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1. 发明授权

US10488176B2 Edge registration for interferometry 有权
公开(公告)号：US10488176B2
公开(公告)日：2019-11-26
申请号：US15624222
申请日：2017-06-15
申请人： Corning Incorporated
发明人： Thomas James Dunn , Paul Francis Michaloski
IPC分类号： G01B9/02 , G01B11/30
CPC分类号： G01B9/02078 , G01B9/02043 , G01B11/306 , G01B2290/50
摘要： A metrology apparatus has an illumination source that directs collimated light to a reference surface and to an optical component having a test surface that is in parallel with the reference surface. A first imaging lens defines a Fourier transform plane for light reflected from the reference surface and the test surface. A spatial filtering element is actuable to a blocking position that blocks specular light at the transform plane. A second imaging lens forms, at an image plane, an image of the test surface. A sensor array generates image data from received light at the image plane.

2. 发明申请

US20170003120A1 INTERFEROMETRIC ROLL-OFF MEASUREMENT USING A STATIC FRINGE PATTERN 有权
标题翻译：使用静态FRINGE模式进行干涉测量
公开(公告)号：US20170003120A1
公开(公告)日：2017-01-05
申请号：US15198661
申请日：2016-06-30
申请人： Corning Incorporated
发明人： Alexander Timothy Bean , Thomas James Dunn , Christopher Alan Lee , Mark Joseph Tronolone
IPC分类号： G01B11/24 , G06T7/60 , G01B9/02 , G06T7/00
CPC分类号： G01B11/2441 , G01B9/02032 , G01B9/02044 , G01N21/9503 , G06T7/0006 , G06T7/64 , G06T2207/30148
摘要： An apparatus for measuring the surface contour of a target area of a substrate has a light source to emit a measurement light beam. A beam splitting element defines a measurement axis and a reference axis. A substrate holder disposes the target area along the measurement axis and tilted away from normal incidence, about a tilt axis that orthogonally intersects the measurement axis, according to a predetermined tilt angle that is a function of the measurement light beam wavelength. An imaging sensor records a fringe pattern generated from the measurement light beam and a reference light beam. A computer extracts frequency profiles from the recorded fringe pattern, each profile taken in a direction that is orthogonal to the direction of the tilt axis, wherein the programmed instructions further compute changes in the contour of the target area surface according to the frequency profiles.
摘要翻译：用于测量衬底的目标区域的表面轮廓的装置具有发射测量光束的光源。分束元件定义测量轴和参考轴。基板保持器根据作为测量光束波长的函数的预定倾斜角度，沿着测量轴布置目标区域并围绕与测量轴正交相交的倾斜轴倾斜远离法向入射。成像传感器记录从测量光束和参考光束产生的条纹图案。计算机从记录的条纹图案中提取频率分布，每个轮廓沿与倾斜轴的方向正交的方向拍摄，其中编程的指令还根据频率分布计算目标区域表面轮廓的变化。

3. 发明申请

US20150049337A1 GRAZING-INCIDENCE INTERFEROMETER WITH DUAL-SIDE MEASUREMENT CAPABILITY 有权
标题翻译：具有双侧测量能力的雷击干扰仪
公开(公告)号：US20150049337A1
公开(公告)日：2015-02-19
申请号：US14445210
申请日：2014-07-29
申请人： Corning Incorporated
发明人： Joshua Monroe Cobb , Thomas James Dunn , John Weston Frankovich
IPC分类号： G01B9/02
CPC分类号： G01B9/02022 , G01B9/02021 , G01B9/02027 , G01B9/02041 , G01B9/02072 , G01B11/06 , G01B2290/30
摘要： A grazing-incidence interferometer includes first and second spaced-apart diffractive optical elements with a generally planar object disposed therebetween. The first diffractive optical element forms sheared first-diffracted-order light beams that reflect from opposite first and second surfaces of the object at grazing-incidence angles, while a zero-diffracted-order light beam goes unreflected. The second diffractive optical element combines the unreflected zero-diffracted-order light beam and the sheared reflected beams to form a collimated, combined beam. A 1X double-telecentric relay system relays the combined beam to a folding optical system that forms first and second interference images on a diffusing screen located at an image plane. Digital images of the first and second interference images are obtained and processed to characterize the thickness variation of the object.
摘要翻译：放射入射干涉仪包括第一和第二间隔开的衍射光学元件，其间设置有大致平面的物体。第一衍射光学元件形成剪切的第一衍射级光束，其以掠射入射角从物体的相对的第一和第二表面反射，而零衍射级光束未反射。第二衍射光学元件组合未反射的零衍射光束和剪切的反射光束以形成准直的组合光束。 1X双心中继系统将组合的光束中继到折叠光学系统，其在位于图像平面的漫射屏上形成第一和第二干涉图像。获得并处理第一和第二干涉图像的数字图像以表征物体的厚度变化。

