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1. 发明授权

US06860977B2 Method for manufacturing a workpiece using a magnetron sputter source 有权
标题翻译：使用磁控溅射源制造工件的方法
公开(公告)号：US06860977B2
公开(公告)日：2005-03-01
申请号：US10703217
申请日：2003-11-06
申请人： Bernd Heinz , Martin Dubs , Thomas Eisenhammer , Pius Grunenfelder , Walter Haag , Stanislav Kadlec , Siegfried Krassnitzer
发明人： Bernd Heinz , Martin Dubs , Thomas Eisenhammer , Pius Grunenfelder , Walter Haag , Stanislav Kadlec , Siegfried Krassnitzer
IPC分类号： C23C14/35 , G11B7/26 , H01J37/34
CPC分类号： H01J37/3408
摘要： A workpiece is manufactured using a magnetron source that has an optimized yield of sputtered-off material as well as service life of the target. Good distribution values of the layer on the workpiece are obtained that are stable over the entire target service life, and a concave sputter face in a configuration with small target-to-workpiece distance is combined with a magnet system to form the magnetron electron trap in which the outer pole of the magnetron electron trap is stationary and an eccentrically disposed inner pole with a second outer pole part is rotatable about the central source axis.
摘要翻译：使用具有优化的溅射材料产量以及靶的使用寿命的磁控管源来制造工件。获得在整个目标使用寿命上稳定的工件上的良好的分布值，并且具有小的目标到工件距离的构造中的凹形溅射面与磁体系统组合以形成磁控管电子阱其中磁控管电子阱的外极是静止的，并且具有第二外极部分的偏心设置的内极可以围绕中心源轴线旋转。

2. 发明授权

US06682637B2 Magnetron sputter source 有权
标题翻译：磁控溅射源
公开(公告)号：US06682637B2
公开(公告)日：2004-01-27
申请号：US10161862
申请日：2002-06-04
申请人： Bernd Heinz , Martin Dubs , Thomas Eisenhammer , Pius Grunenfelder , Walter Haag , Stanislav Kadlec , Siegfried Krassnitzer
发明人： Bernd Heinz , Martin Dubs , Thomas Eisenhammer , Pius Grunenfelder , Walter Haag , Stanislav Kadlec , Siegfried Krassnitzer
IPC分类号： C23C1435
CPC分类号： H01J37/3408
摘要： To optimize the yield of sputtered-off material as well as the service life of the target on a magnetron source, in which simultaneously good attainable distribution values of the layer on the substrate, stable over the entire target service life, a concave sputter face 20 in a configuration with small target-substrate distance d is combined with a magnet system to form the magnetron electron trap in which the outer pole 3 of the magnetron electron trap is disposed stationarily and an eccentrically disposed inner pole 4 with a second outer pole part 11 is developed rotatable about the central source axis 6.
摘要翻译：为了优化溅射材料的产率以及靶在磁控管源上的使用寿命，其中在基板上的层的同时良好的可获得的分布值在整个目标使用寿命上是稳定的，凹形溅射面20 在具有小的目标基板距离d的构造中，与磁体系统组合以形成磁控管电子阱，磁控管电子阱的外极3固定在该磁控管电子阱中，偏心地设置有第二外极部11的内极4 可围绕中心源轴线6旋转。

