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    • 9. 发明授权
    • Multiple layer alignment sensing
    • 多层对齐检测
    • US07650029B2
    • 2010-01-19
    • US10995840
    • 2004-11-23
    • Carl E. PicciottoJun Gao
    • Carl E. PicciottoJun Gao
    • G06K9/00
    • G03F9/7003G03F9/7038G03F9/7088
    • Using an imaging system in relation to a plurality of material layers is described, the material layers being separated by a distance greater than a depth of field of the imaging system. A focal plane of the imaging system and a first of the plurality of material layers are brought into correspondence. A first image including at least a portion of the first material layer having a first feature of interest thereon is stored. The focal plane of the imaging system and a second of the plurality of material layers are brought into correspondence. A second image including at least a portion of the second material layer having a second feature of interest thereon is acquired. The first and second images are processed for automatic computation of an alignment measurement between the first and second features of interest.
    • 描述了相对于多个材料层使用成像系统,材料层被分离大于成像系统的景深的距离。 使成像系统的焦平面和多个材料层中的第一个成对准。 存储包括其上具有感兴趣的第一特征的第一材料层的至少一部分的第一图像。 使成像系统的焦平面和多个材料层中的第二个成对应。 获取包括具有第二特征的第二材料层的至少一部分的第二图像。 处理第一和第二图像以自动计算感兴趣的第一和第二特征之间的对准测量。
    • 10. 发明授权
    • Displacement estimation system and method
    • 位移估计系统和方法
    • US07085673B2
    • 2006-08-01
    • US10930614
    • 2004-08-31
    • Carl E. PicciottoJun GaoWei Wu
    • Carl E. PicciottoJun GaoWei Wu
    • G01B21/02G06K9/32
    • G06T7/20G06T7/70
    • A displacement estimation system including a data acquisition system and a processing system is provided. The data acquisition system is configured to capture a first frame from a first substrate including a first pattern and a second substrate including a second pattern at a first time and capture a second frame from a third substrate including a third pattern and a fourth substrate including a fourth pattern at a second time subsequent to the first time. The first pattern and the third pattern are substantially identical, and the second pattern and the fourth pattern are substantially identical. The processing system is configured to calculate a first displacement between the first pattern and the third pattern using the first frame and the second frame and calculate a second displacement between the second pattern and the fourth pattern using the first frame and the second frame.
    • 提供了包括数据采集系统和处理系统的位移估计系统。 数据采集​​系统被配置为在第一时间从包括第一图案的第一基板和包括第二图案的第二基板捕获第一帧,并从包括第三图案的第三基板和包括第三图案的第四基板捕获第二帧 第四模式在第一次之后的第二时间。 第一图案和第三图案基本相同,第二图案和第四图案基本相同。 处理系统被配置为使用第一帧和第二帧来计算第一图案和第三图案之间的第一位移,并且使用第一帧和第二帧计算第二图案和第四图案之间的第二位移。