4. 发明授权

US10871369B2 Systems for and methods of measuring photomask flatness with reduced gravity-induced error 有权
公开(公告)号：US10871369B2
公开(公告)日：2020-12-22
申请号：US16527917
申请日：2019-07-31
申请人： CORNING INCORPORATED
发明人： Thomas James Dunn , John Weston Frankovich , Robert Dennis Grejda , Christopher Alan Lee , Matthew Ronald Millecchia , Yoshihiro Nakamura
IPC分类号： G01B11/30 , G01B9/02 , G01B11/24 , G03F1/22 , G03F7/20 , G03F1/84
CPC分类号： G01B11/306 , G01B9/02075 , G01B11/2441 , G03F1/22 , G03F1/84 , G03F7/70783
摘要： The methods disclosed herein include recording at near-vertical first and second measurement positions respective first and second interferograms of the photomask surface and defining a difference map as the difference between the first and second interferograms. Respective first and second normal forces on the photomask are also measured at the first and second measurement positions. The change in the normal force is used define a scaling factor, which is applied to the difference map to define a scaled difference map. A compensated flatness measurement with a reduced shape contribution due to gravity is obtained by subtracting the scaled difference map from the first interferogram. An interferometer-based flatness measurement system is also disclosed.

5. 发明授权

US09651358B2 Grazing-incidence interferometer with dual-side measurement capability using a common image plane 有权
公开(公告)号：US09651358B2
公开(公告)日：2017-05-16
申请号：US14445210
申请日：2014-07-29
申请人： Corning Incorporated
发明人： Joshua Monroe Cobb , Thomas James Dunn , John Weston Frankovich
IPC分类号： G01B9/02 , G01B11/06
CPC分类号： G01B9/02022 , G01B9/02021 , G01B9/02027 , G01B9/02041 , G01B9/02072 , G01B11/06 , G01B2290/30
摘要： A grazing-incidence interferometer includes first and second spaced-apart diffractive optical elements with a generally planar object disposed therebetween. The first diffractive optical element forms sheared first-diffracted-order light beams that reflect from opposite first and second surfaces of the object at grazing-incidence angles, while a zero-diffracted-order light beam goes unreflected. The second diffractive optical element combines the unreflected zero-diffracted-order light beam and the sheared reflected beams to form a collimated, combined beam. A 1× double-telecentric relay system relays the combined beam to a folding optical system that forms first and second interference images on a diffusing screen located at an image plane. Digital images of the first and second interference images are obtained and processed to characterize the thickness variation of the object.

6. 发明授权

US09513214B2 Skewed sectional measurement of striated glass 有权
标题翻译：横纹玻璃横截面测量
公开(公告)号：US09513214B2
公开(公告)日：2016-12-06
申请号：US14318882
申请日：2014-06-30
申请人： Corning Incorporated
发明人： Paul Gerard Dewa , Thomas James Dunn , Robert Dennis Grejda , Christopher Alan Lee
IPC分类号： G01N21/45 , G01N1/32 , G01N1/28 , G01N33/38 , G02B5/08 , G01N21/958
CPC分类号： G01N21/45 , G01N1/286 , G01N1/32 , G01N21/958 , G01N33/386 , G02B5/0816
摘要： Thickness and group index variations in test strip samples of ultra-low expansion glass are made by extracting the strip samples with front and back faces oriented at an acute skew angle to the axis of the boule. The strip samples are positioned the within an interferometric measurement cavity so that a set of subcavities formed by pairings of each of two reference surfaces together with each of the front and back faces of the strip sample which each subcavity having a different optical path length spacing. The skew angle is sized to avoid diffusion effects of striae present in the boule.
摘要翻译：超低膨胀玻璃的试片样品的厚度和组指数变化是通过提取具有以与轴的轴线成锐角倾斜的正面和背面的带状样品来进行的。条带样本位于干涉测量空腔内，使得通过两个参考表面中的每一个的配对与条带样品的每个前表面和后表面的每一个形成的一组子维，每个子腔具有不同的光程长度间隔。倾斜角度的大小可以避免在毛坯中存在的条纹的扩散影响。