3. 发明申请

US20060003476A1 Method for the production of multilayer discs 失效
标题翻译：生产多层盘的方法
公开(公告)号：US20060003476A1
公开(公告)日：2006-01-05
申请号：US11167952
申请日：2005-06-28
申请人： Martin Dubs , Wolfgang Nutt , Helfried Weinzerl , Thomas Eisenhammer
发明人： Martin Dubs , Wolfgang Nutt , Helfried Weinzerl , Thomas Eisenhammer
IPC分类号： H01L21/00 , H01L21/44
CPC分类号： G11B7/256 , G11B7/24038 , G11B7/26 , H01L21/2007
摘要： A Method for manufacturing an optical disc substrate comprises a first substrate with at least one structured surface, on which an anti-adhesive layer, preferably carbon, is deposited and first layer on top of said anti-adhesive layer. On a second substrate with a structured surface also a layer is deposited. Both substrates are bonded together with the layers facing each other. The separation now easily can take place afterwards alongside the adhesive layer. This way the first layer from the first substrate is being transferred to the second substrate.
摘要翻译：一种制造光盘基片的方法包括具有至少一个结构化表面的第一基底，其上沉积有抗粘附层，优选为碳，第一层位于所述防粘层的顶部。在具有结构化表面的第二基底上也沉积一层。两个基板彼此粘合在一起。分离现在很容易在粘合剂层之后发生。这样，来自第一衬底的第一层被转移到第二衬底。

4. 发明授权

US07335521B2 Method for the production of multilayer discs 失效
标题翻译：生产多层盘的方法
公开(公告)号：US07335521B2
公开(公告)日：2008-02-26
申请号：US11167952
申请日：2005-06-28
申请人： Martin Dubs , Wolfgang Nutt , Helfried Weinzerl , Thomas Eisenhammer
发明人： Martin Dubs , Wolfgang Nutt , Helfried Weinzerl , Thomas Eisenhammer
IPC分类号： H01L21/00 , H01L21/44
CPC分类号： G11B7/256 , G11B7/24038 , G11B7/26 , H01L21/2007
摘要： A Method for manufacturing an optical disc substrate comprises a first substrate with at least one structured surface, on which an anti-adhesive layer, preferably carbon, is deposited and first layer on top of said anti-adhesive layer. On a second substrate with a structured surface also a layer is deposited. Both substrates are bonded together with the layers facing each other. The separation now easily can take place afterwards alongside the adhesive layer. This way the first layer from the first substrate is being transferred to the second substrate.
摘要翻译：一种制造光盘基片的方法包括具有至少一个结构化表面的第一基底，其上沉积有抗粘附层，优选为碳，第一层位于所述防粘层的顶部。在具有结构化表面的第二基底上也沉积一层。两个基板彼此粘合在一起。分离现在很容易在粘合剂层之后发生。这样，来自第一衬底的第一层被转移到第二衬底。

5. 发明申请

US20050269028A1 Method and apparatus for producing a multilayer storage media 审中-公开
标题翻译：用于生产多层存储介质的方法和装置
公开(公告)号：US20050269028A1
公开(公告)日：2005-12-08
申请号：US11128891
申请日：2005-05-13
申请人： Thomas Eisenhammer , Bernd Heinz , Roger Loow , Cem Yavaser
发明人： Thomas Eisenhammer , Bernd Heinz , Roger Loow , Cem Yavaser
IPC分类号： B08B3/02 , B29C65/52 , B29D17/00 , B32B37/12 , B32B38/16 , G11B7/26 , B32B31/00
CPC分类号： G11B7/26 , B08B3/02 , B08B2203/0229 , B08B2220/01 , B29C37/04 , B29C65/1406 , B29C65/48 , B29C65/4845 , B29C65/52 , B29C65/521 , B29C66/03 , B29C66/45 , B29C66/71 , B29C66/712 , B29C66/723 , B29C2035/0827 , B29D17/005 , B29K2033/12 , B29K2069/00 , B29L2009/00 , B29L2017/003 , B29L2017/005 , B32B37/12 , B32B38/162 , B32B2429/02
摘要： A method and device for manufacturing a disc-shaped workpiece comprises the steps of producing a first and second disc-shaped substrate, applying an adhesive on at least one of the flat sides of said first and second substrates, bonding said substrates to form said disc-shaped workpiece and removing an excess of adhesive at the outer rim of the disc shaped workpiece by means of a liquid while rotating the workpiece on a rotating table. The liquid is being dispensed by a supply system comprising one or severeal nozzles, used liquid is collected by a suction device.
摘要翻译：用于制造盘形工件的方法和装置包括以下步骤：制造第一和第二盘形基底，在所述第一和第二基底的至少一个平坦侧面上施加粘合剂，粘合所述基底以形成所述盘形状的工件，并且通过液体在盘形工件的外缘处去除多余的粘合剂，同时在旋转工作台上旋转工件。液体由包括一个或严重喷嘴的供应系统分配，所使用的液体由抽吸装置收集。

