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1. 发明授权

US10184185B2 Gas flow monitoring method and gas flow monitoring apparatus 有权
公开(公告)号：US10184185B2
公开(公告)日：2019-01-22
申请号：US15363854
申请日：2016-11-29
申请人： CKD CORPORATION , HORIBA STEC, CO., LTD.
发明人： Akiko Nakada , Yasunori Nishimura , Minoru Ito , Masami Nishikawa , Shigeyuki Hayashi , Atsushi Ieki
IPC分类号： C23C16/52 , C23C16/455 , G01F1/34 , G01F3/36 , G01F3/38
摘要： In a gas flow monitoring method using a MFC (a flow control device) for controlling a flow rate of process gas from a process gas supply source and supply the process gas to a predetermined process chamber, a start shut-off valve placed upstream of the MFC, and a pressure gauge placed between the start shut-off valve and the MFC, the start shut-off valve is closed and a drop of pressure on an upstream side of the MFC is measured by the pressure gauge to measure a flow rate of the MFC, thereafter, the start shut-off valve is opened to monitor the flow rate of the MFC. The MFC is switched from an ON state to an OFF state before the start shut-off valve is opened. The method enables in-line monitoring a low rate of process gas without affecting a semiconductor manufacturing process.

2. 发明授权

US11466782B2 Butterfly valve 有权
公开(公告)号：US11466782B2
公开(公告)日：2022-10-11
申请号：US17430175
申请日：2020-02-21
申请人： CKD CORPORATION
发明人： Yasunori Nishimura
IPC分类号： F16K1/22 , F16K31/04 , F16K37/00
摘要： A butterfly valve has a rod connected to a DD motor and disposed along a direction orthogonal to a flow path, and a butterfly valve body that is linked to the rod and that opens and closes the flow path due to the rod being rotated by the DD motor, wherein a linking body center of gravity, which is the center of gravity of a rotating liking body having at least the rod and the butterfly valve body as constituent members, is positioned on an axial line of a rotating shaft of the DD motor.

3. 发明授权

US11339876B2 Butterfly valve 有权
公开(公告)号：US11339876B2
公开(公告)日：2022-05-24
申请号：US17144334
申请日：2021-01-08
申请人： CKD CORPORATION
发明人： Yasunori Nishimura
IPC分类号： F16K1/226 , F16K51/02
摘要： A butterfly valve includes a drive unit and a valve unit that are coupled to each other. The drive unit includes a hollow part in which a rod is inserted between a DD motor and an end portion of the drive unit on a coupling side to the valve unit. In the hollow part, a cylindrical magnetic member is placed coaxially with the rod to cover the outer peripheral surface of the rod. A magnetic fluid is filled in a void between the outer peripheral surface of the magnetic member and the inner peripheral surface of the hollow part. The rod is made of a non-magnetic corrosion-resistant alloy.

4. 发明授权

US10167958B2 Vacuum pressure control apparatus 有权
公开(公告)号：US10167958B2
公开(公告)日：2019-01-01
申请号：US15414091
申请日：2017-01-24
申请人： CKD CORPORATION
发明人： Yasunori Nishimura , Masayuki Watanabe , Seiji Hashiguchi
IPC分类号： F16K1/226
摘要： A vacuum pressure control apparatus includes an annular elastic seal member formed with a valve seat, and a doubly eccentric butterfly valve element configured to come into contact or separate from the valve seat. The vacuum pressure control apparatus is to be placed on a pipe connecting a vacuum chamber and a vacuum pump. The vacuum pressure control apparatus is configured to rotate the butterfly valve element in a first direction from a first valve closed position corresponding to an initial state to change vacuum pressure in the vacuum chamber. The vacuum pressure control apparatus further includes a control unit configured to rotate the butterfly valve element in a direction opposite to a first direction so that the butterfly valve element is moved to a second valve closed position different from the first valve closed position.

