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    • 1. 发明授权
    • Polymer adhesive plasma confinement ring
    • 聚合物粘合剂等离子体约束环
    • US6008130A
    • 1999-12-28
    • US911470
    • 1997-08-14
    • David E. HendersonIan Harvey
    • David E. HendersonIan Harvey
    • H01J37/32H01L21/00H05H1/00
    • H01L21/67069H01J37/32623H01J37/32834H01J37/32935Y10S156/915
    • A plasma confinement ring comprising a first generally planar surface; a second generally planar surface; an aperture extending between the first and second surfaces, the aperture including an annular surface, and a curved surface extending between the annular surface and the first planar surface. A method of manufacturing a plasma reactor for processing a semiconductor wafer, the method comprising providing a reactor chamber and an electrostatic chuck in the reactor chamber for supporting a semiconductor wafer; providing a plasma confinement ring having first and second opposite surfaces, an aperture extending between the first and second opposite surfaces, the aperture being defined by an annular surface, an annular corner being defined at the intersection of the annular surface and the first surface; enhancing adhesion of condensed polymer byproducts by rounding the annular corner to provide a gradual transition from the annular surface to the first surface and roughening the rounded corner to increase surface area; and supporting the ring in the chamber.
    • 一种等离子体限制环,包括第一大体上平坦的表面; 第二大体平面; 在第一和第二表面之间延伸的孔,孔包括环形表面,以及在环形表面和第一平面之间延伸的弯曲表面。 一种制造用于处理半导体晶片的等离子体反应器的方法,所述方法包括在所述反应器室中提供用于支撑半导体晶片的反应室和静电卡盘; 提供具有第一和第二相对表面的等离子体约束环,在所述第一和第二相对表面之间延伸的孔,所述孔由环形表面限定,环形角限定在所述环形表面和所述第一表面的交叉处; 通过对环形角进行四舍五入以提高冷凝的聚合物副产物的附着力,以提供从环形表面到第一表面的逐渐过渡,并使圆角变粗糙以增加表面积; 并支撑在腔室中的环。
    • 4. 发明申请
    • Dual magnetic field sensor unit
    • 双磁场传感器单元
    • US20060103547A1
    • 2006-05-18
    • US11056676
    • 2005-02-11
    • Floyd SalserIan HarveyRoger Allcorn
    • Floyd SalserIan HarveyRoger Allcorn
    • G08C15/06G08B23/00
    • H04Q9/00H04Q2209/60H04Q2209/886Y10T307/839
    • The present inventions relate to a method and apparatus for adding Automatic Meter Reading (AMR) capabilities to utility meters that generate a magnetic field comprising magnetic flux that varies proportionally with the rate of resource consumption. The apparatus comprises a dual magnetic field sensor unit for detecting variations in the magnetic flux density for the magnetic field. The sensor unit may be compact in size so that it can be positioned within a utility meter. The sensor unit may be operatively connected to a data-unit located outside the utility meter. The data unit may be further configured for storing processed or unprocessed sensor signals and is connected to a transmitter. To minimize power consumption, the magnetic field sensors may be configured to have sensor on times and sensor off times. The on/off state of the magnetic field sensors may be controlled by either a dedicated sensor controller or the data unit.
    • 本发明涉及用于向公用事业计量表添加自动计读取(AMR)能力的方法和装置,其产生包含与资源消耗速率成比例地变化的磁通量的磁场。 该装置包括用于检测磁场的磁通密度的变化的双磁场传感器单元。 传感器单元的尺寸可以紧凑,使得其可以定位在公用事业仪表内。 传感器单元可以可操作地连接到位于公用事业仪表外部的数据单元。 数据单元还可以被配置用于存储经处理或未处理的传感器信号,并连接到发射机。 为了最小化功耗,磁场传感器可以配置成具有传感器的时间和传感器关闭时间。 磁场传感器的开/关状态可以由专用传感器控制器或数据单元来控制。
    • 5. 发明申请
    • Digital time stamping system
    • 数字时间戳系统
    • US20050044351A1
    • 2005-02-24
    • US10487897
    • 2002-07-23
    • Ian Harvey
    • Ian Harvey
    • H04L9/32H04L9/00
    • H04L9/3247H04L9/3297
    • A digital time-stamping system for issuing stamps on messages by means of a cryptographic digital signature includes a front end unit (10), a load balancer (50) and one or more public key signature units (60). Incoming messages are rapidly and temporarily time-stamped by means of a MAC generator (30) in the front end unit, and the message is then passed on to the load balancer. The load balancer queues the messages, and passes them on at an appropriate speed to the public key signature units (60), which verifies the MAC and resigns the message with a public key signature. The front end unit (10) and the public key signature units (60) are preferably individual secure modules with the load balancer (50) being outside the security boundaries. The system enables large numbers of incoming messages to be accurately time-stamped in a secure manner.
