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    • 4. 发明授权
    • Raw material gas supply method
    • 原料气供应方式
    • US09563209B2
    • 2017-02-07
    • US14168549
    • 2014-01-30
    • TOKYO ELECTRON LIMITED
    • Mitsuya InoueMakoto Takado
    • C23C16/52G05D16/00C23C16/448C23C16/455G05D7/06
    • G05D16/00C23C16/4481C23C16/45561G05D7/0676Y10T137/0379Y10T137/7758
    • A raw material gas supply method for use in a film forming apparatus which forms a film on a substrate, includes supplying a carrier gas to a gas phase zone defined inside a raw material container accommodating a liquid or solid raw material, vaporizing the raw material, supplying a raw material gas containing the vaporized raw material from the raw material container to the film forming apparatus via a raw material gas supply path, measuring a flow rate of the vaporized raw material flowing through the raw material gas supply path, comparing the flow rate of the vaporized raw material obtained by the flow rate measurement unit with a predetermined target value, and controlling an internal pressure of the raw material container to be increased when the flow rate is higher than the predetermined target value, and to be decreased when the is lower than the predetermined target value.
    • 一种在用于在基板上形成膜的成膜装置中使用的原料气体供给方法,包括将载气供给到容纳液体或固体原料的原料容器内的气相区域,使原料蒸发, 通过原料气体供给路径将原料容器内的原料气体从原料容器供给到成膜装置,测定流过原料气体供给路径的气化原料的流量,比较流量 的流量测量单元获得的蒸发的原料具有预定目标值,并且当流量高于预定目标值时,控制原料容器的内部压力增加,并且当其为 低于预定目标值。
    • 5. 发明申请
    • PILOT VALVE
    • 导阀
    • US20170016553A1
    • 2017-01-19
    • US15124405
    • 2015-03-12
    • IMI HYDRONIC ENGINEERING INTERNATIONAL SA
    • Peter VOLOVECSlave LAZOV
    • F16K31/128
    • F16K31/128F16K1/126G05D16/0663G05D16/106G05D16/166Y10T137/7758
    • A pilot valve that includes a pilot valve body including a chamber, a first fluid inlet and a second fluid inlet for providing fluid to the chamber, and a fluid outlet for receiving fluid from the chamber. The pilot valve further includes a separating element and a valve rod, the valve rod is arranged to control fluid flow from the first or second fluid inlet to the fluid outlet via the chamber. The separating element is connected to, and movable with the valve rod, and has a first fluid contacting area configured to be in fluid communication with the first fluid inlet, and a second fluid contacting area configured to be in fluid communication with the second fluid inlet and arranged on an opposite side to the first fluid contacting area. The pilot valve is at least partly controlled by a difference between a first force and a second forces acting on the first and second fluid contacting areas of the separating element.
    • 一种先导阀,包括先导阀体,其包括腔室,第一流体入口和用于向腔室提供流体的第二流体入口以及用于从腔室接收流体的流体出口。 先导阀还包括分离元件和阀杆,阀杆被布置成控制经由腔室从第一或第二流体入口到流体出口的流体流动。 分离元件连接到阀杆上并且可与阀杆一起移动,并且具有被配置为与第一流体入口流体连通的第一流体接触区域和被配置为与第二流体入口流体连通的第二流体接触区域 并且布置在与第一流体接触区域相反的一侧。 导向阀至少部分地由作用在分离元件的第一和第二流体接触区域上的第一力和第二力之间的差异控制。
    • 6. 发明授权
    • Multiflex coupling
    • 多联轴器
    • US09280161B2
    • 2016-03-08
    • US13794517
    • 2013-03-11
    • Kim Ngoc Vu
    • Kim Ngoc Vu
    • G05D7/06H02N2/04
    • G05D7/0635F16K31/52H02N2/043Y10T137/7758
    • A compact, easily manufactured, axisymmetric mechanism can be configured to change the magnitude of a short-movement linear motion, or also reverse the movement direction, of an actuator for control of movable elements. The mechanism is bidirectional and reversible, functioning symmetrically, and does not contain any gears nor lead screw threads. It is constantly loaded, so that force change is achieved without mechanical backlash, introducing hysteresis. The movement conversion is generally proportional and suitable for use in actuating a fluid control valve intended for modulating the control of fluids.
    • 可以将紧凑的,容易制造的轴对称机构配置成改变用于控制可移动元件的致动器的短运动线性运动的大小或者也可以反转运动方向。 机构是双向和可逆的,对称运行,不包含任何齿轮和导螺纹。 它是恒定负载的,所以实现力的变化没有机械反冲,引入滞后。 运动转换通常是成比例的并且适用于致动用于调节流体控制的流体控制阀。