5. 发明授权

US11181198B2 Non-sealed butterfly valve and method for producing the same 有权
公开(公告)号：US11181198B2
公开(公告)日：2021-11-23
申请号：US17144350
申请日：2021-01-08
申请人： CKD CORPORATION
发明人： Yasunori Nishimura
IPC分类号： F16K1/22 , F16K51/02
摘要： In a non-sealed butterfly valve, a butterfly valve element includes a downstream end face that faces a downstream side of a flow passage during valve closing and a maximum outer diameter portion that makes a gap with a minimum distance. The butterfly valve element includes a first chamfered portion that reduces the diameter of the butterfly valve element from the maximum outer diameter portion to the downstream end face over the entire circumference. The first chamfered portion has a taper angle of 5° or less relative to the thickness direction of the butterfly valve element. The first chamfered portion and the downstream end face intersect each other at a ridge line that falls within an imaginary circle that is centered on the central axis of the butterfly valve element and passes the maximum outer diameter portion.

6. 发明授权

US11060637B2 Coupling member, fluid-device connecting jig, and fluid-device connecting structure 有权
公开(公告)号：US11060637B2
公开(公告)日：2021-07-13
申请号：US15807281
申请日：2017-11-08
申请人： CKD CORPORATION
发明人： Hideyuki Takeda , Hiroki Iwata , Hiroto Yasue , Yasunori Nishimura
IPC分类号： F16L43/02 , F16L3/10 , F16L23/16 , F16L21/06 , F16L23/032 , F16L23/06 , B25B27/10 , F16L47/14 , B25B27/16 , F16L21/08 , F16L3/123
摘要： A fluid-device connecting structure includes a first fluid device having a first connection part, a second fluid device having a second connection part, an annular seal member to connect the first and second connection parts, and a coupling member to keep the first and second connection parts in a connected state. The coupling member includes a first coupling segment and a second coupling segment, each including at one end a first hinge part or a second hinge part. The first and second connection parts each have a cylindrical outer shape. The first coupling segment has a U-like shape having an opening and surrounds the first and second connection parts over a range more than 180 degrees of an entire circumference of each of the first and second connection parts.

7. 发明授权

US09416889B2 Fluid-driven shutoff valve 有权
标题翻译：流体驱动截止阀
公开(公告)号：US09416889B2
公开(公告)日：2016-08-16
申请号：US14472764
申请日：2014-08-29
申请人： CKD CORPORATION
发明人： Yasunori Nishimura
IPC分类号： F16K23/00 , F16K31/04 , F16K31/122 , F16K31/126 , F16K31/50
CPC分类号： F16K31/04 , F16K31/1262 , F16K31/50 , Y10T137/7758
摘要： An air-driven shutoff valve includes a valve seat formed in a main body, a valve element movable into or out of contact with the valve seat, a drive part integrally connected to the valve element, and a pilot opening/closing valve configured to supply compressed fluid to drive the drive part. The pilot opening/closing valve includes (a) a first needle valve, a first motor to change an opening degree of the first needle valve, and a first check valve allowing the compressed fluid to flow only from a pilot opening/closing valve side to a drive part side, and (b) a second needle valve, a second motor to change an opening degree of the second needle valve, and a second check valve allowing the compressed fluid to flow only from the drive part side to the pilot opening/closing valve side.
摘要翻译：一种空气驱动的截止阀，包括形成在主体中的阀座，可移动地与阀座接触或不接触的阀元件，与阀元件一体连接的驱动部分，以及配置成供给压缩流体驱动驱动部件。先导开闭阀包括：（a）第一针阀，改变第一针阀的开度的第一电动机和允许压缩流体仅从先导开闭阀侧流动的第一止回阀，驱动部分侧，和（b）第二针阀，改变第二针阀的开度的第二电动机和允许压缩流体仅从驱动部分侧流动到第二针阀的第二止回阀，关闭阀侧。

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