet is manually placed over a mold plug. At another work station a foaming material dispensing gun is automatically operated in a predetermined pattern over a mold which encloses the mold plug. The pattern is manually adjustable to fit any particular mold plug. Control over the system is obtained with a microprocessor programmed to operate with sensors and actuators associated with the system.
摘要翻译：描述了用于制造用于运输诸如计算机，打字机等的物品的模制填料的方法和系统。该系统采用位于旋转平台上的多个模具塞，由此模具塞在工作站之间交替移动。在一个工作站，手动将分离片放置在模具塞上。在另一个工作站，发泡材料分配枪自动地以预定的模式操作在包围模具塞的模具上。该模式可手动调节以适合任何特定的模具插头。使用被编程为与与系统相关联的传感器和致动器操作的微处理器来获得系统的控制。

4. 发明授权

US6008130A Polymer adhesive plasma confinement ring 失效
标题翻译：聚合物粘合剂等离子体约束环
公开(公告)号：US6008130A
公开(公告)日：1999-12-28
申请号：US911470
申请日：1997-08-14
申请人： David E. Henderson , Ian Harvey
发明人： David E. Henderson , Ian Harvey
IPC分类号： H01J37/32 , H01L21/00 , H05H1/00
CPC分类号： H01L21/67069 , H01J37/32623 , H01J37/32834 , H01J37/32935 , Y10S156/915
摘要： A plasma confinement ring comprising a first generally planar surface; a second generally planar surface; an aperture extending between the first and second surfaces, the aperture including an annular surface, and a curved surface extending between the annular surface and the first planar surface. A method of manufacturing a plasma reactor for processing a semiconductor wafer, the method comprising providing a reactor chamber and an electrostatic chuck in the reactor chamber for supporting a semiconductor wafer; providing a plasma confinement ring having first and second opposite surfaces, an aperture extending between the first and second opposite surfaces, the aperture being defined by an annular surface, an annular corner being defined at the intersection of the annular surface and the first surface; enhancing adhesion of condensed polymer byproducts by rounding the annular corner to provide a gradual transition from the annular surface to the first surface and roughening the rounded corner to increase surface area; and supporting the ring in the chamber.
摘要翻译：一种等离子体限制环，包括第一大体上平坦的表面; 第二大体平面; 在第一和第二表面之间延伸的孔，孔包括环形表面，以及在环形表面和第一平面之间延伸的弯曲表面。一种制造用于处理半导体晶片的等离子体反应器的方法，所述方法包括在所述反应器室中提供用于支撑半导体晶片的反应室和静电卡盘; 提供具有第一和第二相对表面的等离子体约束环，在所述第一和第二相对表面之间延伸的孔，所述孔由环形表面限定，环形角限定在所述环形表面和所述第一表面的交叉处; 通过对环形角进行四舍五入以提高冷凝的聚合物副产物的附着力，以提供从环形表面到第一表面的逐渐过渡，并使圆角变粗糙以增加表面积; 并支撑在腔室中的环。

5. 发明授权

US5752650A Shipping carton with flap holder for preventing spillage of packing material 失效
标题翻译：装运纸箱，用于防止包装材料溢出
公开(公告)号：US5752650A
公开(公告)日：1998-05-19
申请号：US678728
申请日：1996-07-10
申请人： David E. Henderson
发明人： David E. Henderson
IPC分类号： B65D5/42
CPC分类号： B65D5/42 , Y10T428/149
摘要： Shipping carton and flap holder which prevent the spillage of loose fill materials as an article is removed from the carton. The flap holder includes a strip having first and second end portions with an adhesive on one side thereof for attachment to adjacent flaps of the carton to hold the flaps in an open position as the article is removed. It also has separately removable backings which cover the adhesive on the two end portions of the strip whereby the strip can be affixed to one flap and folded back upon itself for shipment, and thereafter the second backing can be removed and the second end portion can be folded over and affixed to the adjacent flap.
摘要翻译：从纸箱中取出运送纸箱和挡板固定器，防止作为物品的松散填充材料溢出。翼片保持器包括条带，其具有在其一侧上具有粘合剂的第一和第二端部，用于附接到纸板箱的相邻翼片，以在物品被移除时将翼片保持在打开位置。它还具有单独的可移除的背衬，其覆盖条带的两个端部处的粘合剂，由此带可以固定到一个折板上并折叠在自身上用于运输，然后可以移除第二背衬，并且第二端部可以是折叠并贴在相邻的皮瓣上。

