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    • 10. 发明授权
    • Vacuum safety valve
    • US11280427B2
    • 2022-03-22
    • US16390124
    • 2019-04-22
    • Pfeiffer Vacuum GmbH
    • Thomas CrommTimo Lange
    • F16K31/126F16K17/04
    • The present invention relates to a vacuum safety valve for a vacuum pump, in particular for a rotary vane pump, comprising a housing having a flow path extending between an inlet and an outlet for a gas to be conveyed, a valve region that is disposed in the flow path and in which a valve closure element is arranged that is movable between a closed position and an open position, a control space that is associated with the valve region and in which a membrane separating the pressure side from an operating side is arranged, and a control element active between the membrane and the closure element, wherein the closure element is movable via the control element against a return force from the closed position into the open position by means of the membrane acted on at the pressure side and is movable back into the closed position on a removal of the membrane load due to the return force and is held in the closed position.