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1. 发明申请

US20200266092A1 APPARATUSES AND METHODS FOR NON-CONTACT HOLDING AND MEASUREMENT OF THIN SUBSTRATES 审中-公开
公开(公告)号：US20200266092A1
公开(公告)日：2020-08-20
申请号：US16778478
申请日：2020-01-31
申请人： CORNING INCORPORATED
发明人： Robert Dennis Grejda , Christopher Alan Lee
IPC分类号： H01L21/683 , H01L21/66 , H01L21/67 , H01L21/677
摘要： An apparatus for holding a thin substrate includes a plurality of positive pressure regions including a porous material having an upper surface and a gas flowing outward from the upper surface, the gas producing a positive pressure above the upper surface in the positive pressure regions. The apparatus includes a plurality of negative pressure regions interspersed with the plurality of positive pressure regions, the negative pressure regions exerting a holding force on a bottom surface of the thin substrate. The negative pressure regions and the positive pressure regions operate to maintain the bottom surface of the thin substrate a distance from the upper surface of the porous material in the positive pressure regions. Methods of holding a thin substrate with the apparatus are also disclosed.

2. 发明申请

US20210157085A1 OPTICAL MOUNT 有权
公开(公告)号：US20210157085A1
公开(公告)日：2021-05-27
申请号：US17166073
申请日：2021-02-03
申请人： Corning Incorporated
发明人： Robert Dennis Grejda , Keith Ernest Hanford , Brian Monroe McMaster , Todd Robert McMichael , Matthew Ronald Millecchia , James Edward Platten
IPC分类号： G02B7/00 , B29C33/00 , G02B7/18 , G02B7/02 , G02B7/182 , C23C14/50 , C23C16/458
摘要： An optical mount includes a support substrate defining an aperture configured to receive an optical element. A support assembly is positioned proximate a perimeter of the aperture. The support assembly includes a resilient member configured reflects in response to relative motion between the optical element and the support substrate. A support plate is positioned on the resilient member and is in contact with the optical element.

3. 发明授权

US09557516B2 Optical systems exhibiting improved lifetime using beam shaping techniques 有权
标题翻译：使用光束成形技术显示出改善寿命的光学系统
公开(公告)号：US09557516B2
公开(公告)日：2017-01-31
申请号：US14047200
申请日：2013-10-07
申请人： CORNING INCORPORATED
发明人： Robert Dennis Grejda , Keith Ernest Hanford , Kevin J Magierski , Todd Robert McMichael
IPC分类号： G02B7/02 , G01N21/95 , G03F7/20 , G02B5/18
CPC分类号： G02B7/025 , G01N21/9501 , G01N2201/061 , G03F7/70825
摘要： An optical system includes a lens assembly and a light source. The lens assembly includes an optical lens positioned to transmit and refract light provided by the light source, and a lens holder coupled to the optical lens and maintaining a position of the optical lens relative to the light source. The optical lens is coupled to the lens holder with a bonding agent arranged in an interrupted configuration at positions proximate to a circumference of the optical lens. The light source provides light to the optical lens of the lens assembly that has an optical footprint that includes a plurality of high-intensity regions separated from one another by low-intensity regions and the bonding agent is positioned in a circumferential orientation relative to the light source such that the bonding agent is spaced apart from the high-intensity regions of the optical footprint of the light.
摘要翻译：光学系统包括透镜组件和光源。透镜组件包括光学透镜，其定位成透射和折射由光源提供的光，以及耦合到光学透镜并保持光学透镜相对于光源的位置的透镜保持器。光学透镜通过在接近光学透镜的圆周的位置处以间断配置布置的粘结剂耦合到透镜保持器。光源向透镜组件的光学透镜提供光，其具有包括通过低强度区域彼此分离的多个高强度区域的光学占位面积，并且粘合剂相对于光线定位在圆周方向源，使得粘合剂与光的光学占位面积的高强度区域间隔开。