6. 发明申请

US20050039841A1 Method for the bonding of disk-shaped substrates and apparatus for carrying out the method 失效
标题翻译：用于接合盘状基板的方法和用于实施该方法的装置
公开(公告)号：US20050039841A1
公开(公告)日：2005-02-24
申请号：US10803400
申请日：2004-03-18
申请人： Thomas Eisenhammer , Jeff Ou-Yang
发明人： Thomas Eisenhammer , Jeff Ou-Yang
IPC分类号： B29C35/08 , B29C65/00 , B29C65/48 , B29C65/78 , B32B37/12 , G11B7/24 , G11B7/26 , B32B31/00
CPC分类号： B29C65/7847 , B29C65/48 , B29C65/4815 , B29C65/4845 , B29C65/485 , B29C66/001 , B29C66/1122 , B29C66/342 , B29C66/452 , B29C66/71 , B29C66/72321 , B29C66/8322 , B29C2035/0827 , B29K2069/00 , B29L2017/005 , B32B37/003 , B32B37/12 , B32B38/1866 , B32B2309/06 , B32B2309/68 , B32B2429/02 , G11B7/24038 , G11B7/26
摘要： A first substrate (11a) is positioned on a support surface (7) in a vacuum chamber with an upward-facing first bonding surface (12a) spin-coated with adhesive while a second substrate (11b) is held with downward-facing second bonding surface (12b) to a cover (3) by suction. While the vacuum chamber is being evacuated to a pressure of between 0.1 mbar and 2 mbar, a support pin (9) is extended through central openings (14a, 14b) of the substrates (11a, 11b) and then retracted with the second substrate (11b) released from the cover (3) and carried by radially extended balls (10). The support pin (9) is lowered to a position where the balls (10), acting against the first bonding surface (12a), deform the first substrate (11a). The first bonding surface (12a) being therefore slightly concave, the first and second bonding surfaces (12a, 12b) only touch close to their circumferences. Retraction of the balls (10) causes a spreading of the contact area radially inwards to cover the first and second bonding surfaces (12a, 12b) without entrapment of non-bonded areas. The substrates (11a, 11b) are then lifted by the support pin (9) with again extended balls (10) and pressed against the cover (3) and the vacuum chamber is aired.
摘要翻译：第一基板（11a）被定位在真空室中的支撑表面（7）上，具有旋转涂覆有粘合剂的向上的第一粘合表面（12a），而第二基板（11b）被保持为向下的第二粘合通过抽吸将表面（12b）覆盖（3）。当真空室被抽真空至0.1毫巴和2毫巴之间的压力时，支撑销（9）延伸穿过基板（11a，11b）的中心开口（14a，14b），然后与第二基板 11b）从盖（3）释放并由径向延伸的球（10）承载。支撑销（9）下降到使第一接合表面（12a）作用的滚珠（10）使第一基板（11a）变形的位置。因此，第一接合表面（12a）稍微凹入，第一和第二接合表面（12a，12b）仅接近其周长接触。球（10）的缩回导致接触区域径向向内扩展以覆盖第一和第二接合表面（12a，12b）而不夹带非接合区域。然后，基板（11a，11b）被支撑销（9）用再次延伸的滚珠（10）提升，并被压靠盖（3）并且真空室被播出。