6. 发明授权

US5382058A Rotatable flange union for use with vacuum systems 失效
标题翻译：用于真空系统的可旋转法兰联接
公开(公告)号：US5382058A
公开(公告)日：1995-01-17
申请号：US79440
申请日：1993-06-17
申请人： David E. Henderson
发明人： David E. Henderson
IPC分类号： F16L27/08 , F16L17/10
CPC分类号： F16L27/08
摘要： A rotatable flange union for use with vacuum systems includes a first flange, a second flange and a connector which connects the first flange to the second flange and allows the first flange to rotate 360 degrees with respect to the second flange. In the preferred embodiment, tubing of the first flange is placed within tubing of the second flange. Additionally, the connector includes a first quad ring seal, a second quad ring seal, and a cavity in the second flange. The first quad ring seal is in contact with an inner diameter of the second flange and is in contact with an outer diameter of the first flange. The second quad ring seal is in contact with the inner diameter of the second flange and is in contact with the outer diameter of the first flange. The cavity is between the first quad ring seal and the second quad ring seal. The cavity is pumped to a pressure of less than ten millitorr.
摘要翻译：与真空系统一起使用的可旋转凸缘联接件包括第一凸缘，第二凸缘和将第一凸缘连接到第二凸缘的连接器，并允许第一凸缘相对于第二凸缘360度旋转。在优选实施例中，第一凸缘的管道被放置在第二凸缘的管道内。此外，连接器包括第一四环密封件，第二四环密封件和第二凸缘中的空腔。第一四环密封件与第二凸缘的内径接触并且与第一凸缘的外径接触。第二四环密封件与第二凸缘的内径接触并且与第一凸缘的外径接触。空腔位于第一四环密封件和第二四环密封件之间。将空腔泵送至小于10毫托的压力。

7. 发明授权

US4725106A Reconfigurable work station for a video display unit and keyboard 失效
标题翻译：用于视频显示单元和键盘的可重构工作站
公开(公告)号：US4725106A
公开(公告)日：1988-02-16
申请号：US805011
申请日：1985-12-05
申请人： Nicholas L. Shields , Fred D. Roe, Jr. , Mary F. Fagg , David E. Henderson
发明人： Nicholas L. Shields , Fred D. Roe, Jr. , Mary F. Fagg , David E. Henderson
IPC分类号： A47B21/02 , A47B21/00
CPC分类号： A47B21/02 , A47B2200/0068
摘要： A reconfigurable workstation (10) is illustrated having video, keyboard, and hand operated motion controller capabilities. The workstation includes main side panels (12, 14) between which a primary work panel (A) is pivotally carried in a manner in which primary work panel (A) may be adjusted and set in a negatively declined or positively inclined position for proper forearm support while operating hand controllers (34, 36). A keyboard table (B) supports a keyboard (32) in such a manner that the keyboard (32) is set in a positively inclined position with respect to the negatively declined work panel (A). Declined forearm support surfaces (26, 28) are provided on either side of an alcove (24) accommodating a seated operator with forearms of the operator supported in a declined position for proper support and operation of the hand controllers (34, 36). A visual display unit (C) is inclined with respect to primary work panel (A) so that the operator seated at alcove (24) is properly positioned. With the proper declination of work panel (A) and inclination of keyboard (32) and a visual display unit (64), keys (33) of keyboard (32) and the screen of visual display units (62, 64) are well within the focal cone (106) of operator (96). Various adjustable devices (70, 90, 98, and 102) are provided for adjusting the relative declinations and inclinations of the work panels, tables, and visual display panels.
摘要翻译：示出了具有视频，键盘和手动运动控制器能力的可重构工作站（10）。工作站包括主侧面板（12,14），在主工作面板（A）之间枢转地承载主工作面板（A），其中主工作面板（A）可以被调节并且被设置为负倾斜或正倾斜的位置，用于适当的前臂支持操作手控制器（34,36）。键盘台（B）以这样的方式支撑键盘（32），使得键盘（32）相对于负面下降的工作面板（A）被设置在相对倾斜的位置。下降的前臂支撑表面（26,28）设置在容纳座位操作者的凹室（24）的任一侧上，操作者的前臂支撑在倾斜位置，以便手动控制器（34,36）的适当支撑和操作。视觉显示单元（C）相对于主工作面板（A）倾斜，使得坐在凹室（24）处的操作者被适当地定位。随着工作面板（A）的正确偏角和键盘（32）和视觉显示单元（64）的倾斜，键盘（32）的键（33）和视觉显示单元（62,64）的屏幕在操作者（96）的焦点锥体（106）。提供了各种可调节装置（70,90,98和102），用于调整工作面板，工作台和视觉显示面板的相对倾斜度和倾斜度。