4. 发明申请

US20150098131A1 LENS ASSEMBLIES AND OPTICAL SYSTEMS INCORPORATING LENS ASSEMBLIES 有权
标题翻译：镜头组件和配有镜头组件的光学系统
公开(公告)号：US20150098131A1
公开(公告)日：2015-04-09
申请号：US14047200
申请日：2013-10-07
申请人： CORNING INCORPORATED
发明人： Robert Dennis Grejda , Keith Ernest Hanford , Kevin J. Magierski , Todd Robert McMichael
IPC分类号： G02B7/02 , G01N21/95 , G03F7/20
CPC分类号： G02B7/025 , G01N21/9501 , G01N2201/061 , G03F7/70825
摘要： An optical system includes a lens assembly and a light source. The lens assembly includes an optical lens positioned to transmit and refract light provided by the light source, and a lens holder coupled to the optical lens and maintaining a position of the optical lens relative to the light source. The optical lens is coupled to the lens holder with a bonding agent arranged in an interrupted configuration at positions proximate to a circumference of the optical lens. The light source provides light to the optical lens of the lens assembly. The light provided to the optical lens has an optical footprint that includes a plurality of high-intensity regions separated from one another by low-intensity regions and the bonding agent is positioned in a circumferential orientation relative to the light source such that the bonding agent is spaced apart from the high-intensity regions of the optical footprint of the light.
摘要翻译：光学系统包括透镜组件和光源。透镜组件包括光学透镜，其定位成透射和折射由光源提供的光，以及耦合到光学透镜并保持光学透镜相对于光源的位置的透镜保持器。光学透镜通过在接近光学透镜的圆周的位置处以间断配置布置的粘结剂耦合到透镜保持器。光源为透镜组件的光学透镜提供光。提供给光学透镜的光具有光学占地面积，其包括通过低强度区域彼此分离的多个高强度区域，并且粘合剂相对于光源位于圆周方向，使得粘合剂为与光的光学足迹的高强度区域隔开。

5. 发明授权

US10732336B2 Method of assembling optical systems and minimizing retardance distortions in optical assemblies 有权
公开(公告)号：US10732336B2
公开(公告)日：2020-08-04
申请号：US15886245
申请日：2018-02-01
申请人： Corning Incorporated
发明人： Paul Gerard Dewa , Robert Dennis Grejda , Stephen Karl Mack , Robert Louis Michaels , Paul Francis Michaloski , Duncan Christopher Spaulding
IPC分类号： G02B5/30 , G02B27/00 , G02B30/25 , B23P19/04 , G02B27/26
摘要： According to some embodiments a method of assembling an optical system comprises steps of: measuring retardance profiles of a plurality of optical elements, relatively positioning the optical elements in relative orientations that enhance complementarity between the retardance profiles of the optical elements, and securing the combinations of relatively oriented optical elements together, to control or minimize the combined retardance of the stacked optical elements.

6. 发明申请

US20180239102A1 OPTICAL MOUNT 审中-公开
公开(公告)号：US20180239102A1
公开(公告)日：2018-08-23
申请号：US15880117
申请日：2018-01-25
申请人： Corning Incorporated
发明人： Robert Dennis Grejda , Keith Ernest Hanford , Brian Monroe McMaster , Todd Robert McMichael , Matthew Roland Millecchia , James Edward Platten
IPC分类号： G02B7/00 , G02B7/18 , G02B7/182 , B29C33/00 , G02B7/02 , G03F7/20
CPC分类号： G02B7/003 , B29C33/005 , C23C14/50 , C23C16/4585 , G02B7/008 , G02B7/026 , G02B7/028 , G02B7/181 , G02B7/1822 , G03F7/70833
摘要： An optical mount includes a support substrate defining an aperture configured to receive an optical element. A support assembly is positioned proximate a perimeter of the aperture. The support assembly includes a resilient member configured reflects in response to relative motion between the optical element and the support substrate. A support plate is positioned on the resilient member and is in contact with the optical element.

7. 发明申请

US20170057027A1 METHOD OF MINIMIZING STACKING ELEMENT DISTORTIONS IN OPTICAL ASSEMBLIES 审中-公开
标题翻译：最小化光学组件堆叠元件失真的方法
公开(公告)号：US20170057027A1
公开(公告)日：2017-03-02
申请号：US14997824
申请日：2016-01-18
申请人： Corning Incorporated
发明人： Robert Dennis Grejda , Todd Robert McMichael
IPC分类号： B23P19/04 , G02B7/00 , G02B27/00 , G02B7/02
CPC分类号： B23P19/04 , B23P11/00 , G02B7/003 , G02B7/004 , G02B7/025 , G02B7/026 , G02B27/0012 , G02B27/62 , G03F7/70825 , G03F7/70975 , Y10T29/49769 , Y10T29/49771 , Y10T29/4978
摘要： A compound optical assembly is constructed from a plurality of stacking elements for spacing, aligning, and retaining optical elements within the assembly. Stacking faces of the stacking elements are measured and low-order surface errors are extracted, represented by mathematical approximations having a primary angular frequency. The stacking elements including the optic holders are relatively oriented to promote complementarity between the low-order surface errors of mating stacking faces.
摘要翻译：复合光学组件由多个堆叠元件构成，用于在组件内间隔，对准和保持光学元件。测量堆叠元件的堆叠面，并提取低阶表面误差，由具有主角频率的数学近似表示。包括光学保持器的堆叠元件相对定向以促进配合堆叠面的低阶表面误差之间的互补。