    • 一种用于通过密码数字签名在消息上发行邮票的数字时间戳系统包括前端单元(10),负载平衡器(50)和一个或多个公钥签名单元(60)。 传入的消息通过前端单元中的MAC生成器(30)快速和临时地被时间戳,然后将消息传递到负载平衡器。 负载均衡器对消息进行排队,并以适当的速度将它们传递到公共密钥签名单元(60),公钥签名单元(60)验证MAC并且用公开密钥签名来重新登记消息。 前端单元(10)和公钥签名单元(60)优选地是具有负载平衡器(50)在安全边界之外的单独的安全模块。 该系统能够以安全的方式准确地对时间戳进行大量的传入消息。
    • 6. 发明申请
    • Encoder-type register for an automatic water meter reader
    • 自动水表读取器的编码器类型寄存器
    • US20090255346A1
    • 2009-10-15
    • US12384158
    • 2009-04-02
    • Arthur Hendey, SR.Ronnel GallonIan Harvey
    • Arthur Hendey, SR.Ronnel GallonIan Harvey
    • G01F1/075H01L43/06
    • G01F15/063G01F15/066
    • An encoder-type register for an automatic meter reader to be interfaced with a visual read-only register of the kind found in a water meter that measures water consumption. The water meter register has a rotatable sweep hand that carries a magnet and rotates around a register plate in relation to the speed and volume of water moving through the water meter. A plurality of (e.g., three) magnetic (e.g., Hall effect) sensors are fixedly positioned one-after-another in the path of the magnet carried by the rotating sweep hand. The magnetic sensors measure the magnetic field produced by the rotating magnet and generate corresponding output signals. A microprocessor receives the output signals generated by the magnetic sensors whenever the magnet rotates therepast. The microprocessor stores information concerning the number of rotations of the magnet carried by the sweep hand depending upon the direction in which the magnet is being rotated as an indication of water consumption. The microprocessor provides the stored information to a meter interface unit connected to a set of output terminals of the encoder register so that such information can be transmitted from the meter interface unit to a remote data collector over a wireless communication path.
    • 用于自动仪表读取器的编码器型寄存器,与用于测量耗水量的水表中发现的类似的可视化只读寄存器连接。 水表寄存器具有可旋转的扫掠手,其携带磁体并相对于移动通过水表的水的速度和体积围绕登记板旋转。 多个(例如三个)磁(例如,霍尔效应)传感器在由旋转扫掠手携带的磁体的路径中固定地定位。 磁传感器测量由旋转磁铁产生的磁场并产生相应的输出信号。 只要磁铁一直旋转,微处理器就会接收磁传感器产生的输出信号。 微处理器存储关于由扫掠手携带的磁体的旋转次数的信息,这取决于磁体旋转的方向作为耗水量的指示。 微处理器将存储的信息提供给连接到编码器寄存器的一组输出端的仪表接口单元,使得这些信息可以通过无线通信路径从仪表接口单元发送到远程数据采集器。
    • 8. 发明申请
    • Time stamping system
    • 时间戳系统
    • US20050125672A1
    • 2005-06-09
    • US10488979
    • 2002-09-10
    • Ian Harvey
    • Ian Harvey
    • H04L9/32H04L9/00
    • H04L9/3297
    • A secure time stamping device uses multiple virtual clocks, each of which may be individually accessed and calibrated. A digital key is associated with each of the clocks. All of the virtual clocks use a common timer (130), with the actual clock output being generated by applying calibration information (124) for that clock to the timer (130) output. A user wishing to have a message time stamped presents that message along with information as to which virtual clock to be used at a device input (92). The appropriate calibration information (124) is then selected and the timer (130) output is compensated accordingly. The incoming message plus the resultant time are concatenated and automatically signed using the key (126) applicable to that particular virtual clock.