8. 发明授权

US5924585A Connections and methods of restricting an opening 失效
标题翻译：限制开口的连接和方法
公开(公告)号：US5924585A
公开(公告)日：1999-07-20
申请号：US13321
申请日：1998-01-26
申请人： David E. Henderson , Daniel M. Thomas
发明人： David E. Henderson , Daniel M. Thomas
IPC分类号： B67D7/02 , B65D45/30
CPC分类号： B67D7/0283 , B67D7/0288
摘要： The present invention provides connections and methods of restricting an opening. One connection according to the subject invention is configured to restrict a mouth of a container, the mouth having an inner surface having an inside diameter and an outer surface having an outside diameter, the connection includes: a plug having a side surface of varying dimension and configured to engage the inner surface to form a seal of the side surface of the plug and the inner surface; at least one intermediate member having a first end borne by the plug and a second end distally spaced from the first end; and a securing member configured to engage the outer surface of the container and the second end of the intermediate member, the intermediate member being configured to couple the plug and the securing member and maintain the seal of the side surface of the plug with the inner surface of the container.
摘要翻译：本发明提供限制开口的连接和方法。根据本发明的一个连接被构造成限制容器的口部，嘴部具有内表面和具有外径的外表面的内表面，该连接包括：具有变化尺寸的侧表面的塞子，以及被配置为接合所述内表面以形成所述插头和所述内表面的侧表面的密封; 至少一个中间构件，具有由插头承载的第一端和与第一端远离的第二端; 以及固定构件，其构造成接合所述容器的外表面和所述中间构件的所述第二端，所述中间构件被配置为联接所述塞子和所述固定构件，并且将所述塞子的侧表面的密封件与所述内表面的容器。