8. 发明授权

US09254538B2 Method of minimizing stacking element distortions in optical assemblies 有权
标题翻译：最小化光学组件中堆叠元件失真的方法
公开(公告)号：US09254538B2
公开(公告)日：2016-02-09
申请号：US13959804
申请日：2013-08-06
申请人： CORNING INCORPORATED
发明人： Robert Dennis Grejda , Todd Robert McMichael
IPC分类号： B23P11/00 , G02B7/02 , G02B27/62 , B23P19/04 , G02B27/00 , G03F7/20 , G02B7/00
CPC分类号： B23P19/04 , B23P11/00 , G02B7/003 , G02B7/004 , G02B7/025 , G02B7/026 , G02B27/0012 , G02B27/62 , G03F7/70825 , G03F7/70975 , Y10T29/49769 , Y10T29/49771 , Y10T29/4978
摘要： A compound optical assembly is constructed from a plurality of stacking elements for spacing, aligning, and retaining optical elements within the assembly. Stacking faces of the stacking elements are measured and low-order surface errors are extracted, represented by mathematical approximations having a primary angular frequency. The stacking elements including the optic holders are relatively oriented to promote complementarity between the low-order surface errors of mating stacking faces.
摘要翻译：复合光学组件由多个堆叠元件构成，用于在组件内间隔，对准和保持光学元件。测量堆叠元件的堆叠面，并提取低阶表面误差，由具有主角频率的数学近似表示。包括光学保持器的堆叠元件相对定向以促进配合堆叠面的低阶表面误差之间的互补。

9. 发明申请

US20230077090A1 MAGNIFICATION ADJUSTABLE PROJECTION SYSTEM USING DEFORMABLE LENS PLATES 有权
公开(公告)号：US20230077090A1
公开(公告)日：2023-03-09
申请号：US17897328
申请日：2022-08-29
申请人： Corning Incorporated
发明人： Robert Dennis Grejda , Brian Monroe McMaster , Paul Francis Michaloski
IPC分类号： G03F7/20 , G02B3/14
摘要： A magnification adjustable projection system is provided that includes an imaging system having an object or image space, a first deformable lens plate located within the object or image space for contributing a first magnification power to the imaging system as a function of an amount of curvature of the first deformable lens plate, and a second deformable lens plate located within the object or image space for contributing a second magnification power to the imaging system as a function of an amount of curvature of the second deformable lens plate. The projection system also has first and second bending apparatuses that adjust the curvature of the first and second deformable lens plate through a range of curvature variation for adjusting the magnification power of the imaging system.

10. 发明申请

US20210055498A1 OPTICAL ASSEMBLIES AND APPARATUSES AND METHODS FOR ALIGNING COMPONENTS OF OPTICAL ASSEMBLIES 有权
公开(公告)号：US20210055498A1
公开(公告)日：2021-02-25
申请号：US16941999
申请日：2020-07-29
申请人： CORNING INCORPORATED
发明人： Robert Dennis Grejda , Kevin John Magierski , Brian Monroe McMaster , Todd Robert McMichael
IPC分类号： G02B7/00 , G02B7/02
摘要： An alignment apparatus for aligning components of an optical assembly include a chuck configured to support the optical assembly thereon, and an adjustable flexure assembly disposed around the chuck. The adjustable flexure assembly includes a plurality of flexures. The plurality of flexures are positioned relative to the chuck such that each of the plurality of flexures contact the optical assembly when the optical assembly is positioned on the chuck. Adjustment of a position of one or more flexures of the plurality of flexures adjusts an alignment of an optical axis of an optical component of the optical assembly when the optical assembly is positioned on the chuck, wherein the alignment apparatus is configured to align optical axes of the optical component to an angle of deviation of less than about 1,000 μrad and provide an extinction ratio within the optical assembly of greater than or equal to 1000:1

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