7. 发明申请

US20080053620A1 METHOD FOR THE BONDING OF DISK-SHAPED SUBSTRATES AND APPARATUS FOR CARRYING OUT THE METHOD 审中-公开
标题翻译：用于结合盘形基板的方法和实现该方法的装置
公开(公告)号：US20080053620A1
公开(公告)日：2008-03-06
申请号：US11934187
申请日：2007-11-02
申请人： Thomas Eisenhammer , Jeff Ou-Yang
发明人： Thomas Eisenhammer , Jeff Ou-Yang
IPC分类号： B32B37/00
CPC分类号： B29C65/7847 , B29C65/48 , B29C65/4815 , B29C65/4845 , B29C65/485 , B29C66/001 , B29C66/1122 , B29C66/342 , B29C66/452 , B29C66/71 , B29C66/72321 , B29C66/8322 , B29C2035/0827 , B29K2069/00 , B29L2017/005 , B32B37/003 , B32B37/12 , B32B38/1866 , B32B2309/06 , B32B2309/68 , B32B2429/02 , G11B7/24038 , G11B7/26
摘要： A first substrate (11a) is positioned on a support surface (7) in a vacuum chamber with an upward-facing first bonding surface (12a) spin-coated with adhesive while a second substrate (11b) is held with downward-facing second bonding surface (12b) to a cover (3) by suction. While the vacuum chamber is being evacuated to a pressure of between 0.1 mbar and 2 mbar, a support pin (9) is extended through central openings (14a, 14b) of the substrates (11a, 11b) and then retracted with the second substrate (11b) released from the cover (3) and carried by radially extended balls (10). The support pin (9) is lowered to a position where the balls (10), acting against the first bonding surface (12a), deform the first substrate (11a). The first bonding surface (12a) being therefore slightly concave, the first and second bonding surfaces (12a, 12b) only touch close to their circumferences. Retraction of the balls (10) causes a spreading of the contact area radially inwards to cover the first and second bonding surfaces (12a, 12b) without entrapment of non-bonded areas. The substrates (11a, 11b) are then lifted by the support pin (9) with again extended balls (10) and pressed against the cover (3) and the vacuum chamber is aired.
摘要翻译：第一衬底（11a）被定位在真空室中的支撑表面（7）上，具有用粘合剂旋涂的朝上的第一接合表面（12a），而第二衬底（11b）通过抽吸将第二粘合表面（12b）面向盖（3）。当真空室被抽真空至0.1毫巴和2毫巴之间的压力时，支撑销（9）延伸穿过基板（11a，11b）的中心开口（14a，14b），然后用所述第二基板（11b）从所述盖（3）释放并由径向延伸的滚珠（10）承载。支撑销（9）下降到使第一接合表面（12a）作用的滚珠（10）使第一基板（11a）变形的位置。因此，第一接合表面（12a）略微凹入，第一和第二接合表面（12a，12b）仅接近其周长接触。球（10）的缩回导致接触区域径向向内扩展以覆盖第一和第二接合表面（12a，12b）而不夹带非接合区域。然后，基板（11a，11b）被支撑销（9）用再次延伸的滚珠（10）提升，并被压靠盖（3）并且真空室被播出。

8. 发明授权

US5912045A Process for producing selective absorbers 失效
标题翻译：生产选择性吸收剂的方法
公开(公告)号：US5912045A
公开(公告)日：1999-06-15
申请号：US975556
申请日：1997-11-21
申请人： Thomas Eisenhammer , Helmut Schellinger , Miladin Lazarov
发明人： Thomas Eisenhammer , Helmut Schellinger , Miladin Lazarov
IPC分类号： F24J2/48 , B05D5/12
CPC分类号： F24J2/485 , Y02E10/40
摘要： This invention relates to a process for producing a selective absorber which contains one or more layers of a non-homogeneous material (cermet), the non-homogeneous material having been produced by means of a sol-gel process.
摘要翻译：本发明涉及一种生产含有一层或多层不均匀材料（金属陶瓷）的选择性吸收体的方法，该非均匀材料是通过溶胶 - 凝胶法生产的。