9. 发明授权

US5653479A Vacuum seal for a ball junction 失效
标题翻译：用于球接头的真空密封
公开(公告)号：US5653479A
公开(公告)日：1997-08-05
申请号：US595760
申请日：1996-02-02
申请人： David E. Henderson
发明人： David E. Henderson
IPC分类号： F16L27/06 , F16L27/067
CPC分类号： F16L27/06 , Y10S277/913
摘要： A vacuum seal for a ball junction between a low pressure chemical vapor deposition (LPCVD) chamber and a vacuum system. In one implementation, the LPCVD chamber is a quartz tube used for deposition of certain chemicals onto and into semiconductor substrates placed therein. The ball junction is formed by the combination of a ball socket coupled at the neck of the LPCVD chamber and a metal ball cover coupled to the vacuum system. In one implementation, the metal ball cover is stainless steel. In lieu of using an elastomer O-ring that can denature under certain temperature ranges, the novel vacuum seal contains a series of annular channels cut into the inside surface of a ball cover. When the ball socket is inserted into the metal ball cover, the channels are bounded by metal on three sides and by the outside surface of the ball socket on the fourth side. Each channel contains a hole coupled to a second vacuum system. The channels are evacuated by the second vacuum system such that the outside surface of the ball socket seals with the inside surface of the metal cover. This vacuum seal is sufficient to contain a rough vacuum (e,g., 760 Torr to 1 m Toro required during LPCVD. Since the O-ring is eliminated, there is no need to temperate regulate the novel ball junction to prevent the O-ring from denaturing and temperatures can be maintained at the ball junction to prevent unwanted sublimation from chamber chemicals (e.g., ammonium chloride).
摘要翻译：用于低压化学气相沉积（LPCVD）室和真空系统之间的球接头的真空密封件。在一个实施方案中，LPCVD室是用于将某些化学品沉积到放置在其中的半导体衬底上的石英管。球接头由耦合在LPCVD室的颈部处的球窝和耦合到真空系统的金属球罩的组合形成。在一个实施方案中，金属球罩是不锈钢。代替使用在某些温度范围内变性的弹性体O形环，新颖的真空密封件包含一系列切入球盖内表面的环形通道。当球窝插入金属球罩时，通道由三面金属和第四侧的球窝外表面所限定。每个通道包含耦合到第二真空系统的孔。通过第二真空系统排出通道，使得球窝的外表面与金属盖的内表面密封。该真空密封足以容纳LPCVD中所需的粗略真空（例如760 Torr至1m Toro），由于O形环被消除，因此不需要温度调节新的球形结，以防止O- 可以在球接头处保持变性和温度的环，以防止室内化学物质（例如氯化铵）的不希望的升华。

10. 发明授权

US5240580A Conmag shield 失效
标题翻译： Conmag盾牌
公开(公告)号：US5240580A
公开(公告)日：1993-08-31
申请号：US864892
申请日：1992-04-02
申请人： David E. Henderson , Ronney L. White , Forest P. Kreiss
发明人： David E. Henderson , Ronney L. White , Forest P. Kreiss
IPC分类号： C23C14/34
CPC分类号： C23C14/3407
摘要： An improved shielding assembly is provided for a sputter source which has an anode and cathode target-ring assembly mounted to a cylindrical mounting structure. A cooling assembly for the anode and cathode target-ring assembly is mounted to the distal end of the cylindrical mounting structure. A baffle shield member has an outer flat ring-shaped mounting base-portion which overlies the cooling assembly and from which a baffle portion inwardly extends toward the anode and cathode target-ring assembly. A shield member comprises an annular ring base portion, which is mounted over the outer flat ring-shaped mounting base-portion of the baffle shield member and from which an inner lip portion extends inwardly. The inner lip portion has a rounded contour to provide a smooth base for deposition of a smooth layer of sputtered material on said lip portion. The shield member includes a cylindrical sleeve portion, which is fixed to the annular ring base portion and which extends over the exterior wall of the cylindrical mounting structure to provide shielding of the exterior wall of the cylindrical mounting structure.
摘要翻译：提供了一种用于溅射源的改进的屏蔽组件，其具有安装到圆柱形安装结构的阳极和阴极靶环组件。用于阳极和阴极目标环组件的冷却组件安装到圆柱形安装结构的远端。挡板屏蔽构件具有外部平坦的环形安装基部，其覆盖在冷却组件上，并且挡板部分朝向阳极和阴极靶环组件向内延伸。屏蔽构件包括环形基座部分，其安装在挡板屏蔽构件的外平坦环形安装基座部分上方，并且内唇部分向内延伸。内唇部分具有圆形轮廓，以提供平滑的基底，用于在所述唇部上沉积平滑的溅射材料层。屏蔽构件包括圆柱形套筒部分，其固定到环形基座部分并且在圆柱形安装结构的外壁上延伸，以提供圆柱形安装结构的外壁的屏蔽。

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