    • 安全的时间戳装置使用多个虚拟时钟,每个虚拟时钟可以单独访问和校准。 数字键与每个时钟相关联。 所有虚拟时钟使用公共定时器(130),通过将该时钟的校准信息(124)应用于定时器(130)输出来产生实际的时钟输出。 希望具有时间戳的消息的用户将显示该消息以及关于要在设备输入端使用哪个虚拟时钟的信息(92)。 然后选择适当的校准信息(124),并相应地补偿定时器(130)输出。 使用适用于该特定虚拟时钟的密钥(126),将输入消息加上合成时间连接并自动签名。
    • 9. 发明授权
    • Oxide etch stop techniques for uniform damascene trench depth
    • 氧化物蚀刻停止技术,用于均匀的镶嵌槽深度
    • US6057227A
    • 2000-05-02
    • US880580
    • 1997-06-23
    • Ian Harvey
    • Ian Harvey
    • H01L21/311H01L21/768H01L21/4763
    • H01L21/31116H01L21/76807H01L2221/1036
    • A damascene structure and method for forming such structure. In one embodiment, the damascene structure of the present invention includes a first layer of oxide which is a stochiometric oxide deposited onto a semiconductor substrate. A second layer of oxide which is a non-stochiometric oxide is then deposited onto the semiconductor substrate which is followed by a stochiometric oxide layer. The semiconductor substrate is then masked and etched so as to form vias using a selective etch process which etches the stochiometric oxide and stops etching on the non-stochiometric oxide layer. The etch chemistry is then changed in-situ, allowing the removal of the non-stochiometric oxide at the bottom of the via. The wafer is then re-masked in the pattern of trench interconnect using a selective etch process to selectively etch the layer of stochiometric oxide in the damascene trench down to the layer of non-stochiometric oxide while simultaneously completing the etching of vias. The use of the layer of non-stochiometric oxide as an etch stop gives trenches with a substantially planar bottom surface in a process superior in simplicity and process margin compared to nitride etch stop technologies. Metal is deposited over the semiconductor substrate and is polished so as to remove the metal which overlies the layer of stochiometric oxide so as to form interconnects having uniform depth and contacts. In an alternate embodiment, a damascene structure is formed without the deposition of the first stochiometric oxide layer and etched using an initial non selective etch.
    • 用于形成这种结构的镶嵌结构和方法。 在一个实施例中,本发明的镶嵌结构包括第一层氧化物,其是沉积在半导体衬底上的烧结氧化物。 然后将第二层氧化物作为非化学计量氧化物沉积到半导体衬底上,其后是化学计量氧化物层。 然后对半导体衬底进行掩模和蚀刻,以便使用蚀刻刻蚀氧化物并停止对非化学氧化物层进行蚀刻的选择性蚀刻工艺形成通孔。 然后蚀刻化学物质原位改变,允许去除通孔底部的非化学计量氧化物。 然后使用选择性蚀刻工艺,以沟槽互连的图案重新掩模晶片,以选择性地蚀刻镶嵌沟槽中的化学计量氧化物层,直到非化学计量氧化物层,同时完成通孔的蚀刻。 与氮化物蚀刻停止技术相比,使用非化学计量氧化物层作为蚀刻停止剂在具有基本上平坦的底部表面的沟槽中,在简化和工艺裕度方面优于工艺。 将金属沉积在半导体衬底上并被抛光以除去覆盖在氧化物层上的金属,从而形成具有均匀深度和接触的互连。 在替代实施例中,形成镶嵌结构,而不沉积第一固体氧化物层并且使用初始非选择性蚀刻进行蚀刻。