9. 发明授权

US07311795B2 Method for the bonding of disk-shaped substrates and apparatus for carrying out the method 失效
标题翻译：用于接合盘状基板的方法和用于实施该方法的装置
公开(公告)号：US07311795B2
公开(公告)日：2007-12-25
申请号：US10803400
申请日：2004-03-18
申请人： Thomas Eisenhammer , Jeff Ou-Yang
发明人： Thomas Eisenhammer , Jeff Ou-Yang
IPC分类号： B32B37/10
CPC分类号： B29C65/7847 , B29C65/48 , B29C65/4815 , B29C65/4845 , B29C65/485 , B29C66/001 , B29C66/1122 , B29C66/342 , B29C66/452 , B29C66/71 , B29C66/72321 , B29C66/8322 , B29C2035/0827 , B29K2069/00 , B29L2017/005 , B32B37/003 , B32B37/12 , B32B38/1866 , B32B2309/06 , B32B2309/68 , B32B2429/02 , G11B7/24038 , G11B7/26
摘要： A first substrate (11a) is positioned on a support surface (7) in a vacuum chamber with an upward-facing first bonding surface (12a) spin-coated with adhesive while a second substrate (11b) is held with downward-facing second bonding surface (12b) to a cover (3) by suction. While the vacuum chamber is being evacuated to a pressure of between 0.1 mbar and 2 mbar, a support pin (9) is extended through central openings (14a, 14b) of the substrates (11a, 11b) and then retracted with the second substrate (11b) released from the cover (3) and carried by radially extended balls (10). The support pin (9) is lowered to a position where the balls (10), acting against the first bonding surface (12a), deform the first substrate (11a). The first bonding surface (12a) being therefore slightly concave, the first and second bonding surfaces (12a, 12b) only touch close to their circumferences. Retraction of the balls (10) causes a spreading of the contact area radially inwards to cover the first and second bonding surfaces (12a, 12b) without entrapment of non-bonded areas. The substrates (11a, 11b) are then lifted by the support pin (9) with again extended balls (10) and pressed against the cover (3) and the vacuum chamber is aired.
摘要翻译：第一衬底（11a）被定位在真空室中的支撑表面（7）上，具有用粘合剂旋涂的朝上的第一接合表面（12a），而第二衬底（11b）通过抽吸将第二粘合表面（12b）面向盖（3）。当真空室被抽真空至0.1毫巴和2毫巴之间的压力时，支撑销（9）延伸穿过基板（11a，11b）的中心开口（14a，14b），然后用所述第二基板（11b）从所述盖（3）释放并由径向延伸的滚珠（10）承载。支撑销（9）下降到使第一接合表面（12a）作用的滚珠（10）使第一基板（11a）变形的位置。因此，第一接合表面（12a）略微凹入，第一和第二接合表面（12a，12b）仅接近其周长接触。球（10）的缩回导致接触区域径向向内扩展以覆盖第一和第二接合表面（12a，12b）而不夹带非接合区域。然后，基板（11a，11b）被支撑销（9）用再次延伸的滚珠（10）提升，并被压靠盖（3）并且真空室被播出。

10. 发明授权

US07019264B2 Heat-treatment system and method 失效
标题翻译：热处理系统及方法
公开(公告)号：US07019264B2
公开(公告)日：2006-03-28
申请号：US10818827
申请日：2004-04-06
申请人： Thomas Eisenhammer , Thomas Matt , Gebhard Stittmatter , Klaus Zapf
发明人： Thomas Eisenhammer , Thomas Matt , Gebhard Stittmatter , Klaus Zapf
IPC分类号： F26B15/04
CPC分类号： H01L21/67109 , G11B7/26 , H01L21/67098 , H01L21/68714
摘要： This invention relates to a system and a method for the heat treatment of substrates, incorporating an annular heat-treatment section with a rotary table designed to accept substrate holders, at least two of which substrate holders are positioned one behind the other in heat-treatment zones that extend in a radial spoke pattern around the center of the rotary table.
摘要翻译：本发明涉及一种用于热处理基板的系统和方法，其包括设置成接受基板保持器的旋转台的环形热处理部分，其中至少两个基板保持器在热处理中彼此位于另一个之间围绕旋转台的中心以径向轮辐图案延伸的区域。

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