7. 发明申请

US20150009487A1 SKEWED SECTIONAL MEASUREMENT OF STRIATED GLASS 有权
标题翻译：冲击玻璃的部分测量
公开(公告)号：US20150009487A1
公开(公告)日：2015-01-08
申请号：US14318882
申请日：2014-06-30
申请人： Corning Incorporated
发明人： Paul Gerard Dewa , Thomas James Dunn , Robert Dennis Grejda , Christopher Alan Lee
IPC分类号： G01N21/45 , G02B5/08 , G01N33/38 , G01N1/32 , G01N1/28
CPC分类号： G01N21/45 , G01N1/286 , G01N1/32 , G01N21/958 , G01N33/386 , G02B5/0816
摘要： Thickness and group index variations in test strip samples of ultra-low expansion glass are made by extracting the strip samples with front and back faces oriented at an acute skew angle to the axis of the boule. The strip samples are positioned the within an interferometric measurement cavity so that a set of subcavities formed by pairings of each of two reference surfaces together with each of the front and back faces of the strip sample which each subcavity having a different optical path length spacing. The skew angle is sized to avoid diffusion effects of striae present in the boule.
摘要翻译：超低膨胀玻璃的试片样品的厚度和组指数变化是通过提取具有以与轴的轴线成锐角倾斜的正面和背面的带状样品来进行的。条带样本位于干涉测量空腔内，使得通过两个参考表面中的每一个的配对与条带样品的每个前表面和后表面的每一个形成的一组子维，每个子腔具有不同的光程长度间隔。倾斜角度的大小可以避免在毛坯中存在的条纹的扩散影响。

8. 发明申请

US20200041248A1 SYSTEMS FOR AND METHODS OF MEASURING PHOTOMASK FLATNESS WITH REDUCED GRAVITY-INDUCED ERROR 审中-公开
公开(公告)号：US20200041248A1
公开(公告)日：2020-02-06
申请号：US16527917
申请日：2019-07-31
申请人： CORNING INCORPORATED
发明人： Thomas James Dunn , John Weston Frankovich , Robert Dennis Grejda , Christopher Alan Lee , Matthew Ronald Millecchia , Yoshihiro Nakamura
IPC分类号： G01B9/02 , G03F1/22 , G01B11/24
摘要： The methods disclosed herein include recording at near-vertical first and second measurement positions respective first and second interferograms of the photomask surface and defining a difference map as the difference between the first and second interferograms. Respective first and second normal forces on the photomask are also measured at the first and second measurement positions. The change in the normal force is used define a scaling factor, which is applied to the difference map to define a scaled difference map. A compensated flatness measurement with a reduced shape contribution due to gravity is obtained by subtracting the scaled difference map from the first interferogram. An interferometer-based flatness measurement system is also disclosed.

9. 发明授权

US09829310B2 Interferometric roll-off measurement using a static fringe pattern 有权
公开(公告)号：US09829310B2
公开(公告)日：2017-11-28
申请号：US15198661
申请日：2016-06-30
申请人： Corning Incorporated
发明人： Alexander Timothy Bean , Thomas James Dunn , Christopher Alan Lee , Mark Joseph Tronolone
IPC分类号： G01B11/24 , G01N21/95 , G01B9/02 , G06T7/00 , G06T7/64
CPC分类号： G01B11/2441 , G01B9/02032 , G01B9/02044 , G01N21/9503 , G06T7/0006 , G06T7/64 , G06T2207/30148
摘要： An apparatus for measuring the surface contour of a target area of a substrate has a light source to emit a measurement light beam. A beam splitting element defines a measurement axis and a reference axis. A substrate holder disposes the target area along the measurement axis and tilted away from normal incidence, about a tilt axis that orthogonally intersects the measurement axis, according to a predetermined tilt angle that is a function of the measurement light beam wavelength. An imaging sensor records a fringe pattern generated from the measurement light beam and a reference light beam. A computer extracts frequency profiles from the recorded fringe pattern, each profile taken in a direction that is orthogonal to the direction of the tilt axis, wherein the programmed instructions further compute changes in the contour of the target area surface according to the frequency profiles.

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